142944 ⎘
Pumps having pertinent characteristics not provided for in, or of interest apart from, groups - for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Sub-classes:CRYOPUMP APPARATUS
#2PISTON INTENDED FOR A FLUID MACHINE AND PROVIDED WITH A SYSTEM FOR PRESSING SEALS, FLUID MACHINE COMPRISING SUCH A PISTON
#3CRYOGENIC TANDEM PUMP WITH ASYNCHRONOUS DRIVES, ZERO TANK RETURN
#4CRYOPUMP AND CONTROL DEVICE
#5CRYOPUMP
#6HIGH TEMPERATURE SUPERCONDUCTING CABLE BASED POWER DELIVERY SYSTEM IN PULSED POWER DRILLING
#7CRYOGENIC PUMP FOR SEMICONDUCTOR PROCESSING
#8CRYOGENIC PUMP
#9MULTIPLE CRYOGENIC PUMP ASSEMBLY FOR HYDROGEN FUELING STATION
#10FLUID COMPRESSION APPARATUS AND METHOD
#11REFRIGERATOR AND CRYOPUMP
#12CRYOPUMP
#13TRANSPORT DEVICE AND TRANSPORT METHOD
#14CRYOGENIC CLEANING DEVICE
#15CRYOPUMP SYSTEM
#16METHOD FOR VACUUM-EXHAUSTING BY MEANS OF CRYOPUMP
#17CRYOPUMP, CRYOPUMP CONTROL SYSTEM AND CRYOPUMP CONTROL METHOD
#18CRYOPUMP
#19CRYOPUMP AND METHOD OF OPERATING CRYOPUMP
#20INSTALLATION FOR PUMPING CRYOGENIC FLUID AND FILLING STATION COMPRISING SUCH AN INSTALLATION
#21CRYOPUMP SYSTEM AND REGENERATION CONTROLLER
#22CRYOPUMP
#23CRYOPUMP AND CONTROL METHOD FOR CRYOPUMP
#24CRYOGENIC REFRIGERATION SYSTEM AND CRYOGENIC PUMP
#25INSTALLATION FOR PUMPING CRYOGENIC FLUID AND FILLING STATION COMPRISING SUCH AN INSTALLATION
#26CRYOPUMP AND CRYOPUMP REGENERATION METHOD
#27CRYOPUMP, METHOD OF MANUFACTURING CRYOPUMP, AND METHOD OF USING CRYOPUMP
#28VIBRATIONALLY ISOLATED CRYOGENIC SHIELD FOR LOCAL HIGH-QUALITY VACUUM
#29OIL SEPARATOR FOR COMPRESSOR AND COMPRESSOR FOR CRYOGENIC REFRIGERATOR
#30CRYOPUMPS AND INLET FLOW RESTRICTORS FOR CRYOPUMPS
#31CRYOPUMP
#32Apparatus and method for cryogenic pump cooldown
#33Cryopanel structure for a cryopump
#34Cryopanel structure for a cryopump
#35Systems and methods for improved sustainment of a high performance FRC with multi-scaled capture type vacuum pumping
#36METHOD OF SETTING UP AN ELECTRICAL MOTOR SPEED CONTROL IN A FLUIDIC SYSTEM
#37PUMPING OF LIQUID CRYOGEN FROM A STORAGE TANK
#38Vacuum pumping system having multiple pumps
#39Vacuum system with diagnostic circuitry and a method and computer program for monitoring the health of such a vacuum system
#40Terpene extraction system and method of extracting terpenes from plant biomass
#41Systems and methods for improved sustainment of a high performance FRC with multi-scaled capture type vacuum pumping
#42Cryopump and baffle plate for cryopump
#43Cryopump and regeneration method of cryopump
#44SYSTEMS AND METHODS FOR IMPROVED SUSTAINMENT OF A HIGH PERFORMANCE FRC PLASMA AT ELEVATED ENERGIES UTILIZING NEUTRAL BEAM INJECTORS WITH TUNABLE BEAM ENERGIES
#45Vibrationally isolated cryogenic shield for local high-quality vacuum
#46Cryopump and cryocooler vibration isolation structure
#47ENRICHMENT AND PURIFICATION DEVICE FOR SINGLE GAS IN MIXED GAS
#48Compression apparatus and filling station comprising such an apparatus
#49Cryopump system, and control device and regeneration method for cryopump system
#50MULTI-COOLING TYPE COLD TRAP
#51Cryopump and control method for cryopump
#52Refrigerator including rare earth cold accumulating material particles, and superconducting magnet, inspection device and cryopump using same
#53Cryopump
#54Cryopump
#55CRYOPUMP AND CRYOPANEL
#56Cryopump and method of monitoring cryopump
#57Cryopump
#58Cryocooler
#59Cryopump with enhanced frontal array
#60Cryopump with peripheral first and second stage arrays
#61Cryopump and method for controlling cryopump
#62Cryocooler Assemblies and Methods
#63Cryocooler assemblies and methods
#64COMPRESSOR UNIT FOR CRYOCOOLER AND CRYOPUMP SYSTEM
#65Cryopump
#66Cryopump
#67Systems and methods for improved sustainment of a high performance FRC with multi-scaled capture type vacuum pumping
#68Systems and methods for improved sustainment of a high performance FRC plasma at elevated energies utilizing neutral beam injectors with tunable beam energies
#69Cryogenic pump flange
#70Ultra high vacuum cryogenic pumping apparatus with nanostructure material
