ClassID:

121381

C30B35/00 - CPC Classification

Classification description:

Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure

Sub-classes:
Recent Application in this class:
#1
20260092377
2026-04-02

COORDINATION COMPLEX CURABLE FLUIDS TO COAT SUBSTRATES WITH METAL CARBIDES

#2
20260092351
2026-04-02

PROCESS FOR CREATING REFRACTORY CARBIDE PARTS BY CARBURIZING METAL

#3
20260070095
2026-03-12

METHODS FOR CLEANING THE PULL CABLE OF AN INGOT PULLER APPARATUS

#4
20250215613
2025-07-03

METHOD AND APPARATUS FOR MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL, AND SILICON CARBIDE SINGLE CRYSTAL INGOT

#5
20250163605
2025-05-22

Artificial Crystal Furnace, and Artificial Crystal Furnace System Comprising Artificial Crystal Furnace

#6
20250132155
2025-04-24

APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION

#7
20250121415
2025-04-17

METHODS FOR CLEANING THE PULL CABLE OF AN INGOT PULLER APPARATUS

#8
20250109521
2025-04-03

METHOD AND APPARATUS FOR DIAMETER MEASUREMENT OF CZOCHRALSKI MONOCRYSTALLINE SILICON, AND DEVICE FOR GROWING CZOCHRALSKI MONOCRYSTALLINE SILICON

#9
20250091100
2025-03-20

CLEANING TOOLS AND METHODS FOR CLEANING THE PULL CABLE OF AN INGOT PULLER APPARATUS

#10
20250087485
2025-03-13

APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION

#11
20250051965
2025-02-13

SHOWERHEAD FOR FAST DELIVERY OF INCOMPATABLE PRECURSORS

#12
20250033093
2025-01-30

DEVICES AND METHODS FOR CLEANING A FINISHED MONOCRYSTALLINE SQUARE ROD, AND GRINDERS

#13
20240368801
2024-11-07

DOPED PARTICULATE SILICON PARTICLE SIZE SELECTION

#14
20240337042
2024-10-10

INGOT PULLER APPARATUS HAVING COOLING JACKET DEVICE WITH COOLING FLUID TUBES

#15
20240335863
2024-10-10

METHODS FOR CLEANING THE PULL CABLE OF AN INGOT PULLER APPARATUS

#16
20240263352
2024-08-08

CONTROLLED NANOMATERIAL MANUFACTURING

#17
20240263262
2024-08-08

MONOCRYSTALLINE METAL FOIL AND MANUFACTURING METHOD THEREFOR

#18
20240254657
2024-08-01

WATER-COOLED SCREEN FOR IMPROVING PULLING RATE OF SILICON CRYSTAL AND MOULD FOR PREPARING THE SAME

#19
20240240356
2024-07-18

Hierarchical Inverted/Normal Cobalt Ferrite Nano-Chessboard

#20
20240231042
2024-07-11

PROCESS CHAMBER WITH REFLECTOR

#21
20240134151
2024-04-25

PROCESS CHAMBER WITH REFLECTOR

#22
20240035193
2024-02-01

Ingot puller apparatus having cooling jacket device with cooling fluid tubes

#23
20230420275
2023-12-28

Processing chamber with annealing mini-environment

#24
20230349066
2023-11-02

Heater In Hot-Zone of Single Crystal Pulling Apparatus and Single Crystal Pulling Apparatus

#25
20230347388
2023-11-02

Cleaning tools and methods for cleaning the pull cable of an ingot puller apparatus

#26
20230347271
2023-11-02

Method for collecting dust from single crystal growth system

#27
20230212787
2023-07-06

METALORGANIC CHEMICAL VAPOR PHASE EPITAXY OR VAPOR PHASE DEPOSITION APPARATUS

#28
20230212781
2023-07-06

APPARATUS FOR FORMING SINGLE CRYSTAL PIEZOELECTRIC LAYERS USING LOW-VAPOR PRESSURE METALORGANIC PRECURSORS IN CVD SYSTEMS AND METHODS OF FORMING SINGLE CRYSTAL PIEZOELECTRIC LAYERS USING THE SAME

