Patents-Review.com
ClassID:

121289 ⎘

C30B25/105 - CPC Classification

Classification description:

Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth; Epitaxial-layer growth; Heating of the reaction chamber or the substrate by irradiation or electric discharge

Recent Application in this class:
#1
20260092397
2026-04-02

SUBSTRATE PROCESSING APPARATUS

 #2
20260090293
2026-03-26

SEMICONDUCTOR STACKS AND PROCESSES THEREOF

 #3
20260066234
2026-03-05

PLASMA ENHANCED EPITAXIAL DEPOSITION CHAMBER

 #4
20260062834
2026-03-05

ACTIVE SIC HEATING WITH ZONALITY CONTROL FOR EPI CHAMBER THERMAL PROFILE ADJUSTING

 #5
20260009155
2026-01-08

MULTI-LAYERED EPITAXIAL STACK FORMED IN A PRESENCE OF A HIGHER ORDER SILICON PRECURSOR

 #6
20250354295
2025-11-20

A DIAMOND MICROPARTICLES BASED PHYSICAL UNCLONABLE FUNCTIONAL MATERIAL, PREPARATION METHOD, AND USE THEREOF

 #7
20250349539
2025-11-13

Deposition Equipment with Adjustable Temperature Source

 #8
20250341019
2025-11-06

ENVELOPE AND ISOLATION PLATE FOR IR TRANSMISSION ADJUSTMENT

 #9
20250171926
2025-05-29

ULTRA-HIGH THERMAL-CONDUCTIVITY DIAMOND AND SYNTHETIC METHOD THEREFOR

 #10
20250140556
2025-05-01

CRYSTALLINE WAFERS AND PROCESS FOR FORMING CRYSTALLINE WAFERS

 #11
20250059677
2025-02-20

Method of Growing Single Crystal Diamond Assisted by Polycrystalline Diamond Growth

 #12
20250051959
2025-02-13

EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTURING APPARATUS

 #13
20250034752
2025-01-30

GALLIUM OXIDE FILM, AND MANUFACTURING DEVICE AND MANUFACTURING METHOD FOR SAME

 #14
20250015144
2025-01-09

SUBSTRATE WITH ß-GALLIUM OXIDE FILM AND PRODUCTION METHOD THEREFOR

 #15
20240371636
2024-11-07

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

 #16
20240363378
2024-10-31

COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL LAYER

 #17
20240363327
2024-10-31

EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS

 #18
20240344236
2024-10-17

Diamond substrate and method for manufacturing the same

 #19
20240332018
2024-10-03

Deposition Equipment with Adjustable Temperature Source

 #20
20240321605
2024-09-26

SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR CALIBRATING A SEMICONDUCTOR PROCESSING APPARATUS

 #21
20240318351
2024-09-26

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

 #22
20240309548
2024-09-19

PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING TURBINES FOR ENERGY HARNESSING

 #23
20240309547
2024-09-19

PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING THERMOELECTRIC GENERATORS FOR ENERGY HARNESSING

 #24
20240295048
2024-09-05

HIGHLY REFLECTIVE METALLIC ALLOYS FOR COMPONENTS OF SEMICONDUCTOR PROCESSING EQUIPMENT, AND RELATED METHODS

 #25
20240279842
2024-08-22

DIAMOND SUBSTRATE AND METHOD FOR MANUFACTURING SAME

 #26
20240203709
2024-06-20

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

 #27
20230392283
2023-12-07

Method of Growing Single Crystal Diamond Assisted by Polycrystalline Diamond Growth

 #28
20230383434
2023-11-30

A Process For Producing Diamonds

 #29
20230272551
2023-08-31

Method of manufacture of single crystal synthetic diamond material

 #30
20230167581
2023-06-01

WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER

 #31
20230062860
2023-03-02

Laser Activated Luminescence System

 #32
20220411965
2022-12-29

Method of providing a wrinkle pattern or producing a substrate having a wrinkle pattern of a single layer

 #33
20220392767
2022-12-08

Deposition equipment with adjustable temperature source

 #34
20220344151
2022-10-27

Semiconductor Device and Method of Manufacture

 #35
20220316090
2022-10-06

METHOD FOR GROWING EPITAXIAL LAYER ON WAFER

 #36
20220267926
2022-08-25

Method for depositing an epitaxial layer on a front side of a semiconductor wafer, and device for carrying out the method

