G01C19/5755 - CPC Classification Index

#1

20260118138

2026-04-30

SCALE FACTOR CALIBRATION METHOD FOR MICROELECTROMECHANICAL GYROSCOPES

#2

20260071873

2026-03-12

RESONANT MEMS DEVICE

#3

20250237504

2025-07-24

ROTATION RATE SENSOR COMPRISING A SUBSTRATE AND A METHOD FOR PRODUCING AND/OR OPERATING A ROTATION RATE SENSOR

#4

20240337491

2024-10-10

RESONANT SENSOR SYSTEM AND METHOD FOR OPERATING A RESONANT SENSOR SYSTEM

#5

20240240945

2024-07-18

CIRCUIT AND METHOD FOR DRIVING A MICRO-ELECTRO-MECHANICAL RESONATOR OF A GYROSCOPE WITH A REDUCED EXCITATION OF SPURIOUS HARMONICS

#6

20240210174

2024-06-27

MEMS MOTION SENSOR AND METHOD OF MANUFACTURING

#7

20230213340

2023-07-06

SENSOR SYSTEM AND METHOD FOR COMPENSATING FOR AN OFFSET OF AN ANGULAR RATE SIGNAL

#8

20230192475

2023-06-22

MEMS DIE AND MEMS-BASED VIBRATION SENSOR

#9

20230067030

2023-03-02

FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS

#10

20220412739

2022-12-29

Driving circuit for controlling a MEMS oscillator of resonant type

#11

20220252397

2022-08-11

MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof

#12

20220162059

2022-05-26

Low-parasitic capacitance MEMS inertial sensors and related methods

#13

20220049959

2022-02-17

Micro hemispherical resonator gyroscope, and an assembly method and wafer fixture

#14

20210381831

2021-12-09

SENSOR AND ELECTRONIC DEVICE

#15

20210270608

2021-09-02

Inertial sensor and method of inertial sensing with tuneable mode coupling strength

#16

20210003607

2021-01-07

Physical quantity sensor having a movable body formed with through-holes to reduce a difference between the inside-hole damping and the squeeze film damping

#17

20200407217

2020-12-31

Low-parasitic capacitance MEMS inertial sensors and related methods

#18

20200400434

2020-12-24

MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof

#19

20200378763

2020-12-03

Bandwidth extension for continuous mode reversal gyroscope

#20

20200355500

2020-11-12

Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units

#21

20200200536

2020-06-25

Gyroscope

#22

20200072607

2020-03-05

SENSOR DEVICE AND ELECTRONIC APPARATUS

#23

20200025566

2020-01-23

Systems and methods for sensing angular motion in the presence of low-frequency noise

#24

20190360808

2019-11-28

Method of optimising the performance of a MEMS rate gyroscope

#25

20190302142

2019-10-03

Physical quantity sensor having a movable body formed with through-holes to reduce a difference between the inside-hole damping and the squeeze film damping

#26

20190214543

2019-07-11

MONOLITHIC PZT ACTUATOR, STAGE, AND METHOD FOR MAKING

#27

20190204081

2019-07-04

Vibration device and method for controlling the same

#28

20190187169

2019-06-20

Single axis inertial sensor with suppressed parasitic modes

#29

20190170514

2019-06-06

Vibrating-mass gyroscope system

#30

20190078886

2019-03-14

Sensor device employing MEMS

#31

20190063923

2019-02-28

Frequency mismatch detection method for mode matching in gyroscopes

#32

20190041213

2019-02-07

Rotation rate sensor and method for manufacturing a rotation rate sensor

#33

20190035905

2019-01-31

Proof mass and polysilicon electrode integrated thereon

#34

20180347985

2018-12-06

Simplified time domain switched ring/disk resonant gyroscope

#35

20180306580

2018-10-25

MEMS gyroscope with improved rejection of a quadrature error

#36

20180299270

2018-10-18

MEMS DEVICE

#37

20180266823

2018-09-20

MEMS out of plane actuator

#38

20180259359

2018-09-13

Gyroscope in-field prognostics

#39

20180128615

2018-05-10

MEMS device with improved spring system

#40

20180118561

2018-05-03

Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device

#41

20180094929

2018-04-05

MEMS gyroscope having a high stability with respect to temperature and humidity variations

#42

20180069507

2018-03-08

Self-tuning microelectromechanical impedance matching circuits and methods of fabrication

