166761 ⎘
Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements ; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means; Transmitting or indicating the displacement of flexible diaphragms Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
Sub-classes:METHOD FOR GLASS-BONDING SEMICONDUCTOR CHIP, METHOD FOR MANUFACTURING PRESSURE SENSOR, AND BONDING APPARATUS
#2HIGH OUTPUT EXTENDED-RANGE STRAIN GAUGE PRESSURE SENSOR
#3MULTI-CHIP SENSOR
#4PRESSURE SENSOR
#5ENVIRONMENTAL BARRIER STRUCTURE WITH INTEGRATED FLUID CHANNEL
#6PRESSURE SENSOR AND DETECTION DEVICE
#7MEMS SENSOR WITH PARTICLE FILTER AND METHOD FOR PRODUCING IT
#8STACKED SENSOR DEVICE
#9PRESSURE SENSOR DEVICE AND METHOD OF MANUFACTURING PRESSURE SENSOR DEVICE
#10METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT, AND MICROELECTROMECHANICAL COMPONENT
#11PRESSURE SENSOR ARRANGEMENT AND METHOD OF MANUFACTURING A PRESSURE SENSOR ARRANGEMENT
#12DIFFERENTIAL PRESSURE SENSOR FOR AN AEROSOL DELIVERY DEVICE
#13MEASURING DEVICE FOR DETERMINING AND/OR MONITORING AT LEAST ONE PHYSICAL AND/OR CHEMICAL MEASUREMENT VARIABLE
#14CAPACITIVE PRESSURE SENSOR FOR DETECTING A PRESSURE, COMPRISING TWO PRESSURE RANGES, AND PRODUCTION METHODS
#15Sensor Package With A Sensor Die
#16SENSOR ASSEMBLY WITH A FULL-BRIDGE PRESSURE SENSOR
#17ELECTRONIC DEVICES AND METHODS OF MANUFACTURING ELECTRONIC DEVICES
#18PRESSURE TRANSDUCERS HAVING IMPROVED RESISTANCE TO TEMPERATURE ERROR
#19Differential pressure sensor for an aerosol delivery device
#20Systems and methods for high voltage rating thin film sensors
#21PRESSURE SENSOR
#22PRESSURE SENSING IMPLANT
#23Methods and devices for microelectromechanical resonators
#24Sensor device including sensor unit for a gaseous medium
#25Pressure sensors with tensioned membranes
#26MEMS environmental sensor and preparation method therefor
#27GLASS WAFER AND GLASS ELEMENT FOR PRESSURE SENSORS
#28PRESSURE SENSOR
#29Methods and devices for microelectromechanical resonators
#30MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
#31MEMS DEVICE COMPRISING AN INSULATED SUSPENDED DIAPHRAGM, IN PARTICULAR PRESSURE SENSOR, AND MANUFACTURING PROCESS THEREOF
#32Mems pressure sensing element with stress adjustors to minimize thermal hysteresis induced by electrical field
#33SEMICONDUCTOR PRESSURE SENSOR AND MANUFACTURING METHOD OF SEMICONDUCTOR PRESSURE SENSOR
#34Capacitive pressure sensor device including lower and upper electrodes
#35FET BASED SENSORY SYSTEMS
#36Stand-alone water detector
#37Manufacturing method of a semiconductor pressure sensor having first silicon and second silicon substrates including an oxide film
#38MEMS SENSOR WITH PARTICLE FILTER AND METHOD FOR PRODUCING IT
#39SEMICONDUCTOR PRESSURE SENSOR AND MANUFACTURING METHOD THEREFOR
#40Pressure sensor element for a pressure sensor having a strain resistance gauge on a first surface of the diaphragm
#41Semiconductor transducer device with multilayer diaphragm and method of manufacturing a semiconductor transducer device with multilayer diaphragm
#42Semiconductor pressure sensor and method for manufacturing the same
#43Microstructure and method for manufacturing same
#44Multicavity pressure sensor
#45Differential pressure sensor for an aerosol delivery device
#46Systems and methods for high voltage rating thin film sensors
#47MEMS pressure sensor and method for forming the same
#48Pressure measurement device having piezostrictive and magnetostrictive measurement units
#49Pressure sensing device and processing method thereof
#50Methods of forming MEMS diaphragms including corrugations
#51Pressure detection element and pressure detection apparatus
#52Radiation resistant circuit device, pressure transmission device, and nuclear power plant measurement system
#53High temperature protected wire bonded sensors
#54MEMS sensor
#55Pressure sensor enabling high linearity of change in electrostatic capacitance
#56Sensor device including sensor unit for a gaseous medium
#57Arrangement for a semiconductor-based pressure sensor chip and pressure sensor chip having a bridge circuit of transistors
#58Strain gauge with mechanically decoupled temperature sensor
#59Methods and devices for microelectromechanical resonators
#60Pressure sensor stacking arrangement, measuring device and method for the production thereof
#61Pressure sensor having a high-strength bonded structure
#62Pressure sensors with tensioned membranes
#63Capacitive pressure with Ti electrode
#64Sensor assemblies with multirange construction
#65Pressure sensor and moving device having pressure sensor
#66Composite sensor and manufacturing method thereof
#67Double-membrane capacitive pressure sensor and manufacturing method
#68Detecting contamination of a pressure sensor based on cross-sensitivity to acceleration
#69Pressure sensor with a cap structured with an inner receiving section that prevents excessive spreading of a conductive adhesive