 #37
20220119983
2022-04-21

Method of growing single crystal diamond assisted by polycrystalline diamond growth

 #38
20220081801
2022-03-17

MANUFACTURE OF LAB GROWN DIAMONDS

 #39
20210395916
2021-12-23

METHODS OF FABRICATING SYNTHETIC DIAMOND MATERIALS USING MICROWAVE PLASMA ACTIVATED CHEMICAL VAPOUR DEPOSITION TECHNIQUES AND PRODUCTS OBTAINED USING SAID METHODS

 #40
20210381125
2021-12-09

EPITAXIAL DIRECTED ALD CRYSTAL GROWTH

 #41
20210355581
2021-11-18

Laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof

 #42
20210324514
2021-10-21

Multi-thermal CVD chambers with shared gas delivery and exhaust system

 #43
20210285127
2021-09-16

Method of producing a synthetic diamond

 #44
20210285125
2021-09-16

Method of manufacture of single crystal synthetic diamond material

 #45
20210222300
2021-07-22

Substrate processing apparatus, material layer deposition apparatus, and atmospheric pressure chemical vapor deposition apparatus

 #46
20210087705
2021-03-25

Epitaxially coated semiconductor wafer of monocrystalline silicon and method for production thereof

 #47
20210066069
2021-03-04

Method of fabricating hexagonal boron nitride

 #48
20210062360
2021-03-04

Methods for improved III/V nano-ridge fabrication on silicon

 #49
20210032773
2021-02-04

Method for manufacturing an ultra small grain-size nanocrystalline diamond film having a SiV photoluminescence

 #50
20210017669
2021-01-21

SEMICONDUCTOR EPITAXIAL STRUCTURE AND METHOD OF FORMING THE SAME

 #51
20200141027
2020-05-07

III-V or II-VI compound semiconductor films on graphitic substrates

 #52
20200045776
2020-02-06

MULTIZONE LAMP CONTROL AND INDIVIDUAL LAMP CONTROL IN A LAMPHEAD

 #53
20200010976
2020-01-09

Toroidal plasma processing apparatus with a shaped workpiece holder

 #54
20190330765
2019-10-31

Heat-insulating shield member and single crystal manufacturing apparatus having the same

 #55
20190284716
2019-09-19

APPARATUS AND METHOD OF PRODUCING DIAMOND AND PERFORMING REAL TIME IN SITU ANALYSIS

 #56
20190218685
2019-07-18

Single-crystal diamond material, single-crystal diamond chip, and perforated tool

 #57
20190169767
2019-06-06

Method of utilizing a degassing chamber to reduce arsenic outgassing following deposition of arsenic-containing material on a substrate

 #58
20190161885
2019-05-30

SiC epitaxial growth apparatus

 #59
20190136410
2019-05-09

Diamond substrate

 #60
20190043718
2019-02-07

Mono- and multilayer silicene prepared by plasma-enhanced chemical vapor deposition

 #61
20190027889
2019-01-24

Method for Synthesis of graphene along waveguides in situ, photonics device including graphene obtained using the method

 #62
20190003076
2019-01-03

Silicon wafers by epitaxial deposition

 #63
20180371640
2018-12-27

Wafer supporting mechanism, chemical vapor deposition apparatus, and epitaxial wafer manufacturing method

 #64
20180363139
2018-12-20

Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus

 #65
20180334756
2018-11-22

Epitaxial growing device and method for making epitaxial structure using the same

 #66
20180327927
2018-11-15

ULTRA SMALL GRAIN-SIZE NANOCRYSTALLINE DIAMOND FILM HAVING A SiV PHOTOLUMINESCENCE AND MANUFACTURING METHOD THEREOF

 #67
20180312993
2018-11-01

Diamond substrate

 #68
20180282865
2018-10-04

CVD apparatus

 #69
20180264443
2018-09-20

APPARATUS AND METHOD FOR PRODUCING CARBON NANOTUBES

 #70
20180258549
2018-09-13

LOW-TEMPERATURE SELECTIVE EPITAXIAL GROWTH OF SILICON FOR DEVICE INTEGRATION

 #71
20180223449
2018-08-09

Method of producing a synthetic diamond

 #72
20180223447
2018-08-09

Foundation substrate for producing diamond film and method for producing diamond substrate using same

