ClassID:

166761

G01L9/0042 - CPC Classification

Classification description:

Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements ; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means; Transmitting or indicating the displacement of flexible diaphragms Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Sub-classes:
Recent Application in this class:
#1
20260118195
2026-04-30

METHOD FOR GLASS-BONDING SEMICONDUCTOR CHIP, METHOD FOR MANUFACTURING PRESSURE SENSOR, AND BONDING APPARATUS

#2
20260085988
2026-03-26

HIGH OUTPUT EXTENDED-RANGE STRAIN GAUGE PRESSURE SENSOR

#3
20260062286
2026-03-05

MULTI-CHIP SENSOR

#4
20260056074
2026-02-26

PRESSURE SENSOR

#5
20260042661
2026-02-12

ENVIRONMENTAL BARRIER STRUCTURE WITH INTEGRATED FLUID CHANNEL

#6
20260022984
2026-01-22

PRESSURE SENSOR AND DETECTION DEVICE

#7
20250376370
2025-12-11

MEMS SENSOR WITH PARTICLE FILTER AND METHOD FOR PRODUCING IT

#8
20250271317
2025-08-28

STACKED SENSOR DEVICE

#9
20250207991
2025-06-26

PRESSURE SENSOR DEVICE AND METHOD OF MANUFACTURING PRESSURE SENSOR DEVICE

#10
20250171298
2025-05-29

METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT, AND MICROELECTROMECHANICAL COMPONENT

#11
20250155305
2025-05-15

PRESSURE SENSOR ARRANGEMENT AND METHOD OF MANUFACTURING A PRESSURE SENSOR ARRANGEMENT

#12
20250099699
2025-03-27

DIFFERENTIAL PRESSURE SENSOR FOR AN AEROSOL DELIVERY DEVICE

#13
20240377272
2024-11-14

MEASURING DEVICE FOR DETERMINING AND/OR MONITORING AT LEAST ONE PHYSICAL AND/OR CHEMICAL MEASUREMENT VARIABLE

#14
20240344910
2024-10-17

CAPACITIVE PRESSURE SENSOR FOR DETECTING A PRESSURE, COMPRISING TWO PRESSURE RANGES, AND PRODUCTION METHODS

#15
20240302236
2024-09-12

Sensor Package With A Sensor Die

#16
20240241004
2024-07-18

SENSOR ASSEMBLY WITH A FULL-BRIDGE PRESSURE SENSOR

#17
20240175772
2024-05-30

ELECTRONIC DEVICES AND METHODS OF MANUFACTURING ELECTRONIC DEVICES

#18
20240159611
2024-05-16

PRESSURE TRANSDUCERS HAVING IMPROVED RESISTANCE TO TEMPERATURE ERROR

#19
20240050671
2024-02-15

Differential pressure sensor for an aerosol delivery device

#20
20240019326
2024-01-18

Systems and methods for high voltage rating thin film sensors

#21
20240011855
2024-01-11

PRESSURE SENSOR

#22
20230380764
2023-11-30

PRESSURE SENSING IMPLANT

#23
20230308076
2023-09-28

Methods and devices for microelectromechanical resonators

#24
20230251154
2023-08-10

Sensor device including sensor unit for a gaseous medium

#25
20230243711
2023-08-03

Pressure sensors with tensioned membranes

#26
20230192477
2023-06-22

MEMS environmental sensor and preparation method therefor

#27
20230175906
2023-06-08

GLASS WAFER AND GLASS ELEMENT FOR PRESSURE SENSORS

#28
20230131075
2023-04-27

PRESSURE SENSOR

#29
20230051438
2023-02-16

Methods and devices for microelectromechanical resonators

#30
20230016416
2023-01-19

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

#31
20220411256
2022-12-29

MEMS DEVICE COMPRISING AN INSULATED SUSPENDED DIAPHRAGM, IN PARTICULAR PRESSURE SENSOR, AND MANUFACTURING PROCESS THEREOF

#32
20220341799
2022-10-27

Mems pressure sensing element with stress adjustors to minimize thermal hysteresis induced by electrical field

