ClassID:

164598

G01C19/574 - CPC Classification

Classification description:

Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects; Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis; Structural details or topology the devices having two sensing masses in anti-phase motion

Sub-classes:
Recent Application in this class:
#1
20250277662
2025-09-04

Single Body Multi-mode Mechanical Resonator Accelerometer

#2
20250002331
2025-01-02

COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES

#3
20240271932
2024-08-15

MEMS GYROSCOPE AND ELECTRONIC PRODUCT TECHNICAL FIELD

#4
20240191994
2024-06-13

INERTIAL SENSOR ARCHITECTURE WITH BALANCED SENSE MODE AND IMPROVED IMMUNITY TO QUADRATURE EFFECTS

#5
20240102805
2024-03-28

Single body multi-mode mechanical resonator accelerometer

#6
20230366701
2023-11-16

METHOD FOR CALIBRATING THE DIFFERENCE IN STIFFNESS AND/OR QUADRATURE OF A VIBRATING INERTIAL SENSOR

#7
20230251107
2023-08-10

Method for calibrating a vibrating inertial sensor

#8
20230251091
2023-08-10

Vibratory sensor with electronic balancing

#9
20230184552
2023-06-15

COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS

#10
20230152098
2023-05-18

Double-lever coupling

#11
20220404150
2022-12-22

Frequency modulation MEMS triaxial gyroscope

#12
20220252397
2022-08-11

MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof

#13
20220178693
2022-06-09

Synchronized four mass gyroscope

#14
20220155072
2022-05-19

Physical quantity sensor

#15
20220057210
2022-02-24

3-axis gyroscope with rotational vibration rejection

#16
20210381834
2021-12-09

3-axis gyroscope with rotational vibration rejection

#17
20210164781
2021-06-03

Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle

#18
20200400434
2020-12-24

MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof

#19
20200370888
2020-11-26

One-axis and two-axis rotation rate sensor

#20
20200346920
2020-11-05

Systems and methods for bias suppression in a non-degenerate MEMS sensor

#21
20200263987
2020-08-20

Balanced multiaxis gyroscope

#22
20200166539
2020-05-28

Inertial sensor, electronic device, and vehicle

#23
20200141732
2020-05-07

MULTI-AXIS GYROSCOPE WITH REDUCED BIAS DRIFT

#24
20200109945
2020-04-09

Piezoelectric z-axis gyroscope

#25
20200096339
2020-03-26

Frequency modulation MEMS triaxial gyroscope

#26
20200048077
2020-02-13

Methods for increasing aspect ratios in comb structures

#27
20200025567
2020-01-23

Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate

#28
20190346265
2019-11-14

Synchronization structure for gyroscope

#29
20190271544
2019-09-05

Angular velocity sensor, sensor element, and multi-axis angular velocity sensor

#30
20190212144
2019-07-11

Proof mass offset compensation

#31
20190170514
2019-06-06

Vibrating-mass gyroscope system

#32
20190154446
2019-05-23

Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle

#33
20180306581
2018-10-25

Physical quantity sensor, method for manufacturing physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle

#34
20180306580
2018-10-25

MEMS gyroscope with improved rejection of a quadrature error

#35
20180283866
2018-10-04

Stacked balanced resonators

#36
20180266822
2018-09-20

Gyroscope

#37
20180266821
2018-09-20

Vibratory gyroscope including a plurality of inertial bodies

#38
20180238689
2018-08-23

Anchoring structure for a sensor insensitive to anchor movement

#39
20180238688
2018-08-23

Gyro sensor, electronic apparatus, and vehicle

#40
20180231384
2018-08-16

Systems and methods for a four-mass vibrating MEMS structure

#41
20180231381
2018-08-16

Dual-axis ultra-robust rotation rate sensor for automotive applications

#42
20180195863
2018-07-12

Rotation rate sensor with multiple evaluation during operation at several frequencies

