164594 ⎘
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects; Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
CROSSTALK COMPENSATION IN AN FM GYROSCOPE
#2AZIMUTH MEASUREMENT DEVICE
#3ANALOG DEMODULATION USING FULL-WAVE RECTIFICATION AND OVERSAMPLING ADC
#4DESIGN METHOD FOR ALL-FUSED-SILICA CAPACITIVE PLANARIZED MICRO ELECTRO-MECHANICAL SYSTEMS (MEMS) GYROSCOPE
#5METHOD AND DEVICE FOR DETECTING A SIGNAL CHARACTERISTIC OF A SENSOR SIGNAL ORIGINATING FROM A SENSOR
#6TRIAXIAL MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED PERFORMANCES
#7RESONANT MEMS DEVICE
#8SENSOR UNIT AND METHOD FOR OPERATING A SENSOR UNIT
#9THREE-AXIS GYROSCOPE
#10SYSTEMS AND METHODS FOR ESTIMATING A BIAS OF AN INERTIAL MEASUREMENT UNIT
#11GYROSCOPE ROTOR VOLTAGE HOLDING CIRCUIT FOR UNEXPECTED POWER SUPPLY REMOVAL
#12MICROELECTROMECHANICAL COUPLING DEVICE
#13DUAL AXIS ANGULAR RATE SENSOR
#14MICROELECTROMECHANICAL GYROSCOPE WITH OUT-OF-PLANE DETECTION MOVEMENT
#15COMPACT DRIVE AND SENSE BALANCED MULTI-AXIS GYROSCOPE
#16Multi-Sensor Round Robin Sensing
#17MICROELECTROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROELECTROMECHANICAL INERTIAL SENSOR
#18CONTROL CIRCUIT OF A MEMS GYROSCOPE, MEMS GYROSCOPE AND CONTROL METHOD
#19MULTISENSOR MEMS INERTIAL SENSOR GUIDANCE FOR AUTOMATIC VEHICLES
#20Vibrating Gyro Element and Gyroscope
#21APPARATUS AND METHOD FOR ADJUSTING ELASTICITY OF A SPRING-MASS SYSTEM
#22DRIVE AND SENSE BALANCED, SEMI-COUPLED 3-AXIS GYROSCOPE
#23GYROSCOPES WITH ELECTRODES FOR TUNING CROSS-AXIS SENSITIVITY
#24DRIVE AND SENSE BALANCED GYROSCOPE WITH ENHANCED VIBRATION REJECTION
#25SILICON-BASED PIEZOELECTRIC INERTIAL SENSOR UNIT
#26SENSOR SYSTEM WITH A MEMS GYROSCOPE AND METHOD FOR OPERATING A SENSOR SYSTEM WITH A MEMS GYROSCOPE
#27MEMS SENSOR AND METHOD FOR COMPENSATING FOR SYSTEMATIC MEASUREMENT DEVIATIONS IN MEMS SENSORS
#28SENSOR, SENSOR SYSTEM, AND ELECTRONIC DEVICE
#29SENSOR, SENSOR SYSTEM, AND ELECTRONIC DEVICE
#30AUTO-CALIBRATION METHOD FOR INERTIAL MEMS SENSORS
#31COMPOSITE SENSOR
#32Three-axis Gyroscope
#33INERTIAL SENSOR
#34SYMMETRIC DIFFERENTIAL TRANSDUCER
#35MEMS COMPONENT WITH UPSIDE-DOWN CHIP
#36INERTIAL SENSOR AND METHOD
#37ANGULAR RATE SENSORS
#38SENSOR
#39MULTI-MODE, MODE-MATCHED, MEMS-BASED CORIOLIS VIBRATORY GYROSCOPE
#40MULTI-MASS MEMS MOTION SENSOR
#41MEMS MOTION SENSOR AND METHOD OF MANUFACTURING
#42Gyro sensor, electronic device, and vehicle
#43MICROMECHANICAL ROTATION RATE SENSOR COMPRISING A SENSOR ELEMENT AND A METHOD FOR OPERATING A MICROMECHANICAL ROTATION RATE SENSOR COMPRISING A SENSOR ELEMENT
#44MICROMECHANICAL COMPONENT FOR A ROTATION RATE SENSOR
#45Micro-Electromechanical System
#46MICROELECTROMECHANICAL DEVICE WITH TEST STRUCTURE, TEST EQUIPMENT FOR TESTING MICROELECTROMECHANICAL DEVICES AND METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL DEVICE
#47MONOLITHICALLY-INTEGRATED CURRENT-FEEDBACK INSTRUMENTATION AMPLIFIER AND SENSING SYSTEM COMPRISING SAID AMPLIFIER
#48SYSTEM AND METHOD FOR DETERMINING A FREQUENCY AND/OR FREQUENCY CHANGE OF A DRIVE OSCILLATION OF AN INERTIAL SENSOR
#49Vibratory gyroscopes with resonator attachments
#50MEMS-TYPE INERTIAL SENSOR WITH SPECIFIC MECHANICAL LINK
#51Fully decoupled three-axis MEMS gyroscope
#52DUAL-MODE CONTROL CIRCUIT FOR MICROELECTROMECHANICAL SYSTEM GYROSCOPES
#53THREE-AXIS GYROSCOPE
#54Temporal differential sensing structure for vibrating gyroscope
#55Inertial Measurement Device And Method For Manufacturing Inertial Measurement Device
#56MEMS DEVICE
#57MEMS GYROSCOPE WITH ENHANCED ROBUSTNESS AGAINST VIBRATIONS AND REDUCED DIMENSIONS
#58SYNCHRONIZED MASS GYROSCOPE WITH FULL SYMMETRY AND TURNABILITY
#59MEMS GYROSCOPE SENSING IN-PLANE ROTATIONS
