121381 ⎘
Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
Sub-classes:COORDINATION COMPLEX CURABLE FLUIDS TO COAT SUBSTRATES WITH METAL CARBIDES
#2PROCESS FOR CREATING REFRACTORY CARBIDE PARTS BY CARBURIZING METAL
#3METHODS FOR CLEANING THE PULL CABLE OF AN INGOT PULLER APPARATUS
#4METHOD AND APPARATUS FOR MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL, AND SILICON CARBIDE SINGLE CRYSTAL INGOT
#5Artificial Crystal Furnace, and Artificial Crystal Furnace System Comprising Artificial Crystal Furnace
#6APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION
#7METHODS FOR CLEANING THE PULL CABLE OF AN INGOT PULLER APPARATUS
#8METHOD AND APPARATUS FOR DIAMETER MEASUREMENT OF CZOCHRALSKI MONOCRYSTALLINE SILICON, AND DEVICE FOR GROWING CZOCHRALSKI MONOCRYSTALLINE SILICON
#9CLEANING TOOLS AND METHODS FOR CLEANING THE PULL CABLE OF AN INGOT PULLER APPARATUS
#10APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION
#11SHOWERHEAD FOR FAST DELIVERY OF INCOMPATABLE PRECURSORS
#12DEVICES AND METHODS FOR CLEANING A FINISHED MONOCRYSTALLINE SQUARE ROD, AND GRINDERS
#13DOPED PARTICULATE SILICON PARTICLE SIZE SELECTION
#14INGOT PULLER APPARATUS HAVING COOLING JACKET DEVICE WITH COOLING FLUID TUBES
#15METHODS FOR CLEANING THE PULL CABLE OF AN INGOT PULLER APPARATUS
#16CONTROLLED NANOMATERIAL MANUFACTURING
#17MONOCRYSTALLINE METAL FOIL AND MANUFACTURING METHOD THEREFOR
#18WATER-COOLED SCREEN FOR IMPROVING PULLING RATE OF SILICON CRYSTAL AND MOULD FOR PREPARING THE SAME
#19Hierarchical Inverted/Normal Cobalt Ferrite Nano-Chessboard
#20PROCESS CHAMBER WITH REFLECTOR
#21PROCESS CHAMBER WITH REFLECTOR
#22Ingot puller apparatus having cooling jacket device with cooling fluid tubes
#23Processing chamber with annealing mini-environment
#24Heater In Hot-Zone of Single Crystal Pulling Apparatus and Single Crystal Pulling Apparatus
#25Cleaning tools and methods for cleaning the pull cable of an ingot puller apparatus
#26Method for collecting dust from single crystal growth system
#27METALORGANIC CHEMICAL VAPOR PHASE EPITAXY OR VAPOR PHASE DEPOSITION APPARATUS
#28APPARATUS FOR FORMING SINGLE CRYSTAL PIEZOELECTRIC LAYERS USING LOW-VAPOR PRESSURE METALORGANIC PRECURSORS IN CVD SYSTEMS AND METHODS OF FORMING SINGLE CRYSTAL PIEZOELECTRIC LAYERS USING THE SAME
#29GA2O3 CRYSTAL FILM DEPOSITION METHOD ACCORDING TO HVPE, DEPOSITION APPARATUS AND GA2O3 CRYSTAL FILM-DEPOSITED SUBSTRATE USING THE SAME
#30Method of single crystal growth by controlling the heating of a source material and the cooling of a backside of a lid
#31Rocking type seed crystal surface corrosion, cleaning and drying device and process method
#32Cylinder assembly for improving region of defect-free growth of crystal ingot for single crystal pulling apparatus and single crystal pulling apparatus
#33Manufacturing apparatus for a group-III nitride crystal comprising a raw material chamber and a nurturing chamber in which a group III-element oxide gas and a nitrogen element-containing gas react to produce a group-III nitride crystal on a seed substrate
#34PROTECTIVE STRUCTURE FOR SILICON ROD AND METHOD FOR MANUFACTURING SILICON ROD
#35DYNAMIC BALANCING SEED LIFT
#36Deposit removing device and deposit removing method
#37MANUFACTURING DEVICE FOR SIC SEMICONDUCTOR SUBSTRATE
#38Methods and systems for controlling crystal growth
#39Single crystal furnace
#40Tantalum carbide-coated carbon material and method for manufacturing same
#41Tantalum carbide coated carbon material
#42Production method of monocrystalline silicon based on an emissivity of a production apparatus
#43Semiconductor wafer evaluation apparatus and semiconductor wafer manufacturing method
#44Method and apparatus for manufacturing silicon carbide single crystal, and silicon carbide single crystal ingot
#45ACTIVE BALANCING SEED LIFT
