164216 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers; Reduction or prevention of errors; Testing; Calibration Active error reduction, i.e. varying with time
Sub-classes:Line-field OCT System with K Space Calibration
#2ASYMMETRY EXTENDED GRID MODEL FOR WAFER ALIGNMENT
#3Apparatus for measuring thickness and surface profile of multilayered film structure using imaging spectral optical system and measuring method
#4OPHTHALMOLOGIC APPARATUS
#5Method of air refractive index correction for absolute long distance measurement
#6Precision surface measurement in a vacuum
#7Shape Measuring Device
#8Accurate chirped synthetic wavelength interferometer
#9Ophthalmologic apparatus for measuring position of measuring portion inside eye
#10Spectral filtering of k-clock signal in OCT system and method
#11Interferometer system, lithography apparatus, and article manufacturing method
#12Position monitoring system with reduced noise
#13Ophthalmologic apparatus
#14Apparatus and methods for uniform frequency sample clocking
#15TWO-WAVELENGTH LASER INTERFEROMETER AND METHOD OF ADJUSTING OPTICAL AXIS IN THE SAME
#16Apparatus and methods for uniform frequency sample clocking