#29
20230193509
2023-06-22

GA2O3 CRYSTAL FILM DEPOSITION METHOD ACCORDING TO HVPE, DEPOSITION APPARATUS AND GA2O3 CRYSTAL FILM-DEPOSITED SUBSTRATE USING THE SAME

#30
20230059271
2023-02-23

Method of single crystal growth by controlling the heating of a source material and the cooling of a backside of a lid

#31
20230038976
2023-02-09

Rocking type seed crystal surface corrosion, cleaning and drying device and process method

#32
20230013467
2023-01-19

Cylinder assembly for improving region of defect-free growth of crystal ingot for single crystal pulling apparatus and single crystal pulling apparatus

#33
20220411962
2022-12-29

Manufacturing apparatus for a group-III nitride crystal comprising a raw material chamber and a nurturing chamber in which a group III-element oxide gas and a nitrogen element-containing gas react to produce a group-III nitride crystal on a seed substrate

#34
20220380935
2022-12-01

PROTECTIVE STRUCTURE FOR SILICON ROD AND METHOD FOR MANUFACTURING SILICON ROD

#35
20220356603
2022-11-10

DYNAMIC BALANCING SEED LIFT

#36
20220267929
2022-08-25

Deposit removing device and deposit removing method

#37
20220259760
2022-08-18

MANUFACTURING DEVICE FOR SIC SEMICONDUCTOR SUBSTRATE

#38
20220220630
2022-07-14

Methods and systems for controlling crystal growth

#39
20220170177
2022-06-02

Single crystal furnace

#40
20220170150
2022-06-02

Tantalum carbide-coated carbon material and method for manufacturing same

#41
20220170149
2022-06-02

Tantalum carbide coated carbon material

#42
20220162769
2022-05-26

Production method of monocrystalline silicon based on an emissivity of a production apparatus

#43
20220146564
2022-05-12

Semiconductor wafer evaluation apparatus and semiconductor wafer manufacturing method

#44
20220112623
2022-04-14

Method and apparatus for manufacturing silicon carbide single crystal, and silicon carbide single crystal ingot

#45
20220090292
2022-03-24

ACTIVE BALANCING SEED LIFT

#46
20220034829
2022-02-03

Thermal conductivity estimation method, thermal conductivity estimation apparatus, production method for semiconductor crystal product, thermal conductivity calculator, thermal conductivity calculation program, and, thermal conductivity calculation method

#47
20210394100
2021-12-23

Method for collecting dust from single crystal growth system and dust collecting system thereof

#48
20210381128
2021-12-09

VAPOR PHASE GROWTH APPARATUS

#49
20210324536
2021-10-21

Epitaxial wafer production system for performing a correction based on variation in total output value of upper and lower lamps

#50
20210310153
2021-10-07

Epi-growth apparatus of separate chamber type

#51
20210301423
2021-09-30

Metalorganic chemical vapor phase deposition apparatus having bubbler with first supply section leading to reactor, first, second and third mass flow controller and pressure sensor

#52
20210285128
2021-09-16

Apparatus for growing single crystal metal-oxide EPI wafer

#53
20210262119
2021-08-26

SILICON CARBIDE SINGLE CRYSTAL GROWTH APPARATUS AND METHOD FOR MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL

#54
20210246570
2021-08-12

Apparatus including horizontal flow reactor with a central injector column having separate conduits for low-vapor pressure metalorganic precursors and other precursors for formation of piezoelectric layers on wafers

#55
20210115593
2021-04-22

METHOD AND APPARATUS FOR MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL

#56
20210002736
2021-01-07

Monocrystalline metal foil and manufacturing method therefor

#57
20200346258
2020-11-05

Cleaning method, method for producing silicon single crystal, and cleaning device

#58
20200308725
2020-10-01

Sputtering equipment and method of manufacturing semiconductor device

#59
20200283890
2020-09-10

Assembly for the deposition of silicon nanostructures

#60
20200198980
2020-06-25

Method of manufacturing tantalum carbide material

#61
20200135508
2020-04-30

Processing chamber with annealing mini-environment

#62
20200131666
2020-04-30

Gemstone growing device

#63
20200001335
2020-01-02

Device and method for cleaning monocrystalline pulling apparatus

#64
20190388943
2019-12-26

Cleaning device for monocrystal pulling apparatus

#65
20190316272
2019-10-17

Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them

#66
20190242016
2019-08-08

Chemical vapor deposition reactor to grow diamond film by microwave plasma chemical vapor deposition