#46Thermal conductivity estimation method, thermal conductivity estimation apparatus, production method for semiconductor crystal product, thermal conductivity calculator, thermal conductivity calculation program, and, thermal conductivity calculation method
#47Method for collecting dust from single crystal growth system and dust collecting system thereof
#48VAPOR PHASE GROWTH APPARATUS
#49Epitaxial wafer production system for performing a correction based on variation in total output value of upper and lower lamps
#50Epi-growth apparatus of separate chamber type
#51Metalorganic chemical vapor phase deposition apparatus having bubbler with first supply section leading to reactor, first, second and third mass flow controller and pressure sensor
#52Apparatus for growing single crystal metal-oxide EPI wafer
#53SILICON CARBIDE SINGLE CRYSTAL GROWTH APPARATUS AND METHOD FOR MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL
#54Apparatus including horizontal flow reactor with a central injector column having separate conduits for low-vapor pressure metalorganic precursors and other precursors for formation of piezoelectric layers on wafers
#55METHOD AND APPARATUS FOR MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL
#56Monocrystalline metal foil and manufacturing method therefor
#57Cleaning method, method for producing silicon single crystal, and cleaning device
#58Sputtering equipment and method of manufacturing semiconductor device
#59Assembly for the deposition of silicon nanostructures
#60Method of manufacturing tantalum carbide material
#61Processing chamber with annealing mini-environment
#62Gemstone growing device
#63Device and method for cleaning monocrystalline pulling apparatus
#64Cleaning device for monocrystal pulling apparatus
#65Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them
#66Chemical vapor deposition reactor to grow diamond film by microwave plasma chemical vapor deposition
#67Heater for ingot growing apparatus
#68Method of utilizing a degassing chamber to reduce arsenic outgassing following deposition of arsenic-containing material on a substrate
#69Evaporation source and evaporation-deposition device having the same
#70Heating unit comprised of ring heaters with ring support units disposed between the ring heaters and ingot growing device including the same
#71Monocrystal and polycrystal texturing method
#72Apparatus for manufacturing silicon single crystal and melt inlet pipe of the same
#73ADVANCED CRUCIBLE SUPPORT AND THERMAL DISTRIBUTION MANAGEMENT
#74System and method for crystalline sheet growth using a cold block and gas jet
#75Crystal growth apparatus and crystal production method
#76Method for manufacturing epitaxial silicon wafer and vapor phase growth device
#77Method for cleaning exhaust passage for semiconductor crystal manufacturing device
#78Substrate processing system having susceptorless substrate support with enhanced substrate heating control
#79System and fabrication method of piezoelectric stack that reduces driving voltage and clamping effect
#80Crystal pulling system and method for inhibiting precipitate build-up in exhaust flow path
#81Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them
#82Single crystal growing apparatus
#83Controlling a temperature of a crucible inside an oven
#84Substrate processing system having susceptorless substrate support with enhanced substrate heating control
#85Reaction system for growing a thin film
#86Single crystal production apparatus
#87Single crystal production apparatus
#88Protecting a target pump interior with an ALD coating
#89METHOD FOR FABRICATING THIN FILM TRANSISTOR AND APPARATUS THEREOF
#90Liner for epi chamber
#91Methodology for annealing group III-nitride semiconductor device structures using novel weighted cover systems
#92Silicon carbide-tantalum carbide composite and susceptor
