144085 ⎘
Axial-flow pumps; Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Sub-classes:Bearing and Rotary Pump Including Such Bearing
#2METHOD FOR A VACUUM PUMP SYSTEM
#3VACUUM PUMP AND VACUUM EVACUATION SYSTEM
#4FLUID ROUTING FOR A VACUUM PUMPING SYSTEM
#5A PUMP, A BEARING ASSEMBLY FOR A PUMP AND A METHOD OF ASSEMBLING THE BEARING ASSEMBLY
#6VACUUM PUMP, PROTECTIVE NET, AND CONTACT PART
#7VACUUM PUMP AND CONTROL DEVICE
#8VACUUM PUMP AND CONTROL DEVICE
#9METHOD OF MANUFACTURING ROTOR BLADE OF VACUUM PUMP, ROTOR BLADE OF VACUUM PUMP, AND VACUUM PUMP
#10PURGE APPARATUS AND PURGE METHOD
#11VACUUM PUMP AND SPACER
#12VACUUM PUMP
#13VACUUM PUMP, VACUUM PUMP CONTROLLER, AND REMOTE CONTROLLER
#14CELL SEPARATION USING MICROCHANNEL HAVING PATTERNED POSTS
#15A BEARING ASSEMBLY FOR A PUMP AND A PUMP COMPRISING THE BEARING ASSEMBLY
#16TURBOMOLECULAR VACUUM PUMP AND METHOD FOR MANUFACTURING A ROTOR
#17VACUUM PUMP AND VACUUM EXHAUST SYSTEM USING THE VACUUM PUMP
#18VACUUM PUMP, STATOR BLADE, AND SPACER
#19A PUMP AND A SET OF SEALS SEALING THE STATOR COMPONENTS OF SUCH A PUMP
#20VACUUM PUMP
#21Vacuum pump and water cooling spacer
#22Vacuum pump and vacuum pump rotor blade
#23METHOD OF SETTING UP AN ELECTRICAL MOTOR SPEED CONTROL IN A FLUIDIC SYSTEM
#24Pump speed controlling method and apparatus, a computer program and a computer readable medium having stored thereon the computer program applied thereby and a pump
#25VACUUM PUMP AND VACUUM PUMP COMPONENT
#26Pump backstream prevention structure for semiconductor fabrication equipment
#27METHOD TO OPERATE A VACUUM SYSTEM
#28VACUUM PUMP AND PIPING STRUCTURAL PORTION FOR VACUUM PUMP
#29VACUUM PUMP
#30Vacuum pump and controller
#31VACUUM EXHAUST APPARATUS AND VACUUM PUMP USED THEREIN
#32Vacuum pump and leak detector
#33Vacuum pump system and vacuum pump
#34Vacuum pump and electromagnet unit used for vacuum pump comprising sensors and electromagnets connected to two sides of a circuit board
#35Drag pump
#36Vacuum pump comprising a relief valve and a method of assembly of the relief valve
#37Vacuum pump device and lifting-type gate valve
#38MULTIPLE VACUUM CHAMBER EXHAUST SYSTEM AND METHOD OF EVACUATING MULTIPLE CHAMBERS
#39Vacuum pump and magnetic-bearing-integrated motor
#40Methods and systems for cooling a vacuum pump
#41Vacuum pump, casing, and inlet port flange
#42VACUUM PUMP AND VACUUM PUMP CONSTITUENT COMPONENT
#43VACUUM PUMP AND CONNECTION PORT USED IN VACUUM PUMP
#44Vacuum pumping
#45Vacuum pump including levitated magnetic bearing
#46VACUUM PUMP WITH A SOLENOID VALVE
#47Turbomolecular pump lubricant supply systems
#48Cryopump system, and control device and regeneration method for cryopump system
#49VACUUM PUMP AND SENSOR TARGET
#50Vacuum pump and cooling component thereof
#51GAS SUPPLY APPARATUS
#52Vacuum pump, and control device of vacuum pump
#53Vacuum pump and vacuum-pump damper
#54Artificial intelligence training method for a target model based on the label matrix
#55Methods and systems for cooling a vacuum pump
#56Vacuum pump exhaust system, vacuum pump provided for vacuum pump exhaust system, purge gas supply unit, temperature sensor unit, and exhausting method of vacuum pump
#57Leak detector for checking sealing tightness of an object comprising a pumping device including a turbomolecular pump and first and second vacuum pumps having at least one first and second pumping stage wherein the outlet of the second vacuum pump is connected between pumping stages of the first vacuum pump
#58Vacuum pump, and blade component, rotor, and stationary blade used therein
#59Support frame for a pump stand for receiving vacuum pumps, and main support frame for a coating device for containers, and coating device
