Patents-Review.com
ClassID:

164186 ⎘

G01B9/02027 - CPC Classification

Classification description:

Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers characterised by the beam path configuration Two or more interferometric channels or interferometers

Sub-classes:
Recent Application in this class:
#1
20260139940
2026-05-21

INTEGRATED MULTIPLEXING MEASUREMENT SYSTEM

 #2
20260133025
2026-05-14

OPTICAL COHERENCE TOMOGRAPHIC IMAGING APPARATUS

 #3
20260126283
2026-05-07

OPTICAL PATH LENGTH SENSOR

 #4
20260123833
2026-05-07

Parallel Optical Coherence Tomography Apparatuses, Systems, and Related Methods

 #5
20260092772
2026-04-02

METHOD FOR MEASURING AT LEAST ONE CROSS-SECTIONAL DIMENSION OF A CYLINDRICAL HOLLOW BODY

 #6
20260016499
2026-01-15

VELOCITY MEASUREMENT BY DECORRELATION RATIO OF STRUCTURED OPTICAL SIGNALS

 #7
20250389529
2025-12-25

TIME DOMAIN COHERENCE TOMOGRAPHY SYSTEM AND METHOD BASED ON PHOTONIC INTEGRATED CHIP

 #8
20250251234
2025-08-07

SELF-MIXING INTERFEROMETRY OPTO-ACOUSTIC TRANSDUCER AND METHOD OF OPERATING A SELF-MIXING INTERFEROMETRY

 #9
20250244632
2025-07-31

CONTROL METHOD AND SYSTEM OF LITHIUM NIOBATE BASED MACH-ZEHNDER INTERFEROMETER MODULATOR

 #10
20250116499
2025-04-10

POSITION DETECTION SYSTEM USING LASER LIGHT INTERFEROMETRY

 #11
20250093514
2025-03-20

TECHNIQUES FOR ROBUST MACHINE VISION SYSTEMS

 #12
20250035425
2025-01-30

INTERFEROMETRIC WAVEMETER FOR BROADBAND SENSORS IN PHOTONIC SYSTEMS

 #13
20250027764
2025-01-23

INFEROMETRIC MEASURING APPARATUS

 #14
20240324875
2024-10-03

PARALLEL OPTICAL COHERENCE TOMOGRAPHY APPARATUSES, SYSTEMS, AND RELATED METHODS

 #15
20240310158
2024-09-19

INTERFEROMETRIC DISPLACEMENT MEASUREMENT APPARATUS

 #16
20240288362
2024-08-29

Optical Device And Spectroscopic Device

 #17
20240255320
2024-08-01

OPTICAL FIBER SENSOR AND MEASURING SYSTEM USING THE SAME

 #18
20240175672
2024-05-30

On-Chip Opto-Digital Wavelength Meter

 #19
20240003672
2024-01-04

SINGLE FRAME-TILTED WAVE INTERFEROMETER

 #20
20230375337
2023-11-23

DETECTION DEVICE, SYSTEM AND METHOD FOR DETERMINATION OF INCIDENCE ANGLE OF AN OPTICAL BEAM

 #21
20230366668
2023-11-16

THREE-DIMENSIONAL MEASUREMENT DEVICE

 #22
20230366667
2023-11-16

HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRACTION

 #23
20230288188
2023-09-14

Optical interference range sensor

 #24
20230168077
2023-06-01

Method for calibration of an optical measurement system and optical measurement system

 #25
20230168075
2023-06-01

Compact snapshot dual-mode interferometric system

 #26
20230127285
2023-04-27

Four-quadrant interferometry system based on an integrated array wave plate

 #27
20230084871
2023-03-16

OPTICAL INTERFERENCE RANGE SENSOR

 #28
20230013339
2023-01-19

Method and system for determining the position of an element of an optical system in an assembly for processing or measuring an object, as well as the position of said object relative to said assembly, by parallel interferometric measurements

 #29
20220397383
2022-12-15

Self-configuration and error correction in linear photonic circuits

 #30
20220357236
2022-11-10

Device and method for measuring interfaces of an optical element

 #31
20220341724
2022-10-27

PARALLEL OPTICAL SCANNING INSPECTION DEVICE

 #32
20220313091
2022-10-06

2D material detector for activity monitoring of single living micro-organisms and nano-organisms