 #73
20180209066
2018-07-26

RUTILE-TYPE NIOBIUM OXYNITRIDE, METHOD FOR PRODUCING SAME, AND SEMICONDUCTOR STRUCTURE

 #74
20180207697
2018-07-26

Diamond die

 #75
20180119307
2018-05-03

III-nitride epitaxial structure and method for manufacturing the same

 #76
20180087183
2018-03-29

MONOCRYSTALLINE DIAMONDS AND METHODS OF GROWING THE SAME

 #77
20180073162
2018-03-15

DEGASSING CHAMBER FOR ARSENIC RELATED PROCESSES

 #78
20180044777
2018-02-15

Film forming apparatus

 #79
20170330746
2017-11-16

Phosphorus incorporation for n-type doping of diamond with (100) and related surface orientation

 #80
20170241042
2017-08-24

Single-crystal diamond material, single-crystal diamond chip, and perforated tool

 #81
20170218536
2017-08-03

APPARATUS FOR FABRICATING TWO-DIMENSIONAL LAYERED CHALCOGENIDE FILM

 #82
20170159205
2017-06-08

Method for fabricating carbon-based composite material

 #83
20170130359
2017-05-11

Multizone control of lamps in a conical lamphead using pyrometers

 #84
20170121847
2017-05-04

WAFER CARRIER HAVING THERMAL UNIFORMITY-ENHANCING FEATURES

 #85
20170114476
2017-04-27

Process and apparatus for diamond synthesis

 #86
20170073836
2017-03-16

DIAMOND PRODUCING METHOD AND DC PLASMA ENHANCED CVD APPARATUS

 #87
20170040145
2017-02-09

Microwave plasma reactor for manufacturing synthetic diamond material

 #88
20170037537
2017-02-09

Apparatus for depositing a thin film

 #89
20170029976
2017-02-02

Batch processing chamber

 #90
20170009377
2017-01-12

Diamond substrate and method for manufacturing diamond substrate

 #91
20170009376
2017-01-12

METHODS OF FABRICATING SYNTHETIC DIAMOND MATERIALS USING MICROWAVE PLASMA ACTIVATED CHEMICAL VAPOUR DEPOSITION TECHNIQUES AND PRODUCTS OBTAINED USING SAID METHODS

 #92
20160381732
2016-12-29

Heating system comprising semiconductor light sources

 #93
20160369423
2016-12-22

III-V or II-VI compound semiconductor films on graphitic substrates

 #94
20160362813
2016-12-15

INJECTOR FOR SEMICONDUCTOR EPITAXY GROWTH

 #95
20160340798
2016-11-24

Toroidal plasma processing apparatus with a shaped workpiece holder

 #96
20160340797
2016-11-24

Method of pulsed laser-based large area graphene synthesis on metallic and crystalline substrates

 #97
20160333497
2016-11-17

Apparatus and Method of Producing Diamond and Performing Real Time In Situ Analysis

 #98
20160258081
2016-09-08

Ordered growth of large crystal graphene by laser-based localized heating for high throughput production

 #99
20160240376
2016-08-18

Method of fabricating two-dimensional layered chalcogenide film

 #100
20160237592
2016-08-18

Diamond substrate and diamond substrate manufacturing method

 #101
20160230311
2016-08-11

Method of producing a synthetic diamond

 #102
20160222544
2016-08-04

Silicon wafers by epitaxial deposition

 #103
20160138188
2016-05-19

Multizone control of lamps in a conical lamphead using pyrometers

 #104
20160049321
2016-02-18

Semiconductor baking apparatus and operation method thereof

 #105
20160043278
2016-02-11

Non-polar (Al,B,In,Ga)N quantum wells

 #106
20160002821
2016-01-07

Batch epitaxy processing system having gas deflectors

 #107
20150376814
2015-12-31

PROCESS FOR PRODUCING MOULDED MICROMETIRC, SUBMICROMETRIC OR NANOMETRIC SIZED ELEMENTS MADE OF MONOCRYSTALLINE DIAMOND OR OF DIAMOND WITH A VERY LOW DENSITY OF GRAIN BOUNDARIES