#33
20220315415
2022-10-06

SEMICONDUCTOR PRESSURE SENSOR AND MANUFACTURING METHOD OF SEMICONDUCTOR PRESSURE SENSOR

#34
20220268653
2022-08-25

Capacitive pressure sensor device including lower and upper electrodes

#35
20220153572
2022-05-19

FET BASED SENSORY SYSTEMS

#36
20220099513
2022-03-31

Stand-alone water detector

#37
20220099512
2022-03-31

Manufacturing method of a semiconductor pressure sensor having first silicon and second silicon substrates including an oxide film

#38
20220033249
2022-02-03

MEMS SENSOR WITH PARTICLE FILTER AND METHOD FOR PRODUCING IT

#39
20220011186
2022-01-13

SEMICONDUCTOR PRESSURE SENSOR AND MANUFACTURING METHOD THEREFOR

#40
20210372875
2021-12-02

Pressure sensor element for a pressure sensor having a strain resistance gauge on a first surface of the diaphragm

#41
20210356342
2021-11-18

Semiconductor transducer device with multilayer diaphragm and method of manufacturing a semiconductor transducer device with multilayer diaphragm

#42
20210302252
2021-09-30

Semiconductor pressure sensor and method for manufacturing the same

#43
20210284528
2021-09-16

Microstructure and method for manufacturing same

#44
20210270687
2021-09-02

Multicavity pressure sensor

#45
20210268216
2021-09-02

Differential pressure sensor for an aerosol delivery device

#46
20210262882
2021-08-26

Systems and methods for high voltage rating thin film sensors

#47
20210239556
2021-08-05

MEMS pressure sensor and method for forming the same

#48
20210239554
2021-08-05

Pressure measurement device having piezostrictive and magnetostrictive measurement units

#49
20210181050
2021-06-17

Pressure sensing device and processing method thereof

#50
20210070610
2021-03-11

Methods of forming MEMS diaphragms including corrugations

#51
20210063263
2021-03-04

Pressure detection element and pressure detection apparatus

#52
20210050348
2021-02-18

Radiation resistant circuit device, pressure transmission device, and nuclear power plant measurement system

#53
20210041318
2021-02-11

High temperature protected wire bonded sensors

#54
20210039946
2021-02-11

MEMS sensor

#55
20210010887
2021-01-14

Pressure sensor enabling high linearity of change in electrostatic capacitance

#56
20210003466
2021-01-07

Sensor device including sensor unit for a gaseous medium

#57
20200408629
2020-12-31

Arrangement for a semiconductor-based pressure sensor chip and pressure sensor chip having a bridge circuit of transistors

#58
20200408621
2020-12-31

Strain gauge with mechanically decoupled temperature sensor

#59
20200407218
2020-12-31

Methods and devices for microelectromechanical resonators

#60
20200386643
2020-12-10

Pressure sensor stacking arrangement, measuring device and method for the production thereof

#61
20200363279
2020-11-19

Pressure sensor having a high-strength bonded structure

#62
20200355567
2020-11-12

Pressure sensors with tensioned membranes

#63
20200340875
2020-10-29

Capacitive pressure with Ti electrode

#64
20200340869
2020-10-29

Sensor assemblies with multirange construction

#65
20200324881
2020-10-15

Pressure sensor and moving device having pressure sensor

#66
20200319228
2020-10-08

Composite sensor and manufacturing method thereof

#67
20200319049
2020-10-08

Double-membrane capacitive pressure sensor and manufacturing method

#68
20200284821
2020-09-10

Detecting contamination of a pressure sensor based on cross-sensitivity to acceleration

#69
20200256752
2020-08-13

Pressure sensor with a cap structured with an inner receiving section that prevents excessive spreading of a conductive adhesive

#70
20200231431
2020-07-23

Semiconductor manufacturing method and structure thereof

#71
20200225107
2020-07-16

Sensor unit and method of interconnecting a substrate and a carrier

#72
20200200633
2020-06-25

Pressure-sensor assembly having a carrier substrate

#73
20200131030
2020-04-30

Shielded semiconductor device and lead frame therefor

#74
20200131026
2020-04-30

Sensor device with flip-chip die and interposer

#75
20200109048
2020-04-09

Methods of forming MEMS diaphragms including corrugations

#76
20200064214
2020-02-27

Physical quantity sensor having a wall including first and second protrusion arrangements