#67
20190177875
2019-06-13

Heater for ingot growing apparatus

#68
20190169767
2019-06-06

Method of utilizing a degassing chamber to reduce arsenic outgassing following deposition of arsenic-containing material on a substrate

#69
20190062899
2019-02-28

Evaporation source and evaporation-deposition device having the same

#70
20190032243
2019-01-31

Heating unit comprised of ring heaters with ring support units disposed between the ring heaters and ingot growing device including the same

#71
20180130922
2018-05-10

Monocrystal and polycrystal texturing method

#72
20180066377
2018-03-08

Apparatus for manufacturing silicon single crystal and melt inlet pipe of the same

#73
20180057957
2018-03-01

ADVANCED CRUCIBLE SUPPORT AND THERMAL DISTRIBUTION MANAGEMENT

#74
20180047864
2018-02-15

System and method for crystalline sheet growth using a cold block and gas jet

#75
20170362735
2017-12-21

Crystal growth apparatus and crystal production method

#76
20170338117
2017-11-23

Method for manufacturing epitaxial silicon wafer and vapor phase growth device

#77
20170314162
2017-11-02

Method for cleaning exhaust passage for semiconductor crystal manufacturing device

#78
20170259294
2017-09-14

Substrate processing system having susceptorless substrate support with enhanced substrate heating control

#79
20170186937
2017-06-29

System and fabrication method of piezoelectric stack that reduces driving voltage and clamping effect

#80
20170145587
2017-05-25

Crystal pulling system and method for inhibiting precipitate build-up in exhaust flow path

#81
20160348273
2016-12-01

Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them

#82
20160298260
2016-10-13

Single crystal growing apparatus

#83
20160281259
2016-09-29

Controlling a temperature of a crucible inside an oven

#84
20160243580
2016-08-25

Substrate processing system having susceptorless substrate support with enhanced substrate heating control

#85
20160233124
2016-08-11

Reaction system for growing a thin film

#86
20160208410
2016-07-21

Single crystal production apparatus

#87
20160208407
2016-07-21

Single crystal production apparatus

#88
20160076148
2016-03-17

Protecting a target pump interior with an ALD coating

#89
20160071961
2016-03-10

METHOD FOR FABRICATING THIN FILM TRANSISTOR AND APPARATUS THEREOF

#90
20160068997
2016-03-10

Liner for epi chamber

#91
20160061528
2016-03-03

Methodology for annealing group III-nitride semiconductor device structures using novel weighted cover systems

#92
20150321966
2015-11-12

Silicon carbide-tantalum carbide composite and susceptor

#93
20150284876
2015-10-08

Crystal growth apparatus and thermal insulation cover of the same

#94
20150218729
2015-08-06

Aluminum nitride bulk crystals having high transparency to untraviolet light and methods of forming them

#95
20150176152
2015-06-25

Apparatus and method for bulk vapour phase crystal growth

#96
20150176150
2015-06-25

Advanced crucible support and thermal distribution management

#97
20150159296
2015-06-11

Crystal growth system and method for lead-contained compositions using batch auto-feeding

#98
20150153233
2015-06-04

Adjustable pyrometer mount with removable viewport mechanism

#99
20150136018
2015-05-21

Apparatus for manufacturing single crystal

#100
20150114286
2015-04-30

Pulling head having a magnetic drive

#101
20150114283
2015-04-30

Cantilever device for extending capacity of a scale used in a crystal growth apparatus

#102
20150092920
2015-04-02

Intelligent machines and process for production of monocrystalline products with goniometer continual feedback

#103
20150044622
2015-02-12

Heater moving type substrate processing apparatus

#104
20150020545
2015-01-22

Crucible for solidifying a silicon ingot

#105
20150013577
2015-01-15

Annular structure having excellent heat insulating and heat releasing properties

#106
20150011076
2015-01-08

Reactor gas panel common exhaust

#107
20150007766
2015-01-08

Vapor phase growth apparatus and vapor phase growth method

#108
20140361414
2014-12-11

Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions

#109
20140345801
2014-11-27

Apparatus for processing substrate for supplying reaction gas having phase difference

