164601 ⎘
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects; Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis; Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
MEMS GYROSCOPE START-UP PROCESS AND CIRCUIT
#2DRIVE AND SENSE BALANCED, SEMI-COUPLED 3-AXIS GYROSCOPE
#3TRIM CIRCUIT AND METHOD OF OSCILLATOR DRIVE CIRCUIT PHASE CALIBRATION
#4ROTATION RATE SENSOR WITH A SUBSTRATE HAVING A MAIN EXTENSION PLANE AND WITH AT LEAST ONE MASS OSCILLATOR
#5VIBRATIONAL MEMS STRUCTURE, IN PARTICULAR GYROSCOPE, HAVING SPURIOUS MODE TEST STRUCTURES, TEST SYSTEM AND METHOD
#6MICROMECHANICAL ROTATION RATE SENSOR COMPRISING A SENSOR ELEMENT AND A METHOD FOR OPERATING A MICROMECHANICAL ROTATION RATE SENSOR COMPRISING A SENSOR ELEMENT
#7OPERATING DEVICE AND METHOD FOR OPERATING A ROTATION-RATE SENSOR
#8MICROELECTROMECHANICAL GYROSCOPE WITH DETECTION OF ANGULAR VELOCITY ALONG A VERTICAL AXIS
#9Drive and sense balanced, semi-coupled 3-axis gyroscope
#10MEMS gyroscope start-up process and circuit
#11Micromachined gyroscope
#12Trim circuit and method of oscillator drive circuit phase calibration
#13Robust method for gyroscope drive amplitude measurement
#14Angular velocity sensor and angular velocity sensor system
#15Piezoelectric frequency-modulated gyroscope
#16Gyroscope with self-test
#17Inertial sensor and method of inertial sensing with tuneable mode coupling strength
#18Drive and sense balanced, semi-coupled 3-axis gyroscope
#19One-axis and two-axis rotation rate sensor
#20Sensor
#21Configuration to reduce non-linear motion
#22Vibration gyroscope
#23Microelectromechanical gyroscope for sensing angular rate and method of sensing angular rate
#24Vibration type angular velocity sensor with piezoelectric film
#25ROTATIONAL SPEED SENSOR AND OPERATION OF A ROTATIONAL SPEED SENSOR AT VARIOUS FREQUENCIES AND IN VARIOUS DIRECTIONS
#26Micromechanical rotational rate sensor system and corresponding production method
#27Drive mode and sense mode resonance frequency matching
#28Rotation rate sensor, method for manufacturing a rotation rate sensor
#29Proof mass and polysilicon electrode integrated thereon
#30GYROSCOPE DEVICES AND METHODS FOR FABRICATING GYROSCOPE DEVICES
#31Mobile mass suspension system comprising means of connecting the mobile mass with optimised linearity
#32MULTI-AXIS, SINGLE-DRIVE INERTIAL DEVICE
#33Gyro sensor system
#34Gyroscope
#35Drive and sense balanced, semi-coupled 3-axis gyroscope
#36Rotational speed sensor with minimized interference movements in the driving mode
#37Vibration device
#38Gyro sensor, method of manufacturing gyro sensor, electronic apparatus, and vehicle
#39Microelectromechanical gyroscope for sensing angular rate and method of sensing angular rate
#40Configuration to reduce non-linear motion
#41Angular velocity acquisition device
#42Microelectromechanical or/and nanoelectromechanical device with out-of-plane displacement having capacitive elements having a variable surface
#43System comprising a mechanical resonator and method therefor
#44Angular velocity acquisition device and electronic component for acquiring angular velocity
#45Inertial sensors
#46Controller and method for minimizing scale factor errors of a rotation rate sensor
#47Gyroscope with auxiliary self-test
#48MEMS structure
#49Sensor for detecting angular velocity
#50Configuration to reduce non-linear motion
#51MEMS device mechanical amplitude control
#52Vibrating micro-mechanical sensor of angular velocity
#53Method for acquiring angular velocity of gyro sensor and device for doing the same
#54Method and circuit for the time-continuous detection of the position of the sensor mass with simultaneous feedback for capacitive sensors
#55MEMS-sensor
#56Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device
#57Micro-gyroscope and method for operating a micro-gyroscope
#58MEMS sensors and methods for detecting rotation rates
#59Gyroscope with simplified calibration and simplified calibration method for a gyroscope
#60Gyroscope structure and gyroscope device
#61Microelectromechanical gyroscope with open loop reading device and control method
#62Micro-electromechanical apparatus utilizing folded spring for rotary element
#63Vibrating element with an increased amount of change in detuning frequency per unit mass, vibrator, electronic apparatus, and moving object
#64Angular velocity sensor
#65Angular rate sensor with quadrature error compensation
#66Method and structure of an integrated MEMS inertial sensor device using electrostatic quadrature-cancellation
#67METHOD FOR OPERATING A RATE-OF-ROTATION SENSOR
#68Detection device, sensor, electronic apparatus, and moving object
#69Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device
#70Manufacturing methods for micro-electromechanical system device having electrical insulating structure
#71Angular velocity detecting device
#72Vibratory gyroscope
#73Gyro sensor and electronic apparatus
#74Gyro sensor and electronic apparatus
#75Gyro sensor and electronic apparatus
#76Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope
#77Inertial micro-sensor of angular displacements
#78Time domain switched gyroscope
#79Fully decoupled lateral axis gyroscope with thickness-insensitive Z-axis spring and symmetric teeter totter sensing element
#80Micro-gyroscope and method for operating a micro-gyroscope
#81Driving circuit for a microelectromechanical gyroscope and related microelectromechanical gyroscope
#82Inertial sensor with off-axis spring system
#83Microelectromechanical sensor with non-conductive sensing mass, and method of sensing through a microelectromechanical sensor
#84Micromachined gyroscope including a guided mass system
#85Semiconductor device
#86Method for the functional checking of an inertial sensor and inertial sensor
#87MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED READING STAGE AND METHOD
#88Limiting travel of proof mass within frame of MEMS device
#89MEMS devices sensing both rotation and acceleration
#90Gyrometer with reduced parasitic capacitances
#91Micro-electromechanical system device having electrical insulating structure and manufacturing methods
#92Method for detecting accelerations and rotation rates, and MEMS sensor
#93Microelectromechanical gyroscope with open loop reading device and control method
#94Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope
#95Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope
#96Vibrating element, vibrator, and electronic apparatus
#97Rotation rate sensor having a quadrature compensation pattern
#98Microelectromechanical gyroscope with position control driving and method for controlling a microelectromechanical gyroscope
#99Angular velocity detecting device
#100Rotation rate sensor
#101Micromechanical inertial sensor for measuring rotation rates
#102Yaw rate sensor
#103Micro-electro-mechanical gyroscope with open-loop reading device and control method thereof
#104Vibrating micro-mechanical sensor of angular velocity
#105Angular velocity sensor
#106Angular velocity detecting device
#107Micromechanical rotational speed sensor
#108Method for measuring angular velocity and a vibrating micromechanical sensor of angular velocity
#109Vibratory gyroscope balanced by an electrostatic device
#110Microelectromechanical gyroscope with open loop reading device and control method
#111Microelectromechanical gyroscope with self-test function and control method
#112Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method
#113Method for quadrature-bias compensation in a Coriolis gyro, as well as a Coriolis gyro which is suitable for this purpose
#114Electrostatically oscillated device
#115Micro-electro-mechanical gyroscope having electrically insulated regions
#116Electrostatically oscillated device