 #33
20220307815
2022-09-29

System for spatial multiplexing

 #34
20220290970
2022-09-15

Optical coherence tomography system

 #35
20220196385
2022-06-23

Apparatus, systems and methods for detecting light

 #36
20220196383
2022-06-23

High-resolution phase detection method and system based on plane grating laser interferometer

 #37
20220187055
2022-06-16

Heterodyne photonic integrated circuit for absolute metrology

 #38
20220133446
2022-05-05

HIGH-SPEED, DENTAL OPTICAL COHERENCE TOMOGRAPHY SYSTEM

 #39
20220090907
2022-03-24

Heterodyne grating interferometric method and system for two-degree-of-freedom with high alignment tolerance

 #40
20220071492
2022-03-10

Multi-fiber optical probe and optical coherence tomography system

 #41
20220049945
2022-02-17

Swept frequency photonic integrated circuit for absolute metrology

 #42
20220034652
2022-02-03

Grey-mode scanning scatterometry overlay metrology

 #43
20220003540
2022-01-06

INTERFEROMETRY SYSTEMS AND METHODS

 #44
20210396880
2021-12-23

OPTICAL DISTANCE MEASUREMENT DEVICE

 #45
20210389118
2021-12-16

Device and method for interferometric measurement of a two or three dimensional translation of an object

 #46
20210293523
2021-09-23

Laser interference device

 #47
20210199418
2021-07-01

Differential sinusoidal phase modulation laser interferometric nanometer displacement measuring apparatus and method

 #48
20210196126
2021-07-01

System, method, and computer-accessible medium for subsurface capillary flow imaging by wavelength-division-multiplexing swept-source optical doppler tomography

 #49
20210190474
2021-06-24

Single sideband frequency modulated laser measurement for detecting a difference in a propagation distance

 #50
20210164915
2021-06-03

Chamber for vibrational and environmental isolation of thin wafers

 #51
20210164772
2021-06-03

Two-degree-of-freedom heterodyne grating interferometry measurement system

 #52
20210159667
2021-05-27

Fast phase-shift interferometry by laser frequency shift

 #53
20210033383
2021-02-04

Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system

 #54
20200383566
2020-12-10

Parallel optical coherence tomography apparatuses, systems, and related methods

 #55
20200318943
2020-10-08

Apparatus with cantilever light guide

 #56
20200225021
2020-07-16

Optical coherence tomography system

 #57
20200149867
2020-05-14

Multi-probe gauge for slab characterization

 #58
20200149866
2020-05-14

Multi-probe gauge for slab characterization

 #59
20200096320
2020-03-26

Interferometry systems and methods

 #60
20200056877
2020-02-20

Photonic imaging array

 #61
20200011654
2020-01-09

Dual-interferometry wafer thickness gauge

 #62
20190353474
2019-11-21

Interferometry system and associated methods

 #63
20190310071
2019-10-10

Coherent receiver array

 #64
20190293407
2019-09-26

Shape measuring apparatus and shape measuring method using matched frequency measuring light

 #65
20190277622
2019-09-12

Multi-probe gauge for slab characterization

 #66
20190257640
2019-08-22

Single-chip optical coherence tomography device

 #67
20190162526
2019-05-30

Interferometry system and associated methods

 #68
20190133448
2019-05-09

Multi-fiber optical probe and optical coherence tomography system

 #69
20190086192
2019-03-21

Optical delay line for coherence imaging

 #70
20190078872
2019-03-14

Dual beam optical coherence tomography with simultaneous orthogonal scanning

 #71
20190049312
2019-02-14

Large range, high resolution interferometer for wide range of sensing applications

 #72
20190033057
2019-01-31

Interferometer measurement device and control method therefor

 #73
20190011248
2019-01-10

Displacement detecting device with controlled heat generation

 #74
20180364594
2018-12-20

Position measurement system and lithographic apparatus

 #75
20180364028
2018-12-20

DEVICE AND METHOD FOR MEASURING HEIGHT IN THE PRESENCE OF THIN LAYERS

 #76
20180328711
2018-11-15

Interferometer using tilted object waves and comprising a Fizeau interferometer objective

 #77
20180313974
2018-11-01

Optical frequency comb source for fiber sensor interferometer arrays

 #78
20180216927
2018-08-02

Laser multibeam differential interferometric sensor and methods for vibration imaging

