164599 ⎘
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects; Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis; Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
MECHANICALLY AMPLIFIED HIGH-PRECISION, HIGH-STABILITY ANGULAR RATE SENSORS
#2COMPACT DRIVE AND SENSE BALANCED MULTI-AXIS GYROSCOPE
#3MICROELECTROMECHANICAL GYROSCOPE WITH FULLY DIFFERENTIAL STRUCTURE AND PITCH/ROLL SENSING
#4GYROSCOPE WITH ENHANCED SENSITIVITY
#5DRIVE AND SENSE BALANCED, SEMI-COUPLED 3-AXIS GYROSCOPE
#6FULLY DECOUPLED THREE-AXIS MEMS GYROSCOPE
#7PHYSICAL QUANTITY SENSOR, COMPOSITE SENSOR, INERTIAL MEASUREMENT UNIT, PORTABLE ELECTRONIC APPARATUS, ELECTRONIC APPARATUS, AND VEHICLE
#8MICRO-MECHANICAL GYROSCOPE AND ELECTRONIC PRODUCT
#9Angular Velocity Sensor
#10OPERATOR DEVICE AND METHOD FOR OPERATING A CAPACITIVE SENSOR
#11MICRO-ELECTRO-MECHANICAL DEVICE
#12METHOD FOR CORRECTING THE MEASUREMENT FROM A VIBRATING ANGULAR INERTIAL SENSOR
#13Inertial navigation sensor with reduced footprint
#14Drive and sense balanced, semi-coupled 3-axis gyroscope
#15Three-axis MEMS gyroscope
#16Micromachined gyroscope and electronic product
#17MEMS gyroscope for three-axis detection
#18Physical quantity sensor, composite sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#19MEMS GYROSCOPE
#20Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array and corresponding manufacturing method
#21Frequency modulation MEMS triaxial gyroscope
#22Angular rate sensor based on frequency modulation and drive strategy for same
#23Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
#243-axis gyroscope with rotational vibration rejection
#253-axis gyroscope with rotational vibration rejection
#26Gyroscope with mass pairs
#27Multiaxis gyroscope with supplementary masses
#28Gyroscope with peripheral detection
#29Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor
#30Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#31Drive and sense balanced, semi-coupled 3-axis gyroscope
#32SENSOR
#33Rotation-rate sensor, method for producing a rotation-rate sensor
#34One-axis and two-axis rotation rate sensor
#35Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units
#36Systems and methods for bias suppression in a non-degenerate MEMS sensor
#37Vibration type angular velocity sensor
#38Multiaxis gyroscope with synchronization frame
#39Configuration to reduce non-linear motion
#40MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
#41MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
#42Yaw rate gyroscope robust to linear and angular acceleration
#43Necrosis inhibitors
#44Inertial sensor, electronic device, and vehicle
#45MICROMECHANICAL COMPONENT
#46Microelectromechanical gyroscope for sensing angular rate and method of sensing angular rate
#47Frequency modulation MEMS triaxial gyroscope
#48Out-of-plane sensing gyroscope robust to external acceleration and rotation
#49Vibration type angular velocity sensor with piezoelectric film
#50Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
#51Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate
#52MEMS gyroscopes with in-line springs and related systems and methods
#53Angular velocity sensor, sensor element, and multi-axis angular velocity sensor
#54Sensor
#55Microelectromechanical structure with enhanced rejection of acceleration noise
#56Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#57Physical Quantity Sensor, Inertial Measurement Device, Vehicle Positioning Device, Portable Electronic Apparatus, Electronic Apparatus, And Vehicle
#58Physical quantity sensor, inertia measurement device, vehicle positioning device, electronic apparatus, and vehicle
#59Physical quantity sensor, inertia measurement device, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle
#60PHYSICAL QUANTITY SENSOR
#61Micromechanical rotational rate sensor system and corresponding production method
#62Micromechanical yaw rate sensor and method for operating same
#63Rotation rate sensor, method for manufacturing a rotation rate sensor
#64SENSOR
#65Angular rate sensor with in-phase motion suppression structure
#66Silicon-based micro-machined vibratory gyroscope with an I-shaped structure
#67Mobile mass suspension system comprising means of connecting the mobile mass with optimised linearity
#68Piezoelectric rotational MEMS resonator
#69Piezoelectric rotational MEMS resonator
#70Concatenated suspension in a piezoelectric gyroscope
#71Piezoelectric gyroscope with transversal drive transducer
#72Micromechanical yaw rate sensor and method for the production thereof
#73MEMS Yaw-Rate Sensor
#74Micro-mechanical sensor element of angular velocity
#75Physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle
#76Out-of-plane sensing gyroscope robust to external acceleration and rotation
#77Gyroscope
#78Deformation rejection mechanism for offset minimization of out-of-plane sensing MEMS device
#79Systems and methods for a four-mass vibrating MEMS structure
#80Dual-axis ultra-robust rotation rate sensor for automotive applications
#81MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
#82Drive and sense balanced, semi-coupled 3-axis gyroscope
#83MOTION MEASUREMENT DEVICES AND METHODS FOR MEASURING MOTION
#84Rotational speed sensor with minimized interference movements in the driving mode