 #108
20150361581
2015-12-17

WINDOW ASSEMBLY FOR SUBSTRATE PROCESSING SYSTEM

 #109
20150345023
2015-12-03

Window cooling using compliant material

 #110
20150337459
2015-11-26

MULTILAYER THIN FILM FOR CUTTING TOOL AND CUTTING TOOL INCLUDING THE SAME

 #111
20150329989
2015-11-19

MULTI-CRYSTAL DIAMOND BODY

 #112
20150329988
2015-11-19

Use of freestanding nitride veneers in semiconductor devices

 #113
20150315027
2015-11-05

Diamond material

 #114
20150299897
2015-10-22

METHOD FOR FORMING AN EPITAXIAL SILICON LAYER

 #115
20150292110
2015-10-15

Method for preparing graphene

 #116
20150266741
2015-09-24

Plasma etching of diamond surfaces

 #117
20150247259
2015-09-03

LOW-TEMPERATURE SELECTIVE EPITAXIAL GROWTH OF SILICON FOR DEVICE INTEGRATION

 #118
20150236353
2015-08-20

FABRICATION AND FUNCTIONALIZATION OF A PURE NON-NOBLE METAL CATALYST STRUCTURE SHOWING TIME STABILITY FOR LARGE SCALE APPLICATIONS

 #119
20150222087
2015-08-06

Thick polycrystalline synthetic diamond wafers for heat spreading applications and microwave plasma chemical vapour depositon synthesis techniques

 #120
20150191850
2015-07-09

Single crystal diamond and diamond tool

 #121
20150167198
2015-06-18

Substrate structures and methods

 #122
20150075420
2015-03-19

Method for manufacturing a single crystal diamond

 #123
20150061191
2015-03-05

Microwave plasma reactors and substrates for synthetic diamond manufacture

 #124
20150059647
2015-03-05

Apparatus for growing diamonds by microwave plasma chemical vapour deposition process and substrate stage used therein

 #125
20150047566
2015-02-19

Apparatus for impurity layered epitaxy

 #126
20150030846
2015-01-29

CRYSTAL FILM, METHOD FOR MANUFACTURING CRYSTAL FILM, VAPOR DEPOSITION APPARATUS AND MULTI-CHAMBER APPARATUS

 #127
20150030786
2015-01-29

Microwave plasma reactor for manufacturing synthetic diamond material

 #128
20140360430
2014-12-11

WAFER CARRIER HAVING THERMAL UNIFORMITY-ENHANCING FEATURES

 #129
20140318442
2014-10-30

HIGH THROUGHPUT EPITAXIAL DEPOSITION SYSTEM FOR SINGLE CRYSTAL SOLAR DEVICES

 #130
20140311403
2014-10-23

High throughput multi-wafer epitaxial reactor

 #131
20140295106
2014-10-02

High throughput multi-wafer epitaxial reactor

 #132
20140251205
2014-09-11

Methods and systems for thin film deposition processes

 #133
20140220261
2014-08-07

Microwave plasma reactors

 #134
20140209014
2014-07-31

Method of growing diamond thin film

 #135
20140069327
2014-03-13

PROCESS FOR DEVELOPING A COMPOSITE COATING OF DIAMOND LIKE CARBON AND GRAPHITE ON SILICON CARBIDE GRAIN BY INDIRECT ARC PLASMA HEATING DISSOCIATION

 #136
20140048016
2014-02-20

Microwave plasma reactor for manufacturing synthetic diamond material

 #137
20140041574
2014-02-13

Diamond producing method and DC plasma enhanced CVD apparatus

 #138
20140037865
2014-02-06

Migration and plasma enhanced chemical vapor deposition

 #139
20140033981
2014-02-06

MOCVD for Growing III-V Compound Semiconductors on Silicon Substrates

 #140
20140017827
2014-01-16

Apparatus and method for manufacturing a light-emitting device using a neutral particle beam

