121244 ⎘
Single-crystal growth by pulling from a melt, e.g. Czochralski method; Mechanisms for rotating or moving either the melt or the crystal Stirring of the melt
SUPERCONDUCTING MAGNET DEVICE
#2Systems for production of low oxygen content silicon
#3Systems for production of low oxygen content silicon
#4METHOD FOR PULLING A SINGLE CRYSTAL OF SILICON IN ACCORDANCE WITH THE CZOCHRALSKI METHOD
#5High resistivity single crystal silicon ingot and wafer having improved mechanical strength
#6High resistivity single crystal silicon ingot and wafer having improved mechanical strength
#7Systems and methods for production of low oxygen content silicon
#8Systems and methods for production of low oxygen content silicon
#9High resistivity single crystal silicon ingot and wafer having improved mechanical strength
#10Silicon wafer with homogeneous radial oxygen variation
#11Epitaxial silicon wafer
#12Apparatus for growing single crystalline ingot and method for growing same
#13Method for producing a semiconductor wafer of monocrystalline silicon, device for producing a semiconductor wafer of monocrystalline silicon and semiconductor wafer of monocrystalline
#14Growing apparatus and single-crystal ingot growing method using the same
#15Systems and methods for production of low oxygen content silicon
#16SiC single crystal production method and production apparatus
#17Single-crystal pulling apparatus and single-crystal pulling method
#18Apparatus for growing single crystalline ingot and method for growing same
#19Methods for producing low oxygen silicon ingots
#20Apparatus and method for growing silicon single crystal ingot
#21APPARATUS FOR MANUFACTURING SiC SINGLE CRYSTAL AND METHOD OF MANUFACTURING SiC SINGLE CRYSTAL
#22Method for growing a silicon crystal substrate from a melt by directing a flow of molten silicon around a baffle structure
#23Single crystal production apparatus
#24Methods for producing low oxygen silicon ingots
#25Method of producing silicon single crystal
#26Stirring apparatus of ingot casting furnace
#27Method of manufacturing silicon single crystal
#28Generating a homogeneous magnetic field while pulling a single crystal from molten semiconductor material
#29Manufacturing apparatus of SiC single crystal and method for manufacturing SiC single crystal
#30ELECTROMAGNETIC MIXING FOR NITRIDE CRYSTAL GROWTH
#31Method and an apparatus for growing a silicon single crystal from a melt
#32Thermal load leveling during silicon crystal growth from a melt using anisotropic materials
#332-DIMENSIONAL LINE-DEFECTS CONTROLLED SILICON INGOT, WAFER AND EPITAXIAL WAFER, AND MANUFACTURING PROCESS AND APPARATUS THEREFOR
#342-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor
#35Method of three-dimensional optimization design for asymmetric cusp magnetic field in MCZ single crystal furnace
#36Silicon single crystal production method
#37Method of producing SiC single crystal
#38METHOD FOR THE SOLIDIFICATION OF A NON-METAL MELT
#39Method for producing semiconductor wafers composed of silicon with reduced pinholes
#40Single-crystal manufacturing method and single-crystal manufacturing apparatus
#41Method for pulling a single crystal composed of silicon with a section having a diameter that remains constant
#42Superconducting magnet device for single crystal pulling apparatus
#43Method and an apparatus for growing a silicon single crystal from a melt
#44APPARATUS AND METHOD FOR PULLING SILICON SINGLE CRYSTAL
#45Method of manufacturing single crystal
#46Manufacturing method of silicon single crystal
#47Semiconductor wafer composed of monocrystalline silicon and method for producing it
#48SILICON WAFER AND METHOD FOR PRODUCING THE SAME
#49Silicon wafer and method for producing the same
#50Coil Arrangement for Crystal Pulling and Method of Forming a Crystal
#51Generating a pumping force in a silicon melt by applying a time-varying magnetic field
#52Controlling a melt-solid interface shape of a growing silicon crystal using an unbalanced magnetic field and iso-rotation
#53Method of shoulder formation in growing silicon single crystals
#54Method of growing silicon single crystals
#55Method of growing silicon single crystals
#56PRODUCTION METHOD OF SILICON SINGLE CRYSTAL
#57Silicon single crystal pulling method
#58CARBON-DOPED SINGLE CRYSTAL MANUFACTURING METHOD
#59Method for determining distance between reference member and melt surface, method for controlling location of melt surface using the same, and apparatus for production silicon single crystal
#60APPARATUS FOR MANUFACTURING HIGH-QUALITY SEMICONDUCTOR SINGLE CRYSTAL INGOT AND METHOD USING THE SAME
#612-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor
#62Semiconductor single crystal growth method having improvement in oxygen concentration characteristics
#63METHOD FOR GROWING SILICON INGOT
#64Single crystal silicon wafer for insulated gate bipolar transistors and process for producing the same
#65Single Crystal manufacturing method
#66Single crystal pulling apparatus
#67Method for manufacturing semiconductor single crystal by Czochralski technology, and single crystal ingot and wafer manufactured using the same
#68Magnetic Field Applied Pulling Method for Pulling Silicon Single Crystal
#69Apparatus and method for producing single crystal, and silicon single crystal
#70Controlling melt-solid interface shape of a growing silicon crystal using a variable magnetic field
#71Method for preparing silicon carbide single crystal
#72Method for manufacturing single crystal semiconductor
#73Single crystal silicon wafer for insulated gate bipolar transistors
#74Single crystal semiconductor manufacturing apparatus and method
#75Method for manufacturing single crystal semiconductor
#76Silicon single crystal pulling method
#77Method for producing silicon single crystal and silicon single crystal
#78Silicon single crystal ingot and wafer, growing apparatus and method thereof
#79Controlling melt-solid interface shape of a growing silicon crystal using a variable magnetic field
#80Electromagnetic pumping of liquid silicon in a crystal growing process
#81Apparatus and method for producing single crystal, and silicon single crystal
#82Silicon wafer and method for producing silicon single crystal