142943 ⎘
Pumps having pertinent characteristics not provided for in, or of interest apart from, groups - for evacuating by thermal means
Sub-classes:SNAP-ON GETTER PUMP ASSEMBLY AND ITS USE
#2TURBOMOLECULAR PUMP
#3Vaporizer apparatus
#4Method and apparatus for control of fluid temperature and flow
#5Microfabricated gas flow structure
#6Method and apparatus for control of fluid temperature and flow
#7Vacuum pump with abatement function
#8Exhaust gas abatement apparatus
#9Distributed thrusters driven gas compressor
#10Cryogenic pumps
#11Apparatus and methods for evacuating air from a closed area
#12Gas micropump
#13Cryopump and method for regenerating the cryopump
#14Method and apparatus for control of fluid temperature and flow
#15Pump power consumption enhancement
#16Sublimation pump and method
#17Vacuum pumping system
#18Thermally driven Knudsen pump
#19Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps
#20Method and apparatus for control of fluid temperature and flow
#21Cryopump
#22Domestic appliance comprising a thermoelectric heat pump
#23Pump apparatus and pump unit thereof
#24Apparatus for trapping residual products in semiconductor device fabrication equipment
#25Pump for supplying a gas to a sensor and methods therefor