164594 ⎘
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects; Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
Drive circuit, vibrator device, electronic apparatus, and moving object
#302Micromechanical sensor of angular velocity
#303Micromechanical sensor of angular velocity
#304Angular velocity sensor
#305Micro-opto-electromechanical systems (MOEMS) device
#306Micromechanical gyroscope structure
#307Z-axis microelectromechanical detection structure with reduced drifts
#308Micromechanical coriolis rate of rotation sensor
#309Hollow supports and anchors for mechanical resonators
#310WAFER BONDING METHOD FOR USE IN MAKING A MEMS GYROSCOPE
#311MEMS GYROSCOPE
#312GYRO SENSOR, ELECTRONIC APPARATUS, AND MOVING BODY
#313Manufacturing method of inertial sensor and inertial sensor
#314System comprising a mechanical resonator and method therefor
#315Resonance Frequency Adjustment Module
#316MEMS SENSOR MODULE, VIBRATION DRIVING MODULE, AND MEMS SENSOR
#317Rotation rate sensor and a method for operating a rotation rate sensor
#318Physical quantity sensor, electronic device, and mobile body
#319Physical quantity sensor, electronic device, and mobile body
#320Rotation rate sensor
#321Systems and methods for improving MEMS gyroscope start time
#322Micro-gyroscope and method for operating a micro-gyroscope
#323Apparatus and method for measuring a bending angle of a workpiece
#324Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
#325Micromechanical sensor and method for manufacturing a micromechanical sensor
#326MEMS gyroscope for determining rotational movements about an x, y, and/or z axis
#327Self-test in a closed-loop vibratory gyroscope
#328Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
#329Electronic device, manufacturing method thereof, and electronic apparatus
#330Drive circuitry and method for a vibration gyroscope
#331Angular velocity sensor and manufacturing method therefor
#332Shock-robust integrated multi-axis MEMS gyroscope
#333Gyroscope structure and gyroscope device
#334MEMS-based rotation sensor for seismic applications and sensor units having same
#335Micro-electromechanical apparatus with pivot element
#336Microelectromechanical gyroscope with open loop reading device and control method
#337Gyro sensor and composite sensor comprising gyro sensor
#338Positioning apparatus comprising an inertial sensor and inertial sensor temperature compensation method
#339Multi-axis integrated inertial sensing device
#340Integrated inertial sensing device
#341Integrated MEMs inertial sensing device with automatic gain control
#342MEMS motion sensor and method of manufacturing
#343Microelectromechanical device with motion limiters
#344MICRO ELECTRO MECHANICAL SYSTEMS SENSOR
#345Extension-mode angular velocity sensor
#346Drive circuit for MEMS resonator startup
#347Drive circuit for a MEMS resonator
#348MEMS GYROSCOPE
#349Stacked lateral overlap transducer (SLOT) based three-axis accelerometer
#350Microelectromechanical gyroscopes and related apparatus and methods
#351Ring gyroscope structure and gyroscope
#352Gyroscope structure and gyroscope
#353MEMS sensor with decoupled drive system
#354Micro-electro-mechanical system drive-mode oscillator module and method therefor
#355Device for measuring rotation angle acceleration
#356Detection device, sensor, electronic apparatus and moving object
#357Resonator
#358MEMS device with integrated temperature stabilization
#359Microelectromechanical gyroscope with compensation of quadrature error drift
#360Gyroscope structure and gyroscope with improved quadrature compensation
#361Gyroscope structure and gyroscope
#362RESONANCE DEVICE HAVING DROP RESISTIVE PROTECTION
#363Multiple sense axis MEMS gyroscope having a single drive mode
#364Micromechanical sensor
#365Wafer bonding method for use in making a MEMS gyroscope
#366MEMS GYROSCOPE
#367MEMS DEVICE
#368MEMS GYROSCOPE
#369Sensing module and angular velocity sensor having the same
#370Technique for forming a MEMS device
#371Oscillation frequency measuring system and method for a MEMS sensor
#372Angular rate sensor with quadrature error compensation
#373Yaw rate sensor having three sensitive axes and method for manufacturing a yaw rate sensor
#374Rotation rate sensor and method for operating a rotation rate sensor
#375Micromachined gyroscope including a guided mass system
#376Method and structure of an integrated MEMS inertial sensor device using electrostatic quadrature-cancellation
