166163 ⎘
Radiation pyrometry, e.g. infrared or optical thermometry; Constructional details; Shape of the cavity itself or of elements contained in or suspended over the cavity Special manufacturing steps or sacrificial layers or layer structures
INFRARED TERMOPILE SENSOR AND MANUFACTURING METHOD THEREFOR
#2LIGHT SENSOR, LIGHT DETECTION DEVICE, AND TERAHERTZ/INFRARED FOURIER SPECTROSCOPE
#3THERMAL IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
#4OPTICAL FILTER ARRAY
#5FAR INFRARED (FIR) SENSOR DEVICE AND MANUFACTURING METHOD THEREOF AND DETERMINATION METHOD OF THICKNESS OF SENSOR DIELECTRIC LAYER THEREOF
#6HIGHLY SENSITIVE THERMOELECTRIC-BASED INFRARED DETECTOR WITH HIGH CMOS INTEGRATION
#7Microbolometer systems and methods
#8EMBEDDED MECHANICAL STOPPER FOR THERMAL SENSOR DEVICE
#9METHOD FOR MANUFACTURING A DETECTION DEVICE COMPRISING AN ENCAPSULATION STRUCTURE COMPRISING A THIN OPAQUE LAYER RESTING ON A MINERAL PERIPHERAL WALL
#10ELECTROMAGNETIC WAVE DETECTION ELEMENT AND ELECTROMAGNETIC WAVE SENSOR HAVING THE SAME
#11INFRARED SENSOR AND ITS REFERENCE ELEMENT AND MANUFACTURING METHOD OF THE REFERENCE ELEMENT
#12MICROBOLOMETER SYSTEMS AND METHODS
#13BOLOMETER AND MANUFACTURING METHOD OF TEMPERATURE SENSING UNIT
#14INFRARED SENSOR, AND METHOD FOR MANUFACTURING INFRARED SENSOR
#15IR PHOTODETECTOR WITH INTERCALATED GRAPHENE LAYER AND RELATED METHODS
#16MEMS sensors and systems
#17Microbolometer and method of manufacturing the same
#18READOUT CIRCUITS AND METHODS
#19Infrared imaging microbolometer and associated production methods
#20Bolometer and method for manufacturing same
#21High-sensitivity electromagnetic radiation detection component and method for manufacturing such a component
#22Process for fabricating a detecting device the getter of which is better protected
#23PHONON DISRUPTORS FOR INCREASED THERMAL RESISTANCE WITHOUT SACRIFICING ELECTRICAL SIGNAL QUALITY IN THERMAL SENSORS
#24Beam shaping optic for light sources
#25Far infrared (FIR) sensor device and manufacturing method thereof and determination method of thickness of sensor dielectric layer thereof
#26Thermal detector
#27Process for manufacturing a device for detecting electromagnetic radiation, comprising a getter material
#28Low thermal capacity micro-bolometer and associated manufacturing method
#29Electrical field of view control for a passive light sensor
#30Combined near and mid infrared sensor in a chip scale package
#31METAMATERIALS-BASED FOCUSING LENSES FOR THERMAL IMAGING
#32Monolithic post complementary metal-oxide-semiconductor integration of thermoelectric-based infrared detector
#33Long-wave infrared detecting element, long-wave infrared detecting element array structure, long-wave infrared temperature detecting device, and thermal imaging device
#34INFRARED DETECTOR HAVING VERTICAL SIDEWALL SENSITIVE LAYER AND MANUFACTURING METHOD THEREOF
#35Sensor, method for producting same, and test method and device thereof
#36Method for manufacturing a detection structure with an optimised absorption rate, and said structure
#37Microsystem and method for making a microsystem
#38Microbolometer systems and methods
#39Microbolometer systems and methods
#40Process for producing an infrared detector and associated infrared detector
#41Optical detection device having adhesive member
#42PROCESS FOR MANUFACTURING A DEVICE FOR DETECTING ELECTROMAGNETIC RADIATION, COMPRISING A SUSPENDED DETECTION ELEMENT
#43Microbolometer systems and methods
#44MEMS device having curved reflective layer and method for manufacturing MEMS device
#45Sensitive pixel based detection system comprising a thermal detector and a compensation device
#46Method for fabricating a detection device comprising a step of transferring and direct bonding of a thin layer provided with a getter material
#47MEMS sensors and systems
#48CMOS cap for MEMS devices
#49Scalable thermoelectric-based infrared detector
#50Optical filter array
#51Readout circuits and methods
#52Infrared sensor structure
#53Stray light suppression in eye-tracking imaging
#54Process for manufacturing a microbolometer containing vanadium oxide-based sensitive material
#55Device for detecting electromagnetic radiation with reduced crosstalk