#60Optomechanical gyroscope on planar platform
#61Microelectromechanical gyroscope and method for compensating an output thermal drift in a microelectromechanical gyroscope
#62QUADRATURE TRIM VERTICAL ELECTRODES FOR YAW AXIS CORIOLIS VIBRATORY GYROSCOPE
#63Drive and sense balanced, semi-coupled 3-axis gyroscope
#64MEMS single-axis gyroscope
#65Gyro sensor, electronic device, and vehicle
#66MEMS MOTION SENSOR AND METHOD OF MANUFACTURING
#67Isotropic attenuated motion gyroscope
#68CIRCUIT FOR A MEMS GYROSCOPE AND METHOD FOR OPERATING A CORRESPONDING CIRCUIT
#69DRIVE AND SENSE STRESS RELIEF APPARATUS
#70Mounting structure of micro vibrator
#71SENSOR AND ELECTRONIC DEVICE
#72Micromachined gyroscope and electronic product
#73Round robin sensor device for processing sensor data
#74Micromechanical gyroscope and electronic device
#75Motion sensor with sigma-delta analog-to-digital converter having resistive continuous-time digital-to-analog converter feedback for improved bias instability
#76Sensor with mechanical compensation frequency anisotropy
#77Vibratory sensor with electronic balancing
#78MICROELECTROMECHANICAL GYROSCOPE WITH OUT-OF-PLANE DETECTION MOVEMENT
#79MEMS gyroscope
#80SENSOR SYSTEM AND METHOD FOR COMPENSATING FOR AN OFFSET OF AN ANGULAR RATE SIGNAL
#81MEMS gyroscope
#82Micromachined gyroscope and electronic product using same
#83Sensor system and method for securing a sensor system
#84ADVANCED CALIPER FOR A PIPE AND METHOD OF USE
#85MEMS GYROSCOPE DEVICE WITH IMPROVED HOT STARTUP AND CORRESPONDING METHOD
#86Inertial sensor sensing of vibration frequency
#87Sensor and electronic device
#88SENSOR AND ELECTRONIC DEVICE
#89Azimuth/attitude angle measuring device
#90MEMS GYROSCOPE HAVING QUADRATURE COMPENSATION ELECTRODES AND METHOD FOR COMPENSATING A QUADRATURE ERROR
#91MEMS multiaxial angular rate sensor
#92MEMS gyroscope and electronic device using same
#93Control circuit of a MEMS gyroscope, MEMS gyroscope and control method
#94Micromechanical component for a rotation rate sensor and corresponding manufacturing method
#95MEMS GYROSCOPE
#96MEMS-based rotation sensor for seismic applications and sensor units having same
#97Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array and corresponding manufacturing method
#98MEMS gyroscope having an improved rejection of the quadrature error
#99THREE-AXIS MICROELECTROMECHANICAL SYSTEM (MEMS) GYROSCOPE
#100Compensating a temperature-dependent quadrature-induced zero rate offset for a microelectromechanical gyroscope
#101Method, system, and circuit for extracting features for use in embedded artificial intelligence mechanisms
#102Microelectromechanical gyroscope having a resonant driving loop with controlled oscillation amplitude and method of controlling a microelectromechanical gyroscope
#103AEROLOGICAL SONDE AND METHOD FOR MEASURING METEOROLOGICAL CONDITIONS
#104Method for lithography process
#105Sensor array and method for operating a sensor array
#106Inertial measurement circuit, corresponding device and method
#107Inertial sensor and method for manufacturing the same
#108MEMS wave gyroscope
#109SENSING DEVICE
#110Sensor and electronic device
#111Three-axis micromachined gyroscope
#112Sensing device
#113Robust method for gyroscope drive amplitude measurement
#114Angular rate sensor based on frequency modulation and drive strategy for same
#115Method for determining, measuring and/or monitoring properties of a sensor system
#116Angular rate sensor with centrally positioned coupling structures
#117MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof
#118Three-axis rotation rate sensor including a substrate and a double rotor
#119Stillness Measurement Apparatus, System, and Method
#120Survey instrument
