166744 ⎘
Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements ; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means; Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm Optical excitation or measuring
Micro-opto-mechanical system sensor, arrangement and manufacturing method
#2MECHANICAL RESONATOR SENSOR
#3Systems and methods for pressure and temperature measurement
#4Systems and methods for acoustic sensing