#93Crystal growth apparatus and thermal insulation cover of the same
#94Aluminum nitride bulk crystals having high transparency to untraviolet light and methods of forming them
#95Apparatus and method for bulk vapour phase crystal growth
#96Advanced crucible support and thermal distribution management
#97Crystal growth system and method for lead-contained compositions using batch auto-feeding
#98Adjustable pyrometer mount with removable viewport mechanism
#99Apparatus for manufacturing single crystal
#100Pulling head having a magnetic drive
#101Cantilever device for extending capacity of a scale used in a crystal growth apparatus
#102Intelligent machines and process for production of monocrystalline products with goniometer continual feedback
#103Heater moving type substrate processing apparatus
#104Crucible for solidifying a silicon ingot
#105Annular structure having excellent heat insulating and heat releasing properties
#106Reactor gas panel common exhaust
#107Vapor phase growth apparatus and vapor phase growth method
#108Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions
#109Apparatus for processing substrate for supplying reaction gas having phase difference
#110Substrate processing apparatus including processing unit
#111Composite geometrical design for a grain starter in a bridgman investment casting process
#112CVD APPARATUS, METHOD OF MANUFACTURING SUSCEPTOR USING THE CVD APPARATUS, AND SUSCEPTOR
#113Sheet production apparatus for removing a crystalline sheet from the surface of a melt using gas jets located above and below the crystalline sheet
#114Method for manufacturing carbon nanotubes
#115System for manufacturing a crystalline material by directional crystallization provided with an additional lateral heat source
#116Apparatus and method for fabricating wafer
#117Systems and methods for producing seed bricks
#118METHOD OF SURFACE TREATMENT OF GROUP III NITRIDE CRYSTAL FILM, GROUP III NITRIDE CRYSTAL SUBSTRATE, GROUP III NITRIDE CRYSTAL SUBSTRATE WITH EPITAXIAL LAYER, AND SEMICONDUCTOR DEVICE
#119Production apparatus of SiC single crystal by solution growth method, method for producing SiC single crystal using the production apparatus, and crucible used in the production apparatus
#120Production apparatus and production method of SiC single crystal
#121Method and apparatus for reducing impurities in a single crystal based on ingot length
#122Heating electrode assembly for crystal growth furnace
#123Apparatus for cleaning exhaust passage for semiconductor crystal manufacturing device
#124Substrate processing system having susceptorless substrate support with enhanced substrate heating control
#125Laser annealing method, laser annealing apparatus, and method for manufacturing thin film transistor
#126Laser crystallization and polycrystal efficiency improvement for thin film solar
#127Gallium trichloride injection scheme
#128Apparatus and method for crystallization of silicon
#129Torque for incrementally advancing a catheter during right heart catheterization
#130HEATING UNIT AND FILM-FORMING APPARATUS
#131CRYSTAL GROWTH FURNACE AND MOVING METHOD THEREOF
#132RIBBON CRYSTAL STRING FOR INCREASING WAFER YIELD
#133RIBBON CRYSTAL END STRING WITH MULTIPLE INDIVIDUAL STRINGS
#134Intelligent machines and process for production of monocrystalline products with goniometer continual feedback
#135Ring-shaped resistance heater for supplying heat to a growing single crystal
#136PULSE CIRCULATOR
#137DEVICE FOR OBTAINING A MULTICRYSTALLINE SEMICONDUCTOR MATERIAL, IN PARTICULAR SILICON, AND METHOD FOR CONTROLLING THE TEMPERATURE THEREIN
#138METHOD AND DEVICE FOR OBTAINING A MULTICRYSTALLINE SEMICONDUCTOR MATERIAL, IN PARTICULAR SILICON
#139Directional solidification furnace heat exchanger
#140CRYSTAL GROWTH APPARATUS AND METHOD
#141Metal-Organic Vapor Phase Epitaxy System and Process