#56Rear surface incident type light receiving device comprising an uppermost part of an electrode with a larger diameter than lowermost part of the electrode
#57Infrared imaging element, infrared imaging array, and method for manufacturing infrared imaging element
#58Microbolometer structure
#59Light detector
#60CMOS cap for MEMS devices
#61MICROMECHANIC STRUCTURE AND METHOD FOR MAKING THE MICROMECHANIC STRUCTURE
#62High speed graphene oxide bolometers and methods for manufacturing the same
#63Light detector
#64Scalable thermoelectric-based infrared detector
#65MULTIBAND WAVELENGTH SELECTIVE DEVICE
#66Thermal pile sensing structure integrated with capacitor
#67Structure for detecting electromagnetic radiation of the bolometer type and method for manufacturing such a structure
#68Infrared detector and infrared sensor including the same
#69Multi layered thermal sensor
#70Thermal pattern sensor with pyroelectric capacitor comprising a sol-gel matrix and metallic oxide particles
#71Infra-red device
#72Infra-red device
#73Thermal pattern sensor with pyroelectric capacitor
#74Method for determining a temperature without contact, and infrared measuring system
#75Method for determining a temperature without contact, and infrared measuring system
#76Vertical microbolometer contact systems and methods
#77Method for manufacturing a thermoelectric-based infrared detector having a MEMS structure above a hybrid component
#78Thermal infrared detector and manufacturing method thereof
#79Optical filter array
#80Non-contact temperature measurement sensor
#81Thermal pile sensing structure integrated with capacitor
#82Infrared detector and infrared sensor including the same
#83Robust GMOs
#84Molybdenum nitride absorber coating for a detector
#85Method for manufacturing a detection device with two substrates and such a detection device
#86Scalable thermoelectric-based infrared detector
#87Thin film structure for micro-bolometer and method for fabricating the same
#88Method for producing a bolometric detector
#89Method for manufacturing rear surface incident type light receiving device including an electrode and characteristic inspection thereof
#90Systems and methods for hybrid superconducting medium comprising first and second layers with different superconductor to induce a proximity effect between thereof
#91Optical device and method for manufacturing same
#92Opto-electronic modules and methods of manufacturing the same and appliances and devices comprising the same
#93Method for vehicular control
#94Thermal pile sensing structure integrated with capacitor
#95MULTIBAND WAVELENGTH SELECTIVE DEVICE
#96Optical detection device having adhesive member
#97Micromechanical device for electromagnetic radiation sensing
#98Electromagnetic wave detector, electromagnetic wave detector array, and gas analyzing apparatus
#99Thermomechanical device for measuring electromagnetic radiation
#100Fabry-Perot interference filter and light-detecting device
#101Resistive switching for MEMS devices
#102MULTIBAND WAVELENGTH SELECTIVE DEVICE
#103Thermal infrared detector and manufacturing method for thermal infrared detector
#104Process for determining state of a vehicle
#105Device for detecting electromagnetic radiation having an encapsulating structure including at least one interference filter
#106Radiation detector and method for manufacturing a radiation detector
#107Microbolometer contact systems and methods
#108Device for detecting electromagnetic radiation comprising a raised electrical connection pad
#109IR detector array device
#110Method of manufacturing an infrared detector having a micro-cavity and a low refraction index step at an interface with a transparent cap, and associated infrared detector
#111Method for manufacturing MEMS double-layer suspension microstructure, and MEMS infrared detector
#112Substrate having a hole, method for manufacturing the substrate, infrared sensor, and method for manufacturing the infrared sensor
#113Light sensing device and fabricating method thereof
#114Detection device with suspended bolometric membranes having a high absorption efficiency and signal-to-noise ratio
#115Thermal pile sensing structure integrated with capacitor