 #79
20180202795
2018-07-19

Pressure-balanced seismic sensor package

 #80
20180195853
2018-07-12

OPTICAL INTERFEROMETER

 #81
20180180401
2018-06-28

System and method for phase-readout and active stabilization of optical interferometers

 #82
20180156597
2018-06-07

Scanning white-light interferometry system for characterization of patterned semiconductor features

 #83
20180146851
2018-05-31

Ocular metrology employing spectral wavefront analysis of reflected light

 #84
20180143010
2018-05-24

Rotation angle measuring system and machining system comprising the same

 #85
20180128600
2018-05-10

Optical shape sensing system and method for sensing a position and/or shape of a medical device using backscatter reflectometry

 #86
20180128592
2018-05-10

Integrated fourier transform optical spectrometer

 #87
20180120085
2018-05-03

Photonic imaging array

 #88
20180106590
2018-04-19

Three-dimensional measurement device

 #89
20180092529
2018-04-05

Parallel optical coherence tomography apparatuses, systems, and related methods

 #90
20180070813
2018-03-15

Apparatus and method for detecting surface topography

 #91
20180051980
2018-02-22

Interferometry system and associated methods

 #92
20180035894
2018-02-08

Optical coherence tomographic device

 #93
20170370697
2017-12-28

Bending detecting system, light guide body, tubular apparatus, light detecting apparatus, light detecting method, and optical bending measuring apparatus

 #94
20170363415
2017-12-21

Multichannel optical receivers

 #95
20170332897
2017-11-23

System and method for performing tear film structure measurement

 #96
20170248405
2017-08-31

OPTICAL COHERENCE TOMOGRAPHY IMAGING SYSTEM AND METHOD

 #97
20170234675
2017-08-17

Synchronized dual mode OCT system

 #98
20170211925
2017-07-27

Tomographic image capturing device

 #99
20170191820
2017-07-06

Two-channel point-diffraction interferometer

 #100
20170167858
2017-06-15

Intracavity fiber sensor for measuring sliding based on Fabry-Perot interferometer

 #101
20170146335
2017-05-25

Dual laser frequency sweep interferometry system and method

 #102
20170138721
2017-05-18

Apparatus and method for processing the signal in master slave interferometry and apparatus and method for master slave optical coherence tomography with any number of sampled depths

 #103
20170122721
2017-05-04

Overall Z-direction displacement measuring system

 #104
20170115110
2017-04-27

Compact portable double differential fiber optic Sagnac interferometer

 #105
20170112375
2017-04-27

Angular separation of scan channels

 #106
20170023385
2017-01-26

Fiber optic transducers, fiber optic accelerometers and fiber optic sensing systems

 #107
20170023350
2017-01-26

High-speed optical coherence tomography using multiple interferometers with suppressed multiple scattering cross-talk

 #108
20170016711
2017-01-19

Instantaneous phase-shift interferometer

 #109
20160372353
2016-12-22

Overlay and semiconductor process control using a wafer geometry metric

 #110
20160370170
2016-12-22

Laser heterodyne interferometric straightness measurement apparatus and method with six DOFs determination

 #111
20160338585
2016-11-24

System and method for performing tear film structure measurement and evaporation rate measurements

 #112
20160313112
2016-10-27

Optical coherence tomography using polarization information

 #113
20160305761
2016-10-20

System and a method for quantitative sample imaging using off-axis interferometry with extended field of view or faster frame rate

 #114
20160290789
2016-10-06

Method and system for determining in-plane distortions in a substrate

 #115
20160265898
2016-09-15

Multi-path interferometeric sensor

 #116
20160252340
2016-09-01

Selective amplification of optical coherence tomography signals

 #117
20160178346
2016-06-23

Method and system for low coherence interferometry

 #118
20160178345
2016-06-23

Method and system for conformal imaging vibrometry

 #119
20160161244
2016-06-09

Wavelength encoded multi-beam optical coherence tomography

 #120
20160153764
2016-06-02

Three-DOF heterodyne grating interferometer displacement measurement system

 #121
20160146590
2016-05-26

Dual wavelength dual interferometer with combiner-splitter

 #122
20160135680
2016-05-19

Wavefront analyser

 #123
20160135679
2016-05-19

Ocular metrology employing spectral wavefront analysis of reflected light

 #124
20160123717
2016-05-05

Multiple beam path laser optical system using multiple beam reflector

 #125
20160120401
2016-05-05

Optical tomographic imaging apparatus

 #126
20160113485
2016-04-28

Optical tomographic imaging device

 #127
20160097631
2016-04-07

Pressure-balanced seismic sensor package

 #128
20160089019
2016-03-31

Parallel optical coherence tomography apparatuses, systems, and related methods

 #129
20160033675
2016-02-04

Gravity and/or acceleration measurements using dual interferometer configurations