#110
20140345528
2014-11-27

Substrate processing apparatus including processing unit

#111
20140332175
2014-11-13

Composite geometrical design for a grain starter in a bridgman investment casting process

#112
20140245956
2014-09-04

CVD APPARATUS, METHOD OF MANUFACTURING SUSCEPTOR USING THE CVD APPARATUS, AND SUSCEPTOR

#113
20140209016
2014-07-31

Sheet production apparatus for removing a crystalline sheet from the surface of a melt using gas jets located above and below the crystalline sheet

#114
20140205765
2014-07-24

Method for manufacturing carbon nanotubes

#115
20140190398
2014-07-10

System for manufacturing a crystalline material by directional crystallization provided with an additional lateral heat source

#116
20140170838
2014-06-19

Apparatus and method for fabricating wafer

#117
20140137395
2014-05-22

Systems and methods for producing seed bricks

#118
20140124826
2014-05-08

METHOD OF SURFACE TREATMENT OF GROUP III NITRIDE CRYSTAL FILM, GROUP III NITRIDE CRYSTAL SUBSTRATE, GROUP III NITRIDE CRYSTAL SUBSTRATE WITH EPITAXIAL LAYER, AND SEMICONDUCTOR DEVICE

#119
20140116325
2014-05-01

Production apparatus of SiC single crystal by solution growth method, method for producing SiC single crystal using the production apparatus, and crucible used in the production apparatus

#120
20140116324
2014-05-01

Production apparatus and production method of SiC single crystal

#121
20140102357
2014-04-17

Method and apparatus for reducing impurities in a single crystal based on ingot length

#122
20140023106
2014-01-23

Heating electrode assembly for crystal growth furnace

#123
20130306109
2013-11-21

Apparatus for cleaning exhaust passage for semiconductor crystal manufacturing device

#124
20130256962
2013-10-03

Substrate processing system having susceptorless substrate support with enhanced substrate heating control

#125
20130244347
2013-09-19

Laser annealing method, laser annealing apparatus, and method for manufacturing thin film transistor

#126
20130109122
2013-05-02

Laser crystallization and polycrystal efficiency improvement for thin film solar

#127
20130104802
2013-05-02

Gallium trichloride injection scheme

#128
20130104601
2013-05-02

Apparatus and method for crystallization of silicon

#129
20130102888
2013-04-25

Torque for incrementally advancing a catheter during right heart catheterization

#130
20130068164
2013-03-21

HEATING UNIT AND FILM-FORMING APPARATUS

#131
20130055764
2013-03-07

CRYSTAL GROWTH FURNACE AND MOVING METHOD THEREOF

#132
20130047914
2013-02-28

RIBBON CRYSTAL STRING FOR INCREASING WAFER YIELD

#133
20130036966
2013-02-14

RIBBON CRYSTAL END STRING WITH MULTIPLE INDIVIDUAL STRINGS

#134
20130028385
2013-01-31

Intelligent machines and process for production of monocrystalline products with goniometer continual feedback

#135
20130014695
2013-01-17

Ring-shaped resistance heater for supplying heat to a growing single crystal

#136
20120312790
2012-12-13

PULSE CIRCULATOR

#137
20120304697
2012-12-06

DEVICE FOR OBTAINING A MULTICRYSTALLINE SEMICONDUCTOR MATERIAL, IN PARTICULAR SILICON, AND METHOD FOR CONTROLLING THE TEMPERATURE THEREIN

#138
20120297580
2012-11-29

METHOD AND DEVICE FOR OBTAINING A MULTICRYSTALLINE SEMICONDUCTOR MATERIAL, IN PARTICULAR SILICON

#139
20120285201
2012-11-15

Directional solidification furnace heat exchanger

#140
20120282133
2012-11-08

CRYSTAL GROWTH APPARATUS AND METHOD

#141
20120272892
2012-11-01

Metal-Organic Vapor Phase Epitaxy System and Process

#142
20120266821
2012-10-25

Reaction system for growing a thin film

#143
20120266809
2012-10-25

INSULATION DEVICE OF SINGLE CRYSTAL GROWTH DEVICE AND SINGLE CRYSTAL GROWTH DEVICE INCLUDING THE SAME

#144
20120238084
2012-09-20

Method of forming epitaxial based integrated circuit

#145
20120238083
2012-09-20

Method of forming epitaxial semiconductor structure

#146
20120238080
2012-09-20

Method of forming epitaxial film

#147
20120238079
2012-09-20

Method of transferring epitaxial film

#148
20120238078
2012-09-20

Method of integrating epitaxial film onto assembly substrate

#149
20120227472
2012-09-13

Method of determining an amount of impurities that a contaminating material contributes to high purity silicon