#142Reaction system for growing a thin film
#143INSULATION DEVICE OF SINGLE CRYSTAL GROWTH DEVICE AND SINGLE CRYSTAL GROWTH DEVICE INCLUDING THE SAME
#144Method of forming epitaxial based integrated circuit
#145Method of forming epitaxial semiconductor structure
#146Method of forming epitaxial film
#147Method of transferring epitaxial film
#148Method of integrating epitaxial film onto assembly substrate
#149Method of determining an amount of impurities that a contaminating material contributes to high purity silicon
#150Single crystal silicon pulling device, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt
#151Jig for semiconductor production and method for producing same
#152Apparatus with two-chamber structure for growing silicon carbide crystals
#153SYSTEMS AND METHODS FOR DETERMINING PROCESS CONDITIONS IN CONFINED VOLUMES
#154Kyropoulos sapphire single crystal growing apparatus using elliptic crucible
#155Apparatus and method for crystallization of silicon
#156Complete recrystallization of semiconductor wafers
#157FEEDSTOCK MELTING AND CASTING SYSTEM AND PROCESS
#1582-DIMENSIONAL LINE-DEFECTS CONTROLLED SILICON INGOT, WAFER AND EPITAXIAL WAFER, AND MANUFACTURING PROCESS AND APPARATUS THEREFOR
#1592-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor
#160Metal organic chemical vapor deposition equipment
#161Silicon oxide removal apparatus and facility for recycling inert gas for use in silicon single crystal manufacturing apparatus
#162Method for equipping an epitaxy reactor
#163METHOD FOR MANUFACTURING CARBON NANOTUBES
#164Vapor phase deposition apparatus and support table
#165Eddy current thickness measurement apparatus
#166Apparatus for growth of single crystals including a solute feeder
#167Gallium trichloride injection scheme
#168Crystal growth apparatus with ceramic coating and methods for preventing molten material breach in a crystal growth apparatus
#169Reaction chamber of an epitaxial reactor and reactor that uses said chamber
#170CRYSTALLIZATION SYSTEM AND METHOD FOR PROMOTING CRYSTALLIZATION
#171Microfluidic protein crystallography
#172Multi-Chamber CVD Processing System
#173CHEMICAL VAPOR DEPOSITED SILICON CARBIDE ARTICLES
#174Removing a sheet from the surface of a melt using gas jets
#175Carbon component and method for manufacturing the same
#176Silicon single crystal pull-up apparatus and method of manufacturing silicon single crystal
#177Single scan irradiation for crystallization of thin films
#178Apparatus for making epitaxial film
#179Ribbon Crystal String for Increasing Wafer Yield
#180CRYSTAL GROWTH APPARATUS WITH LOAD-CENTERED APERTURE, AND DEVICE AND METHOD FOR CONTROLLING HEAT EXTRACTION FROM A CRUCIBLE
#181Single-crystal manufacturing method and single-crystal manufacturing apparatus
#182Substrate treatment device
#183SILICON HEATING FURNACE
#184Laser crystallization apparatus and laser crystallization method
#185Device for crystal growth at intermediate temperatures using controlled semi-active cooling
#186SYSTEM FOR THE PRODUCTION OF GRAIN FREE METAL PRODUCTS
#187SYSTEM AND METHOD FOR ARRANGING HEATING ELEMENT IN CRYSTAL GROWTH APPARATUS
#188Method and system for diamond deposition using a liquid-solvent carbon-tranfser mechanism
#189Method Of Determining An Amount of Impurities That A Contaminating Material Contributes To High Purity Silicon And Furnace For Treating High Purity Silicon
#190Apparatus and method of use for casting system with independent melting and solidification
#191Crystal manufacturing apparatus, semiconductor device manufactured using the same, and method of manufacturing semiconductor device using the same
#192Crystal growth in solution under static conditions
#193Thermal processing apparatus and cooling method
#194EPITAXIAL GROWTH OF COMPOUND NITRIDE SEMICONDUCTOR STRUCTURES
