164186 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers characterised by the beam path configuration Two or more interferometric channels or interferometers
Compensation of effects of atmospheric perturbations in optical metrology
#302Multi-axis interferometer system using independent, single axis interferometers
#303Methods and apparatus for measuring multiple Fabry-Perot gaps
#304Fiber optic interferometric position sensor and measurement method thereof
#305Optical mapping apparatus with optimized OCT configuration
#306Interferometric Measuring System
#307Size difference measuring method and size difference measuring apparatus
#308Method and apparatus for optical imaging via spectral encoding
#309Dual polarization interferometers for measuring opposite sides of a workpiece
#310Arrangements and methods for providing multimodality microscopic imaging of one or more biological structures
#311Optics system for an interferometer that uses a measuring mirror, a reference mirror and a beam deflector
#312Interferometer system for monitoring an object
#313Data age compensation with avalanche photodiode
#314METHOD AND APPARATUS FOR METHOD FOR VIEWING AND ANALYZING OF ONE OR MORE BIOLOGICAL SAMPLES WITH PROGRESSIVELY INCREASING RESOLUTIONS
#315Polarization-sensitive common path optical coherence reflectometry/tomography device
#316APPARATUS FOR MEASURING THE POSITION OF AN OBJECT WITH A LASER INTERFEROMETER SYSTEM
#317Integrated interference scanning method
#318Multi-beam heterodyne laser doppler vibrometer
#319Imaging systems using unpolarized light and related methods and controllers
#320Interferometer using integrated retarders to reduce physical volume
#321Method and apparatus for optical imaging via spectral encoding
#322Optical Mapping Apparatus with Optimized OCT Configuration
#323Multi-axis interferometer system using independent, single axis interferometers
#324Angle interferometers
#325Position-measuring device
#326Method for determining the refractive index during interferometric length measurement and interferometric arrangement therefor
#327High precision interferometer apparatus employing a grating beamsplitter
#328Free-form optical surface measuring apparatus and method
#329Rotation and translation measurement
#330Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers
#331Interferometry systems and methods of using interferometry systems
#332Interferometer for determining characteristics of an object surface
#333Interferometer with multiple modes of operation for determining characteristics of an object surface
#334Interferometer for determining characteristics of an object surface, including processing and calibration
#335Overlapping common-path interferometers for two-sided measurement
#336Optical coherence tomography with 3d coherence scanning
#337Interferometer system, signal processing method in interferometer system, and stage using signal processing
#338Fiber optic interferometric position sensor and measurement method thereof
#339System and method for surface profiling a target object
#340Low walk-off interferometer
#341Optical image measuring apparatus
#342Interferometer systems for measuring displacement and exposure systems using the same
#343Optical image measuring apparatus and optical image measuring method
#344Error correction in interferometry systems
#345Heterodyning time resolution boosting method and system
#346Optical image measuring apparatus
#347Method and apparatus for interferometric measurement of components with large aspect ratios
#348Optical image measuring apparatus and optical image measuring method
#349Interferometric optical assemblies and systems including interferometric optical assemblies
#350Optical mapping apparatus with optimized OCT configuration
#351Fiberoptic fabry-perot optical processor
#352Interferometry systems and methods of using interferometry systems
#353Lithographic interferometer system with an absolute measurement subsystem and differential measurement subsystem and method thereof
#354Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer
#355Interferometry systems and methods of using interferometry systems
#356Interferometric signal conditioner for measurement of the absolute length of gaps in a fiber optic Fabry-Perot interferometer
#357Optical beam shearing apparatus
#358Compensation for errors in off-axis interferometric measurements
#359Device for high-accuracy measurement of dimensional changes
#360Measurement of optical properties
#361Method and apparatus for three-dimensional spectrally encoded imaging
#362Integrated plane mirror and differential plane mirror interferometer system
#363Apparatus for measuring two-dimensional displacement
#364System for rotation measurement with laser interferometry
#365Optical characterization of surfaces and plates
#366Lithographic apparatus, device manufacturing method, and computer program
#367Hybrid displacement measuring device
#368Differential height measurement using interstitial mirror plate
#369All-optical ultrasonic detection device based on light-induced ultrasound and laser interference
#370Heterodyne photonic integrated circuit for absolute metrology
#371Apparatus for a dynamic multi-axis heterodyne interferometric vibrometer
#372Multi-probe gauge for slab characterization
#373Super-PIC SPIDER
#374Generating an image using an active optical interference system