166761 ⎘
Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements ; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means; Transmitting or indicating the displacement of flexible diaphragms Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
Method and system for etching a diaphragm pressure sensor
#302Pressure sensor
#303Sensor system for detecting high pressures
#304Ceramic component having at least one electrical feedthrough, method for its manufacture and pressure sensor with such a component
#305Micromechanical component and manufacturing method for a micromechanical component
#306Method for producing an electrical feedthrough in a substrate, and substrate having an electrical feedthrough
#307Capacitive pressure sensor
#308Electrostatic capacitive pressure sensor
#309Pressure sensor
#310Wireless self-powered monolithic integrated capacitive sensor and method of manufacture
#311Sensor and method for fabricating the same
#312Sensor and method for fabricating the same
#313Piezo-resistive pressure sensor
#314Semiconductor pressure sensor
#315Method for forming a transducer
#316Orientation of an electronic CMOS structure with respect to a buried structure in the case of a bonded and thinned-back stack of semiconductor wafers
#317Pressure sensor
#318Pressure sensor and method for manufacturing the pressure sensor
#319Microphone with irregular diaphragm
#320METHODS OF FORMING AN EMBEDDED CAVITY FOR SENSORS
#321Method for manufacturing separated micromechanical components situated on a silicon substrate and components manufactured therefrom
#322Pressure sensor and method
#323Method for fabricating a microelectromechanical sensor with a piezoresistive type readout
#324Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate
#325Semiconductor pressure sensor and method for manufacturing the same
#326Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor
#327Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe
#328METHOD FOR MANUFACTURING A SENSOR COMPONENT WITHOUT PASSIVATION, AND A SENSOR COMPONENT
#329SENSOR SYSTEM AND METHOD FOR MANUFACTURING SAME
#330Integrated MEMS and ESD protection devices
#331MEMS stress concentrating structure for MEMS sensors
#332Low temperature wafer level processing for MEMS devices
#333Low pressure sensor device with high accuracy and high sensitivity
#334Manufacturing method for a micromechanical component having a thin-layer capping
#335SEMICONDUCTOR PRESSURE SENSOR AND ITS MANUFACTURING METHOD
#336Pressure sensor and manufacturing method
#337CMOS microelectromechanical system (MEMS) device and fabrication method thereof
#338Device for detecting the thinning down of the substrate of an integrated circuit chip
#339PRESSURE SENSOR AND MANUFACTURING METHOD THEREOF
#340Media-compatible electrically isolated pressure sensor for high temperature applications
#341Thin semiconductor device having embedded die support and methods of making the same
#342Pressure sensor package
#343Pressure sensor and manufacturing method thereof
#344Micro piezoresistive pressure sensor and manufacturing method thereof
#345Semiconductor pressure sensor and method of producing the same
#346Semiconductor device with integrated piezoelectric elements and support circuitry
#347Media-compatible electrically isolated pressure sensor for high temperature applications
#348Semiconductor sensor and method of manufacturing the same
#349METHOD FOR MANUFACTURING A SENSOR COMPONENT AND SENSOR COMPONENT
#350Semiconductor pressure sensor having symmetrical structure, and manufacturing method thereof
#351MEMS dosimeter
#352Method and structure of monolithically integrated pressure sensor using IC foundry-compatible processes
#353Use of field oxidation to simplify chamber fabrication in microfluidic devices
#354Semiconductor pressure sensor
#355Micromechanical component and corresponding production method
#356MEMS device and method for fabricating the same
#357High temperature resistant solid state pressure sensor
#358Pressure sensor
#359Micromechanical pressure sensing device
#360Component and method for its manufacture
#361PRESSURE SENSOR AND WIRE GUIDE ASSEMBLY
#362Method and apparatus for preventing catastrophic contact failure in ultra high temperature piezoresistive sensors and transducers
#363Method and apparatus for fabricating piezoresistive polysilicon by low-temperature metal induced crystallization
#364Pressure sensor with nonlinear characteristic curve
#365Method of manufacturing MEMS sensor and MEMS sensor
#366Pressure sensor
#367Electronic device and method of manufacturing same
#368Transducer with fluidly isolated connection
#369Semiconductor structural element
#370Pressure sensor with dual chamber cover and corrugated membrane
#371Semiconductor device and manufacturing method
#372Sensor unit for the measurment of a variable in a medium
#373Ceramic pressure sensors and method for producing the same
#374Accessible stress-based electrostatic monitoring of chemical reactions and binding
#375Method and apparatus for preventing catastrophic contact failure in ultra high temperature piezoresistive sensors and transducers
#376SEMICONDUCTOR SENSOR AND MANUFACTURING METHOD OF SENSOR BODY FOR SEMICONDUCTOR SENSOR
#377Pressure Sensor Having Sealed And Apertured Chambers
#378Physical quantity sensor
#379Silicon carbide piezoresistive pressure transducer and method of fabrication
#380Method for making a transducer
#381Sensing membrane with stress releasing structure and micro-electro-mechanical system device using the same
#382Method for manufacturing a microelectromechanical component, and a microelectromechanical component
#383Transducer for use in harsh environments
#384Diaphragm isolation forming through subtractive etching
#385Pressure sensor and manufacturing method thereof
#386Semiconductor pressure sensor and fabrication method thereof
#387Micromechanical component and corresponding method for its manufacture
#388Pressure sensor with dual chamber cover
#389Small gauge pressure sensor using wafer bonding and electrochemical etch stopping
