164214 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers; Reduction or prevention of errors; Testing; Calibration; Passive reduction of errors Reducing effect of parasitic reflections, e.g. cyclic errors
INTERFEROMETRIC RETROREFLECTING SENSOR SYSTEM
#2HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRACTION
#3Method for calibration of an optical measurement system and optical measurement system
#4Method and device for characterizing the surface shape of an optical element
#5Device for measuring a substrate and method for correcting cyclic error components of an interferometer
#6OCT system and OCT method
#7OCT system and OCT method
#8Reflective condensing interferometer
#9Systems and methods for cyclic error correction in a heterodyne interferometer
#10Optical coherence tomography system
#11Eliminating internal reflections in an interferometric endpoint detection system
#12Cyclic error measurements and calibration procedures in interferometers
#13SYSTEMS AND METHODS FOR CYCLIC ERROR CORRECTION IN A HETERODYNE INTERFEROMETER
#14Reference signal filter for interferometric system
#15Optical interferometer
#16Signal processing apparatus for eliminating object reflection noise in optical tomographic measurement
#17Optical coherence tomography laser with integrated clock
#18Reference signal filter for interferometric system
#19Microscopy system with auto-focus adjustment by low-coherence interferometry
#20Device for determining a 3D structure of an object
#21Imaging apparatus and imaging method
#22Optical coherence tomography laser with integrated clock
#23Optical measurement apparatus and optical measurement method
#24Microscopy system with auto-focus adjustment by low-coherence interferometry
#25Tomographic image capturing apparatus and method with noise reduction technique
#26Measurement apparatus and method that measure shape of surface while canceling cyclical errors to zero by summing of cyclic errors having different phases
#27Method for reducing interference from scattered light/reflected light of interference path by generating carrier through phase
#28Dual beam splitter interferometer measuring 3 degrees of freedom, system and method of use
#29Optical measurement apparatus for measuring a target using signal, reference, and control beams
#30Interferometric heterodyne optical encoder system
#31Interferometer
#32Optical coherence tomography (OCT) system having integrated detector and analysis systems
#33Optical coherence tomography laser with integrated clock
#34Optimized device for swept source optical coherence domain reflectometry and tomography
#35Non-harmonic cyclic error compensation in interferometric encoder systems
#36Double pass interferometer with tilted mirrors
#37MEASUREMENT APPARATUS AND MEASUREMENT METHOD
#38INTERFEROMETER AND MEASUREMENT METHOD
#39Interferometric heterodyne optical encoder system
#40Integrated optical coherence tomography system
#41Interferometer with paraboloidal illumination and imaging optic and tilted imaging plane
#42Interferometer and distance calculation method therefor
#43Equal-path interferometer
#44Error compensation in phase shifting interferometry
#45Optical coherence tomography laser with integrated clock
#46Double pass interferometer with tilted mirrors
#47Systems and Methods for Reducing Nonlinearity in an Interferometer
#48Interferometer with Double Polarizing Beam Splitter
#49Cyclic error compensation in interferometry systems
#50Apparatus and method for reducing effects of coherent artifacts and compensation of effects of vibrations and environmental changes in interferometry
#51Beam shear reduction in interferometry systems
#52Time-delayed source and interferometric measurement of windows and domes
#53Phase shift interferometer
#54System and method for interferometer non-linearity compensation
#55Multi-axis interferometer with procedure and data processing for mirror mapping
#56Interferometry systems and methods of using interferometry systems
#57Error correction in interferometry systems
#58Compensation for effects of beam misalignments in interferometer metrology systems
#59Coating for reflective optical components
#60Precision retroreflector positioning apparatus
#61Systems using polarization-manipulating retroreflectors
#62Interferometry systems and methods of using interferometry systems
#63Interferometry systems and methods of using interferometry systems
#64Interferometric servo control system for stage metrology
#65Interferometer assemblies having reduced cyclic errors and system using the interferometer assemblies
#66Cyclic error reduction in average interferometric position measurements
#67Cyclic error compensation in interferometry systems
#68Coherent beam device for observing and measuring sample
#69Optical position measuring system and method using a low coherence light source