#150
20120222613
2012-09-06

Single crystal silicon pulling device, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt

#151
20120196038
2012-08-02

Jig for semiconductor production and method for producing same

#152
20120192790
2012-08-02

Apparatus with two-chamber structure for growing silicon carbide crystals

#153
20120190127
2012-07-26

SYSTEMS AND METHODS FOR DETERMINING PROCESS CONDITIONS IN CONFINED VOLUMES

#154
20120186513
2012-07-26

Kyropoulos sapphire single crystal growing apparatus using elliptic crucible

#155
20120167629
2012-07-05

Apparatus and method for crystallization of silicon

#156
20120164760
2012-06-28

Complete recrystallization of semiconductor wafers

#157
20120159993
2012-06-28

FEEDSTOCK MELTING AND CASTING SYSTEM AND PROCESS

#158
20120141808
2012-06-07

2-DIMENSIONAL LINE-DEFECTS CONTROLLED SILICON INGOT, WAFER AND EPITAXIAL WAFER, AND MANUFACTURING PROCESS AND APPARATUS THEREFOR

#159
20120132131
2012-05-31

2-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor

#160
20120118234
2012-05-17

Metal organic chemical vapor deposition equipment

#161
20120114531
2012-05-10

Silicon oxide removal apparatus and facility for recycling inert gas for use in silicon single crystal manufacturing apparatus

#162
20120094474
2012-04-19

Method for equipping an epitaxy reactor

#163
20120064258
2012-03-15

METHOD FOR MANUFACTURING CARBON NANOTUBES

#164
20120055406
2012-03-08

Vapor phase deposition apparatus and support table

#165
20120048496
2012-03-01

Eddy current thickness measurement apparatus

#166
20120048183
2012-03-01

Apparatus for growth of single crystals including a solute feeder

#167
20120048182
2012-03-01

Gallium trichloride injection scheme

#168
20120048179
2012-03-01

Crystal growth apparatus with ceramic coating and methods for preventing molten material breach in a crystal growth apparatus

#169
20120027646
2012-02-02

Reaction chamber of an epitaxial reactor and reactor that uses said chamber

#170
20120020850
2012-01-26

CRYSTALLIZATION SYSTEM AND METHOD FOR PROMOTING CRYSTALLIZATION

#171
20110306522
2011-12-15

Microfluidic protein crystallography

#172
20110290175
2011-12-01

Multi-Chamber CVD Processing System

#173
20110274874
2011-11-10

CHEMICAL VAPOR DEPOSITED SILICON CARBIDE ARTICLES

#174
20110271899
2011-11-10

Removing a sheet from the surface of a melt using gas jets

#175
20110259270
2011-10-27

Carbon component and method for manufacturing the same

#176
20110259260
2011-10-27

Silicon single crystal pull-up apparatus and method of manufacturing silicon single crystal

#177
20110248278
2011-10-13

Single scan irradiation for crystallization of thin films

#178
20110247550
2011-10-13

Apparatus for making epitaxial film

#179
20110247546
2011-10-13

Ribbon Crystal String for Increasing Wafer Yield

#180
20110220012
2011-09-15

CRYSTAL GROWTH APPARATUS WITH LOAD-CENTERED APERTURE, AND DEVICE AND METHOD FOR CONTROLLING HEAT EXTRACTION FROM A CRUCIBLE

#181
20110214605
2011-09-08

Single-crystal manufacturing method and single-crystal manufacturing apparatus

#182
20110212623
2011-09-01

Substrate treatment device

#183
20110209693
2011-09-01

SILICON HEATING FURNACE

#184
20110207338
2011-08-25

Laser crystallization apparatus and laser crystallization method

#185
20110203515
2011-08-25

Device for crystal growth at intermediate temperatures using controlled semi-active cooling