#43
20180172447
2018-06-21

Synchronized mass gyroscope

#44
20180172446
2018-06-21

Flexural couplers for microelectromechanical systems (MEMS) devices

#45
20180172445
2018-06-21

Balanced runners synchronizing motion of masses in micromachined devices

#46
20180167053
2018-06-14

Vibration device

#47
20180164100
2018-06-14

Vibration device

#48
20180135984
2018-05-17

SYMMETRICAL Z-AXIS MEMS GYROSCOPES

#49
20180128614
2018-05-10

Rotation rate sensor and method

#50
20180118557
2018-05-03

Systems and methods for bias suppression in a non-degenerate MEMS sensor

#51
20180112981
2018-04-26

Frequency modulation MEMS triaxial gyroscope

#52
20180094929
2018-04-05

MEMS gyroscope having a high stability with respect to temperature and humidity variations

#53
20180074090
2018-03-15

MULTIPLE DEGREE OF FREEDOM MEMS SENSOR CHIP AND METHOD FOR FABRICATING THE SAME

#54
20180038692
2018-02-08

MEMS gyroscope with frequency regulation and electrostatic cancellation of the quadrature error

#55
20180031373
2018-02-01

Vibrating-mass gyroscope systems and method

#56
20170314960
2017-11-02

Gyroscope self test by applying rotation on Coriolis sense mass

#57
20170284803
2017-10-05

Quadrature compensation method for MEMS gyroscopes and a gyroscope sensor

#58
20170268879
2017-09-21

MEMS gyro

#59
20170254833
2017-09-07

Angular velocity detection circuit, angular velocity detection device, electronic apparatus, and moving object

#60
20170233246
2017-08-17

Physical quantity sensor

#61
20170184400
2017-06-29

Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate

#62
20170167878
2017-06-15

MEMS anti-phase vibratory gyroscope

#63
20170131100
2017-05-11

Angular velocity sensor

#64
20170089702
2017-03-30

Gyroscope structure and gyroscope

#65
20170074655
2017-03-16

Physical quantity sensor, electronic device, and moving object

#66
20170074654
2017-03-16

Oscillator, electronic device, and moving object

#67
20170016928
2017-01-19

OMM rotation rate sensor including a drive, without stationary electrodes

#68
20170016727
2017-01-19

Sensor device

#69
20160377434
2016-12-29

Systems and methods for a time-based optical pickoff for MEMS sensors

#70
20160370182
2016-12-22

MEMS device with common mode rejection structure

#71
20160356599
2016-12-08

Sensor device and method for operating a sensor device having at least one seismic mass

#72
20160327391
2016-11-10

Sensor module, and sensor chip and processing circuit chip used therefor

#73
20160313123
2016-10-27

Microelectromechanical gyroscope with compensation of quadrature error drift

#74
20160305780
2016-10-20

Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device

#75
20160290803
2016-10-06

Sensor including moving masses and means for detecting relative movements of the masses

#76
20160273916
2016-09-22

Inertial sensor with nested seismic masses and method for manufacturing such a sensor

#77
20160258753
2016-09-08

Gyro sensor, electronic device, mobile apparatus, and manufacturing method of gyro sensor

#78
20160231118
2016-08-11

Vibrating-mass gyroscope systems and method

#79
20160223330
2016-08-04

Rotation rate sensor and method for operating a rotation rate sensor

#80
20160195395
2016-07-07

Angular velocity sensor

#81
20160109236
2016-04-21

Yaw-rate sensor

#82
20160091528
2016-03-31

Microelectromechanical device incorporating a gyroscope and an accelerometer

#83
20160069685
2016-03-10

Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body

#84
20160069684
2016-03-10

Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body

#85
20160069683
2016-03-10

Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body

#86
20160069682
2016-03-10

Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate

#87
20160047654
2016-02-18

Rotation rate sensor

#88
20160025492
2016-01-28

MEMS gyroscope for determining rotational movements about an x, y, and/or z axis

#89
20160003617
2016-01-07

MEMS sensors and methods for detecting rotation rates

#90
20150377621
2015-12-31

MEMS angular inertial sensor operating in tuning fork mode

#91
20150330784
2015-11-19

Shock-robust integrated multi-axis MEMS gyroscope

#92
20150330783
2015-11-19

Systems and methods for MEMS gyroscope shock robustness

#93
20150316377
2015-11-05

Angular rate sensor

#94
20150308828
2015-10-29

Gyro sensor and composite sensor comprising gyro sensor

#95
20150300821
2015-10-22

Angular velocity sensor, electronic apparatus, and mobile object

#96
20150300820
2015-10-22

Angular velocity sensor

#97
20150285634
2015-10-08

Angular velocity detection element

#98
20150276408
2015-10-01

Yaw-rate sensor

#99
20150253139
2015-09-10

Angular velocity sensor

#100
20150211854
2015-07-30

Gyroscope structure and gyroscope

#101
20150168145
2015-06-18

Modal decoupling via flexure-based transmissions as applied to a micromachined tuning fork gyroscope