#116Systems and methods for enhanced bolometer response
#117Component for the detection of electromagnetic radiation in a range of wavelengths and method for manufacturing such a component
#118Fully-coherent terahertz detection method and system
#119Non-contact temperature sensor
#120Thermal radiation microsensor comprising thermoelectric micro pillars
#121Radiation detector, array of radiation detectors and method for manufacturing a radiation detector
#122Bolometer
#123Process for determining state of a vehicle
#124Titanium nitride for MEMS bolometers
#125Uncooled microbolometer pixel and array for configurable broadband and multi-frequency terahertz detection
#126IR sensor for IR sensing based on power control
#127MEMS-based wafer level packaging for thermo-electric IR detectors
#128Infrared sensor having improved sensitivity and reduced heat generation
#129Radiation detector comprising a compensating sensor
#130Method for producing a microsystem having pixels
#131Integrated imaging device for infrared radiation and method of production
#132Techniques for tiling arrays of pixel elements and fabricating hybridized tiles
#133PYROELECTRIC MATERIAL, MANUFACTURING METHOD OF PYROELECTRIC MATERIAL, PYROELECTRIC ELEMENT, MANUFACTURING METHOD OF PYROELECTRIC ELEMENT, THERMOELECTRIC CONVERSION ELEMENT, MANUFACTURING METHOD OF THERMOELECTRIC CONVERSION ELEMENT, THERMAL PHOTODETECTOR, MANUFACTURING METHOD OF THERMAL PHOTODETECTOR, AND ELECTRONIC INSTRUMENT
#134Combined leg structure of micro bridge unit of focal plane array
#135Micromechanical sensor device and corresponding production method
#136Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation
#137Method for making wavelength-selective, integrated resonance detector for electromagnetic radiation
#138Sensor array with self-aligned optical cavities
#139Infrared sensor package
#140Terahertz radiation detector, focal plane array incorporating terahertz detector, multispectral metamaterial absorber, and combined optical filter and terahertz absorber
#141Microbolometer contact systems and methods
#142Layered structure for an infrared emitter, infrared emitter device and detector
#143CMOS integrated method for fabrication of thermopile pixel on semiconductor substrate with buried insulation regions
#144CMOS integrated method for the fabrication of thermopile pixel with umbrella absorber on semiconductor substrate
#145Infrared thermal sensor with beams having different widths
#146Infrared thermal sensor with good SNR
#147Infrared detecting element, method for manufacturing infrared detecting element, and electronic device
#148Thermally shorted bolometer
#149Infrared sensor device and method for producing an infrared sensor device
#150Pyroelectric detector and method for manufacturing same, pyroelectric detection device, and electronic instrument
#151Electromagnetic radiation micro device, wafer element and method for manufacturing such a micro device
#152Vehicle vision system with yaw rate determination
#153Method for making an infrared detection device
#154MEMS infrared sensor including a plasmonic lens
#155Infrared detector made up of suspended bolometric micro-plates
#156Method for making an imager device
#157Vehicle vision system with yaw rate determination
#158Bolometer having absorber with pillar structure for thermal shorting
#159MEMS infrared sensor including a plasmonic lens
#160Multi-stack film bolometer
#161Integrated diode array and corresponding manufacturing method
#162Microbolometer detector with centrally-located support structure
#163Serpentine IR sensor
#164Thermal detector
#165CMOS bolometer
#166Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method
#167Pyroelectric detector and method for manufacturing same, pyroelectric detection device, and electronic instrument
#168Fabrication of window cavity cap structures in wafer level packaging
#169Thermal electromagnetic wave detection element, method for producing thermal electromagnetic wave detection element, thermal electromagnetic wave detection device, and electronic apparatus
#170Optically transitioning thermal detector structures
#171Solid-state image sensing device with detecting units having a microlens