#186
20110200841
2011-08-18

SYSTEM FOR THE PRODUCTION OF GRAIN FREE METAL PRODUCTS

#187
20110200496
2011-08-18

SYSTEM AND METHOD FOR ARRANGING HEATING ELEMENT IN CRYSTAL GROWTH APPARATUS

#188
20110185964
2011-08-04

Method and system for diamond deposition using a liquid-solvent carbon-tranfser mechanism

#189
20110177626
2011-07-21

Method Of Determining An Amount of Impurities That A Contaminating Material Contributes To High Purity Silicon And Furnace For Treating High Purity Silicon

#190
20110158887
2011-06-30

Apparatus and method of use for casting system with independent melting and solidification

#191
20110156045
2011-06-30

Crystal manufacturing apparatus, semiconductor device manufactured using the same, and method of manufacturing semiconductor device using the same

#192
20110142741
2011-06-16

Crystal growth in solution under static conditions

#193
20110076632
2011-03-31

Thermal processing apparatus and cooling method

#194
20110070721
2011-03-24

EPITAXIAL GROWTH OF COMPOUND NITRIDE SEMICONDUCTOR STRUCTURES

#195
20110068206
2011-03-24

Crusher for crushing a silicon lump, and silicon lump crushing apparatus having a plurality of crushers

#196
20110060126
2011-03-10

METHOD AND APPARATUS FOR OPTIMIZING CRYSTALLIZATION CONDITIONS OF A SUBSTRATE

#197
20110051757
2011-03-03

Connection unit and laser oscillating apparatus having the same

#198
20110046022
2011-02-24

CRYSTALLIZATION DEVICE FOR HIGH-THROUGHPUT VISUAL INSPECTION AND X-RAY DIFFRACTION ANALYSIS

#199
20110036874
2011-02-17

Solid yttrium oxide-containing substrate which has been cleaned to remove impurities

#200
20110030612
2011-02-10

Single-crystal manufacturing apparatus

#201
20110027928
2011-02-03

PULSED LASER DEPOSITION OF HIGH QUALITY PHOTOLUMINESCENT GaN FILMS

#202
20110020054
2011-01-27

THERMAL STRAIN RELIEF DEVICE FOR HIGH TEMPERATURE FURNACE

#203
20110008621
2011-01-13

Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them

#204
20100310769
2010-12-09

Continuous Feed Chemical Vapor Deposition System

#205
20100307403
2010-12-09

(110) DISLOCATION-FREE MONOCRYSTALLINE SILICON AND ITS PREPARATION AND THE GRAPHITE HEAT SYSTEM USED

#206
20100290973
2010-11-18

METHOD AND DEVICE FOR PROVIDING LIQUID SILICON

#207
20100277735
2010-11-04

Apparatus for manufacturing carbon nanotubes

#208
20100258050
2010-10-14

Apparatus for producing single crystal

#209
20100227532
2010-09-09

METHOD OF SURFACE TREATMENT OF GROUP III NITRIDE CRYSTAL FILM, GROUP III NITRIDE CRYSTAL SUBSTRATE, GROUP III NITRIDE CRYSTAL SUBSTRATE WITH EPITAXIAL LAYER, AND SEMICONDUCTOR DEVICE

#210
20100227060
2010-09-09

Atomic layer deposition apparatus and method of fabricating atomic layer using the same

#211
20100216261
2010-08-26

Method for identifying an incorrect position of a semiconductor wafer during a thermal treatment

#212
20100207312
2010-08-19

Silicon Supporting Apparatus and Silicon Heating and Quenching Equipment Using the Same