#70Semiconductor manufacturing method and structure thereof
#71Sensor unit and method of interconnecting a substrate and a carrier
#72Pressure-sensor assembly having a carrier substrate
#73Shielded semiconductor device and lead frame therefor
#74Sensor device with flip-chip die and interposer
#75Methods of forming MEMS diaphragms including corrugations
#76Physical quantity sensor having a wall including first and second protrusion arrangements
#77Piezoresistive sensor with spring flexures for stress isolation
#78High temperature protected wire bonded sensors
#79Vacuum-resistant pressure sensing device
#80N-implant electrical shield for piezo-resistor sensor
#81PHYSICAL QUANTITY MEASUREMENT DEVICE AND METHOD FOR MANUFACTURING SAME, AND PHYSICAL QUANTITY MEASUREMENT ELEMENT
#82CSOI MEMS pressure sensing element with stress equalizers
#83Ramping of sensor power in a microelectromechanical system device
#84Physical quantity sensor
#85Flow channel pressure measurement
#86Methods for fabricating pressure sensors with non-silicon diaphragms
#87Integrating diverse sensors in a single semiconductor device
#88Strain gauge with mechanically decoupled temperature sensor
#89MEMS pressure sensor and method for forming the same
#90Micro mechanical devices with an improved recess or cavity structure
#91Pressure sensor
#92Methods and devices for microelectromechanical resonators
#93Method for producing a stress-decoupled micromechanical pressure sensor
#94Pressure sensing implant
#95Micromechanical component including diaphragm, manufacturing method for such a component and method for operating a pressure sensor
#96Semiconductor pressure sensor
#97Pressure sensor and manufacturing method thereof
#98PIEZOELECTRIC PACKAGE-INTEGRATED PRESSURE SENSING DEVICES
#99Stress sensor
#100Measurement fluctuation suppressing pressure sensor device
#101Pressure sensor assembly mounted to a ceramic substrate
#102Biocompatible monolithically integrated sensor, in particular for an active implantable medical device
#103Two-dimensional center of pressure sensor systems, devices, and methods
#104Differential pressure sensor for an aerosol delivery device
#105Compact sensor connector for single-use fluid measurement
#106Method for producing a MEMS sensor, and MEMS sensor
#107Semiconductor device capable of suppressing cracks of through-hole protective film and short circuit of adjacent through-electrodes
#108Device for measuring and system for measuring a pressure comprising a pressure sensor
#109High temperature protected wire bonded sensors
#110Pressure sensor
#111Sensor arrangement and method for testing a sensor arrangement
#112PRESSURE SENSOR AND METHOD FOR OPERATING A PRESSURE SENSOR
#113Passive wireless pressure sensor for harsh environments
#114Manufacturing method of semiconductor structure including heater
#115Membrane for a capacitive MEMS pressure sensor and method of forming a capacitive MEMS pressure sensor
#116STRAIN DETECTION ELEMENT, PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL
#117Trench-based microelectromechanical transducer and method for manufacturing the microelectromechanical transducer
#118BONDED WAFER PRODUCTION METHOD AND BONDED WAFER
#119Semiconductor sensor device and method for manufacturing same
#120PRESSURE SENSOR, PRESSURE SENSOR MODULE, ELECTRONIC APPARATUS, AND VEHICLE
#121Capacitive pressure sensor
#122Capacitive pressure sensor
#123Pressure sensor
#124Strain sensing element and pressure sensor
#125Self-biased sensing device and methods of fabricating and operating same
#126MEMS devices and methods of forming the same
#127FET based sensory systems
#128Sensor element
#129Physical quantity sensing semiconductor device and method for manufacturing the same
#130Mechanical quantity measurement device and pressure sensor using same
#131Sensor device including sensor unit for a gaseous medium
#132Pressure sensor sub assembly and fabrication
#133Piezoelectric MEMS sensor, such as force, pressure, deformation sensor or microphone, with improved sensitivity
#134Light shields for catheter sensors
#135METHOD OF MANUFACTURING PRESSURE SENSOR, DEPOSITION SYSTEM, AND ANNEALING SYSTEM
#136Sensor device with ingress protection
#137Overforce control through sense die design
#138Micro mechanical devices with an improved recess or cavity structure
#139CMOS compatible capacitive absolute pressure sensors
#140Pressure sensor device and manufacturing method
#141Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone
#142Pressure sensor and method for manufacturing a pressure sensor
#143Differential pressure transducer
#144Semiconductor sensor assembly for harsh media application
#145Optimized epoxy die attach geometry for MEMS die
#146Semiconductor pressure sensor device
#147Low stress integrated device packages
#148Method and structure of MEMS PLCSP fabrication
