164246 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers Self-interferometers
Sub-classes:OPTICAL MEASUREMENT DEVICE AND METHOD
#2SEMICONDUCTOR MEASUREMENT DEVICE
#3METHOD, INTERFEROMETER AND SIGNAL PROCESSING DEVICE, EACH FOR DETERMINING AN INPUT PHASE AND/OR AN INPUT AMPLITUDE OF AN INPUT LIGHT FIELD
#4SEMICONDUCTOR MEASUREMENT APPARATUS
#5SEMICONDUCTOR MEASUREMENT APPARATUS
#6FREQUENCY-DOMAIN INTERFEROMETRIC BASED IMAGING SYSTEMS AND METHODS
#7Self-mixing inteferometry sensor module, electronic device and method of determining an optical power ratio for a self-mixing inteferometry sensor module
#8Method for determining a focal length of a particle in a medium
#9Self-Mixing Interference Device for Sensing Applications
#10Finger devices with self-mixing interferometric proximity sensors
#11SCANNING SELF-MIXING INTERFEROMETRY WITH WAVEGUIDE
#12Scanning self-mixing interferometry system and sensor
#13Self-referencing interferometer and dual self-referencing interferometer devices
#14Surface quality sensing using self-mixing interferometry
#15Two-Dimensional Second Harmonic Dispersion Interferometer
#16METHOD, INTERFEROMETER AND SIGNAL DEVICE, EACH FOR DETERMINING AN INPUT PHASE AND/OR AN INPUT AMPLITUDE OF AN INPUT LIGHT FIELD
#17Methods and systems of holographic interferometry
#18Two-dimensional second harmonic dispersion interferometer
#19Frequency-domain interferometric based imaging systems and methods
#20Self-mixing interference device for sensing applications
#21Method for determining a phase of an input beam bundle
#22Three-dimensional interferometer and method for determining a phase of an electric field
#23Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method
#24Methods and systems of holographic interferometry
#25Interferometer based on a tilted MMI
#26Rotation angle measuring system and machining system comprising the same
#27Integrated fourier transform optical spectrometer
#28Three-dimensional interferometer, method for calibrating such an interferometer and method for reconstructing an image
#29Two-channel point-diffraction interferometer
#30Portable interferometric device
#31Compact portable double differential fiber optic Sagnac interferometer
#32Frequency-domain interferometric based imaging systems and methods
#33System and method for a self-referencing interferometer
#34POLARIZATION-SENSITIVE SPECTRAL INTERFEROMETRY
#35System and a method for quantitative sample imaging using off-axis interferometry with extended field of view or faster frame rate
#36Optical position measuring device for generating wavelength-dependent scanning signals
#37Method for detecting focal plane based on grating talbot effect
#38Device for interferential distance measurement
#39Methods for 3-dimensional interferometric microscopy
#40Wavelength-encoded tomography
#41Portable interferometric device
#42Spatial frequency reproducing apparatus and optical distance measuring apparatus
#43Method of 3-dimensional imaging of activated samples
#44System and method for a self-referencing interferometer
#45Polarization-sensitive spectral interferometry
#46Light reflection mechanism, optical interferometer and spectrometric analyzer
#47System and method for a virtual reference interferometer
#48Optical interfering apparatus
#49SS OCT interferometry for measuring a sample
#50Displacement measurement device, exposure apparatus, and working device
#51Short coherence interferometry for measuring distances
#52Apparatus and method for measuring displacement
#53Force sensor and industrial robot including the same
#54DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF RELATIVE DISTANCES
#55Self-interfering tomography system
#56Talbot interferometer, its adjustment method, and measurement method
#57Three-dimensional interferometric microscopy
#58Polarization-sensitive spectral interferometry
#59Systems and methods for 3-dimensional interferometric microscopy
#60Optical tomography method & device
#61Heterodyne array detector
#62Systems and methods for tilt and range measurement
#63Method for measuring contour variations
#64Common optical-path testing of high-numerical-aperture wavefronts
#65Self-referencing interferometric microscope
#66Interferometer based on a tilted MMI
#67High speed Michelson interferometer microscope