164215 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers; Reduction or prevention of errors; Testing; Calibration; Passive reduction of errors Reduction or prevention of effects of tilts or misalignment
FLATNESS PRECISION IMPROVEMENT WITH SYSTEMATIC ERROR REDUCTION VIA INDUCED WAFER TILT VARIATION
#2METHOD, INTERFEROMETER AND SIGNAL PROCESSING DEVICE, EACH FOR DETERMINING AN INPUT PHASE AND/OR AN INPUT AMPLITUDE OF AN INPUT LIGHT FIELD
#3REFLECTIVE INTERFEROMETER SYSTEMS AND METHODS THEREOF
#4Method of Processing Interferometry Signal, and Associated Interferometer
#5Method and device for characterizing the surface shape of an optical element
#6Device for interferometric distance measurement
#7METHOD, INTERFEROMETER AND SIGNAL DEVICE, EACH FOR DETERMINING AN INPUT PHASE AND/OR AN INPUT AMPLITUDE OF AN INPUT LIGHT FIELD
#8Systems and methods for improved OCT measurements
#9Position measurement system, interferometer and lithographic apparatus
#10Displacement detection apparatus
#11Light detection module for OCT device and OCT device
#12Measurement apparatus, lithography apparatus, and method of manufacturing article
#13Laser heterodyne interferometric straightness measurement apparatus and method with six DOFs determination
#14Device for interferential distance measurement
#15Interferometer having two transparent plates in parallel for making reference and measurement beams parallel
#16Measuring device for high-precision optical determination of distance or position
#17Interferometer
#18Device for distance measurement
#19Interferometer and fourier-transform spectroscopic analyzer
#20Measuring apparatus including multi-wavelength interferometer
#21Multi-wavelength interferometer, measurement apparatus, and measurement method
#22Device for determining distance interferometrically
#23Grazing incidence interferometer
#24Method and arrangement for robust interferometry for detecting a feature of an object
#25Interferometric distance measurement device using a scanning plate and transparent carrier substrate containing a reflector element
#26Device and method for acquiring position with a confocal Fabry-Perot interferometer
#27Supporting structure for a movable mirror, method for reducing the tilting of a movable mirror, and interferometer
#28Multi-beam interferometer displacement measuring system utilized in a large measuring range
#29Interferometer
#30Optical tomographic imaging apparatus including a beam scattering structure
#31Optical rotary adapter and optical tomographic imaging system using the same
#32Optical rotary adaptor and optical tomographic imaging apparatus using the same
#33Optical tomographic imaging system
#34Multi-axis interferometers and methods and systems using multi-axis interferometers
#35Image amplifying, servo-loop controlled, point diffraction interometer
#36Interferometer for measurement of dome-like objects
#37Apparatus and methods for reducing non-cyclic non-linear errors in interferometry
#38Tilt compensated interferometers
#39Interferometry systems and methods of using interferometry systems
#40Method for calibration and removal of wavefront errors
#41Position detection apparatus and method
#42Interferometer systems for measuring displacement and exposure systems using the same
#43Error correction in interferometry systems
#44Interferometry systems and methods of using interferometry systems
#45Interferometry systems and methods of using interferometry systems
#46Multi-axis interferometers and methods and systems using multi-axis interferometers
#47Digital phase detector for periodically alternating signals
#48Compensation for geometric effects of beam misalignments in plane mirror interferometer metrology systems
#49System and method for setting up secondary reflective optic