#121Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
#122Microelectromechanical gyroscope and method for compensating an output thermal drift in a microelectromechanical gyroscope
#123Microelectromechanical systems device including a proof mass and movable plate
#124FET BASED SENSORY SYSTEMS
#125Sensing device
#126Gyroscope
#127SENSING DEVICE
#1283-axis gyroscope with rotational vibration rejection
#129Digital demodulator and complex compensator for MEMS gyroscope
#130Isotropic attenuated motion gyroscope
#131Minimizing a delay of a capacitance-to-voltage converter of a gyroscope by including such converter within a bandpass sigma-delta analog-to-digital converter of the gyroscope
#132Gyro sensor, electronic device, and vehicle
#133Drive and sense balanced, fully-coupled 3-axis gyroscope
#134MOTION SENSOR IN MEMORY
#1353-axis gyroscope with rotational vibration rejection
#136Drive and sense stress relief apparatus
#137Stress-relief MEMS gyroscope
#138SENSOR AND ELECTRONIC DEVICE
#139Micromachined multi-axis gyroscopes with reduced stress sensitivity
#140Gyroscope with mass pairs
#141Gyroscope with self-test
#142Gyroscope with peripheral detection
#143METHOD FOR OPERATING A MICROELECTROMECHANICAL GYROSCOPE, AND GYROSCOPE
#144Micromechanical component for a yaw rate sensor and corresponding production method
#145Gyroscope with locked secondary oscillation frequency
#146MEMS gyroscope sensitivity compensation
#147Use of MEMS gyroscope for compensation of accelerometer stress induced errors
#148SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR
#149METHOD AND DEVICE FOR RIGHT-LEFT DISCRIMINATION OF A GAIT TRAJECTORY
#150MICROELECTROMECHANICAL GYROSCOPE SYSTEM
#151Driving circuit, method for driving a MEMS gyroscope and a corresponding MEMS gyroscope
#152Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor
#153Tracking upper arm movements using sensor modules attached to the hand and forearm
#154Drive and sense balanced, semi-coupled 3-axis gyroscope
#155Readout circuit for a MEMS gyroscope and method for operating such a readout circuit
#156Selective self-assembled monolayer patterning with sacrificial layer for devices
#157Microelectromechanical systems gyroscope
#158Inertial measurement apparatus and method with improved thermal and noise performance
#159Offset-cancelling capacitive MEMS gyroscope
#160Gyro sensor, electronic device, and vehicle
#161Robust method for tuning of gyroscope demodulation phase
#162Angle random walk minimization for frequency modulated gyroscopes
#163MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof
#164Continuous self-test of a gyroscope
#165Torsional oscillator micro electro mechanical systems accelerometer
#166Electro-opto-mechanical micro gyroscope
#167One-axis and two-axis rotation rate sensor
#168Sensor
#169Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units
#170Calibration system, and sensor system including the same
#171Trans impedance amplifier capacitance isolation stage
#172Positioning apparatus comprising an inertial sensor and inertial sensor temperature compensation method
#173Circuit arrangement and method for the digital correction of modulation effects in electromechanical delta-sigma modulators
#174Vibration-robust multiaxis gyroscope
#175Gyroscope with double input
#176Multiaxis gyroscope with synchronization frame
#177Balanced multiaxis gyroscope
#178High quality factor mems silicon flower-of-life vibratory gyroscope
#179MEMS device with optimized geometry for reducing the offset due to the radiometric effect
#180GYROSCOPE
#181Synchronized multi-axis gyroscope
#182Inertial sensor, electronic device, and vehicle
#183Three-axis MEMS gyroscope
#184Resonator configured to be integrated into an inertial angular sensor