#60Apparatus and method for evacuating very large volumes
#61Vacuum pump apparatus, and pump main body unit, control unit, and spacer each for use in vacuum pump apparatus
#62Vacuum pump and heating device therefor
#63Vacuum pumping arrangement
#64Vacuum pump and spiral plate, spacer, and rotating cylindrical body each included vacuum pump
#65Variable inlet conductance vacuum pump, vacuum pump arrangement and method
#66Vacuum pump, stator column used therein, and method for manufacturing stator column
#67Vacuum pump and control apparatus associated with vacuum pump
#68Device and method for driving a vacuum pump
#69Vacuum pump control apparatus and vacuum pump, and assembly method of vacuum pump control apparatus
#70Vacuum pump and stator disk to be installed in vacuum pump
#71Vacuum pump, and waterproof structure and control apparatus applied to vacuum pump
#72Vacuum pump with control device in relation to outer cylinder
#73Temperature sensor for a high speed rotating machine
#74VACUUM PUMP ASSEMBLY
#75Turbomolecular pump lubricant supply systems
#76PUMP ASSEMBLIES WITH SEALING
#77Vacuum pump
#78Enclosure system including wire mesh and thin non-porous membrane panels
#79Mass-spectrometric leak detector with turbomolecular pump and booster pump on a common shaft
#80Gas estimation device and vacuum pumping device
#81Turbo-molecular pump
#82Vacuum pump
#83VACUUM PUMP, AND FLEXIBLE COVER AND ROTOR USED IN VACUUM PUMP
#84Connected thread groove spacer and vacuum pump
#85Vacuum pump lubricants
#86Vacuum-pump rotor
#87Deposition substance monitoring device and vacuum pump
#88GAS SUPPLY APPARATUS
#89Rotor life estimation device and vacuum pump
#90Vacuum-processing device and control method therefor, and vacuum soldering device and control method therefor
#91Vacuum pump and abnormality cause estimating method for vacuum pump
#92Vacuum system
#93Dry pump and exhaust gas treatment method
#94Vacuum pump of lightweight construction
#95Vacuum soldering apparatus and control method therefor
#96Vacuum pump
#97Vacuum pump
#98Evacuator system having multi-port evacuator
#99Vacuum pump
#100Vacuum pump
#101Vacuum pump
#102Vacuum pump with abatement function
#103Vacuum pump with abatement function
#104ROTATING FLOW GENERATOR, PLUMBING SYSTEM, SEMICONDUCTOR MANUFACTURING EQUIPMENT AND HEAT EXCHANGER COMPRISING THEREOF
#105Vacuum pump protection net, method for manufacturing the same, and vacuum pump
#106Sealing material
#107Cryopump and method of monitoring cryopump
#108Vacuum pump
#109Vacuum pump
#110ELECTRIC VACUUM PUMP
#111Arrangement with a vacuum pump and method of compensating magnetic field produced by magnetic interference field of at least one vacuum pump component
#112Gas transfer vacuum pump
#113Vacuum pump
#114Sensorless magnetic levitation vacuum pump and sensorless magnetic levitation device
#115LEAK PREVENTION SYSTEM AND METHOD FOR A RETENTION POND
#116Vacuum system
#117Vacuum pump with fiber-reinforced resin cylinder
#118Vacuum pump
#119PUMP
#120Stator member and vacuum pump
#121Vacuum pump having fastening element for securing rotor part to rotor shaft and deformed safety element projecting in axial direction for preventing relative rotation between the rotor part and rotor shaft
#122Bolt-fastening system for turbomolecular pump, and a pump containing the same
#123Vacuum pump controller
#124Energy-saving silencer assembly, a semiconductor manufacturing vacuum pump with same and method for heating nitrogen gas
#125Splinter shield for vacuum pump, and vacuum pump with the splinter shield
#126Magnetic levitation type vacuum pump and magnetic levitation device
#127VACUUM PUMP
#128Deposition detection device for exhaust pump and exhaust pump having the same
#129Vacuum pump
#130Vacuum pump
