166746 ⎘
Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements ; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means; Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element Optical excitation or measuring
PRESSURE SENSOR AND METHOD FOR OPERATING A PRESSURE SENSOR
#2Pressure sensor and method for monitoring a pressure sensor
#3Resonator device
#4MECHANICAL RESONATOR SENSOR
#5SYSTEMS AND METHODS FOR NON-INVASIVE TESTING OF ELECTROMECHANICAL SYSTEMS DEVICES
#6OPTICAL MEMS DEVICE AND REMOTE SENSING SYSTEM UTILIZING THE SAME
#7Optically Coupled Sealed-Cavity Resonator and Process
#8Pressure sensor with improved vibrating microassembly and optical detection system
#9Optically coupled resonator