METHODS AND SYSTEM FOR DETERMINING ABERRATIONS OF A PROJECTION SYSTEM

Prism-Free Differential Interference Contrast Microscope with Tunable Beam Shear Distance

RECONSTRUCTION OF A WAVEFRONT OF A LIGHT BEAM CONTAINING OPTICAL VORTICES

Method for high-accuracy wavefront measurement base on grating shearing interferometry

Wavefront sensor and method of reconstructing distorted wavefronts

Method for measuring complex degree of coherence of random optical field by using mutual intensity-intensity correlation

Sensor apparatus and method for lithographic measurements

Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof

Measurement technique for refractive index inhomogeneity between plates of a lightguide optical element (LOE)

Device and method for detecting projection objective wave-front aberration

Wavefront detector

Method for testing a tire by interferometry

Method for wavefront measurement of optical imaging system based on grating shearing interferometry

APPARATUS FOR MEASURE OF COHERENCE OF LIGHT SOURCE FOR HOLOGRAPHIC DISPLAY AND METHOD THEREOF

Method for evaluating the quality of the measurement of a wavefront and systems implementing such a method

Wavefront detector

Method and device for analysing an electromagnetic wave in high definition

Wavefront sensor and method of reconstructing distorted wavefronts

Method and device for measuring wavefront using diffraction grating, and exposure method and device

Measuring method and measuring system for interferometrically measuring the imaging quality

Shearing interferometer using two opposing shearing plates for laser

Method and apparatus for wavefront sensing

Holographic wavefront sensing

Gas visualizing methods and systems with birefringent polarization interferometer

Wavefront sensor and method for determining differences in piston and tilt existing between several light beams

Device and method for characterization of a light beam to determine space time couplings in the light beam using a two-dimensional interference pattern formed by the light beam and a fourier transform

Collimation evaluation device and collimation evaluation method

Device and method for characterization of a light beam to determine the spatial-temporal properties of the light beam using a two dimensional interference pattern

Collimation evaluation device and collimation evaluation method

Measuring device having ideal wavefront generator for detecting point diffraction interferometric wavefront aberration of measured optical system and method for detecting wavefront aberration thereof

Method and apparatus for wavefront sensing

Method and apparatus for performing optical imaging using frequency-domain interferometry

Method for measuring optical phase, device for measuring optical phase, and optical communication device

Broadband, common-path, interferometric wavefront sensor

Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction

Correction of rotational inaccuracy in lateral shearing interferometry

Method and apparatus for performing optical imaging using frequency-domain interferometry

Imaging apparatus and image processing method

Speckle reduction in optical coherence tomography by path length encoded angular compounding

X-ray imaging apparatus

Speckle reduction in optical coherence tomography by path length encoded angular compounding

Optical scattering disk, use thereof, and wavefront measuring apparatus

All-reflective, radially shearing interferometer

Process and apparatus for a wavelength tuning source

Method and apparatus for performing optical imaging using frequency-domain interferometry

Method and apparatus for performing optical imaging using frequency-domain interferometry

Wavefront imaging sensor

Process and apparatus for a wavelength tuning source

Wavefront-aberration-measuring device and exposure apparatus

Speckle reduction in optical coherence tomography by path length encoded angular compounding

Two grating lateral shearing wavefront sensor

Method, phase grating and device for analyzing a wave surface of a light beam

Process and apparatus for a wavelength tuning source

Wavefront sensor with optical path difference compensation

Optical scattering disk, use thereof, and wavefront measuring apparatus

Method and apparatus for performing optical imaging using frequency-domain interferometry

Method and system for wavefront measurements of an optical system

Device and method for the interferometric measurement of phase masks

Methods and apparatus for measuring wavefronts and for determining scattered light, and related devices and manufacturing methods

Process and apparatus for a wavelength tuning source

Phase shift amount measurement apparatus and transmittance measurement apparatus

Image amplifying, servo-loop controlled, point diffraction interometer

Method for approximating an influence of an optical system on the state of polarization of optical radiation

Two-dimensional spectral shearing interferometry for ultrafast pulse characterization

Methods for measuring a wavefront of an optical system

Wavefront coding interference contrast imaging systems

Speckle reduction method and system for EUV interferometry

Method and apparatus for performing optical imaging using frequency-domain interferometry

Tilt compensated interferometers

Speckle reduction in optical coherence tomography by path length encoded angular compounding

Phase measuring method and apparatus for measuring characterization of optical thin films

Differential interferometers creating desired beam patterns

Spatial light modulator as source module for DUV wavefront sensor

Shearing interferometer with dynamic pupil fill

System and method for calibrating a spatial light modulator array using shearing interferometry

Grating for EUV lithographic system aberration measurement

Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method

Process and apparatus for a wavelength tuning source

Regularized shearograms for phase resolved shearography

Motion compensation system for a shearography apparatus

Two-axis interferometric tracking utilizing pairs of shearing interferometers

Interferometer for Fourier transform infrared spectrometry