 #130
20150338209
2015-11-26

Apparatus for detecting a 3D structure of an object

 #131
20150300813
2015-10-22

Method and device for laser-optical detection of a surface movement of a sample using reference beams respectively superimposed on measurement beams in photorefractive/electro-optical elements

 #132
20150300804
2015-10-22

Fiber optic transducers, fiber optic accelerometers and fiber optic sensing systems

 #133
20150260504
2015-09-17

Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head

 #134
20150248991
2015-09-03

Stage device and charged particle beam apparatus using the stage device

 #135
20150241202
2015-08-27

Optical coherence tomography imaging system and method

 #136
20150241200
2015-08-27

Multi-axis differential interferometer

 #137
20150219447
2015-08-06

Lithography apparatus, and method of manufacturing article

 #138
20150198433
2015-07-16

Laser metrology system and method

 #139
20150176973
2015-06-25

A DUAL INTERFEROMETER SYSTEM WITH A SHORT REFERENCE FLAT DISTANCE FOR WAFER SHAPE AND THICKNESS VARIATION MEASUREMENT

 #140
20150176970
2015-06-25

Interferometric distance measuring arrangement for measuring surfaces and corresponding method with at least two parallel measurement channels and wavelength ramp

 #141
20150176969
2015-06-25

Interferometric distance measuring arrangement for measuring surfaces and corresponding method with emission of at least two parallel channels

 #142
20150153655
2015-06-04

Positioning apparatus, lithography apparatus, and article manufacturing method

 #143
20150124261
2015-05-07

Multi-channel optical coherence tomography

 #144
20150092196
2015-04-02

Optical measurement apparatus for measuring a target using signal, reference, and control beams

 #145
20150077760
2015-03-19

Robust one-shot interferometer

 #146
20150073740
2015-03-12

Measurement apparatus, measurement method, and method of manufacturing article

 #147
20150062589
2015-03-05

Optical measurement apparatus and optical measurement method

 #148
20150062588
2015-03-05

Disturbance detection using a passively terminated fiber optic sensor

 #149
20150049339
2015-02-19

Method and apparatus for optical imaging via spectral encoding

 #150
20150049337
2015-02-19

Grazing-incidence interferometer with dual-side measurement capability using a common image plane

 #151
20150043004
2015-02-12

High speed high resolution heterodyne interferometric method and system

 #152
20150002840
2015-01-01

Method for measuring an angle between two spatially separated elements

 #153
20140376002
2014-12-25

Interferometer

 #154
20140320865
2014-10-30

Apparatus for detecting a 3D structure of an object

 #155
20140320816
2014-10-30

Snapshot spectral domain optical coherence tomographer

 #156
20140313516
2014-10-23

Reducing registration error of front and back wafer surfaces utilizing a see-through calibration wafer

 #157
20140253927
2014-09-11

Acoustic signal receiving apparatus and photo-acoustic tomography

 #158
20140218745
2014-08-07

Multiple measurement channel detector circuit for interferometers

 #159
20140202786
2014-07-24

Optical seismic sensor systems and methods

 #160
20140198300
2014-07-17

Ophthalmic apparatus and ophthalmic method

 #161
20140176956
2014-06-26

Super-Steep Step-Phase Interferometer

 #162
20140168637
2014-06-19

Simultaneous refractive index and thickness measurements with a monochromatic low-coherence interferometer

 #163
20140160489
2014-06-12

Four-axis four-subdividing interferometer

 #164
20140125989
2014-05-08

Six-axis four-subdividing interferometer

 #165
20140125951
2014-05-08

Optical coherence tomography device and optical coherence tomography method

 #166
20140115022
2014-04-24

Program for correcting data measured by PS-OCT and PS-OCT system equipped with the program