#377Micromechanical sensor
#378MULTIAXIAL MICRO-ELECTRONIC INERTIAL SENSOR
#379Microgyroscope for Determining Rotational Movements About Three Spatial Axes which are Perpendicular to One Another
#380MEMS inertial sensor and method of inertial sensing
#381Electronic drive circuit for a MEMS type resonator device and method for actuating the same
#382Multiple axis rate sensor
#383Microelectromechanical gyroscope with rotary driving motion and improved electrical properties
#384MICRO-ELECTROMECHANICAL GYRO DEVICE
#385Micro electro mechanical system
#386Chip level sensor with multiple degrees of freedom
#387Microelectromechanical gyroscope with improved start-up phase, system including the microelectromechanical gyroscope, and method for speeding-up the start up phase
#388Microelectromechanical gyroscopes and related apparatus and methods
#389Gyroscope utilizing torsional springs and optical sensing
#390MICROMECHANICAL STRUCTURE
#391Frequency-Modulated Micro-Gyro Half-Period Signal Processing Method
#392Vibrator element, vibrator, electronic device, electronic apparatus, and moving object
#393Micro/nano multiaxial inertial sensor of movements
#394Micromachined piezoelectric x-axis gyroscope
#395Micromachined gyroscope including a guided mass system
#396Microelectromechanical gyroscope with enhanced rejection of acceleration noises
#397CLASS II CORIOLIS VIBRATORY ROCKING MODE GYROSCOPE WITH CENTRAL FIXED POST
#398Micromachined piezoelectric x-axis gyroscope
#399MEMS gyros with quadrature reducing springs
#400Micromachined piezoelectric z-axis gyroscope
#401Vibration isolated MEMS structures and methods of manufacture
#402Flexure bearing to reduce quadrature for resonating micromachined devices
#403Micromachined monolithic 6-axis inertial sensor
#404Micromechanical coriolis rate of rotation sensor
#405Microelectromechanical z-axis detection structure with low thermal drifts
#406THREE-AXIS GYROSCOPE
#407Gyroscope self test by applying rotation on coriolis sense mass
#408Inertial micro-sensor of angular displacements
#409Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical rotation rate sensor by means of sigma-delta-modulation
#410MEMS multi-axis accelerometer electrode structure
#411Rotation rate sensor and method for operating a rotation rate sensor
#412MICROELECTROMECHANICAL SYSTEM
#413MEMS multi-axis gyroscope Z-axis electrode structure
#414MEMS multi-axis gyroscope with central suspension and gimbal structure
#415Microsystem device and methods for fabricating the same
#416Rotary disk gyroscope
#417Electronic device, manufacturing method thereof, and electronic apparatus
#418Micromachined gyroscope including a guided mass system
#419Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection
#420ANGULAR RATE SENSOR WITH DIFFERENT GAP SIZES
#421Microelectromechanical sensor with differentiated performances and method of controlling a microelectromechanical sensor
#422MEMS structure for an angular rate sensor
#423Microelectromechanical structure with enhanced rejection of acceleration noise
#424Microelectromechanical gyroscope with enhanced rejection of acceleration noises
#425Angular velocity sensor
#426INERTIAL SENSOR
#427Gyroscope utilizing torsional springs and optical sensing
#428Extension-mode angular velocity sensor
#429Inertial unit with several detection axes
#430Gyrometer with reduced parasitic capacitances
#431INERTIAL SENSOR
#432Bias measurement for MEMS gyroscopes and accelerometers
#433Yaw-rate sensor and method for operating a yaw-rate sensor
#434Method for the precise measuring operation of a micromechanical rotation rate sensor
#435MEMS gyros with quadrature reducing springs
#436Vibrating micromechanical sensor of angular velocity
#437Vibrating micromechanical sensor of angular velocity
#438Microgyroscope for determining rotational motions about at least one of three perpendicular spatial axes
#439Micromechanical sensor
#440Micromechanical sensor with multiple spring bars
#441Microelectromechanical gyroscopes and related apparatus and methods
#442Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another
#443Micromechanical Coriolis rate of rotation sensor
#444Inertial sensor having an oscillating rotating disk
#445Microelectromechanical gyroscope with open loop reading device and control method
#446Microelectromechanical gyroscopes and related apparatus and methods