#85Rotation rate sensor with multiple evaluation during operation at several frequencies
#86INERTIAL SENSOR WITH MOTION LIMIT STRUCTURE
#87Synchronized mass gyroscope
#88Flexural couplers for microelectromechanical systems (MEMS) devices
#89Vibration device
#90INERTIA SENSOR
#91MEMS LINK MECHANISM USED FOR GYROSCOPE
#92Systems and methods for bias suppression in a non-degenerate MEMS sensor
#93Gyro sensor, method of manufacturing gyro sensor, electronic apparatus, and vehicle
#94Frequency modulation MEMS triaxial gyroscope
#95Microelectromechanical gyroscope for sensing angular rate and method of sensing angular rate
#96Configuration to reduce non-linear motion
#97Method for operating a rotation rate sensor using different frequencies
#98Vibration and shock robust gyroscope
#99MEMS gyroscope device
#100Microelectromechanical structure with enhanced rejection of acceleration noise
#101Inertial force sensor
#102Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
#103Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
#104MEMS gyro
#105DRIVE CIRCUIT, ANGULAR VELOCITY DETECTION DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
#106Yaw rate gyroscope robust to linear and angular acceleration
#107MEMS anti-phase vibratory gyroscope
#108Microelectromechanical gyroscope for sensing angular rate and method of sensing angular rate
#109Microelectromechanical structure with enhanced rejection of acceleration noise
#110VIBRATION ANGULAR VELOCITY SENSOR
#111Integrated microelectromechanical gyroscope with improved driving structure
#112Multiaxial rotation rate sensor including a split central rotor
#113MEMS device with common mode rejection structure
#114Configuration to reduce non-linear motion
#115Sensor device and method for operating a sensor device having at least one seismic mass
#116Vibrating micro-mechanical sensor of angular velocity
#117Microelectromechanical gyroscope with compensation of quadrature error drift
#118Three axis gyroscope
#119Angular velocity detection element, angular velocity detection device, electronic apparatus, and moving object
#120MEMS anti-phase vibratory gyroscope
#121Micromechanical sensor of angular velocity
#122Micromechanical sensor of angular velocity
#123Angular velocity sensor element and angular velocity sensor using same
#124Micro-gyroscope for detecting motions
#125Micromechanical coriolis rate of rotation sensor
#126MEMS balanced inertial angular sensor and method for balancing such a sensor
#127MEMS-sensor
#128Yaw-rate sensor
#129Performance improvement of MEMS devices
#130Fully balanced micro-machined inertial sensor
#131Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate
#132Physical quantity sensor, electronic device, and mobile body
#133Micro-gyroscope and method for operating a micro-gyroscope
#134Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
#135MEMS sensors and methods for detecting rotation rates
#136Resonator element, method for manufacturing resonator element, resonator, gyro sensor, electronic apparatus, and moving object
#137Systems and methods for extracting system parameters from nonlinear periodic signals from sensors
#138Systems and methods for extracting system parameters from nonlinear periodic signals from sensors
#139Systems and methods for extracting system parameters from nonlinear periodic signals from sensors
#140Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
#141Systems and methods for determining rotation from nonlinear periodic signals
#142Systems and methods for controlling oscillation of a gyroscope
#143MEMS angular inertial sensor operating in tuning fork mode
#144Functional element with a mass body displaced in a direction which intersects its main surface, electronic apparatus and mobile object
#145Inertial sensor
#146Systems and methods for MEMS gyroscope shock robustness
#147Gyroscope structure and gyroscope device
#148MICROMECHANICAL Z-AXIS GYROSCOPE
#149Gyro sensor and composite sensor comprising gyro sensor
#150Yaw-rate sensor
#151Vibrating element, electronic apparatus, and moving object
#152Stacked lateral overlap transducer (SLOT) based three-axis accelerometer
#153Control device, rotation rate sensor and method of operating a control device with harmonic set point signal
#154Physical quantity sensor
#155Modal decoupling via flexure-based transmissions as applied to a micromachined tuning fork gyroscope
#156Capacitance type physical quantity sensor
#157Microelectromechanical gyroscope with compensation of quadrature error drift
#158Multiple sense axis MEMS gyroscope having a single drive mode
#159rotational rate sensor having preset quadrature offset
#160Compact device for detecting at least one acceleration and one speed of rotation
#161Integrated microelectromechanical gyroscope with improved driving structure
#162Angular rate sensor with quadrature error compensation
#163Angular velocity sensor
#164Yaw rate sensor having three sensitive axes and method for manufacturing a yaw rate sensor
#165Vibration angular velocity sensor
#166Yaw-rate sensor
#167Angular velocity sensor and detection element used therein
#168Angular rate sensor having multiple axis sensing capability
#169Displacement amount monitoring electrode arrangement
#170Angular velocity detecting device
#171Rotation rate sensor and method for calibrating a rotation rate sensor
