166745 ⎘
Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements ; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means; Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
Sub-classes:Wide range highly sensitive pressure sensor based on heated micromachined arch beam
#2Sensor unit and method of interconnecting a substrate and a carrier
#3Environmental sensor
#4Pressure detection of hermetically sealed device
#5Microelectromechanical and/or nanoelectromechanical differential pressure measurement sensor
#6Pressure sensor made from nanogauges coupled to a resonator
#7Sensor with a vibrating member in a cavity with integrated anomaly detection
#8MEMS component
#9MEMS resonator pressure sensor
#10Pressure sensor
#11Pressure sensor
#12MEMS pressure sensor
#13Pressure measurement device having an optimized sensitivity
#14Vibration transducer
#15Sensor
#16Heat conduction-type barometric sensor utilizing thermal excitation
#17Vibration transducer and its manufacturing method
#18MEMS pressure sensor
#19Micro-electro-mechanical pressure sensor
#20Backscatter sensor
#21Resonator measurement device and method employing the device
#22Capacity type sensor
#23Diaphragm structure
#24System and method for sensing differential pressure
#25Pressure sensor with improved vibrating microassembly and optical detection system
#26Pressure sensor with expanding member
#27Electronic component having micro-electrical mechanical system
#28Vibration type pressure sensor
#29Silicon resonant type pressure sensor
#30Electronic component having micro-electrical mechanical system
#31Pressure sensor