#1723D stacked uncooled IR sensor device and method
#173Pyroelectric infrared detecting device, and method for replacing pyroelectric element in pyroelectric infrared detecting device
#174Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same
#175Wavelength-selective, integrated resonance detector for electromagnetic radiation
#176Sensing device having a thermal antenna and a method for sensing electromagnetic radiation
#177Infrared detectors
#178Pyroelectric light detector, pyroelectric light detecting device, and electronic device
#179Infrared thermal detector and method of manufacturing the same
#180Bolometer and method of manufacturing the same
#181Nano-tip spacers for precise gap control and thermal isolation in MEMS structures
#182EXTENDED AREA COVER PLATE FOR INTEGRATED INFRARED SENSOR
#183SENSOR AND METHOD OF PRODUCING A SENSOR
#184Infrared detecting element, method for manufacturing infrared detecting element, and electronic device
#185INTEGRATED INFRARED SENSORS WITH OPTICAL ELEMENTS AND METHODS
#186Infrared detecting element and electronic device
#187Microbolometer and pixel exploiting avalanche breakdown
#188Pyroelectric element
#189Opto-electronic modules and methods of manufacturing the same and appliances and devices comprising the same
#190Pyroelectric element and method for manufacturing the same
#191Pyroelectric detector, pyroelectric detection device, and electronic instrument
#192Infrared sensor and a circuit board equipped therewith
#193Thermal-type infrared solid-state image sensing device and method of manufacturing the same
#194Bolometer-type THz wave detector
#195MEMS SENSOR
#196INFRARED GAS DETECTOR AND INFRARED GAS MEASURING DEVICE
#197SENSOR ARRAY
#198MEMS SENSOR AND SENSOR ARRAY HAVING THE SAME
#199Infrared imaging element
#200Thermal detector, thermal detection device, and electronic instrument
#201Pyroelectric detector, pyroelectric detection device, and electronic instrument
#202Compact infrared light detector and method for producing the same, and an infrared light detector system comprising the infrared light detector
#203Resistor film for bolometer
#204Infrared imaging device and method for manufacturing same
#205Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method
#206Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method
#207Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method
#208Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method
#209Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method
#210Infrared detector based on suspended bolometric micro-plates
#211Microbolometer semiconductor material
#212Sensor, semiconductor wafer, and method of producing semiconductor wafer
#213INFRARED DETECTION ELEMENT AND INFRARED IMAGING DEVICE
#214Infrared sensors, focal plane arrays and thermal imaging systems with temperature compensation
#215THERMAL IMAGE SENSOR WITH CHALCOGENIDE MATERIAL AND METHOD OF FABRICATING THE SAME
#216Infrared imaging device
#217SUPERLATTICE QUANTUM WELL INFRARED DETECTOR HAVING EXPOSED LAYERS
#218Infrared detection device
#219Thermal infrared sensor and manufacturing method thereof
#220WIDE SPECTRAL RANGE HYBRID IMAGE DETECTOR
#221Infrared array sensor
#222Infrared imaging device and method of manufacturing the same
#223Electrode material and applications thereof
#224Pyroelectric detector, pyroelectric detection device, and electronic instrument
#225Pyroelectric detector, pyroelectric detection device, and electronic instrument
#226Teramos-terahertz thermal sensor and focal plane array
#227Bolometer type Terahertz wave detector
#228Method for calibrating an electronic chip, electronic chip and heat pattern detector for this method
#229Time-related temperature variation transducer, electronic chip incorporating this transducer and method of fabrication of this chip
#230Infrared sensing element and infrared imaging device
#231Optically transitioning thermal detector structures
#232Pixel structure for microbolometer detector
#233Pixel-level optical elements for uncooled infrared detector devices
#234INFRARED SENSOR AND INFRARED SENSOR MANUFACTURING METHOD
#235Multilayered structure
#236Uncooled infrared detector and methods for manufacturing the same