#390Method for producing electronic components and pressure sensor
#391Hermetic packaging and method of manufacture and use therefore
#392Method for producing a semiconductor component and a semiconductor component produced according to the method
#393Electrostatic pressure sensor with porous dielectric diaphragm
#394Pressure sensor package and electronic part
#395Pressure sensor
#396Ring oscillating digital pressure sensor manufactured by micro-electromechanical system (MEMS) processes
#397Micromechanical pressure sensing device
#398Integrated capacitive microfluidic sensors method and apparatus
#399PRESSURE TRANSDUCER DIAPHRAGM AND METHOD OF MAKING SAME
#400Differential pressure sensing device and fabricating method therefor
#401Sensor module and method of manufacturing same
#402Method for manufacturing a semiconductor component and a semiconductor component, in particular a diaphragm sensor
#403Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process
#404Pressure sensor
#405Capacitive pressure sensor and method therefor
#406Low cost pressure sensor for measuring oxygen pressure
#407Physical quantity sensor
#408Capacitative pressure sensor with ceramic membrane
#409Silicon carbide piezoresistive pressure transducer and method of fabrication
#410Sensor device and a method for its manufacturing
#411Method to reduce die edge shorting on pressure sensors using conductive elastomeric seals
#412Piezo-TFT cantilever MEMS fabrication
#413Method for fabricating a pressure sensor using SOI wafers
#414Pressure sensor having a chamber and a method for fabricating the same
#415Pressure sensor with dual chambers
#416Hermetic chamber with electrical feedthroughs
#417Method and apparatus for preventing catastrophic contact failure in ultra high temperature piezoresistive sensors and transducers
#418Controlling stress in MEMS structures
#419Microelectromechanical device with integrated conductive shield
#420Pressure transducer with increased sensitivity
#421Pressure sensor
#422Manufacturing process for integrated piezo elements
#423Semiconductor physical quantity sensor of electrostatic capacitance type and method for manufacturing the same
#424Isolation scheme for reducing film stress in a MEMS device
#425High accuracy, high temperature, redundant media protected differential transducers
#426Pressure sensor circuits
#427Microelectromechanical component
#428Micromechanical device and method for producing a micromechanical device
#429Method for manufacturing a microelectromechanical component, and a microelectromechanical component
#430Method and system of providing power to a pressure and temperature sensing element
#431Micromechanical pressure sensor system
#432High accuracy, high temperature, redundant media protected differential transducers
#433Semiconductor sensor device with sensor chip and method for producing the same
#434Microphone with irregular diaphragm
#435Pressure sensor with conductive ceramic membrane
#436Sensor having a diaphragm
#437Pressure sensors and methods of making the same
#438METHOD OF FORMING A PIEZORESISTIVE DEVICE CAPABLE OF SELECTING STANDARDS AND METHOD OF FORMING A CIRCUIT LAYOUT CAPABLE OF SELECTING SUB-CIRCUIT LAYOUTS
#439Method of producing semiconductor pressure sensor
#440High temperature resistant solid state pressure sensor
#441Full backside etching for pressure sensing silicon
#442Fluororesin thin film diaphragm pressure sensor and method of fabricating the same
#443Micromechanical component and method for production thereof
#444Technique for manufacturing silicon structures
#445Pressure sensor having thin pressure sensing membrane
#446Apparatus and methods for shielding integrated circuitry
#447Membrane sensor
#448Micromechanical component and suitable method for its manufacture
#449Method for manufacturing pressure sensor
#450Pressure sensors circuits
#451Piezoresistive strain concentrator
#452Piezoresistive strain concentrator
#453Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block
#454Apparatus for detecting an amount of strain and method for manufacturing same
#455Pressure sensor with thin membrane
#456Pressure sensor with conductive ceramic membrane
#457Method for making a pressure sensor
#458Fluororesin thin film diaphragm pressure sensor and method of fabricating the same
#459Sensor using a GaN transistor
#460Pressure sensor
#461Method for producing a semiconductor component and a semiconductor component produced according to the method
#462Magnetic sensor of very high sensitivity
#463Pressure sensor and method for fabricating the same
#464Microstructure comprising a surface which is functionalized through the localized deposit of a thin layer and production method thereof
#465Integrated capacitive microfluidic sensors method and apparatus
#466Combined absolute-pressure and relative-pressure sensor
#467Pressure sensing device for rheometers
#468Method of making a differential pressure sensor
#469Pressure sensor having diaphragm
#470Pressure sensors having transducers positioned to provide for low drift
#471Pressure sensors having stable gauge transducers
#472Pressure sensors having neutral plane positioned transducers
#473Pressure sensors having spacer mounted transducers
#474Implantable pressure sensors
#475Pressure sensor
#476Semiconductor pressure sensor and pressure sensing device
#477Piezo-TFT cantilever MEMS
#478Sensors based on giant planar hall effect in dilute magnetic semiconductors
#479Ultra-miniature pressure sensors and probes
#480Sensing diaphragm for a differential pressure sensor with over-pressure protection and methods
#481System and method of fabricating micro cavities
#482Micromechanical apparatus, pressure sensor, and method
#483Micromechanical pressure sensor
#484Systems and methods for high voltage rating thin film sensors
#485Systems and methods for high voltage rating thin film sensors
#486MEMS unpowered pressure sensor
#487Fabricating ultra-thin silicon carbide diaphragms
#488Method and structure of MEMS PLCSP fabrication