#77
20200041371
2020-02-06

Piezoresistive sensor with spring flexures for stress isolation

#78
20200011757
2020-01-09

High temperature protected wire bonded sensors

#79
20200003649
2020-01-02

Vacuum-resistant pressure sensing device

#80
20190383683
2019-12-19

N-implant electrical shield for piezo-resistor sensor

#81
20190371759
2019-12-05

PHYSICAL QUANTITY MEASUREMENT DEVICE AND METHOD FOR MANUFACTURING SAME, AND PHYSICAL QUANTITY MEASUREMENT ELEMENT

#82
20190368956
2019-12-05

CSOI MEMS pressure sensing element with stress equalizers

#83
20190345026
2019-11-14

Ramping of sensor power in a microelectromechanical system device

#84
20190339147
2019-11-07

Physical quantity sensor

#85
20190337294
2019-11-07

Flow channel pressure measurement

#86
20190310153
2019-10-10

Methods for fabricating pressure sensors with non-silicon diaphragms

#87
20190292042
2019-09-26

Integrating diverse sensors in a single semiconductor device

#88
20190257703
2019-08-22

Strain gauge with mechanically decoupled temperature sensor

#89
20190242770
2019-08-08

MEMS pressure sensor and method for forming the same

#90
20190226933
2019-07-25

Micro mechanical devices with an improved recess or cavity structure

#91
20190226932
2019-07-25

Pressure sensor

#92
20190225488
2019-07-25

Methods and devices for microelectromechanical resonators

#93
20190202687
2019-07-04

Method for producing a stress-decoupled micromechanical pressure sensor

#94
20190200928
2019-07-04

Pressure sensing implant

#95
20190194015
2019-06-27

Micromechanical component including diaphragm, manufacturing method for such a component and method for operating a pressure sensor

#96
20190178739
2019-06-13

Semiconductor pressure sensor

#97
20190172995
2019-06-06

Pressure sensor and manufacturing method thereof

#98
20190165250
2019-05-30

PIEZOELECTRIC PACKAGE-INTEGRATED PRESSURE SENSING DEVICES

#99
20190154527
2019-05-23

Stress sensor

#100
20190137351
2019-05-09

Measurement fluctuation suppressing pressure sensor device

#101
20190119103
2019-04-25

Pressure sensor assembly mounted to a ceramic substrate

#102
20190119100
2019-04-25

Biocompatible monolithically integrated sensor, in particular for an active implantable medical device

#103
20190113410
2019-04-18

Two-dimensional center of pressure sensor systems, devices, and methods

#104
20190082736
2019-03-21

Differential pressure sensor for an aerosol delivery device

#105
20190078952
2019-03-14

Compact sensor connector for single-use fluid measurement

#106
20190055117
2019-02-21

Method for producing a MEMS sensor, and MEMS sensor

#107
20190051575
2019-02-14

Semiconductor device capable of suppressing cracks of through-hole protective film and short circuit of adjacent through-electrodes

#108
20190049328
2019-02-14

Device for measuring and system for measuring a pressure comprising a pressure sensor

#109
20190041288
2019-02-07

High temperature protected wire bonded sensors

#110
20190025144
2019-01-24

Pressure sensor

#111
20190017893
2019-01-17

Sensor arrangement and method for testing a sensor arrangement

#112
20180372571
2018-12-27

PRESSURE SENSOR AND METHOD FOR OPERATING A PRESSURE SENSOR

#113
20180372563
2018-12-27

Passive wireless pressure sensor for harsh environments

#114
20180346319
2018-12-06

Manufacturing method of semiconductor structure including heater

#115
20180327257
2018-11-15

Membrane for a capacitive MEMS pressure sensor and method of forming a capacitive MEMS pressure sensor

#116
20180321102
2018-11-08

STRAIN DETECTION ELEMENT, PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL

#117
20180312393
2018-11-01

Trench-based microelectromechanical transducer and method for manufacturing the microelectromechanical transducer