#71Rare earth cold accumulating material particles, and refrigerator, superconducting magnet, inspection device and cryopump using same
#72Rare earth cold accumulating material particles, and refrigerator, superconducting magnet, inspection device and cryopump using same
#73Cryopump and gate valve
#74DEVICE AND METHOD FOR CONTROLLING TEMPERATURE OF LOW-TEMPERATURE PUMP
#75Non-evaporable getter and non-evaporable getter pump
#76Cryogenic pump operation for controlling heat exchanger discharge temperature
#77Cryogenic trap system
#78Device for improving the vacuum in the housing of a machine
#79Multi-refrigerator high speed cryopump
#80Vacuum pump control device and vacuum pump
#81Cryopump
#82Cryopump, cryopumped gas amount estimation device, and cryopumped gas amount estimation method
#83Cryopump, cryopump controller, and cryopump control method
#84Rare earth cold accumulating material particles, and refrigerator, superconducting magnet, inspection device and cryopump using same
#85Symmetric floating coil compressor
#86Cryopump
#87Cryopump and method of operating the cryopump
#88Hydraulic drive system for cryogenic pump
#89CRYOPUMP
#90Cryogenic pump for liquefied natural gas
#91Cryopump hybrid frontal array
#92Helium management control system
#93Method of operating cryogenic pump and cryogenic pump system
#94Hydraulic drive multi-element cryogenic pump
#95Cryopump
#96Cryopump
#97Cryopump arrangement for improved pump speed
#98Cryopump system, cryopump controller, and method for regenerating the cryopump
#99Cryopump system, cryopump controller, and cryopump regeneration method
#100Pump having inlet reservoir with vapor-layer standpipe
#101Pump drive system with hydraulic tappets
#102Bearing arrangement for cryogenic pump
#103Cold trap and control method of cold trap
#104Cryopump, control method of cryopump, and cryocooler
#105CRYOGENIC PUMP FLANGE
#106Cryopump
#107CRYOPUMP
#108Method And Apparatus For Providing Temperature Control To A Cryopump
#109Non-evaporable getter and non-evaporable getter pump
#110Compression machine with a body oscillating between two reversal points
#111Arrangement and method for damping vibrations during microscopic examinations
#112Cryopump and method of monitoring cryopump
#113Cryopump system and method of operating cryopump system
#114Cryopump system
#115Ultra high vacuum cryogenic pumping apparatus with nanostructure material
#116Arrangement with a vacuum pump and method of compensating magnetic field produced by magnetic interference field of at least one vacuum pump component
#117Helium management control system
#118Cryogenic pumps
#119Nano-materials for adhesive-free adsorbers for bakable extreme high vacuum cryopump surfaces
#120Cryopump
#121Cryopump and vacuum pumping method
#122Liquid natural gas cooling on the fly
#123Cryopump and vacuum pumping method
#124Cryopump and method for vacuum pumping non-condensable gas
#125Cryopump system, method of operating the same, and compressor unit
#126Cryopump and method for regenerating the cryopump using two-stage discharge process
#127Cryopump
#128CRYOPUMP AND METHOD OF OPERATING THE CRYOPUMP
#129Cold trap and mounting structure of cold trap
#130Cryopump, cryopanel structure, and vacuum evacuation method
#131Gas compressor control system preventing vibration damage
#132Vacuum pumping system
#133Cryopump
#134Cryopump with controlled hydrogen gas release
#135Cryopump system, and method of operating the same, and compressor unit
#136Cryopump and method for regenerating the cryopump
#137Cryopump, method of regenerating cryopump, and control device for cryopump
#138Multi-refrigerator high speed cryopump
#139Cryopump having inlet cryopanel extension
#140Cryopump and method for repairing cryopumps
#141Reducing the influence of thermal expansion of connector pins on a substrate in a vacuum pump
#142Cryopump system, cryogenic system, and apparatus and method of controlling compressor unit
#143Cryogenic pump with a device for preventing the memory effect