#43

20180038888

2018-02-08

Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body

#44

20180031373

2018-02-01

Vibrating-mass gyroscope systems and method

#45

20180017387

2018-01-18

Segmented electrode structure for quadrature reduction in an integrated device

#46

20180003502

2018-01-04

Angular velocity acquisition device

#47

20170191830

2017-07-06

Inertial sensor

#48

20170108530

2017-04-20

Microelectromechanical sensor device with reduced stress sensitivity

#49

20170074658

2017-03-16

Physical quantity sensor, sensor device, electronic apparatus, and moving object

#50

20170059420

2017-03-02

Piezoresistive detection resonant device in particular with large vibration amplitude

#51

20170059323

2017-03-02

COMBINATION ELECTRODE FOR DRIVE, DRIVE DETECTION, CORIOLIS DETECTION, AND QUADRATURE COMPENSATION

#52

20170038211

2017-02-09

Resonant gyroscopes and methods of making and using the same

#53

20160349056

2016-12-01

MEMS device mechanical amplitude control

#54

20160264404

2016-09-15

Micromachined monolithic 3-axis gyroscope with single drive

#55

20160231118

2016-08-11

Vibrating-mass gyroscope systems and method

#56

20160223329

2016-08-04

Micro-opto-electromechanical systems (MOEMS) device

#57

20160202061

2016-07-14

Method and circuit for the time-continuous detection of the position of the sensor mass with simultaneous feedback for capacitive sensors

#58

20160169677

2016-06-16

ROTATION DETECTION SENSOR

#59

20160072041

2016-03-10

Monolithic PZT actuator, stage, and method for making

#60

20160047839

2016-02-18

Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body

#61

20160003618

2016-01-07

Frequency readout gyroscope

#62

20160003617

2016-01-07

MEMS sensors and methods for detecting rotation rates

#63

20150354981

2015-12-10

Gyroscope with simplified calibration and simplified calibration method for a gyroscope

#64

20150316379

2015-11-05

MEMS device with improved spring system

#65

20150284243

2015-10-08

Method of manufacturing a temperature-compensated micro-electromechanical device

#66

20150260519

2015-09-17

MEMS motion sensor and method of manufacturing

#67

20150251897

2015-09-10

Inertia sensors with multi-directional shock protection

#68

20150214462

2015-07-30

Microelectromechanical gyroscopes and related apparatus and methods

#69

20150114115

2015-04-30

Torsional rate measuring gyroscope

#70

20150082885

2015-03-26

Gyroscope structure and gyroscope with improved quadrature compensation

#71

20150053001

2015-02-26

Micromechanical component and method for producing a micromechanical component

#72

20150000401

2015-01-01

Electric gradient force drive and sense mechanism for a micro-electro-mechanical-system gyroscope

#73

20140366631

2014-12-18

Micromachined gyroscope including a guided mass system

#74

20140339654

2014-11-20

Micropatterned component and method for manufacturing a micropatterned component

#75

20140150552

2014-06-05

Chip level sensor with multiple degrees of freedom

#76

20140116108

2014-05-01

Method for calibrating yaw rate sensors

#77

20130328139

2013-12-12

Micromachined monolithic 3-axis gyroscope with single drive

#78

20130298675

2013-11-14

MEMS inertial sensor and method of inertial sensing

#79

20130283908

2013-10-31

MEMS gyroscopes with reduced errors

#80

20130270657

2013-10-17

Micromachined monolithic 6-axis inertial sensor

#81

20130247666

2013-09-26

Micromachined 3-axis accelerometer with a single proof-mass

#82

20130239686

2013-09-19

Microelectromechanical z-axis detection structure with low thermal drifts

#83

20130118258

2013-05-16

INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SME

#84

20130081466

2013-04-04

Microelectromechanical sensor with non-conductive sensing mass, and method of sensing through a microelectromechanical sensor

#85

20130068018

2013-03-21

Micromachined gyroscope including a guided mass system

#86

20130055787

2013-03-07

Coriolis gyroscope having correction units and method for reducing the quadrature bias

#87

20130036818

2013-02-14

Inertial sensor and method of manufacturing the same

#88

20120293907

2012-11-22

Variable-area capacitor structure, comb grid capacitor accelerometer and comb grid capacitor gyroscope

#89

20120291547

2012-11-22

Angular velocity sensor

#90

20120272734

2012-11-01

Inertial sensor

#91

20120272733

2012-11-01

Adaptive modifications in micro opto-electro-mechanical systems

#92

20120125101

2012-05-24

MEMS device with improved spring system

#93

20120118062

2012-05-17

Method for the precise measuring operation of a micromechanical rotation rate sensor