#118
20180277422
2018-09-27

BONDED WAFER PRODUCTION METHOD AND BONDED WAFER

#119
20180274999
2018-09-27

Semiconductor sensor device and method for manufacturing same

#120
20180252607
2018-09-06

PRESSURE SENSOR, PRESSURE SENSOR MODULE, ELECTRONIC APPARATUS, AND VEHICLE

#121
20180238757
2018-08-23

Capacitive pressure sensor

#122
20180238756
2018-08-23

Capacitive pressure sensor

#123
20180202882
2018-07-19

Pressure sensor

#124
20180202793
2018-07-19

Strain sensing element and pressure sensor

#125
20180195921
2018-07-12

Self-biased sensing device and methods of fabricating and operating same

#126
20180194618
2018-07-12

MEMS devices and methods of forming the same

#127
20180186623
2018-07-05

FET based sensory systems

#128
20180180502
2018-06-28

Sensor element

#129
20180172530
2018-06-21

Physical quantity sensing semiconductor device and method for manufacturing the same

#130
20180164168
2018-06-14

Mechanical quantity measurement device and pressure sensor using same

#131
20180136064
2018-05-17

Sensor device including sensor unit for a gaseous medium

#132
20180136063
2018-05-17

Pressure sensor sub assembly and fabrication

#133
20180124521
2018-05-03

Piezoelectric MEMS sensor, such as force, pressure, deformation sensor or microphone, with improved sensitivity

#134
20180099120
2018-04-12

Light shields for catheter sensors

#135
20180076385
2018-03-15

METHOD OF MANUFACTURING PRESSURE SENSOR, DEPOSITION SYSTEM, AND ANNEALING SYSTEM

#136
20180070162
2018-03-08

Sensor device with ingress protection

#137
20180058955
2018-03-01

Overforce control through sense die design

#138
20180024021
2018-01-25

Micro mechanical devices with an improved recess or cavity structure

#139
20180022600
2018-01-25

CMOS compatible capacitive absolute pressure sensors

#140
20180017456
2018-01-18

Pressure sensor device and manufacturing method

#141
20180009656
2018-01-11

Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone

#142
20180003580
2018-01-04

Pressure sensor and method for manufacturing a pressure sensor

#143
20170363497
2017-12-21

Differential pressure transducer

#144
20170363492
2017-12-21

Semiconductor sensor assembly for harsh media application

#145
20170334713
2017-11-23

Optimized epoxy die attach geometry for MEMS die

#146
20170328802
2017-11-16

Semiconductor pressure sensor device

#147
20170320725
2017-11-09

Low stress integrated device packages

#148
20170313578
2017-11-02

Method and structure of MEMS PLCSP fabrication

#149
20170305742
2017-10-26

Manufacturing method of semiconductor device

#150
20170305739
2017-10-26

Method for manufacturing an electromechanical device and corresponding device

#151
20170292887
2017-10-12

Pressure sensors with tensioned membranes

#152
20170292884
2017-10-12

Pressure-sensing integrated circuit device with diaphragm

#153
20170284886
2017-10-05

WATERPROOF PRESSURE SENSOR AND METHOD FOR MANUFACTURING WATERPROOF PRESSURE SENSOR

#154
20170234751
2017-08-17

Pressure detection unit and pressure sensor using the same

#155
20170234750
2017-08-17

Pressure detection unit, pressure sensor using the same, and method of manufacturing pressure detection unit

#156
20170234749
2017-08-17

Pressure detection unit and pressure sensor using the same

#157
20170219448
2017-08-03

Sensor

#158
20170217763
2017-08-03

Sensor, filter element comprising a sensor and use of said type of filter element

#159
20170217761
2017-08-03

MEMS device and process

#160
20170210618
2017-07-27

MEMS devices and methods of forming the same

#161
20170176279
2017-06-22

Pressure sensor chip

#162
20170160153
2017-06-08

Piezoelectric pressure sensor

#163
20170158001
2017-06-08

Tire pressure monitoring sensor suitable for use in an environment with liquids and/or impurities