#447MEMS gyroscope for detecting rotational motions about an X-, Y-, and/or Z-axis
#448Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer
#449Stacked lateral overlap transducer (SLOT) based three-axis accelerometer
#450Micromachined piezoelectric z-axis gyroscope
#451Micromachined piezoelectric x-axis gyroscope
#452Micromachined piezoelectric X-Axis gyroscope
#453ROTATIONAL VIBRATION GYRO
#454Micro electro mechanical system
#455Microgyroscope
#456ROTATION-RATE SENSOR HAVING TWO SENSITIVE AXES
#457Extension-mode angular velocity sensor
#458Offset detection and compensation for micromachined inertial sensors
#459Frequency modulated micro-gyro signal processing method and device
#460Micromachined devices and fabricating the same
#461Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies
#462Micromachined inertial sensor devices
#463Microelectromechanical Z-axis detection structure with low thermal drifts
#464Micromechanical yaw-rate sensor
#465Capacitive MEMS gyroscope and method of making the same
#466Gyroscope utilizing MEMS and optical sensing
#467MEMS rotational sensor with improved anchoring
#468Isolated active temperature regulator for vacuum packaging of a disc resonator gyroscope
#469CAPACITIVE SENSOR AND 3-AXIS GYROSCOPIC SENSOR UTILIZING CAPACITIVE SENSORS
#470Microelectromechanical structure with enhanced rejection of acceleration noise
#471Angular velocity sensor
#472Micromechanical rate-of-rotation sensor
#473Microelectromechanical gyroscope with enhanced rejection of acceleration noises
#474Reading circuit for a multi-axis MEMS gyroscope having detection directions inclined with respect to the reference axes
#475X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
#476Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection
#477Microelectromechanical gyroscope with rotary driving motion and improved electrical properties
#478Method for operating a sensor system, and sensor system
#479Micromachined torsional gyroscope with anti-phase linear sense transduction
#480Micromechanical inertial sensor for measuring rotation rates
#481Manufacturing method for a rotation sensor device and rotation sensor device
#482Rotational speed sensor having a coupling bar
#483Arrangement for measuring a rate of rotation using a vibration sensor
#484INERTIA FORCE SENSOR
#485Vibrating micro-mechanical sensor of angular velocity
#486Angular velocity sensor
#487Vibrating micromechanical sensor of angular velocity
#488High sensitivity microelectromechanical sensor with rotary driving motion
#489Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes
#490Angular velocity sensor
#491Microelectromechanical gyroscope with open loop reading device and control method
#492X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
#493Dual axis rate sensor
#494ANGULAR RATE SENSOR
#495Small angle bias measurement mechanism for MEMS instruments
#496Multi-axis micromachined accelerometer and rate sensor
#497Microelectromechanical integrated sensor structure with rotary driving motion
#498Angular rate sensor featuring mechanically decoupled oscillation modes
#499Micromechanical motion sensor
#500Angular velocity detector, method of detection of angular velocities using angular velocity detector, and method of fabricating angular velocity detector
#501Excitation in micromechanical devices
#502Excitation in micromechanical devices
#503Torsional rate sensor with momentum balance and mode decoupling
#504Torsional rate sensor with momentum balance and mode decoupling
#505Torsional rate sensor with momentum balance and mode decoupling
#506Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
#507Oscillating micro-mechanical sensor of angular velocity
#508Oscillating micro-mechanical sensor of angular velocity
#509Sensor having a self-test
#510Angular rate sensor with temperature compensation and vibration compensation
#511Micro angular rate sensor
#512Rotation-rate sensor
#513Sensor having integrated actuation and detection means
#514X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
#515Digital angular velocity detection device
#516Micromechanical component and method for producing same
#517Vibratory gyroscopes with resonator attachments
#518Multiple axis sensing device based on frequency modulation and method of operation
#519System, method and apparatus of a motion sensing stack
#520Non-linear analog mapper for MEMS based optical circuit switches