#149Manufacturing method of semiconductor device
#150Method for manufacturing an electromechanical device and corresponding device
#151Pressure sensors with tensioned membranes
#152Pressure-sensing integrated circuit device with diaphragm
#153WATERPROOF PRESSURE SENSOR AND METHOD FOR MANUFACTURING WATERPROOF PRESSURE SENSOR
#154Pressure detection unit and pressure sensor using the same
#155Pressure detection unit, pressure sensor using the same, and method of manufacturing pressure detection unit
#156Pressure detection unit and pressure sensor using the same
#157Sensor
#158Sensor, filter element comprising a sensor and use of said type of filter element
#159MEMS device and process
#160MEMS devices and methods of forming the same
#161Pressure sensor chip
#162Piezoelectric pressure sensor
#163Tire pressure monitoring sensor suitable for use in an environment with liquids and/or impurities
#164Pressure sensor
#165Manufacturing catheter sensors
#166Methods for fabricating pressure sensors with non-silicon diaphragms
#167SENSOR
#168High over-pressure capable silicon die pressure sensor
#169High over-pressure capable silicon die pressure sensor with extended pressure signal output
#170Optical pressure sensor with reduced mechanical stresses
#171Integrating diverse sensors in a single semiconductor device
#172Pressure sensor with real time health monitoring and compensation
#173Pressure sensor, especially pressure difference sensor
#174Pressure sensor, microphone, ultrasonic sensor, blood pressure sensor, and touch panel
#175Semiconductor structure and manufacturing method thereof
#176Refractory seed metal for electroplated MEMS structures
#177Dynamic pressure sensor
#178Self test for capacitive pressure sensors
#179Integrated circuit with a pressure sensor
#180High integrity process fluid pressure probe
#181Method for manufacturing resistive element, method for manufacturing pressure sensor element, pressure sensor element, pressure sensor, altimeter, electronic apparatus, and moving object
#182Single diaphragm transducer structure
#183Micromechanical pressure sensor device including, formed side-by-side in a micromechanical functional layer, first and second micromechanical functional regions that correspond to a pressure sensor and another sensor, and corresponding manufacturing method
#1843D stacked piezoresistive pressure sensor
#185Symmetrical piezoresistive pressure sensor with stacking ICs
#186Pressure sensor
#187Semiconductor strain gauge
#188Strain sensing element and pressure sensor
#189MEMS having a cutout section on a concave portion between a substrate and a stationary member
#190Pressure sensor having a bossed diaphragm
#191Miniature pressure sensor having a metallic membrane for measuring a pressure of a fluid
#192Semiconductor pressure sensor
#193Sensor structure for sensing pressure waves and ambient pressure
#194Dynamic quantity sensor
#195Pressure sensing and flow control in diffusion-bonded planar devices for fluid chromatography
#196Stress isolated differential pressure sensor
#197Case isolated oil filled MEMS pressure sensor
#198Microdischarge-based transducer
#199Electronic device, physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object
#200Microintegrated encapsulated MEMS sensor with mechanical decoupling and manufacturing process thereof
#201Pressure sensors and methods of making the same
#202Capacitive pressure sensor
#203Semiconductor package with air pressure sensor
#204Pressure sensor device and pressure sensor device manufacturing method
#205Pressure sensor and manufacturing method of the same
#206SEMICONDUCTOR SENSOR DEVICE FORMED WITH GEL SHEET
#207Physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object
#208Micromachined ultra-miniature piezoresistive pressure sensor and method of fabrication of the same
#209Pressure sensor having strain gauges disposed on a diaphragm
#210Strain detection element, pressure sensor, microphone, blood pressure sensor, and touch panel
#211Methods and devices for microelectromechanical resonators
#212Methods and devices for microelectromechanical pressure sensors
#213Physical quantity sensor, electronic device, altimeter, electronic apparatus, and mobile object
#214Pressure detection device and method for producing same
#215Pressure sensor device with high sensitivity and high accuracy
#216Differential pressure sensor and differential pressure sensor manufacturing method
#217Top port MEMS cavity package and method of manufacture thereof
#218Mems having a cutout section on concave portion of a substrate
#219Apparatus and method for nanocomposite sensors
#220Dynamic pressure sensor
#221MEMS device and formation method thereof
#222Method and structure of three dimensional CMOS transistors with hybrid crystal orientations
#223Method of manufacturing pressure sensor, deposition system, and annealing system