#213
20100129657
2010-05-27

Method and apparatus for growth of multi-component single crystals

#214
20100116436
2010-05-13

RING-SHAPED MEMBER AND METHOD FOR MANUFACTURING SAME

#215
20100105194
2010-04-29

Method of integrating epitaxial film onto assembly substrate

#216
20100102419
2010-04-29

Epitaxy-Level Packaging (ELP) System

#217
20100101725
2010-04-29

Apparatus for making epitaxial film

#218
20100093159
2010-04-15

Separate injection of reactive species in selective formation of films

#219
20100092776
2010-04-15

Ribbon crystal having reduced wetting string

#220
20100064970
2010-03-18

Apparatus and method of forming semiconductor devices

#221
20100061914
2010-03-11

Guided diameter SiC sublimation growth with multi-layer growth guide

#222
20100052218
2010-03-04

Gas Recirculation Heat Exchanger For Casting Silicon

#223
20100051108
2010-03-04

System and method for liquid silicon containment

#224
20100050932
2010-03-04

Apparatus and Method of Direct Electric Melting a Feedstock

#225
20100050393
2010-03-04

APPARATUS AND METHOD OF USE FOR AN INERT GAS REBREATHER USED IN FURNACE OPERATIONS

#226
20100037825
2010-02-18

DIFFERENTIATED-TEMPERATURE REACTION CHAMBER

#227
20100034984
2010-02-11

Microwave plasma reactors

#228
20100031885
2010-02-11

Reactor For Growing Crystals

#229
20100031869
2010-02-11

System for Manufacturing Silicon Single Crystal and Method for Manufacturing Silicon Single Crystal Using this System

#230
20100018454
2010-01-28

Method of producing single crystal

#231
20100013052
2010-01-21

Dual chamber system providing simultaneous etch and deposition on opposing substrate sides for growing low defect density epitaxial layers

#232
20090320744
2009-12-31

High pressure apparatus and method for nitride crystal growth

#233
20090277390
2009-11-12

Source, an arrangement for installing a source, and a method for installing and removing a source

#234
20090274888
2009-11-05

High-purity carbon fiber-reinforced carbon composite and method for producing the same

#235
20090264632
2009-10-22

Device and a method for promoting crystallisation

#236
20090255457
2009-10-15

System and method for epitaxial deposition of a crystal using a liquid-solvent fluidized-bed mechanism

#237
20090249998
2009-10-08

Single crystal pulling apparatus

#238
20090249997
2009-10-08

Method of producing group III nitride crystal, apparatus for producing group III nitride crystal, and group III nitride crystal

#239
20090249994
2009-10-08

Crystal growth apparatus and method

#240
20090246493
2009-10-01

FLEXIBLE, HIGH PURITY EXPANDED GRAPHITE SHEET, METHOD OF PRODUCING SAME, AND CARBON CRUCIBLE LINING USING SAID SHEET

#241
20090243040
2009-10-01

Micro-heater arrays and pn-junction devices having micro-heater arrays, and methods for fabricating the same

#242
20090241829
2009-10-01

Crystal growth system and method for lead-contained compositions using batch auto-feeding

#243
20090229512
2009-09-17

Single crystal silicon pulling apparatus, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt

#244
20090223453
2009-09-10

Equipment for high volume manufacture of group III-V semiconductor materials

#245
20090217877
2009-09-03

Epitaxial reactor for mass production of wafers

#246
20090211520
2009-08-27

Crystal-growing furnace system with emergent pressure-release arrangement

#247
20090211519
2009-08-27

Electrode anchoring structure in crystal-growing furnaces

#248
20090205565
2009-08-20

Apparatus for manufacturing single-crystal silicon carbide

#249
20090205564
2009-08-20

Crystal-growing furnace system

#250
20090194026
2009-08-06

PROCESSING SYSTEM FOR FABRICATING COMPOUND NITRIDE SEMICONDUCTOR DEVICES

#251
20090178611
2009-07-16

Gallium trichloride injection scheme

#252
20090173277
2009-07-09

Cooling structure for body of crystal-growing furnace

#253
20090173275
2009-07-09

Supporting table having heaters inside crystal-growing furnace

#254
20090169460
2009-07-02

2-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor

#255
20090168066
2009-07-02

Microfluidic protein crystallography

#256
20090163001
2009-06-25

Separate injection of reactive species in selective formation of films

#257
20090159897
2009-06-25

Method for treating semiconductor processing components and components formed thereby