#102
20150128700
2015-05-14

Vibration-resistant rotation rate sensor

#103
20150122021
2015-05-07

Inertial force sensor

#104
20150116915
2015-04-30

Manufacturing method of electronic device, electronic device, electronic apparatus, moving object, and lid body

#105
20150114112
2015-04-30

Microelectromechanical gyroscope with compensation of quadrature error drift

#106
20150053001
2015-02-26

Micromechanical component and method for producing a micromechanical component

#107
20150041927
2015-02-12

MEMS device with differential vertical sense electrodes

#108
20150033849
2015-02-05

MEMS device mechanism enhancement for robust operation through severe shock and acceleration

#109
20140374849
2014-12-25

Angular rate sensor with quadrature error compensation

#110
20140373628
2014-12-25

Yaw rate sensor having three sensitive axes and method for manufacturing a yaw rate sensor

#111
20140373627
2014-12-25

Rotation rate sensor and method for operating a rotation rate sensor

#112
20140366631
2014-12-18

Micromachined gyroscope including a guided mass system

#113
20140326070
2014-11-06

Yaw-rate sensor

#114
20140311247
2014-10-23

Multi-axis MEMS rate sensor device

#115
20140299947
2014-10-09

Inertial angular sensor of balanced MEMS type and method for balancing such a sensor

#116
20140245831
2014-09-04

Gyro sensor with spring structures to suppress influence of the same phase mode on a vibration mode

#117
20140144231
2014-05-29

Inertial sensor and method of levitation effect compensation

#118
20140090469
2014-04-03

Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device

#119
20140026662
2014-01-30

Micromachined gyroscope including a guided mass system

#120
20130340525
2013-12-26

Integrated inertial sensor and pressure sensor, and forming method therefor

#121
20130333470
2013-12-19

Planar Coriolis gyroscope

#122
20130333469
2013-12-19

Method for operating and/or for measuring a micromechanical device, and micromechanical device

#123
20130298670
2013-11-14

Vibration gyro having bias correcting function

#124
20130285172
2013-10-31

Combined sensor

#125
20130283908
2013-10-31

MEMS gyroscopes with reduced errors

#126
20130239683
2013-09-19

Angular velocity sensor

#127
20130239681
2013-09-19

Angular velocity sensor

#128
20130233048
2013-09-12

Gyroscope self test by applying rotation on coriolis sense mass

#129
20130192363
2013-08-01

Vibration robust x-axis ring gyro transducer

#130
20130125649
2013-05-23

Microelectromechanical device incorporating a gyroscope and an accelerometer

#131
20130105921
2013-05-02

Microsystem device and methods for fabricating the same

#132
20130098152
2013-04-25

Inertia sensor

#133
20130081465
2013-04-04

Inertial sensor and angular velocity detection method using the same

#134
20130068018
2013-03-21

Micromachined gyroscope including a guided mass system

#135
20130057354
2013-03-07

Angular velocity detection apparatus

#136
20130042683
2013-02-21

Vibrating structure gyrometer with at least one tuning fork

#137
20120312094
2012-12-13

Angular speed sensor for detecting angular speed

#138
20120291549
2012-11-22

Extension-mode angular velocity sensor

#139
20120291548
2012-11-22

Gyro sensor and electronic device

#140
20120279301
2012-11-08

Double-axial, shock-resistant rotation rate sensor with nested, linearly oscillating seismic elements

#141
20120260737
2012-10-18

Vibrating structure gyrometer with at least one tuning fork

#142
20120227489
2012-09-13

Angular velocity sensor

#143
20120222483
2012-09-06

Spring structure, resonator, resonator array and sensor

#144
20120210788
2012-08-23

Double-axle, shock-resistant rotation rate sensor with linear and rotary seismic elements

