166163 ⎘
Radiation pyrometry, e.g. infrared or optical thermometry; Constructional details; Shape of the cavity itself or of elements contained in or suspended over the cavity Special manufacturing steps or sacrificial layers or layer structures
Design and fabrication method for microsensor
#302Sensor
#303Thermal sensor with increased sensitivity
#304Thermal sensor with thermal barrier
#305Carbon nanotube sensor
#306Infrared ray sensing element and method of producing the same
#307Die temperature sensors
#308Photonic crystal emitter, detector and sensor
#309Two F-number, two-color sensor system
#310Method for the production of window elements which can be soldered into a housing in a hermetically tight manner and of a window element sealing a housing
#311Absorptance enhancing coating for MWIR detectors
#312Infrared sensor and method of driving thereof
#313Sensor and cap arrangement
#314Fiber optic temperature sensor
#315Electronic device having infrared sensing elements
#316Microstructured infrared sensor and method for its manufacture
#317Infrared sensor
#318Thermal infrared sensor device and thermal infrared sensor array
#319Carbon nanotube sensor
#320Visible/near infrared image sensor array
#321Process for a monolithically-integrated micromachined sensor and circuit
#322Structure of thermopile sensor
#323Electronic device with thin film structure
#324Nanoscale bolometer operating near the thermodynamic limit
#325Silicon nitride-carbon nanotube-graphene nanocomposite microbolometer IR detector
#326Thermal sensing layer for microbolometer and method of making the same
#327Thermal sensing layer for microbolometer and method of making the same