#164
20170131168
2017-05-11

Pressure sensor

#165
20170131167
2017-05-11

Manufacturing catheter sensors

#166
20170113927
2017-04-27

Methods for fabricating pressure sensors with non-silicon diaphragms

#167
20170108391
2017-04-20

SENSOR

#168
20170089787
2017-03-30

High over-pressure capable silicon die pressure sensor

#169
20170089786
2017-03-30

High over-pressure capable silicon die pressure sensor with extended pressure signal output

#170
20170082514
2017-03-23

Optical pressure sensor with reduced mechanical stresses

#171
20170081174
2017-03-23

Integrating diverse sensors in a single semiconductor device

#172
20170074742
2017-03-16

Pressure sensor with real time health monitoring and compensation

#173
20170074735
2017-03-16

Pressure sensor, especially pressure difference sensor

#174
20170067787
2017-03-09

Pressure sensor, microphone, ultrasonic sensor, blood pressure sensor, and touch panel

#175
20170066646
2017-03-09

Semiconductor structure and manufacturing method thereof

#176
20170066645
2017-03-09

Refractory seed metal for electroplated MEMS structures

#177
20170052083
2017-02-23

Dynamic pressure sensor

#178
20170023427
2017-01-26

Self test for capacitive pressure sensors

#179
20160377497
2016-12-29

Integrated circuit with a pressure sensor

#180
20160370240
2016-12-22

High integrity process fluid pressure probe

#181
20160347604
2016-12-01

Method for manufacturing resistive element, method for manufacturing pressure sensor element, pressure sensor element, pressure sensor, altimeter, electronic apparatus, and moving object

#182
20160341619
2016-11-24

Single diaphragm transducer structure

#183
20160341616
2016-11-24

Micromechanical pressure sensor device including, formed side-by-side in a micromechanical functional layer, first and second micromechanical functional regions that correspond to a pressure sensor and another sensor, and corresponding manufacturing method

#184
20160320255
2016-11-03

3D stacked piezoresistive pressure sensor

#185
20160299025
2016-10-13

Symmetrical piezoresistive pressure sensor with stacking ICs

#186
20160290883
2016-10-06

Pressure sensor

#187
20160282205
2016-09-29

Semiconductor strain gauge

#188
20160282101
2016-09-29

Strain sensing element and pressure sensor

#189
20160272483
2016-09-22

MEMS having a cutout section on a concave portion between a substrate and a stationary member

#190
20160257561
2016-09-08

Pressure sensor having a bossed diaphragm

#191
20160238477
2016-08-18

Miniature pressure sensor having a metallic membrane for measuring a pressure of a fluid

#192
20160209284
2016-07-21

Semiconductor pressure sensor

#193
20160200567
2016-07-14

Sensor structure for sensing pressure waves and ambient pressure

#194
20160187215
2016-06-30

Dynamic quantity sensor

#195
20160169843
2016-06-16

Pressure sensing and flow control in diffusion-bonded planar devices for fluid chromatography

#196
20160169758
2016-06-16

Stress isolated differential pressure sensor

#197
20160153858
2016-06-02

Case isolated oil filled MEMS pressure sensor

#198
20160138991
2016-05-19

Microdischarge-based transducer

#199
20160137494
2016-05-19

Electronic device, physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object

#200
20160122181
2016-05-05

Microintegrated encapsulated MEMS sensor with mechanical decoupling and manufacturing process thereof

#201
20160109314
2016-04-21

Pressure sensors and methods of making the same

#202
20160103030
2016-04-14

Capacitive pressure sensor

#203
20160076961
2016-03-17

Semiconductor package with air pressure sensor

#204
20160076960
2016-03-17

Pressure sensor device and pressure sensor device manufacturing method

#205
20160076959
2016-03-17

Pressure sensor and manufacturing method of the same

#206
20160069763
2016-03-10

SEMICONDUCTOR SENSOR DEVICE FORMED WITH GEL SHEET

#207
20160047704
2016-02-18

Physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object

#208
20160039661
2016-02-11

Micromachined ultra-miniature piezoresistive pressure sensor and method of fabrication of the same

#209
20160025581
2016-01-28

Pressure sensor having strain gauges disposed on a diaphragm

#210
20160009545
2016-01-14

Strain detection element, pressure sensor, microphone, blood pressure sensor, and touch panel

