164598 ⎘
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects; Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis; Structural details or topology the devices having two sensing masses in anti-phase motion
Sub-classes:Single Body Multi-mode Mechanical Resonator Accelerometer
#2COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES
#3MEMS GYROSCOPE AND ELECTRONIC PRODUCT TECHNICAL FIELD
#4INERTIAL SENSOR ARCHITECTURE WITH BALANCED SENSE MODE AND IMPROVED IMMUNITY TO QUADRATURE EFFECTS
#5Single body multi-mode mechanical resonator accelerometer
#6METHOD FOR CALIBRATING THE DIFFERENCE IN STIFFNESS AND/OR QUADRATURE OF A VIBRATING INERTIAL SENSOR
#7Method for calibrating a vibrating inertial sensor
#8Vibratory sensor with electronic balancing
#9COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS
#10Double-lever coupling
#11Frequency modulation MEMS triaxial gyroscope
#12MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof
#13Synchronized four mass gyroscope
#14Physical quantity sensor
#153-axis gyroscope with rotational vibration rejection
#163-axis gyroscope with rotational vibration rejection
#17Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#18MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof
#19One-axis and two-axis rotation rate sensor
#20Systems and methods for bias suppression in a non-degenerate MEMS sensor
#21Balanced multiaxis gyroscope
#22Inertial sensor, electronic device, and vehicle
#23MULTI-AXIS GYROSCOPE WITH REDUCED BIAS DRIFT
#24Piezoelectric z-axis gyroscope
#25Frequency modulation MEMS triaxial gyroscope
#26Methods for increasing aspect ratios in comb structures
#27Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate
#28Synchronization structure for gyroscope
#29Angular velocity sensor, sensor element, and multi-axis angular velocity sensor
#30Proof mass offset compensation
#31Vibrating-mass gyroscope system
#32Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#33Physical quantity sensor, method for manufacturing physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle
#34MEMS gyroscope with improved rejection of a quadrature error
#35Stacked balanced resonators
#36Gyroscope
#37Vibratory gyroscope including a plurality of inertial bodies
#38Anchoring structure for a sensor insensitive to anchor movement
#39Gyro sensor, electronic apparatus, and vehicle
#40Systems and methods for a four-mass vibrating MEMS structure
#41Dual-axis ultra-robust rotation rate sensor for automotive applications
#42Rotation rate sensor with multiple evaluation during operation at several frequencies
#43Synchronized mass gyroscope
#44Flexural couplers for microelectromechanical systems (MEMS) devices
#45Balanced runners synchronizing motion of masses in micromachined devices
#46Vibration device
#47Vibration device
#48SYMMETRICAL Z-AXIS MEMS GYROSCOPES
#49Rotation rate sensor and method
#50Systems and methods for bias suppression in a non-degenerate MEMS sensor
#51Frequency modulation MEMS triaxial gyroscope
#52MEMS gyroscope having a high stability with respect to temperature and humidity variations
#53MULTIPLE DEGREE OF FREEDOM MEMS SENSOR CHIP AND METHOD FOR FABRICATING THE SAME
#54MEMS gyroscope with frequency regulation and electrostatic cancellation of the quadrature error
#55Vibrating-mass gyroscope systems and method
#56Gyroscope self test by applying rotation on Coriolis sense mass
#57Quadrature compensation method for MEMS gyroscopes and a gyroscope sensor
#58MEMS gyro
#59Angular velocity detection circuit, angular velocity detection device, electronic apparatus, and moving object
#60Physical quantity sensor
#61Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate
#62MEMS anti-phase vibratory gyroscope
#63Angular velocity sensor
#64Gyroscope structure and gyroscope
#65Physical quantity sensor, electronic device, and moving object
#66Oscillator, electronic device, and moving object
#67OMM rotation rate sensor including a drive, without stationary electrodes
#68Sensor device
#69Systems and methods for a time-based optical pickoff for MEMS sensors
#70MEMS device with common mode rejection structure
#71Sensor device and method for operating a sensor device having at least one seismic mass
#72Sensor module, and sensor chip and processing circuit chip used therefor
#73Microelectromechanical gyroscope with compensation of quadrature error drift
#74Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device
#75Sensor including moving masses and means for detecting relative movements of the masses
#76Inertial sensor with nested seismic masses and method for manufacturing such a sensor
#77Gyro sensor, electronic device, mobile apparatus, and manufacturing method of gyro sensor
#78Vibrating-mass gyroscope systems and method
#79Rotation rate sensor and method for operating a rotation rate sensor
#80Angular velocity sensor
#81Yaw-rate sensor
#82Microelectromechanical device incorporating a gyroscope and an accelerometer
#83Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body
#84Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body
#85Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body
#86Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate
#87Rotation rate sensor
#88MEMS gyroscope for determining rotational movements about an x, y, and/or z axis
#89MEMS sensors and methods for detecting rotation rates
#90MEMS angular inertial sensor operating in tuning fork mode
#91Shock-robust integrated multi-axis MEMS gyroscope
#92Systems and methods for MEMS gyroscope shock robustness
#93Angular rate sensor
#94Gyro sensor and composite sensor comprising gyro sensor
#95Angular velocity sensor, electronic apparatus, and mobile object
#96Angular velocity sensor
