166743 ⎘
Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements ; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means; Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
Sub-classes:CANTILEVER BEAM BASED PRESSURE SENSOR SYSTEMS AND DEVICES MEHTHODS OF USE THEREOF
#2PRESSURE SENSOR
#3PRESSURE SENSING APPARATUS WITH MEMS
#4Pressure sensors with tensioned membranes
#5PRESSURE SENSOR
#6System and method to determine temperature compensated pressure of a pressure transducer
#7Method of manufacturing a sensor set-up for determining at least one pressure of a fluid medium
#8Integrated optical transducer and method for detecting dynamic pressure changes
#9Variable diaphragm and control method thereof
#10PRESSURE SENSING APPATUS WITH MEMS
#11Pressure sensors with tensioned membranes
#12Transducer apparatus as well as measuring system formed by means of such a transducer apparatus
#13Packaging a sealed cavity in an electronic device
#14Packaging a sealed cavity in an electronic device
#15MEMS device using a released device layer as membrane
#16MEMS sensors, methods for providing same and method for measuring a fluid constituent
#17Pressure sensors with tensioned membranes
#18Pressure sensor and pressure detection device
#19Pressure sensors and methods of making the same
#20Resonant CO2 sensing with mitigation of cross-sensitivities
#21Thickness shear mode resonator sensors and methods of forming a plurality of resonator sensors
#22Pressure transducer with capacitively coupled source electrode
#23Method and apparatus for damping diaphragm vibration in capacitance diaphragm gauges
#24MEMS PRESSURE SENSOR, ELECTRONIC DEVICE, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT
#25Pressure transducer substrate with self alignment feature
#26Device for measuring a pressure with at least one pressure sensor having at least one active sensor surface
#27Pressure sensor
#28Sensor and a sensor system
#29Microelectromechanical pressure sensor including reference capacitor
#30Micro electrical mechanical system with bending deflection of backplate structure
#31Resonant pressure sensor and method of manufacturing the same
#32Sensor unit
#33Thickness shear mode resonator sensors and methods of forming a plurality of resonator sensors
#34Physical quantity sensor
#35Resonant frequency based pressure sensor
#36MEMS sensor, silicon microphone, and pressure sensor
#37Pressure sensor and method for manufacturing the pressure sensor
#38Diaphragm structure and MEMS device
#39Method and Apparatus for Determining at Least One Measured Variable of a Medium
#40Contact force sensor package, blood pressure meter with the same, and method for fabricating the contact force sensor package
#41Micro-electro-mechanical pressure sensor
#42Pressure sensor having a diaphragm having a pressure-receiving portion receiving a pressure and a thick portion adjacent to the pressure-receiving portion
#43Backscatter sensor
#44Capacity type sensor
#45Resonating transducer
#46Pressure sensor
#47Thickness-shear mode resonators