#94

20120104978

2012-05-03

Device for resonantly driving a micromechanical system

#95

20120055248

2012-03-08

Microgyroscope for determining rotational motions about at least one of three perpendicular spatial axes

#96

20120031183

2012-02-09

Micromechanical system

#97

20120026734

2012-02-02

Optomechanical MEMS device including a proof mass and an illumination mitigating mechanism

#98

20120017678

2012-01-26

Method for detecting accelerations and rotation rates, and MEMS sensor

#99

20120017677

2012-01-26

Micromechanical Coriolis rate of rotation sensor

#100

20120017676

2012-01-26

Sensor device for detecting at least one rotation rate of a rotating motion

#101

20120006113

2012-01-12

Microelectromechanical gyroscopes and related apparatus and methods

#102

20110314912

2011-12-29

Yaw rate sensor, sensor system, method for operating a yaw rate sensor and method for operating a sensor system

#103

20110296913

2011-12-08

Yaw rate sensor

#104

20110265567

2011-11-03

Inertial force sensor and detecting element used for same

#105

20110226058

2011-09-22

Vibrating gyro device and manufacturing method therefor

#106

20110179866

2011-07-28

Compensating frequency mismatch in gyroscopes

#107

20110174074

2011-07-21

FRAMED TRANSDUCER DEVICE

#108

20110153251

2011-06-23

Method for compensating for quadrature

#109

20110120221

2011-05-26

MEMS SENSOR, METHOD OF MANUFACTURING THEREOF, AND ELECTRONIC APPARATUS

#110

20110109327

2011-05-12

Sensor for capacitive detection of a mechanical deflection

#111

20110083507

2011-04-14

Yaw rate sensor and method for operating a yaw rate sensor

#112

20110079079

2011-04-07

Yaw rate sensor, yaw rate sensor system, and method for operating a yaw rate sensor

#113

20110023604

2011-02-03

Microelectromechanical Z-axis detection structure with low thermal drifts

#114

20100326188

2010-12-30

Rate-of-rotation sensor and method for operating a rate-of-rotation sensor

#115

20100320873

2010-12-23

Semiconductor device and method of fabricating the semiconductor device

#116

20100307246

2010-12-09

Semiconductor dynamic quantity sensor and method of manufacturing the same

#117

20100307241

2010-12-09

Combined MEMS accelerometer and gyroscope

#118

20100257933

2010-10-14

Multi-axial linear and rotational displacement sensor

#119

20100251819

2010-10-07

DAMPING DEVICE

#120

20100186505

2010-07-29

Rotation rate sensor and method for operating a rotation rate sensor

#121

20100149721

2010-06-17

Variable capacitance electronic device and microelectromechanical device incorporating such electronic device

#122

20100139400

2010-06-10

Mechanical quantity sensor and method of manufacturing the same

#123

20100122576

2010-05-20

Rotation rate sensor

#124

20100107391

2010-05-06

Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device

#125

20090223276

2009-09-10

Accelerometer with offset compensation

#126

20090205423

2009-08-20

Angular velocity sensor

#127

20090139342

2009-06-04

DEVICE WITH DETECTION BY SUSPENDED PIEZORESISTIVE STRAIN GAUGE COMPRISING A STRAIN AMPLIFIER CELL

#128

20090126491

2009-05-21

Inertial sensor

#129

20090017579

2009-01-15

Method of manufacturing micro electro mechanical systems device

#130

20080314148

2008-12-25

Piezo-resistive detection resonant device made using surface technologies

#131

20080190204

2008-08-14

Variable-Capacity Capacitor Having A Specific Shape, Gyrometer Comprising One Such Capacitor And Accelerometer Comprising One Such Capacitor

#132

20080150554

2008-06-26

Capacitance sensing structure

#133

20070234803

2007-10-11

Yaw Rate Sensor

#134

20070222011

2007-09-27

Resonant inertial microsensor with variable thickness produced by surface engineering

#135

20060191338

2006-08-31

Micromechanical rotation rate sensor having error suppression

#136

20060152739

2006-07-13

Miniature electro-optic device having a conductive element for modifying the state of passage of light between inlet/outlet points and corresponding uses thereof

#137

20060086995

2006-04-27

Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device

#138

20060042385

2006-03-02

BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof

#139

20060021864

2006-02-02

Miniaturized relay and corresponding uses

#140

16277610

2020-06-30

High dynamic range gyroscope

#141

15253694

2019-10-15

High dynamic range gyroscope