 #167
20140111791
2014-04-24

Phase characterization of targets

 #168
20130301006
2013-11-14

Dual focusing optical coherence imaging system

 #169
20130250238
2013-09-26

Image sensing apparatus using optical coherence tomography and control method therefor

 #170
20130250099
2013-09-26

Measuring apparatus, measuring method, and method of manufacturing an optical component

 #171
20130206963
2013-08-15

Methods, systems, and devices for multibeam coherent detection and speckle mitigation

 #172
20130188139
2013-07-25

Imaging apparatus, imaging method, and storage medium

 #173
20130182262
2013-07-18

Method for reducing wafer shape and thickness measurement errors resulted from cavity shape changes

 #174
20130176571
2013-07-11

Method and apparatus for optical imaging via spectral encoding

 #175
20130155414
2013-06-20

Measuring apparatus including multi-wavelength interferometer

 #176
20130155413
2013-06-20

Low coherence interferometry with scan error correction

 #177
20130148106
2013-06-13

Arrangements and methods for providing multimodality microscopic imaging of one or more biological structures

 #178
20130128278
2013-05-23

Interferometric device with extrinsic optical fiber for measuring a physical parameter

 #179
20130113925
2013-05-09

Spatial phase shifting interferometer using multi wavelength

 #180
20130107274
2013-05-02

OPTICAL IMAGING AND MAPPING USING PROPAGATION MODES OF LIGHT

 #181
20130107272
2013-05-02

Optical tomographic imaging apparatus and imaging method therefor to acquire images indicating polarization information

 #182
20130107242
2013-05-02

MEASUREMENT APPARATUS

 #183
20130089935
2013-04-11

Overlay and semiconductor process control using a wafer geometry metric

 #184
20130077046
2013-03-28

Normalization of retinal nerve fiber layer thickness measurements made by time domain-optical coherence tomography

 #185
20130070256
2013-03-21

MEASURING APPARATUS

 #186
20130003077
2013-01-03

TOMOGRAPHIC IMAGING APPARATUS AND CONTROL APPARATUS FOR TOMOGRAPHIC IMAGING APPARATUS

 #187
20130002711
2013-01-03

Image processing apparatus, OCT imaging apparatus, tomographic imaging system, control method, and program

 #188
20120320382
2012-12-20

Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device

 #189
20120314220
2012-12-13

Method and device for measuring motion error of linear stage

 #190
20120300213
2012-11-29

Compound interferometer with monolithic measurement cavity

 #191
20120274942
2012-11-01

SIGNAL PROCESSING

 #192
20120262722
2012-10-18

Apparatus and method for optical coherence tomography using multiple beams

 #193
20120257209
2012-10-11

Fiber optic microseismic sensing systems

 #194
20120257208
2012-10-11

Fiber optic transducers, fiber optic accelerometers and fiber optic sensing systems

 #195
20120229814
2012-09-13

Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device

 #196
20120229812
2012-09-13

Low cost high efficiency signal interrogation for multi-channel optical coherence tomography

 #197
20120224182
2012-09-06

Fiber-optic disturbance detection using combined Michelson and Mach-Zehnder interferometers

 #198
20120218557
2012-08-30

Image forming method and optical coherence tomograph apparatus using optical coherence tomography

 #199
20120212746
2012-08-23

INTERFEROMETER AND MEASUREMENT METHOD

 #200
20120170047
2012-07-05

SYSTEM AND METHOD FOR MEASURING A DISTANCE

 #201
20120140241
2012-06-07

Optical system, in particular in a microlithographic projection exposure apparatus

 #202
20120133949
2012-05-31

Apparatus comprising a plurality of interferometers and method of configuring such apparatus

 #203
20120113434
2012-05-10

Measurement apparatus

 #204
20120062901
2012-03-15

Imaging device and imaging method

 #205
20120050747
2012-03-01

Non-destructive stress profile determination in chemically tempered glass

 #206
20120050746
2012-03-01

APPARATUS AND METHOD FOR INCREASING DEPTH RANGE AND SIGNAL TO NOISE RATIO IN FOURIER DOMAIN LOW COHERENCE INTERFEROMETRY

 #207
20120044500
2012-02-23

Optical interferometer

 #208
20120044457
2012-02-23

Imaging apparatus and imaging method

 #209
20120038930
2012-02-16

Fixed wavelength absolute distance interferometer

 #210
20120033691
2012-02-09

Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device

 #211
20120033230
2012-02-09

Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device

 #212
20120033211
2012-02-09

Large area optical diagnosis apparatus and operating method thereof

 #213
20120026463
2012-02-02

Optical coherence tomographic imaging apparatus

 #214
20120013913
2012-01-19

Fiber-based interferometric device for measuring axial dimensions of a human eye

 #215
20120013909
2012-01-19

Apparatus and method of monitoring and measurement using spectral low coherence interferometry