#195Crusher for crushing a silicon lump, and silicon lump crushing apparatus having a plurality of crushers
#196METHOD AND APPARATUS FOR OPTIMIZING CRYSTALLIZATION CONDITIONS OF A SUBSTRATE
#197Connection unit and laser oscillating apparatus having the same
#198CRYSTALLIZATION DEVICE FOR HIGH-THROUGHPUT VISUAL INSPECTION AND X-RAY DIFFRACTION ANALYSIS
#199Solid yttrium oxide-containing substrate which has been cleaned to remove impurities
#200Single-crystal manufacturing apparatus
#201PULSED LASER DEPOSITION OF HIGH QUALITY PHOTOLUMINESCENT GaN FILMS
#202THERMAL STRAIN RELIEF DEVICE FOR HIGH TEMPERATURE FURNACE
#203Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them
#204Continuous Feed Chemical Vapor Deposition System
#205(110) DISLOCATION-FREE MONOCRYSTALLINE SILICON AND ITS PREPARATION AND THE GRAPHITE HEAT SYSTEM USED
#206METHOD AND DEVICE FOR PROVIDING LIQUID SILICON
#207Apparatus for manufacturing carbon nanotubes
#208Apparatus for producing single crystal
#209METHOD OF SURFACE TREATMENT OF GROUP III NITRIDE CRYSTAL FILM, GROUP III NITRIDE CRYSTAL SUBSTRATE, GROUP III NITRIDE CRYSTAL SUBSTRATE WITH EPITAXIAL LAYER, AND SEMICONDUCTOR DEVICE
#210Atomic layer deposition apparatus and method of fabricating atomic layer using the same
#211Method for identifying an incorrect position of a semiconductor wafer during a thermal treatment
#212Silicon Supporting Apparatus and Silicon Heating and Quenching Equipment Using the Same
#213Method and apparatus for growth of multi-component single crystals
#214RING-SHAPED MEMBER AND METHOD FOR MANUFACTURING SAME
#215Method of integrating epitaxial film onto assembly substrate
#216Epitaxy-Level Packaging (ELP) System
#217Apparatus for making epitaxial film
#218Separate injection of reactive species in selective formation of films
#219Ribbon crystal having reduced wetting string
#220Apparatus and method of forming semiconductor devices
#221Guided diameter SiC sublimation growth with multi-layer growth guide
#222Gas Recirculation Heat Exchanger For Casting Silicon
#223System and method for liquid silicon containment
#224Apparatus and Method of Direct Electric Melting a Feedstock
#225APPARATUS AND METHOD OF USE FOR AN INERT GAS REBREATHER USED IN FURNACE OPERATIONS
#226DIFFERENTIATED-TEMPERATURE REACTION CHAMBER
#227Microwave plasma reactors
#228Reactor For Growing Crystals
#229System for Manufacturing Silicon Single Crystal and Method for Manufacturing Silicon Single Crystal Using this System
#230Method of producing single crystal
#231Dual chamber system providing simultaneous etch and deposition on opposing substrate sides for growing low defect density epitaxial layers
#232High pressure apparatus and method for nitride crystal growth
#233Source, an arrangement for installing a source, and a method for installing and removing a source
#234High-purity carbon fiber-reinforced carbon composite and method for producing the same
#235Device and a method for promoting crystallisation
#236System and method for epitaxial deposition of a crystal using a liquid-solvent fluidized-bed mechanism
#237Single crystal pulling apparatus
#238Method of producing group III nitride crystal, apparatus for producing group III nitride crystal, and group III nitride crystal
#239Crystal growth apparatus and method
#240FLEXIBLE, HIGH PURITY EXPANDED GRAPHITE SHEET, METHOD OF PRODUCING SAME, AND CARBON CRUCIBLE LINING USING SAID SHEET
#241Micro-heater arrays and pn-junction devices having micro-heater arrays, and methods for fabricating the same
#242Crystal growth system and method for lead-contained compositions using batch auto-feeding
#243Single crystal silicon pulling apparatus, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt
#244Equipment for high volume manufacture of group III-V semiconductor materials
#245Epitaxial reactor for mass production of wafers