 #141
20140004319
2014-01-02

Dislocation engineering in single crystal synthetic diamond material

 #142
20130298832
2013-11-14

Substrate processing system with lamphead having temperature management

 #143
20130272928
2013-10-17

APPARATUS FOR THE DEPOSITION OF DIAMONDS BY MICROWAVE PLASMA CHEMICAL VAPOUR DEPOSITION PROCESS AND SUBSTRATE STAGE USED THEREIN

 #144
20130260537
2013-10-03

System and process for high-density, low-energy plasma enhanced vapor phase epitaxy

 #145
20130202518
2013-08-08

Single crystal diamond prepared by CVD

 #146
20130196081
2013-08-01

Crystalline film devices, apparatuses for and methods of fabrication

 #147
20130089972
2013-04-11

METHOD FOR FORMING NANOCRYSTALLINE SILICON FILM

 #148
20130069531
2013-03-21

Microwave plasma reactors

 #149
20130059430
2013-03-07

High throughput multi-wafer epitaxial reactor

 #150
20130032085
2013-02-07

PLASMA ASSISTED HVPE CHAMBER DESIGN

 #151
20130032084
2013-02-07

Silicon wafers by epitaxial deposition

 #152
20130019927
2013-01-24

USE OF FREESTANDING NITRIDE VENEERS IN SEMICONDUCTOR DEVICES

 #153
20130017145
2013-01-17

Methods for synthesizing metal oxide nanowires

 #154
20120302045
2012-11-29

METHOD FOR PRODUCING MOSAIC DIAMOND

 #155
20120291696
2012-11-22

Method and apparatus for crystal growth using a membrane-assisted semi-closed reactor

 #156
20120252229
2012-10-04

System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy

 #157
20120241763
2012-09-27

Electronic field effect devices and methods for their manufacture

 #158
20120225308
2012-09-06

MULTILAYER SUBSTRATE AND METHOD FOR PRODUCING THE SAME, DIAMOND FILM AND METHOD FOR PRODUCING THE SAME

 #159
20120225307
2012-09-06

MULTILAYER SUBSTRATE AND METHOD FOR PRODUCING THE SAME, DIAMOND FILM AND METHOD FOR PRODUCING THE SAME

 #160
20120210932
2012-08-23

Low-temperature selective epitaxial growth of silicon for device integration

 #161
20120205623
2012-08-16

NON-POLAR (Al,B,In,Ga)N QUANTUM WELL AND HETEROSTRUCTURE MATERIALS AND DEVICES

 #162
20120195819
2012-08-02

Methods and systems to produce large particle diamonds

 #163
20120164786
2012-06-28

Gallium nitride light emitting devices on diamond

 #164
20120103250
2012-05-03

Film of n type (100) oriented single crystal diamond semiconductor doped with phosphorous atoms, and a method of producing the same

 #165
20120087378
2012-04-12

Method and Apparatus for Producing Gallium Arsenide and Silicon Composites and Devices Incorporating Same

 #166
20120070963
2012-03-22

Plasma deposition

 #167
20120068184
2012-03-22

DISLOCATION REDUCTION IN NON-POLAR III-NITRIDE THIN FILMS

 #168
20120060750
2012-03-15

Method of forming crystalline oxide semiconductor film

 #169
20120056199
2012-03-08

Self-supporting CVD diamond film and method for producing a self-supporting CVD diamond film

 #170
20120051996
2012-03-01

Diamond material

 #171
20120047950
2012-03-01

Multicolored single crystal diamond gemstones and methods for forming the same

 #172
20120037068
2012-02-16

COMPOSITE SUBSTRATES FOR DIRECT HEATING AND INCREASED TEMPERATURE UNIFORMITY

 #173
20120034737
2012-02-09

Producing a diamond semiconductor by implanting dopant using ion implantation

 #174
20120021570
2012-01-26

Method for forming microcrystalline semiconductor film and method for manufacturing semiconductor device

 #175
20110306179
2011-12-15

MOCVD for growing III-V compound semiconductors on silicon substrates

 #176
20110280790
2011-11-17

Production of large, high purity single crystal CVD diamond

 #177
20110275200
2011-11-10

METHODS OF DYNAMICALLY CONTROLLING FILM MICROSTRUCTURE FORMED IN A MICROCRYSTALLINE LAYER

 #178
20110229639
2011-09-22

Non-polar gallium nitride thin films grown by metalorganic chemical vapor deposition

