Patents-Review.com
ClassID:

164247 ⎘

G01B9/02098 - CPC Classification

Classification description:

Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers; Self-interferometers Shearing interferometers

Recent Application in this class:
#1
20240418499
2024-12-19

DOUBLE-MIRROR SHEAR INTERFEROMETER

 #2
20240401928
2024-12-05

DETERMINATION OF A CHANGE OF OBJECT'S SHAPE

 #3
20240255273
2024-08-01

COMPUTATIONAL SHEAR BY PHASE STEPPED SPECKLE HOLOGRAPHY

 #4
20230296368
2023-09-21

COMPACT SHEAROGRAPHY SYSTEM WITH ADJUSTABLE SHEAR DISTANCE

 #5
20230251204
2023-08-10

DEFECT INSPECTION APPARATUS

 #6
20230152082
2023-05-18

Methods and apparatus for measuring a feature of glass-based substrate

 #7
20230062821
2023-03-02

Defect inspection device and defect inspection method

 #8
20220412720
2022-12-29

Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometry

 #9
20220342325
2022-10-27

System and method for lateral shearing interferometry in an inspection tool

 #10
20220074793
2022-03-10

Method for high-accuracy wavefront measurement base on grating shearing interferometry

 #11
20220065617
2022-03-03

DETERMINATION OF A CHANGE OF OBJECT'S SHAPE

 #12
20220011091
2022-01-13

COMPUTATIONAL SHEAR BY PHASE STEPPED SPECKLE HOLOGRAPHY

 #13
20210302150
2021-09-30

Shearing interferometry measurement device for microscopy

 #14
20210293526
2021-09-23

GEOMETRIC PHASE SHEAROGRAPHY SYSTEM AND METHOD THEREOF

 #15
20210245897
2021-08-12

Composite laminate damage detection method using an in-situ thermal gradient and expansion differences across the damage

 #16
20210239452
2021-08-05

Method and apparatus for detecting changes in direction of a light beam

 #17
20210208005
2021-07-08

Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof

 #18
20200363185
2020-11-19

Common lens transmitter for motion compensated illumination

 #19
20200096315
2020-03-26

Metrology and profilometry using light field generator

 #20
20200049493
2020-02-13

Lateral shearing interferometer for auto alignment beam sensing

 #21
20190271534
2019-09-05

LENSLESS IMAGING WITH REDUCED APERTURE

 #22
20190204275
2019-07-04

Defect inspection device and method

 #23
20190145831
2019-05-16

Three-dimensional interferometer and method for determining a phase of an electric field

 #24
20190056212
2019-02-21

Methods, systems and apparatus of interferometry for imaging and sensing

 #25
20180356205
2018-12-13

Defect detection method and defect detection device

 #26
20180328713
2018-11-15

Optical interferometry

 #27
20180283847
2018-10-04

Vibration measurement device

 #28
20170350690
2017-12-07

Defect detection method and defect detection apparatus

 #29
20170162456
2017-06-08

Systems and methods of characterizing process-induced wafer shape for process control using CGS interferometry

 #30
20170122721
2017-05-04

Overall Z-direction displacement measuring system

 #31
20160363440
2016-12-15

Polarization-based coherent gradient sensing systems and methods

 #32
20160313655
2016-10-27

Apparatus and method for overlay measurement

 #33
20160313115
2016-10-27

Apparatus and method for overlay measurement

 #34
20160305773
2016-10-20

Lensless imaging with reduced aperture

 #35
20160265900
2016-09-15

Spatial phase-shift shearography system for non-destructive testing and strain measurement

 #36
20160153766
2016-06-02

OPTICAL APPARATUS AND METHODS

 #37
20150304616
2015-10-22

Measuring apparatus and measuring method

 #38
20150204729
2015-07-23

Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beams

 #39
20130141712
2013-06-06

Low coherence interferometric system for phase stepping shearography combined with 3D profilometry

 #40
20120120410
2012-05-17

All-reflective, radially shearing interferometer

 #41
20120038930
2012-02-16

Fixed wavelength absolute distance interferometer

 #42
20100002242
2010-01-07

Interferometric tracking device

 #43
20090219541
2009-09-03

Lensless imaging with reduced aperture

 #44
20090161115
2009-06-25

Wavefront sensor with optical path difference compensation

 #45
20070211256
2007-09-13

Linear-carrier phase-mask interferometer

 #46
20060154156
2006-07-13

Lensless imaging with reduced aperture

 #47
20060119861
2006-06-08

Method for measuring contour variations

 #48
20060114476
2006-06-01

Exposure apparatus with interferometer

 #49
20060061771
2006-03-23

Compensation for effects of beam misalignments in interferometer metrology systems

 #50
20050213105
2005-09-29

Optical beam shearing apparatus

 #51
20050157313
2005-07-21

Shear inducing beamsplitter for interferometric image processing

 #52
20050099635
2005-05-12

Exposure apparatus with interferometer

 #53
20050007601
2005-01-13

Optical characterization of surfaces and plates

 #54
18143843
2024-01-09

Extended reality virtual distance measurement system

 #55
16414871
2022-03-29

Regularized shearograms for phase resolved shearography

 #56
16125349
2019-11-05

Motion compensation system for a shearography apparatus

 #57
15782327
2019-04-30

Spectral shearing ladar

 #58
13593008
2016-01-12

Shearographic inspection system using a laser matrix