#145
20120167682
2012-07-05

Angular velocity sensor

#146
20120125098
2012-05-24

Rotational rate sensor having intermeshing Coriolis elements

#147
20120060604
2012-03-15

Yaw-rate sensor

#148
20120048016
2012-03-01

Double-axis rotation rate sensor

#149
20120017678
2012-01-26

Method for detecting accelerations and rotation rates, and MEMS sensor

#150
20120017677
2012-01-26

Micromechanical Coriolis rate of rotation sensor

#151
20120013355
2012-01-19

Compound sensor

#152
20110308314
2011-12-22

Electromechanic microsensor

#153
20110303007
2011-12-15

MEMS gyroscope for detecting rotational motions about an X-, Y-, and/or Z-axis

#154
20110283796
2011-11-24

Inertial force sensor

#155
20110271760
2011-11-10

Inertial force sensor

#156
20110265567
2011-11-03

Inertial force sensor and detecting element used for same

#157
20110232384
2011-09-29

Laminated structure provided with movable portion

#158
20110179869
2011-07-28

Angular velocity sensor element, angular velocity sensor and angular velocity sensor unit both using angular velocity sensor element, and signal detecting method for angular velocity sensor unit

#159
20110179866
2011-07-28

Compensating frequency mismatch in gyroscopes

#160
20110094301
2011-04-28

Microgyroscope

#161
20110086455
2011-04-14

Gyroscope

#162
20110079079
2011-04-07

Yaw rate sensor, yaw rate sensor system, and method for operating a yaw rate sensor

#163
20110061460
2011-03-17

Extension-mode angular velocity sensor

#164
20110041603
2011-02-24

Yaw rate sensor and method for operating a yaw rate sensor

#165
20100244819
2010-09-30

MEMS gyroscope magnetic sensitivity reduction

#166
20100225500
2010-09-09

Method for controlling a device and a device for controlling the device

#167
20100218604
2010-09-02

Angular velocity sensor

#168
20100206071
2010-08-19

Drive frequency tunable MEMS gyroscope

#169
20100186507
2010-07-29

Micromechanical rotation rate sensor with a coupling bar and suspension spring elements for quadrature suppression

#170
20100186506
2010-07-29

Gyrometer in surface technology, with out-of-plane detection by strain gauge

#171
20100186505
2010-07-29

Rotation rate sensor and method for operating a rotation rate sensor

#172
20100139399
2010-06-10

Rotation rate sensor

#173
20100132460
2010-06-03

X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging

#174
20100127715
2010-05-27

SEMICONDUCTOR PHYSICAL QUANTITY SENSOR AND CONTROL DEVICE USING THE SAME

#175
20100122577
2010-05-20

EVALUATION ELECTRONICS SYSTEM FOR A ROTATION-RATE SENSOR

#176
20100122576
2010-05-20

Rotation rate sensor

#177
20100116050
2010-05-13

Coriolis gyro

#178
20100037690
2010-02-18

Rotational speed sensor having a coupling bar

#179
20100005884
2010-01-14

High performance sensors and methods for forming the same

#180
20090320594
2009-12-31

INERTIA FORCE SENSOR

#181
20090272189
2009-11-05

Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same

#182
20090249873
2009-10-08

Oscillating mass resonator

#183
20090139342
2009-06-04

DEVICE WITH DETECTION BY SUSPENDED PIEZORESISTIVE STRAIN GAUGE COMPRISING A STRAIN AMPLIFIER CELL

#184
20090090200
2009-04-09

Gyroscope

#185
20090071247
2009-03-19

Composite sensor and acceleration sensor

#186
20090064783
2009-03-12

INERTIAL FORCE SENSOR

#187
20080314148
2008-12-25

Piezo-resistive detection resonant device made using surface technologies

#188
20080229822
2008-09-25

Angular velocity measuring device

#189
20080115579
2008-05-22

X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging

#190
20070222011
2007-09-27

Resonant inertial microsensor with variable thickness produced by surface engineering

#191
20060230830
2006-10-19

Cross-quad and vertically coupled inertial sensors

#192
20060219006
2006-10-05

Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging

#193
20060117849
2006-06-08

Vibrating rate gyro with slaving of detection frequency to excitation frequency

#194
20060032306
2006-02-16

Micro-gyrometer with frequency detection

#195
20050229705
2005-10-20

Inertial sensor with a linear array of sensor elements

#196
20050229703
2005-10-20

Coupling apparatus for inertial sensors

#197
20050081630
2005-04-21

Inertial micromechanical tuning-fork gyrometer