#224Pressure sensor with cover layer
#225Single diaphragm transducer structure
#226Differential pressure sensing die
#227Microelectromechanical pressure sensor with robust diaphragm
#228Device member including cavity and method of producing the device member including cavity
#229Pressure sensor having a bossed diaphragm
#230Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone
#231Pressure sensor package with integrated sealing
#232PRESSURE SENSOR AND PRESSURE SENSOR MANUFACTURING METHOD
#233Ceramic pressure sensor and method for production thereof
#234High integrity process fluid pressure probe
#235Stress measurement sensor
#236Method of manufacturing a semiconductor integrated circuit device having a MEMS element
#237MEMS pressure transducer assembly
#238Physical quantity detection device and physical quantity detector
#239Semiconductor pressure sensor and fabrication method thereof
#240Method of manufacturing a pressure sensor
#241Semiconductor pressure sensor, pressure sensor apparatus, electronic equipment, and method of manufacturing semiconductor pressure sensor
#242Sensor with isolated diaphragm
#243Micromechanical structure having a deformable membrane and a protection against strong deformations
#244Workfunction modulation-based sensor to measure pressure and temperature
#245Pressure transducer substrate with self alignment feature
#246Top port MEMS cavity package and method of manufacture thereof
#247Capacitive pressure sensor and method
#248Pressure measuring instrument and substrate processing apparatus provided with the pressure measuring instrument
#249Pressure transducer utilizing non-lead containing frit
#250Pressure sensor chip
#251Method and apparatus for fabricating piezoresistive polysilicon by low-temperature metal induced crystallization
#252Device for detecting the thinning down of the substrate of an integrated circuit chip
#253Pressure sensor
#254Semiconductor physical quantity sensor and method for manufacturing the same
#255Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same
#256Pressure detection module and pressure sensor device having such a pressure detection module
#257Gas backpressure sensor assembly
#258MEMS pressure sensor and manufacturing method therefor
#259Differential pressure sensor
#260Semiconductor package with air pressure sensor
#261Integrated circuit with pressure sensor having a pair of electrodes
#262Sensor device and related fabrication methods
#263Microelectromechanical pressure sensor including reference capacitor
#264Graphene pressure sensors
#265Graphene pressure sensors
#266Micromechanical component having a diaphragm
#267Apparatus and processes for silicon on insulator MEMS pressure sensors
#268MEMS pressure transducer assembly and method of packaging same
#269Semiconductor sensing device to minimize thermal noise
#270Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone
#271Pressure sensor module for sub-sea applications
#272Fluid pressure sensor and measurement probe
#273Pressure sensing and flow control in diffusion-bonded planar devices for fluid chromatography
#274MEMS capacitive pressure sensor, operating method and manufacturing method
#275Low-temperature wafer level processing for MEMS devices
#276Pressure sensor and method for manufacturing pressure sensor
#277SILICIDE GAP THIN FILM TRANSISTOR
#278PIEZORESISTIVE PRESSURE SENSOR AND PROCESS FOR PRODUCING A PIEZORESISTIVE PRESSURE SENSOR
#279Semiconductor device and manufacturing method
#280MEMS dosimeter
#281Method for producing a pressure sensor assembly and pressure sensor assembly
#282PRESSURE SENSOR
#283PRESSURE SENSOR, ESPECIALLY PRESSURE DIFFERENCE SENSOR
#284METHODS FOR ALIGNED TRANSFER OF THIN MEMBRANES TO SUBSTRATES
#285Apparatus and method for nanocomposite sensors
#286Method of forming membranes with modified stress characteristics
#287Method for etched cavity devices
#288Method for creating monocrystalline piezoresistors
#289Pressure transducer utilizing non-lead containing frit
#290Process for manufacturing a membrane microelectromechanical device, and membrane microelectromechanical device
#291Miniature high sensitivity pressure sensor
#292Compensation of stress effects on pressure sensor components
#293Capacitance type pressure sensor and method for manufacturing a capacitance type pressure sensor
#294Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same
#295Thin semiconductor device having embedded die support and methods of making the same
#296Thin semiconductor device having embedded die support and methods of making the same
#297Pressure sensor mounting structure
#298Method for manufacturing a microelectromechanical component; and a microelectromechanical component
#299Semiconductor pressure sensor, pressure sensor apparatus, electronic equipment, and method of manufacturing semiconductor pressure sensor
#300Silicon structure having bonding pad