144089 ⎘
Axial-flow pumps; Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
TURBOMOLECULAR PUMP
#2VACUUM PUMP WITH AN EDDY CURRENT DAMPER
#3VACUUM PUMP
#4VACUUM PUMP
#5Vacuum pump and adjustment method
#6VACUUM PUMP, VACUUM PUMP BEARING PROTECTION STRUCTURE, AND VACUUM PUMP ROTATING BODY
#7VACUUM PUMP
#8MAGNETIC BEARING DEVICE AND VACUUM PUMP
#9MAGNETIC BEARING DEVICE AND VACUUM PUMP
#10VACUUM PUMP
#11VACUUM PUMP AND VACUUM EXHAUST APPARATUS
#12ROTOR ASSEMBLY FOR A TURBOMOLECULAR PUMP
#13VACUUM PUMP
#14Vacuum pump system and control method
#15Oil feed nut and oil reservoir for a vacuum pump
#16VACUUM PUMP COMPRISING AN AXIAL MAGNETIC BEARING AND A RADIAL GAS FOIL BEARING
#17Vacuum pump and vacuum pump rotor blade
#18Vacuum pump and rotating body for vacuum pump
#19METHOD OF SETTING UP AN ELECTRICAL MOTOR SPEED CONTROL IN A FLUIDIC SYSTEM
#20Axial flow vacuum pump with curved rotor and stator blades
#21Vacuum pump
#22Vacuum pump, rotor, and rotor body with rupture location control means on the rotor
#23VARIABLE INLET CONDUCTANCE VACUUM PUMP, VACUUM PUMP ARRANGEMENT AND METHOD
#24VACUUM PUMP AND PROTECTION MEMBER PROVIDED IN VACUUM PUMP
#25Vacuum pump and linked-type thread groove spacer
#26Vacuum pump including magnetic bearing and motor bearing operable as radial magnetic bearing, motor, and thrust magnetic bearing
#27Vacuum pump and control device for vacuum pump
#28Vacuum pump including levitated magnetic bearing
#29Hybrid magnetic radial bearing in an electric submersible pump (ESP) assembly
#30Vacuum pump, and control device of vacuum pump
#31Vacuum pump, temperature adjustment controller used for vacuum pump, inspection tool, and method of diagnosing temperature-adjustment function unit
#32Vacuum pump and magnetic bearing controller with multiple rigidity modes at high and low gains
#33Vacuum pump exhaust system, vacuum pump provided for vacuum pump exhaust system, purge gas supply unit, temperature sensor unit, and exhausting method of vacuum pump
#34Magnetic bearing control apparatus and vacuum pump
#35Vacuum pump, and magnetic bearing device and annular electromagnet used in vacuum pump
#36Vacuum pump, magnetic bearing device, and rotor
#37PUMP MONITORING DEVICE, VACUUM PROCESSING DEVICE, AND VACUUM PUMP
#38Vacuum pump, rotating portion included in vacuum pump, and imbalance correction method
#39Variable inlet conductance vacuum pump, vacuum pump arrangement and method
#40Pump bearing holders
#41Magnetic levitation control device and vacuum pump
#42Magnetic bearing device and fluid machine system using same
#43FAN
#44Vacuum pump
#45Electromagnetic unit, magnetic bearing device, and vacuum pump
#46Vacuum pump
#47Vacuum pump, and rotor blade and reflection mechanism mounted in vacuum pump
#48Vacuum pump
#49Turbomachine and method of operating a turbomachine
#50Magnetic bearing control device and vacuum pump
#51Vacuum valve and vacuum pump
#52Vacuum valve, vacuum pump, and vacuum pumping system
#53VACUUM PUMP
#54ROTOR AND VACUUM PUMP EQUIPPED WITH SAME
#55Vacuum pump
#56Magnetic levitation vacuum pump
#57Magnetic bearing device and vacuum pump
#58Elongated permanent ring management with a plurality of axially directed magnetized zones and magnetic bearing with such a ring magnet
#59PROTECTIVE BEARING, BEARING UNIT, AND VACUUM PUMP
#60Vacuum pump
#61Electromagnetic rotating device and vacuum pump equipped with electromagnetic rotating device
#62Vacuum pump with back-up bearing contact sensor
#63Rotor and vacuum pump equipped with same
#64TURBO COMPRESSOR
#65Magnetic bearing device and vacuum pump
#66Sensorless magnetic levitation vacuum pump and sensorless magnetic levitation device
#67Method and system for synchronously inhibiting subcritical vibrations of magnetic levitation molecular pump rotor
#68Compressor having biased controlled magnetic bearings
#69Magnetic bearing device and vacuum pump
#70METHOD OF COATING OF AND/OR APPLYING LACQUER ON MAGNETIC RINGS OF A ROTOR MAGNETIC BEARING, ROTOR MAGNETIC BEARING, AND VACUUM PUMP
#71Motor driving device and vacuum pump
#72Vacuum pump
#73VACUUM PUMP
#74Device for detecting the axial position of a rotary shaft and its application to a turbo-molecular pump
#75Bearing arrangement and bearing block having a magnetic radial bearing and a touchdown bearing for a rotating machine
#76Turbomolecular Pump with a Flexible Mount
#77Vacuum pump
#78VACUUM PUMP
#79Multi-stage pump rotor for a turbomolecular pump
#80VACUUM PUMP
#81Vacuum pump having nested chambers associated with a mass spectrometer
#82Turbomachine
#83METHOD FOR DETERMINATION OF RESONANT FREQUENCIES OF A ROTOR USING MAGNETIC BEARINGS
#84Magnetic bearing device with an improved vacuum feedthrough
#85Rotor shaft for a magnetic bearing device
#86Vacuum pumping arrangement
#87Turbomolecular vacuum pump
#88Magnetic bearing device and vacuum pump
#89Vacuum pumping arrangement
#90Magnetic bearing device and turbo molecular pump with the magnetic bearing device mounted thereto
#91Active vibration reduction
#92Magnetic bearing device and pump device with the magnetic bearing device mounted thereto