#237Optical sensor
#238Thermal detector, thermal detection device, and electronic instrument
#239Pyroelectric detector, pyroelectric detection device, and electronic instrument
#240Pyroelectric detector and method for manufacturing same, pyroelectric detection device, and electronic instrument
#241Thermally decoupled micro-structured reference element for sensors
#242Infrared sensor
#243THERMAL-TYPE INFRARED SOLID-STATE IMAGING ELEMENT
#244Thermal detector, thermal detector device, electronic instrument, and method of manufacturing thermal detector
#245Thermal detector, thermal detector device, electronic instrument, and method of manufacturing thermal detector
#246Method for manufacturing MEMS device, method for manufacturing thermal detector, thermal detector, thermal detection device, and electronic instrument
#247Thermal detector, thermal detection device and electronic instrument, and method for manufacturing thermal detector
#248Thermal sensor, non-contact thermometer device, and non-contact temperature measurement method
#249Infrared sensor and infrared sensor module
#250Integrated infrared sensors with optical elements, and methods
#251Sensor for detecting thermal radiation
#252Device to detect thermal radiation with high resolution method to manufacture and use the device
#253Radiation detector having a bandgap engineered absorber
#254Radiation detector with AL2O3 substrate and radiation detection method
#255Etching cavity structures in silicon under dielectric membrane
#256RADIATION POWER DETECTOR
#257INTERCONNECT AND SYSTEM INCLUDING SAME
#258Processes for Producing Thin-Film Sensors, Thin-Film Sensors and Thin-Film Sensor Modules
#259Microbolometer pixel and fabrication method utilizing ion implantation
#260Bolometer pixel provided with a MIM integration capacitor
#261Device for imaging and method for producing the device
#262Infrared sensors, focal plane arrays and thermal imaging systems
#263Thermo-optic infrared pixel and focal plane array
#264BOLOMETER STRUCTURE, INFRARED DETECTION PIXEL EMPLOYING BOLOMETER STRUCTURE, AND METHOD OF FABRICATING INFRARED DETECTION PIXEL
#265Thermopile sensor and method of manufacturing same
#266Method of manufacturing a porous structure
#267Method for manufacturing infrared detecting device
#268Infrared detection unit using a semiconductor optical lens
#269INFRARED DETECTOR AND SOLID STATE IMAGE SENSOR HAVING THE SAME
#270Chemically-selective detector and methods relating thereto
#271Post-supported microbolometer pixel
#272Thermal-type infrared solid-state imaging device and manufacturing method of the same
#273INFRARED RAY SENSOR ELEMENT
#274Wide spectral range hybrid image detector
#275Radiation sensor device and method
#276Infrared sensor and manufacturing method thereof
#277Infrared-detecting element and infrared image sensor using the same
#278Microbolometer with improved mechanical stability and method of manufacturing the same
#279Thermal-type infrared image sensing device and method of producing the same
#280Planar Element Module, Manufacturing Method of Planar Element Module, and Planar Element Device
#281Nanowire multispectral imaging array
#282Infrared sensor and method for producing same
#283Infrared receiving module
#284Thin film multi-layered pyroelectric capacitor
#285Bolometer-type THz-wave detector
#286Bolometer-type THz-wave detector
#287Microcantilever infrared sensor array
#288Tunable microcantilever infrared sensor
#289Radiation sensor with cap and optical elements
#290Electronic device and method for fabricating the same
#291Infrared detector package
#292Electronic detection device and detector comprising such a device
#293Microstructured Infrared Sensor
#294Infrared imaging system and lens module for use with the same
#295System and method for radiation detection and imaging
#296Bolometric infrared sensor having two-layer structure and method for manufacturing the same
#297Method for production of a device for thermal detection of radiation comprising an active microbolometer and a passive microbolometer
#298Infrared detector elements and methods of forming same
#299Systems and methods for integrating focal plane arrays
#300Design and fabrication method for microsensor