 #179
20110222840
2011-09-15

Heating Configuration For Use in Thermal Processing Chambers

 #180
20110204329
2011-08-25

Non-polar (Al,B,In,Ga)N quantum well and heterostructure materials and devices

 #181
20110175109
2011-07-21

FILM OF N TYPE (100) ORIENTED SINGLE CRYSTAL DIAMOND SEMICONDUCTOR DOPED WITH PHOSPHOROUS ATOMS, AND A METHOD OF PRODUCING THE SAME

 #182
20110174213
2011-07-21

Vapor Phase Epitaxy System

 #183
20110155058
2011-06-30

SUBSTRATE PROCESSING APPARATUS HAVING A RADIANT CAVITY

 #184
20110070694
2011-03-24

Diamond semiconductor element and process for producing the same

 #185
20110068352
2011-03-24

Diamond semiconductor element and process for producing the same

 #186
20110037076
2011-02-17

Diamond semiconductor device and method of manufacturing the same

 #187
20110033688
2011-02-10

Large area deposition of graphene via hetero-epitaxial growth, and products including the same

 #188
20110017126
2011-01-27

Coloured diamond

 #189
20110014451
2011-01-20

NANODIAMOND FILM

 #190
20100329965
2010-12-30

Diamond material

 #191
20100329962
2010-12-30

Diamond material

 #192
20100329961
2010-12-30

Diamond material

 #193
20100326135
2010-12-30

Diamond material

 #194
20100289030
2010-11-18

Field effect transistor using diamond and process for producing the same

 #195
20100263587
2010-10-21

High throughput multi-wafer epitaxial reactor

 #196
20100247884
2010-09-30

STACKED BODY OF ISOTOPE DIAMOND

 #197
20100242834
2010-09-30

Method for producing single crystalline diamonds

 #198
20100215915
2010-08-26

METHOD FOR MANUFACTURE AND COATING OF NANOSTRUCTURED COMPONENTS

 #199
20100215872
2010-08-26

High throughput multi-wafer epitaxial reactor

 #200
20100210067
2010-08-19

Migration and plasma enhanced chemical vapor deposition

 #201
20100178234
2010-07-15

Multilayer substrate and method for producing the same, diamond film and method for producing the same

 #202
20100171126
2010-07-08

In situ dopant implantation and growth of a III-nitride semiconductor body

 #203
20100144129
2010-06-10

Method of manufacturing crystalline silicon

 #204
20100126406
2010-05-27

Production of Single Crystal CVD Diamond at Rapid Growth Rate

 #205
20100123098
2010-05-20

Ultratough single crystal boron-doped diamond

 #206
20100101495
2010-04-29

Restricted radiated heating assembly for high temperature processing

 #207
20100093171
2010-04-15

Method of fabrication of cubic boron nitride conical microstructures

 #208
20100092698
2010-04-15

Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition

 #209
20100092697
2010-04-15

Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition

 #210
20100087050
2010-04-08

Chemical vapor deposition with energy input

 #211
20100086703
2010-04-08

Vapor Phase Epitaxy System

 #212
20100084634
2010-04-08

Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film

 #213
20100078652
2010-04-01

DIAMOND ELECTRONIC DEVICES INCLUDING A SURFACE AND METHODS FOR THEIR MANUFACTURE

 #214
20100078651
2010-04-01

Electronic field effect devices

 #215
20100047519
2010-02-25

Plasma etching of diamond surfaces

 #216
20100040534
2010-02-18

RADICAL GENERATING APPARATUS AND ZNO-BASED THIN FILM

 #217
20100038653
2010-02-18

DIAMOND ELECTRONIC DEVICES AND METHODS FOR THEIR MANUFACTURE

 #218
20100034984
2010-02-11

Microwave plasma reactors

 #219
20100015438
2010-01-21

High colour diamond layer

 #220
20100012491
2010-01-21

High uniformity boron doped diamond material

 #221
20100012022
2010-01-21

Diamond uses/applications based on single-crystal CVD diamond produced at rapid growth rate