#246Crystal-growing furnace system with emergent pressure-release arrangement
#247Electrode anchoring structure in crystal-growing furnaces
#248Apparatus for manufacturing single-crystal silicon carbide
#249Crystal-growing furnace system
#250PROCESSING SYSTEM FOR FABRICATING COMPOUND NITRIDE SEMICONDUCTOR DEVICES
#251Gallium trichloride injection scheme
#252Cooling structure for body of crystal-growing furnace
#253Supporting table having heaters inside crystal-growing furnace
#2542-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor
#255Microfluidic protein crystallography
#256Separate injection of reactive species in selective formation of films
#257Method for treating semiconductor processing components and components formed thereby
#258METHOD OF INJECTING DOPANT GAS
#259Convective flow chemical vapor deposition growth of nanostructures
#260Single crystal semiconductor manufacturing apparatus and manufacturing method
#261Semiconductor single crystal manufacturing device and manufacturing method
#262Formation method of single crystal semiconductor layer, formation method of crystalline semiconductor layer, formation method of polycrystalline layer, and method for manufacturing semiconductor device
#263Device and process for heating III-V wafers, and annealed III-V semiconductor single crystal wafer
#264Corrosion-resistant gas distribution plate for plasma processing chamber
#265Deposition system for thin film formation
#266Ribbon Crystal String with Extruded Refractory Material
#267Ribbon crystal end string with multiple individual strings
#268Ribbon crystal string for increasing wafer yield
#269Reduced wetting string for ribbon crystal
#270APPARATUS FOR MANUFACTURING SEMICONDUCTOR LAYER
#271SHAPED CRUCIBLE AND EVAPORATION APPARATUS HAVING SAME
#272SINGLE CRYSTAL AND SEMICONDUCTOR WAFER AND APPARATUS AND METHOD FOR PRODUCING A SINGLE CRYSTAL
#273Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal
#274Continuous growth of single-wall carbon nanotubes using chemical vapor deposition
#275Process and apparatus for producing nitride single crystal
#276VAPOR-PHASE GROWTH APPARATUS AND VAPOR-PHASE GROWTH METHOD
#277CROSS FLOW APPARATUS AND METHOD FOR HYDRIDE VAPOR PHASE DEPOSITION
#278Method and apparatus for producing crystals
#279Pulsed laser deposition of high quality photoluminescent GaN films
#280Material supply apparatus
#281Vapor phase growth apparatus and vapor phase growth method
#282Chemical vapor deposited silicon carbide articles
#283Apparatus for production of crystal of group III element nitride and process for producing crystal of group III element nitride
#284Continuous growth of single-wall carbon nanotubes using chemical vapor deposition
#285Method and apparatus for growth of multi-component single crystals
#286Selective epitaxy process control
#287Sample mounts for microcrystal crystallography
#288Laser light irradiation apparatus and laser light irradiation method
#289Substrate treatment device
#290Heat shield member and single crystal pulling device
#291Annular structure having excellent heat insulating and heat releasing properties
#292Method for continuous, in situ evaluation of entire wafers for macroscopic features during epitaxial growth
#293Batch reaction chamber employing separate zones for radiant heating and resistive heating
#294Silicon single crystal pulling device and graphite member used therein
#295SMALL VOLUME SYMMETRIC FLOW SINGLE WAFER ALD APPARATUS
#296High power laser flat panel workpiece treatment system controller
#297Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder
#298Apparatus for crystallizing semiconductor with laser beams
#299Apparatus for growing high quality silicon single crystal ingot and growing method using the same
#300Method for Producing P-Type Ga2o3 Film and Method for Producing Pn Junction-Type Ga2o3 Film