#258
20090145350
2009-06-11

METHOD OF INJECTING DOPANT GAS

#259
20090140211
2009-06-04

Convective flow chemical vapor deposition growth of nanostructures

#260
20090133617
2009-05-28

Single crystal semiconductor manufacturing apparatus and manufacturing method

#261
20090120352
2009-05-14

Semiconductor single crystal manufacturing device and manufacturing method

#262
20090111247
2009-04-30

Formation method of single crystal semiconductor layer, formation method of crystalline semiconductor layer, formation method of polycrystalline layer, and method for manufacturing semiconductor device

#263
20090104423
2009-04-23

Device and process for heating III-V wafers, and annealed III-V semiconductor single crystal wafer

#264
20090087615
2009-04-02

Corrosion-resistant gas distribution plate for plasma processing chamber

#265
20090078204
2009-03-26

Deposition system for thin film formation

#266
20090061224
2009-03-05

Ribbon Crystal String with Extruded Refractory Material

#267
20090061197
2009-03-05

Ribbon crystal end string with multiple individual strings

#268
20090061163
2009-03-05

Ribbon crystal string for increasing wafer yield

#269
20090060823
2009-03-05

Reduced wetting string for ribbon crystal

#270
20090056631
2009-03-05

APPARATUS FOR MANUFACTURING SEMICONDUCTOR LAYER

#271
20090038549
2009-02-12

SHAPED CRUCIBLE AND EVAPORATION APPARATUS HAVING SAME

#272
20090031945
2009-02-05

SINGLE CRYSTAL AND SEMICONDUCTOR WAFER AND APPARATUS AND METHOD FOR PRODUCING A SINGLE CRYSTAL

#273
20090025751
2009-01-29

Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal

#274
20090013931
2009-01-15

Continuous growth of single-wall carbon nanotubes using chemical vapor deposition

#275
20090013924
2009-01-15

Process and apparatus for producing nitride single crystal

#276
20080308036
2008-12-18

VAPOR-PHASE GROWTH APPARATUS AND VAPOR-PHASE GROWTH METHOD

#277
20080276860
2008-11-13

CROSS FLOW APPARATUS AND METHOD FOR HYDRIDE VAPOR PHASE DEPOSITION

#278
20080271666
2008-11-06

Method and apparatus for producing crystals

#279
20080254235
2008-10-16

Pulsed laser deposition of high quality photoluminescent GaN films

#280
20080245297
2008-10-09

Material supply apparatus

#281
20080236477
2008-10-02

Vapor phase growth apparatus and vapor phase growth method

#282
20080226868
2008-09-18

Chemical vapor deposited silicon carbide articles

#283
20080213158
2008-09-04

Apparatus for production of crystal of group III element nitride and process for producing crystal of group III element nitride

#284
20080206463
2008-08-28

Continuous growth of single-wall carbon nanotubes using chemical vapor deposition

#285
20080203361
2008-08-28

Method and apparatus for growth of multi-component single crystals

#286
20080182397
2008-07-31

Selective epitaxy process control

#287
20080165929
2008-07-10

Sample mounts for microcrystal crystallography

#288
20080165822
2008-07-10

Laser light irradiation apparatus and laser light irradiation method

#289
20080135516
2008-06-12

Substrate treatment device

#290
20080127886
2008-06-05

Heat shield member and single crystal pulling device

#291
20080107844
2008-05-08

Annular structure having excellent heat insulating and heat releasing properties

#292
20080098953
2008-05-01

Method for continuous, in situ evaluation of entire wafers for macroscopic features during epitaxial growth

#293
20080081112
2008-04-03

Batch reaction chamber employing separate zones for radiant heating and resistive heating

#294
20080078322
2008-04-03

Silicon single crystal pulling device and graphite member used therein

#295
20080072821
2008-03-27

SMALL VOLUME SYMMETRIC FLOW SINGLE WAFER ALD APPARATUS

#296
20080071403
2008-03-20

High power laser flat panel workpiece treatment system controller

#297
20080066497
2008-03-20

Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder

#298
20080062498
2008-03-13

Apparatus for crystallizing semiconductor with laser beams

#299
20080047485
2008-02-28

Apparatus for growing high quality silicon single crystal ingot and growing method using the same

#300
20080038906
2008-02-14

Method for Producing P-Type Ga2o3 Film and Method for Producing Pn Junction-Type Ga2o3 Film