166290 ⎘
Measuring optical phase difference ; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods using two or more gratings
METHODS AND SYSTEM FOR DETERMINING ABERRATIONS OF A PROJECTION SYSTEM
#2Method for high-accuracy wavefront measurement base on grating shearing interferometry
#3Measuring method and measuring system for interferometrically measuring the imaging quality
#4Shearing interferometer using two opposing shearing plates for laser
#5Ocular metrology employing spectral wavefront analysis of reflected light
#6Wavefront analyser
#7Ocular metrology employing spectral wavefront analysis of reflected light
#8Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beams
#9Two grating lateral shearing wavefront sensor
#10Wavelength shift measuring apparatus, optical source apparatus, interference measuring apparatus, exposure apparatus, and device manufacturing method
#11Methods for measuring a wavefront of an optical system