#97Angular velocity detection element
#98Yaw-rate sensor
#99Angular velocity sensor
#100Gyroscope structure and gyroscope
#101Modal decoupling via flexure-based transmissions as applied to a micromachined tuning fork gyroscope
#102Vibration-resistant rotation rate sensor
#103Inertial force sensor
#104Manufacturing method of electronic device, electronic device, electronic apparatus, moving object, and lid body
#105Microelectromechanical gyroscope with compensation of quadrature error drift
#106Micromechanical component and method for producing a micromechanical component
#107MEMS device with differential vertical sense electrodes
#108MEMS device mechanism enhancement for robust operation through severe shock and acceleration
#109Angular rate sensor with quadrature error compensation
#110Yaw rate sensor having three sensitive axes and method for manufacturing a yaw rate sensor
#111Rotation rate sensor and method for operating a rotation rate sensor
#112Micromachined gyroscope including a guided mass system
#113Yaw-rate sensor
#114Multi-axis MEMS rate sensor device
#115Inertial angular sensor of balanced MEMS type and method for balancing such a sensor
#116Gyro sensor with spring structures to suppress influence of the same phase mode on a vibration mode
#117Inertial sensor and method of levitation effect compensation
#118Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device
#119Micromachined gyroscope including a guided mass system
#120Integrated inertial sensor and pressure sensor, and forming method therefor
#121Planar Coriolis gyroscope
#122Method for operating and/or for measuring a micromechanical device, and micromechanical device
#123Vibration gyro having bias correcting function
#124Combined sensor
#125MEMS gyroscopes with reduced errors
#126Angular velocity sensor
#127Angular velocity sensor
#128Gyroscope self test by applying rotation on coriolis sense mass
#129Vibration robust x-axis ring gyro transducer
#130Microelectromechanical device incorporating a gyroscope and an accelerometer
#131Microsystem device and methods for fabricating the same
#132Inertia sensor
#133Inertial sensor and angular velocity detection method using the same
#134Micromachined gyroscope including a guided mass system
#135Angular velocity detection apparatus
#136Vibrating structure gyrometer with at least one tuning fork
#137Angular speed sensor for detecting angular speed
#138Extension-mode angular velocity sensor
#139Gyro sensor and electronic device
#140Double-axial, shock-resistant rotation rate sensor with nested, linearly oscillating seismic elements
#141Vibrating structure gyrometer with at least one tuning fork
#142Angular velocity sensor
#143Spring structure, resonator, resonator array and sensor
#144Double-axle, shock-resistant rotation rate sensor with linear and rotary seismic elements
#145Angular velocity sensor
#146Rotational rate sensor having intermeshing Coriolis elements
#147Yaw-rate sensor
#148Double-axis rotation rate sensor
#149Method for detecting accelerations and rotation rates, and MEMS sensor
#150Micromechanical Coriolis rate of rotation sensor
#151Compound sensor
#152Electromechanic microsensor
#153MEMS gyroscope for detecting rotational motions about an X-, Y-, and/or Z-axis
#154Inertial force sensor
#155Inertial force sensor
#156Inertial force sensor and detecting element used for same
#157Laminated structure provided with movable portion
#158Angular velocity sensor element, angular velocity sensor and angular velocity sensor unit both using angular velocity sensor element, and signal detecting method for angular velocity sensor unit
#159Compensating frequency mismatch in gyroscopes
#160Microgyroscope
#161Gyroscope
#162Yaw rate sensor, yaw rate sensor system, and method for operating a yaw rate sensor
#163Extension-mode angular velocity sensor
#164Yaw rate sensor and method for operating a yaw rate sensor
#165MEMS gyroscope magnetic sensitivity reduction
#166Method for controlling a device and a device for controlling the device
#167Angular velocity sensor
#168Drive frequency tunable MEMS gyroscope
#169Micromechanical rotation rate sensor with a coupling bar and suspension spring elements for quadrature suppression
#170Gyrometer in surface technology, with out-of-plane detection by strain gauge
#171Rotation rate sensor and method for operating a rotation rate sensor
#172Rotation rate sensor
#173X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
#174SEMICONDUCTOR PHYSICAL QUANTITY SENSOR AND CONTROL DEVICE USING THE SAME
#175EVALUATION ELECTRONICS SYSTEM FOR A ROTATION-RATE SENSOR
#176Rotation rate sensor
#177Coriolis gyro
#178Rotational speed sensor having a coupling bar
#179High performance sensors and methods for forming the same
#180INERTIA FORCE SENSOR
#181Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same
#182Oscillating mass resonator
#183DEVICE WITH DETECTION BY SUSPENDED PIEZORESISTIVE STRAIN GAUGE COMPRISING A STRAIN AMPLIFIER CELL
#184Gyroscope
#185Composite sensor and acceleration sensor
#186INERTIAL FORCE SENSOR
#187Piezo-resistive detection resonant device made using surface technologies
#188Angular velocity measuring device
#189X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
#190Resonant inertial microsensor with variable thickness produced by surface engineering
#191Cross-quad and vertically coupled inertial sensors
#192Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
#193Vibrating rate gyro with slaving of detection frequency to excitation frequency
#194Micro-gyrometer with frequency detection
#195Inertial sensor with a linear array of sensor elements
#196Coupling apparatus for inertial sensors
#197Inertial micromechanical tuning-fork gyrometer