#172Micromachined piezoelectric x-axis gyroscope
#173Micromachined piezoelectric x-axis gyroscope
#174Semiconductor physical quantity detecting sensor
#175Yaw rate sensor
#176Planar Coriolis gyroscope
#177Method for operating and/or for measuring a micromechanical device, and micromechanical device
#178Micromachined piezoelectric z-axis gyroscope
#179Gyro sensor and electronic apparatus
#180Yaw-rate sensor with a compensating mass
#181Gyro sensor, electronic apparatus, and mobile unit
#182Planar structure for a triaxial gyrometer
#183Angular velocity sensor
#184Electronic device and manufacturing method thereof, electronic apparatus, and moving body
#185Gyro sensor and electronic apparatus
#186Gyro sensor and electronic apparatus
#187Gyro sensor and electronic device including the same
#188Apparatus and method for providing an in-plane inertial device with integrated clock
#189Vibrating gyroscope that prevents changes in sensitivity
#190Inertial micro-sensor of angular displacements
#191Micromechanical structure and method for manufacturing a micromechanical structure
#192Sensor structure and yaw rate sensor
#193Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
#194Micro-electro-mechanical-system device with oscillating assembly
#195Micro-gyroscope and method for operating a micro-gyroscope
#196Inertial sensor
#197Gyro sensor, electronic apparatus, and method of manufacturing gyro sensor
#198Inertial sensor with off-axis spring system
#199Inertia sensor
#200Micromachined gyroscope including a guided mass system
#201Micro-gyroscope for detecting motions
#202Inertial sensor and angular velocity detection method using the same
#203Microelectromechanical structure with enhanced rejection of acceleration noise
#204Inertial unit with several detection axes
#205Micromachined gyroscope with detection in the plane of the machined wafer
#206Yaw-rate sensor
#207ANGULAR VELOCITY DETECTING APPARATUS
#208Angular velocity sensor
#209Physical quantity sensor and electronic device
#210Yaw-rate sensor and method for operating a yaw-rate sensor
#211Coupling structure for resonant gyroscope
#212Yaw-rate sensor
#213Microgyroscope for determining rotational motions about at least one of three perpendicular spatial axes
#214Microgyroscope for determining rotational movements about an X and/or Y and Z axis
#215MEMS device and method of manufacturing MEMS device
#216Yaw rate sensor and method for manufacturing a mass element
#217Method for detecting accelerations and rotation rates, and MEMS sensor
#218Yaw rate sensor
#219Yaw rate sensor
#220Angular velocity sensor, electronic apparatus, and method of detecting an angular velocity
#221Angular velocity sensor
#222Angular velocity sensor
#223Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer
#224Stacked lateral overlap transducer (SLOT) based three-axis accelerometer
#225Micromachined piezoelectric z-axis gyroscope
#226Micromachined piezoelectric x-axis gyroscope
#227Micromachined piezoelectric X-Axis gyroscope
#228Micromechanical yaw rate sensor having two sensitive axes and coupled detection modes
#229Vibrating element, vibrator, and electronic apparatus
#230Integrated microelectromechanical gyroscope with improved driving structure
#231Yaw rate sensor
#232Micromechanical structure and method for operating a micromechanical structure
#233Oscillation angular velocity sensor
#234Micromechanical yaw-rate sensor
#235Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection
#236Dynamic quantity sensor and method of manufacturing the same
#237Microelectromechanical structure with enhanced rejection of acceleration noise
#238Angular velocity detecting device
#239Gyroscopes using surface electrodes
#240Micro-mechanical sensor of angular velocity
#241Vibrating micro-mechanical sensor of angular velocity
#242MICROMECHANICAL DEVICE HAVING A DRIVE FRAME
#243Micromechanical structures
#244Microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses
#245Quadrature compensation for a rotation-rate sensor
#246Rotation rate sensor
#247Angular velocity measuring device
#248Yaw rate sensor
#249Vibrating micro-mechanical sensor of angular velocity
#250Angular velocity detecting device
#251Micromechanical rotational speed sensor
#252Vibratory gyroscope balanced by an electrostatic device
#253Rotation Speed Sensor
#254Micro-machined gyrometric sensor for differential measurement of the movement of vibrating masses
#255Microsystem, more particularly microgyrometer, with capacitive electrode detection element
#256Method for quadrature-bias compensation in a Coriolis gyro, as well as a Coriolis gyro which is suitable for this purpose
#257Method for measurement of rotation rates/accelerations using a rotation rate coriolis gyro, as well as a coriolis gyro which is suitable for this purpose
#258Inertial sensor
#259Micro-electro-mechanical gyroscope having electrically insulated regions
#260Tuning fork vibratory MEMS gyroscope
#261Micromechanical rotational rate sensor
#262Micromachined gyroscopic sensor with detection in the plane of the machined wafer
#263MEMS gyroscope having coupling springs
#264Micromachined double tuning-fork gyrometer with detection in the plane of the machined wafer
#265Z-axis angular rate sensor
#266Micromachined double tuning-fork gyrometer with detection in the plane of the machined wafer