 #216
20120002214
2012-01-05

OPTICAL TOMOGRAPHIC IMAGING APPARATUS AND CONTROL METHOD THEREFOR

 #217
20110310378
2011-12-22

Interferometric measurement with crosstalk suppression

 #218
20110304854
2011-12-15

INSTANTANEOUS, PHASE MEASURING INTERFEROMETER APPARATUS AND METHOD

 #219
20110304853
2011-12-15

Wavelength sweeping light source and imaging apparatus using the same

 #220
20110301455
2011-12-08

OPTICAL TOMOGRAPHIC IMAGING APPARATUS

 #221
20110292401
2011-12-01

Apparatus and method for optical interrogation

 #222
20110282331
2011-11-17

OPTICAL COHERENCE TOMOGRAPHY WITH MULTIPLE IMAGING INSTRUMENTS

 #223
20110282191
2011-11-17

OPTICAL COHERENCE TOMOGRAPHY FOR NEURAL-SIGNAL APPLICATIONS

 #224
20110279822
2011-11-17

Profile measuring apparatus

 #225
20110279821
2011-11-17

Optical coherence tomography with multiple sample arms

 #226
20110273719
2011-11-10

Optical imaging for optical device inspection

 #227
20110273668
2011-11-10

OPTICAL TOMOGRAPHIC IMAGING APPARATUS AND IMAGING METHOD FOR AN OPTICAL TOMOGRAPHIC IMAGE

 #228
20110255095
2011-10-20

Optical coherence tomography imaging system and method

 #229
20110242487
2011-10-06

Optical tomographic imaging apparatus

 #230
20110235051
2011-09-29

Device for interferential distance measurement

 #231
20110234786
2011-09-29

Optical tomographic imaging method and optical tomographic imaging apparatus

 #232
20110211198
2011-09-01

Lightwave interference measurement apparatus that calculates absolute distance using lightwave interference

 #233
20110205523
2011-08-25

Compact fiber optic geometry for a counter chirp FMCW coherent laser radar

 #234
20110157552
2011-06-30

SS OCT interferometry for measuring a sample

 #235
20110149296
2011-06-23

Method and apparatus for optical imaging via spectral encoding

 #236
20110149291
2011-06-23

Optical tomographic imaging apparatus, interference signal processing method, and endoscope apparatus

 #237
20110144504
2011-06-16

Method and apparatus for optical imaging via spectral encoding

 #238
20110134436
2011-06-09

Method for depth resolved wavefront sensing, depth resolved wavefront sensors and method and apparatus for optical imaging

 #239
20110126617
2011-06-02

LASER SENSOR BASED SYSTEM FOR STATUS DETECTION OF TIRES

 #240
20110058178
2011-03-10

Arrangements and methods for providing multimodality microscopic imaging of one or more biological structures

 #241
20110032479
2011-02-10

Image sensing apparatus using optical coherence tomography and control method therefor

 #242
20110007324
2011-01-13

Probe microscope

 #243
20100315652
2010-12-16

Method and system of adjusting a field of view of an interferometric imaging device

 #244
20100309478
2010-12-09

Ophthalmic surgical microscope having an OCT-system

 #245
20100290059
2010-11-18

Optical structure measuring apparatus and optical probe thereof

 #246
20100277746
2010-11-04

METHOD AND SYSTEM FOR LATERAL SCANNING INTERFEROMETRY

 #247
20100268499
2010-10-21

Interferometer system and method for its operation

 #248
20100265511
2010-10-21

System for fourier domain optical coherence tomography

 #249
20100231921
2010-09-16

Methods and systems for measuring target movement with an interferometer

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2010-09-16

Quantitative phase-imaging systems

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2010-09-09

Optical interference measuring apparatus

 #252
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2010-08-19

Method and apparatus for measuring shape or thickness information of a substrate

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20100201990
2010-08-12

Interferometer for optically measuring an object

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2010-08-05

Interference microscope with scan motion detection using fringe motion in monitor patterns