#144Cryogenic refrigerator, cryopump and displacer
#145Refrigeration device, hydrogenation device for nitrogen, and leaked gas removing method
#146CRYOPUMP AND METHOD OF MANUFACTURING THE SAME
#147Helium management control system
#148Gas balanced brayton cycle cold water vapor cryopump
#149Cryopump and Method of Manufacturing the Same
#150Cryopump control apparatus, cryopump system, and method for monitoring cryopump
#151Cryopump control apparatus, cryopump system, and method for evaluating vacuum retention of cryopumps
#152Cryopump system and method for regenerating cryopumps
#153COVER STRUCTURE FOR CRYOPUMP, CRYOPUMP, START-UP METHOD OF CRYOPUMP, AND STORAGE METHOD OF CRYOPUMP
#154CRYOPUMP SYSTEM, COMPRESSOR, AND METHOD FOR REGENERATING CRYOPUMPS
#155Particle capture unit, method for manufacturing the same, and substrate processing apparatus
#156Cryogenic refrigerator system with pressure wave generator
#157Cryopump and vacuum pumping method
#158CRYOPUMP AND VACUUM VALVE DEVICE
#159Cryopump system and method for controlling the cryopump system
#160PRESSURE REDUCTION SYSTEM AND VACUUM TREATMENT DEVICE
#161Cryopump and cryogenic refrigerator
#162Cryopump and filter device
#163CRYOGENIC REFRIGERATOR
#164Method and apparatus for regeneration water
#165Cold trap and cold trap regeneration method
#166Cold trap and vacuum evacuation apparatus
#167VACUUM PUMPING SYSTEM, SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND OPERATING METHOD OF VACUUM PUMPING SYSTEM
#168Method and Apparatus for Providing Temperature Control to a Cryopump
#169VACUUM PUMPING SYSTEM, OPERATING METHOD OF VACUUM PUMPING SYSTEM, REFRIGERATOR, VACUUM PUMP, OPERATING METHOD OF REFRIGERATOR, OPERATION CONTROL METHOD OF TWO-STAGE TYPE REFRIGERATOR, OPERATION CONTROL METHOD OF CRYOPUMP, TWO-STAGE TYPE REFRIGERATOR, CRYOPUMP, SUBSTRATE PROCESSING APPARATUS, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
#170Linear drive cryogenic refrigerator
#171Cryogenic pump employing tin—gallium alloys and methods of use
#172Sputter ion pump with enhanced anode
#173EXPANDER SPEED CONTROL
#174Cryopump and method of monitoring cryopump
#175Helium management control system
#176Exhaust system
#177High pressure cryogenic fluid generator
#178CRYOPUMP
#179Cryopump
#180CRYOPUMP LOUVER EXTENSION
#181CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP
#182Cryopump
#183Cryopump and method for diagnosing the cryopump
#184Cryopump
#185Cold trap and cold trap regeneration method
#186COMPACT CONFIGURATION FOR CRYOGENIC PUMPS AND TURBINES
#187Cryopump and evacuation method
#188CRYOPUMP APPARATUS AND OPERATION METHOD THEREFOR
#189Cryopanel and Cryopump Using the Cryopanel
#190Integration of automated cryopump safety purge
#191Electronically Controlled Vacuum Pump
#192Pressure burst free high capacity cryopump
#193Thermally isolated cryopanel for vacuum deposition systems
#194Rolling bearing for use in a cryogenic pump
#195Vacuum ion-getter pump with cryogenically cooled cathode
#196Cryopump and semiconductor device manufacturing apparatus using the cryopump
#197Cryopump and regenerating method of the cryopump
#198Interrupted DC operation of thermocouple vacuum gauge
#199Cryo pump
#200Method and apparatus for regeneration water
#201Helium management control system
#202Radiation shield for cryogenic pump for high temperature physical vapor deposition
#203Vacuum device
#204Vacuum device
#205Cryogenic refrigerator
#206High conductance cryopump for type III gas pumping
#207Valve device
#208Cryogenic adsorption pump for the collection of airborne gases, particles, organic molecules and micro-organisms
#209Cryopump with enhanced hydrogen pumping
#210Integration of automated cryopump safety purge
#211Integrated rough/purge/vent (RPV) valve
#212Electronically controlled vacuum pump
#213Double-acting, high pressure cryogenic pump
#214Method and apparatus for detecting and measuring state of fullness in cryopumps
#215Cryopump temperature control of arrays
#216Cryopump control system
#217Panels for pulse tube cryopump
#218Gas collection system