#211
20160006414
2016-01-07

Methods and devices for microelectromechanical resonators

#212
20160002026
2016-01-07

Methods and devices for microelectromechanical pressure sensors

#213
20150369681
2015-12-24

Physical quantity sensor, electronic device, altimeter, electronic apparatus, and mobile object

#214
20150330858
2015-11-19

Pressure detection device and method for producing same

#215
20150330856
2015-11-19

Pressure sensor device with high sensitivity and high accuracy

#216
20150330854
2015-11-19

Differential pressure sensor and differential pressure sensor manufacturing method

#217
20150315014
2015-11-05

Top port MEMS cavity package and method of manufacture thereof

#218
20150303153
2015-10-22

Mems having a cutout section on concave portion of a substrate

#219
20150302949
2015-10-22

Apparatus and method for nanocomposite sensors

#220
20150276529
2015-10-01

Dynamic pressure sensor

#221
20150274507
2015-10-01

MEMS device and formation method thereof

#222
20150270180
2015-09-24

Method and structure of three dimensional CMOS transistors with hybrid crystal orientations

#223
20150268116
2015-09-24

Method of manufacturing pressure sensor, deposition system, and annealing system

#224
20150260596
2015-09-17

Pressure sensor with cover layer

#225
20150253208
2015-09-10

Single diaphragm transducer structure

#226
20150247773
2015-09-03

Differential pressure sensing die

#227
20150226624
2015-08-13

Microelectromechanical pressure sensor with robust diaphragm

#228
20150211949
2015-07-30

Device member including cavity and method of producing the device member including cavity

#229
20150192486
2015-07-09

Pressure sensor having a bossed diaphragm

#230
20150118779
2015-04-30

Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone

#231
20150090042
2015-04-02

Pressure sensor package with integrated sealing

#232
20150082894
2015-03-26

PRESSURE SENSOR AND PRESSURE SENSOR MANUFACTURING METHOD

#233
20150075289
2015-03-19

Ceramic pressure sensor and method for production thereof

#234
20150000417
2015-01-01

High integrity process fluid pressure probe

#235
20140360281
2014-12-11

Stress measurement sensor

#236
20140339659
2014-11-20

Method of manufacturing a semiconductor integrated circuit device having a MEMS element

#237
20140339656
2014-11-20

MEMS pressure transducer assembly

#238
20140319628
2014-10-30

Physical quantity detection device and physical quantity detector

#239
20140319585
2014-10-30

Semiconductor pressure sensor and fabrication method thereof

#240
20140318259
2014-10-30

Method of manufacturing a pressure sensor

#241
20140311249
2014-10-23

Semiconductor pressure sensor, pressure sensor apparatus, electronic equipment, and method of manufacturing semiconductor pressure sensor

#242
20140298913
2014-10-09

Sensor with isolated diaphragm

#243
20140290375
2014-10-02

Micromechanical structure having a deformable membrane and a protection against strong deformations

#244
20140283616
2014-09-25

Workfunction modulation-based sensor to measure pressure and temperature

#245
20140251030
2014-09-11

Pressure transducer substrate with self alignment feature

#246
20140246739
2014-09-04

Top port MEMS cavity package and method of manufacture thereof

#247
20140231939
2014-08-21

Capacitive pressure sensor and method

#248
20140196545
2014-07-17

Pressure measuring instrument and substrate processing apparatus provided with the pressure measuring instrument

#249
20140123771
2014-05-08

Pressure transducer utilizing non-lead containing frit

#250
20140102208
2014-04-17

Pressure sensor chip

#251
20140091410
2014-04-03

Method and apparatus for fabricating piezoresistive polysilicon by low-temperature metal induced crystallization

#252
20140070829
2014-03-13

Device for detecting the thinning down of the substrate of an integrated circuit chip

#253
20140053651
2014-02-27

Pressure sensor

#254
20140042497
2014-02-13

Semiconductor physical quantity sensor and method for manufacturing the same

#255
20140037116
2014-02-06

Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same

#256
20140033824
2014-02-06

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