 #255
20100182611
2010-07-22

DISPLACEMENT MEASURING APPARATUS AND DISPLACEMENT MEASURING METHOD

 #256
20100166293
2010-07-01

Image forming method and optical coherence tomograph apparatus using optical coherence tomography

 #257
20100134786
2010-06-03

Interferometer with multiple modes of operation for determining characteristics of an object surface

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2010-05-27

Interferometric systems and methods featuring spectral analysis of unevenly sampled data

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20100128280
2010-05-27

Scan error correction in low coherence scanning interferometry

 #260
20100128278
2010-05-27

Fiber-based interferometer system for monitoring an imaging interferometer

 #261
20100128276
2010-05-27

Compound reference interferometer

 #262
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2010-05-06

Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device

 #263
20100091296
2010-04-15

Interferometer system for monitoring an object

 #264
20100068655
2010-03-18

POSITION MEASURING MODULE, POSITION MEASURING APPARATUS, STAGE APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

 #265
20100053636
2010-03-04

Multiple beam source for a multi-beam interferometer and multi-beam interferometer

 #266
20100033733
2010-02-11

Vibration-resistant interferometric scanning system and method thereof

 #267
20100020332
2010-01-28

Interferometric device for position measurement and coordinate measuring machine

 #268
20100020331
2010-01-28

Laser interferometer systems and methods with suppressed error and pattern generators having the same

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20090323074
2009-12-31

Fiber-based laser interferometer for measuring and monitoring vibrational characterstics of scattering surface

 #270
20090310105
2009-12-17

Optical member, interferometer system, stage apparatus, exposure apparatus, and device manufacturing method

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20090244545
2009-10-01

Optical rotary adaptor and optical tomographic imaging apparatus using the same

 #272
20090213385
2009-08-27

Multi-phase interferometer

 #273
20090207416
2009-08-20

Surface characteristic determining apparatus

 #274
20090185195
2009-07-23

Interference objective for annular test surfaces

 #275
20090174885
2009-07-09

Sensor and method utilizing multiple optical interferometers

 #276
20090153839
2009-06-18

Partial coherence interferometer with measurement ambiguity resolution

 #277
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2009-04-09

Apparatus for interferometric sensing

 #278
20090040530
2009-02-12

Coordinate measuring machine and a method for correcting non-linearities of the interferometers of a coordinate measuring machine

 #279
20090033916
2009-02-05

System and method for measuring interferences

 #280
20090021723
2009-01-22

Generating model signals for interferometry

 #281
20080304075
2008-12-11

Interferometer for optically measuring an object

 #282
20080291464
2008-11-27

Interferometric position-measuring devices and methods

 #283
20080285049
2008-11-20

Heterodyne interferometer device for optically measuring an object

 #284
20080285048
2008-11-20

Method and apparatus for simultaneously acquiring interferograms and method for solving the phase information

 #285
20080198386
2008-08-21

Vibration detection device and vibration detector

 #286
20080192264
2008-08-14

Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device

 #287
20080175465
2008-07-24

Optical coherence tomography imaging system and method

 #288
20080165347
2008-07-10

Interferometer system for monitoring an object

 #289
20080144042
2008-06-19

Stage apparatus, control system, exposure apparatus, and device manufacturing method

 #290
20080140328
2008-06-12

Optical tomographic imaging apparatus

 #291
20080137094
2008-06-12

Optical tomographic imaging apparatus

 #292
20080117432
2008-05-22

Ophthalmic surgical microscope having an OCT-system

 #293
20080117431
2008-05-22

Optical coherence tomographic imaging apparatus

 #294
20080117427
2008-05-22

Optical tomograph using a plurality of wavelength-swept light beams

 #295
20080117424
2008-05-22

Optical coherence tomographic imaging apparatus

 #296
20080111996
2008-05-15

Three-dimensional shape measuring method and apparatus

 #297
20080109178
2008-05-08

Method and system for predicting and correcting signal fluctuations of an interferometric measuring apparatus

 #298
20080100848
2008-05-01

Optical tomograph

 #299
20080088849
2008-04-17

Interferometry for determining characteristics of an object surface, with spatially coherent illumination

 #300
20080079945
2008-04-03

Apparatus and Method to Quantify Laser Head Reference Signal Reliability