#185Method for measuring a behavior of a MEMS device
#186Microelectromechanical device for detection of rotational motion
#187Piezoelectric z-axis gyroscope
#188Drive and sense balanced, fully-coupled 3-axis gyroscope
#189Resonator and device including the same
#190Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features
#191MEMS-based rotation sensor for seismic applications and sensor units having same
#192Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
#193Micromechanical z-inertial sensor
#194Yaw rate sensor and method for operating a yaw rate sensor
#195Angular rate sensor with in-phase drive and sense motion suppression
#196Piezoelectric ring gyroscope
#197Inertial sensor with single proof mass and multiple sense axis capability
#198MEMS gyroscopes with in-line springs and related systems and methods
#199Semiconductor device and semiconductor system
#200Gyroscope sensitivity calibration
#201Differential z-axis resonant accelerometry
#202Sense amplifiers for gyroscopes and related systems and methods
#203Micromechanical resonator having reduced size
#204Chip module, signal processing method, and electronic equipment
#205Method for open-loop compensation of a MEMS gyroscope
#206Microelectromechanical system (MEMS) device readout with optical directional coupler
#207Proof mass offset compensation
#208On-chip gap measurement
#209Microelectromechanical structure with enhanced rejection of acceleration noise
#210MEMS sensor with offset anchor load rejection
#211Physical quantity sensor, electronic device, and mobile body
#212Inertial sensing device
#213Micromachined multi-axis gyroscopes with reduced stress sensitivity
#214MEMS DEVICE
#215MEMS device, inertial measurement unit, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle
#216Driving circuit, method for driving a MEMS gyroscope and a corresponding MEMS gyroscope
#217Apparatuses and methods for processing a sensor signal
#218Micromechanical rotational rate sensor system and corresponding production method
#219Mems gyroscope with regulation of the mismatch between the driving and sensing frequencies
#220Micromechanical yaw rate sensor and method for operating same
#221Rotation rate sensor, method for manufacturing a rotation rate sensor
#222High quality factor MEMS silicon flower-of-life vibratory gyroscope
#223Multi-mode coriolis vibratory gyroscopes having high order rotationally symmetric mechanical structure and 32 electrodes
#224Proof mass and polysilicon electrode integrated thereon
#225ELECTROSTATIC OFFSET CORRECTION
#226Angular rate sensor with in-phase motion suppression structure
#227Piezoelectric rotational MEMS resonator
#228Piezoelectric rotational MEMS resonator
#229Concatenated suspension in a piezoelectric gyroscope
#230Piezoelectric gyroscope with transversal drive transducer
#231Micromechanical yaw rate sensor and method for the production thereof
#232Capacitive microelectromechanical accelerometer
#233MEMS gyroscope with improved rejection of a quadrature error
#234MULTI-AXIS, SINGLE-DRIVE INERTIAL DEVICE
#235MEMS Yaw-Rate Sensor
#236Micro-mechanical sensor element of angular velocity
#237Demodulator for in-phase and quadrature modulated signals, MEMS gyroscope including the same and demodulation method
#238Gyroscope
#239MEMS DEVICE WITH IN-PLANE QUADRATURE COMPENSATION
#240Deformation rejection mechanism for offset minimization of out-of-plane sensing MEMS device
#241Anchoring structure for a sensor insensitive to anchor movement
#242Systems and methods for a four-mass vibrating MEMS structure
#243Drive and sense balanced, semi-coupled 3-axis gyroscope
#244Rotational speed sensor with minimized interference movements in the driving mode