 #222
20100003780
2010-01-07

Methods for depositing a microcrystalline silicon film for a photovoltaic device

 #223
20090297429
2009-12-03

HIGH GROWTH RATE METHODS OF PRODUCING HIGH-QUALITY DIAMONDS

 #224
20090278114
2009-11-12

Control of carbon nanotube diameter using CVD or PECVD growth

 #225
20090261347
2009-10-22

DIAMOND SEMICONDUCTOR ELEMENT AND PROCESS FOR PRODUCING THE SAME

 #226
20090239078
2009-09-24

Process and apparatus for diamond synthesis

 #227
20090233445
2009-09-17

Method of making diamond nanopillars

 #228
20090230019
2009-09-17

Substrate cassette having electrode array

 #229
20090226293
2009-09-10

Method and apparatus for manufacturing semiconductor wafer

 #230
20090224243
2009-09-10

Spontaneous Growth Of Nanostructures On Non-single Crystalline Surfaces

 #231
20090214785
2009-08-27

Thermalization of gaseous precursors in CVD reactors

 #232
20090176114
2009-07-09

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METHOD FOR FILM DEPOSITING GROUP III NITRIDE SUCH AS GALLIUM NITRIDE

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Method for manufacturing diamond monocrystal having a thin film, and diamond monocrystal having a thin film

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Method for forming crystalline semiconductor film, method for manufacturing thin film transistor, and method for manufacturing display device

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In situ deposition of a low κ dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application

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High crystalline quality synthetic diamond

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MICROWAVE PLASMA CVD DEVICE

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System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy

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Low-temperature catalyzed formation of segmented nanowire of dielectric material

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Process and apparatus for forming nanoparticles using radiofrequency plasmas

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Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device

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APPARATUS AND METHOD FOR DIAMOND PRODUCTION

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Crystalline film devices, apparatuses for and methods of fabrication

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Method of producing large area SiC substrates

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Remote Plasma Atomic Layer Deposition Apparatus and Method Using Dc Bias

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Process For Manufacturing A Gallium Rich Gallium Nitride Film

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Silicon-carbide nanostructure and method for producing the silicon-carbide nanostructure

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Method and apparatus for growing a group (III) metal nitride film and a group (III) metal nitride film

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Ultrahard diamonds and method of making thereof

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Diamond semiconductor element and process for producing the same

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Laser uses for single-crystal CVD diamond

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Film of N Type (100) Oriented Single Crystal Diamond Semiconductor Doped with Phosphorous Atoms, and a Method of Producing the Same

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Method and apparatus for producing single crystalline diamonds

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STACKED PHOTOELECTRIC CONVERSION DEVICE AND METHOD OF PRODUCING THE SAME

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SYSTEM AND METHOD FOR PRODUCING SYNTHETIC DIAMOND

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System and method for producing synthetic diamond

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System and process for high-density, low-energy plasma enhanced vapor phase epitaxy

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DIAMOND SEMICONDUCTOR ELEMENT AND PROCESS FOR PRODUCING THE SAME

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Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device

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SYSTEM AND METHOD FOR PRODUCING SYNTHETIC DIAMOND

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Diamond uses/applications based on single-crystal CVD diamond produced at rapid growth rate

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Thick single crystal diamond layer method for making it and gemstones produced from the layer

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Self-assembled nanostructures

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Non-polar (a1,b,in,ga)n quantum wells

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METHODS AND APPARATUS FOR EPITAXIAL FILM FORMATION

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Featuring forming methods to reduce stacking fault nucleation sites

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Monocrystalline diamond layer and method for the production thereof

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Element of low temperature poly-silicon thin film and method of making poly-silicon thin film by direct deposition at low temperature and inductively-coupled plasma chemical vapor deposition equipment therefor

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Tough diamonds and method of making thereof

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CVD diamond in wear applications

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Synthesis of large homoepitaxial monocrystalline diamond

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Deposition methods utilizing microwave excitation

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Process and apparatus for producing single crystal

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Low-temperature catalyzed formation of segmented nanowire of dielectric material

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Non-polar (Al,B,In,Ga)N quantum well and heterostructure materials and devices

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