SPECTROGRAPH STABILIZATION USING A SINGLE-DELAY INTERFEROMETER

Device and method for measuring wavelength for laser device

Spectroscope, wavelength measuring device, and spectrum measuring method

Three-dimensional shape, displacement, and strain measurement device and method using periodic pattern, and program therefor

Imprint apparatus, imprint method, detecting method, and method of manufacturing device

Collimation evaluation device and collimation evaluation method

Imprint apparatus to detect a contact state between a mold and a substrate

Uses of electromagnetic interference patterns

Surface shape measurement apparatus and method

EVALUATION METHOD, EVALUATION APPARATUS, AND EXPOSURE APPARATUS

Optical communications using spectral interferometry

Laser system

Phase shift amount measurement apparatus and transmittance measurement apparatus

Scanning simultaneous phase-shifting interferometer

Phase shifting interferometry with multiple accumulation

Optical readhead

Heterodyne array detector

Method and apparatus for feedback control of tunable laser wavelength

Optical image measuring apparatus for forming an image of an object to be measured based on interference light