#131Method for predicting a rotation fault in the rotor of a vacuum pump, and associated pumping device
#132Method and apparatus for controlling a processing system
#133VACUUM PUMP HOUSING AND SET OF COOLING ELEMENTS FOR A VACCUM PUMP HOUSING
#134Vacuum pump
#135METHOD FOR LOWERING THE PRESSURE IN A LOAD LOCK AND ASSOCIATED EQUIPMENT
#136Multiple inlet vacuum pumps
#137VACUUM PUMP
#138MULTI-STAGE VACUUM PUMP
#139VACUUM PUMP
#140Controlling gas partial pressures for process optimization
#141VACUUM LINE
#142Apparatus for detecting a flammable atmosphere within a compressor, in particular a vacuum pump
#143Vacuum pump
#144Vacuum pump
#145Spiral pumping stage and vacuum pump incorporating such pumping stage
#146METHOD FOR REACTING SELF-IGNITING DUSTS IN A VACUUM PUMP DEVICE
#147Vibration isolator
#148Turbo vacuum pump and semiconductor manufacturing apparatus having the same
#149VACUUM PUMP
#150High rotational speed vacuum pump
#151Vacuum turbomolecular pump
#152Seal cartridge for a vacuum pumps
#153Ball bearing and a vacuum pump that is equipped with a bearing of this type
#154SPLIT JOINT FOR VACUUM PUMPS AND METHOD FOR OBTAINING THEREOF
#155Terminal structure and vacuum pump
#156Apparatus for Inhibiting the Propagation of a Flame Front
#157Electronically Controlled Vacuum Pump
#158Exhaust pump, communicating pipe, and exhaust system
#159Structure for Connecting End Parts and Vacuum System Using the Structure
#160Damper and vacuum pump
#161Pumping arrangement
#162Vacuum pumps with improved pumping channel cross sections
#163Pumping system
#164Vibration damper
#165Touchdown bearing
#166Trend monitoring and diagnostic analysis method and system for failure protection and for predictive maintenance of a vacuum pump
#167Vacuum pump with control unit
#168Vacuum pump with a continuous ignition source
#169Vaccum pump having shaft seal to prevent corrosion and to ensure smooth operation
#170Vacuum housing
#171Vacuum pump with improved oil lubrication
#172Vacuum pump system
#173Adjustable suspended shelf structure
#174Fixing structure for fixing rotor to rotor shaft, and turbo molecular pump having the fixing structure
#175Enhanced heteroscopic techniques
#176Single-molecule systems
#177Terminal structure and vacuum pump
#178Vacuum pump and method of starting the same
#179Lubricant collection apparatus
#180Vacuum pump cabinet
#181Test-gas leak detector
#182Condition monitoring of pumps and pump system
#183Controlling gas partial pressures for process optimization
#184Vacuum-generating apparatus and thin film processing apparatus having the same
#185Ball bearing and a vacuum pump that is equipped with a bearing of this type
#186Annular support for rolling bearings
#187Rotary vacuum pump, structure and method for the balancing thereof
#188Vacuum pump
#189Device for fixing a vacuum pump
#190Apparatus for controlling the pressure in a process chamber and method of operating same
#191Vacuum pump damping adapter
#192Vacuum pumping system
#193Electronically controlled vacuum pump
#194Gas friction pump
#195Gas friction pump
#196Vacuum pump control device and vacuum device
#197Apparatus and method for control, pumping and abatement for vacuum process chambers
#198Fore-line preconditioning for vacuum pumps
#199Vacuum pumping arrangement
#200Coating of objects
#201Cryopump temperature control of arrays
#202Vacuum pumping system
#203Motor control system and vacuum pump equipped with the motor control system
#204Turbo vacuum pump and semiconductor manufacturing apparatus having the same
#205Processing apparatus having integrated pumping system
#206Mounting bracket for a rotary pump
#207Vibration damper with nested turbo molecular pump
#208Passively pumped, polycrystalline ceramic high and ultra-high vacuum chambers