#245Micromechanical sensor
#246Multi-axis accelerometers with reduced cross-axis sensitivity
#247SINGLE-GAP SHOCK-STOP STRUCTURE AND METHODS OF MANUFACTURE FOR MICRO-MACHINED MEMS DEVICES
#248FET based sensory systems
#249INERTIAL SENSOR WITH MOTION LIMIT STRUCTURE
#250Extending the range of a MEMS gyroscope using eccentric accelerometers
#251Flexural couplers for microelectromechanical systems (MEMS) devices
#252Balanced runners synchronizing motion of masses in micromachined devices
#253MEMS GYROSCOPE HAVING 2-DEGREE-OF-FREEDOM SENSING MODE
#254SYMMETRICAL Z-AXIS MEMS GYROSCOPES
#255Microelectromechanical systems device test system and method
#256MEMS LINK MECHANISM USED FOR GYROSCOPE
#257Gyro sensor, method of manufacturing gyro sensor, electronic apparatus, and vehicle
#258Inertial measurement unit and diagnostic system
#259MULTIPLE DEGREE OF FREEDOM MEMS SENSOR CHIP AND METHOD FOR FABRICATING THE SAME
#260Vibration gyro having bias correcting function, and method of using vibration gyro
#261Quad proof mass MEMS gyroscope with outer couplers and related methods
#262MEMS gyroscope with frequency regulation and electrostatic cancellation of the quadrature error
#263Angular velocity acquisition device
#264Continuous monitoring of drive amplitude in vibrating microelectromechanical gyroscopes
#265Angular rate sensor
#266Micromechanical sensor and method for producing a micromechanical sensor
#267Microelectromechanical structure with enhanced rejection of acceleration noise
#268Gyroscope self test by applying rotation on Coriolis sense mass
#269Compensating circuit for a microelectromechanical (MEMS) resonator
#270Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
#271Quadrature compensation method for MEMS gyroscopes and a gyroscope sensor
#272Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
#273MEMS gyro
#274MEMS-based rotation sensor for seismic applications and sensor units having same
#275Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features
#276ANGULAR VELOCITY DETECTION CIRCUIT, ANGULAR VELOCITY DETECTION DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
#277Electrode for a microelectromechanical device
#278Integrated inertial sensing device
#279MEMS sensor with voltage sensing of movable mass
#280Circuitry and method for generating a discrete-time high voltage
#281MEMS DEVICE WITH CAPACITANCE ENHANCEMENT ON QUADRATURE COMPENSATION ELECTRODE
#282Electronic device having a bonding wire connected to a terminal at an alloyed portion
#283Multi-mass MEMS motion sensor
#284Circular system and method for the digital correction of modulation effects in eletromechanical delta-sigma modulators
#285Gyroscope structure and gyroscope
#286Integrated MEMS inertial sensing device
#287Three-axis micro gyroscope with ring spring
#288Oscillator, electronic device, and moving object
#289Physical quantity detection system, electronic apparatus, and moving object
#290Microelectromechanical structure with enhanced rejection of acceleration noise
#291Method for manufacturing a MEMS element
#292Micro electro mechanical system
#293Reducing resonance peaks and drive tones from a micro-electro-mechanical system gyroscope response
#294Gyratory sensing system to enhance wearable device user experience via HMI extension
#295Micro-hemispherical resonators and methods of making the same
#296ROTATION RATE SENSOR AND METHOD FOR OPERATING A ROTATION RATE SENSOR WITH CIRCULAR DRIVE
#297Vibrating micro-mechanical sensor of angular velocity
#298Phase-based measurement and control of a gyroscope
#299Microelectromechanical gyroscope with compensation of quadrature error drift
#300System, apparatus, and method for resonator and coriolis axis control in vibratory gyroscopes