166763 ⎘
Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements ; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means; Transmitting or indicating the displacement of flexible diaphragms; Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms Diaphragm associated with a buried cavity
SEMICONDUCTOR DIE WITH PRESSURE AND ACCELERATION SENSOR ELEMENTS
#2SEALED MICROELECTROMECHANICAL MEMBRANE DEVICE
#3SENSOR
#4Semiconductor Device and Method for Sensing External Condition in Harsh Environment
#5Fully differential capacitive pressure sensor including stacked sensor and reference capacitors
#6SEMICONDUCTOR DIE WITH PRESSURE AND ACCELERATION SENSOR ELEMENTS
#7MEMS device with dummy-area utilization for pressure enhancement
#8Method for manufacturing a membrane component and a membrane component
#9Pressure sensor assemblies with protective pressure feature of a pressure mitigation element
#10Capacitive pressure sensor
#11Semiconductor manufacturing method and structure thereof
#12MEMS device with dummy-area utilization for pressure enhancement
#13Sensor device and method of manufacture
#14Integrated system and method for measuring deformations and/or stresses in one-dimensional elements
#15Integrated micro-electromechanical device of semiconductor material having a diaphragm
#16Micro mechanical devices with an improved recess or cavity structure
#17Pressure sensor
#18Method for producing a stress-decoupled micromechanical pressure sensor
#19Semiconductor pressure sensor
#20Microelectromechanical transducer with thin-membrane for high pressures, method of manufacturing the same and system including the microelectromechanical transducer
#21Environmental sensor and manufacturing method thereof
#22Manufacturing method of semiconductor structure including heater
#23Pressure sensor
#24Multi-transducer modulus, electronic apparatus including the multi-transducer modulus and method for manufacturing the multi-transducer modulus
#25MULTIPLE DEGREE OF FREEDOM MEMS SENSOR CHIP AND METHOD FOR FABRICATING THE SAME
#26Micro mechanical devices with an improved recess or cavity structure
#27CMOS compatible capacitive absolute pressure sensors
#28Pressure sensor device and manufacturing method
#29Electronic part with sensor exposed to ambient air
#30Pressure sensor and method for producing the pressure sensor
#31Semiconductor structure and manufacturing method thereof
#32MEMS capacitive pressure sensor
#33Pressure sensor
#34MEMS chip, measuring element and pressure sensor for measuring a pressure
#35Integrated micro-electromechanical device of semiconductor material having a diaphragm, such as a pressure sensor and an actuator
#36MEMS capacitive pressure sensors
#37Piezoresistive pressure sensor device
#38Electronic device, physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object
#39Pressure sensors and methods of making the same
#40Micromachined ultra-miniature piezoresistive pressure sensor and method of fabrication of the same
#41Capacitive MEMS sensor and method
#42Method and device for measuring a vacuum pressure using a measuring cell arrangement
#43Pressure sensor with overpressure protection
#44Pressure sensor having cantilever and displacement measurement unit
#45Pressure sensor package with integrated sealing
#46Method for producing a pressure sensor and corresponding sensor
#47Semiconductor pressure sensor device and method of manufacturing the same
#48Polymer layer system pressure sensor device, and polymer layer system pressure sensor method
#49Micromachined ultra-miniature piezoresistive pressure sensor and method of fabrication of the same
#50CATHETER DIE AND METHOD OF FABRICATING THE SAME
#51Method of manufacturing a semiconductor device and a semiconductor device
#52Pressure detection module and pressure sensor device having such a pressure detection module
#53Method of providing a semiconductor structure with forming a sacrificial structure
#54Pressure sensor, oscillator, ultrasonic wave sensor and measuring method thereof
#55Catheter die
#56Catheter die and method of fabricating the same
#57Capacitive pressure sensor and method of manufacturing the same
#58Method for producing an electrical feedthrough in a substrate, and a substrate having an electrical feedthrough
#59Pressure sensor and method for manufacturing pressure sensor
#60Resonant pressure sensor and method of manufacturing the same
#61Multilayered NONON membrane in a MEMS sensor
#62Method for creating monocrystalline piezoresistors
#63Capacitive semiconductor pressure sensor
#64Pressure sensor and method for manufacturing pressure sensor
#65Capacitance type pressure sensor and method for manufacturing a capacitance type pressure sensor
#66Method of providing a semiconductor structure with forming a sacrificial structure
#67MEMS sensor capable of sensing acceleration and pressure
#68Sensor system, method for operating a sensor system, and method for manufacturing a sensor system
#69SENSOR SYSTEM AND METHOD FOR MANUFACTURING SAME
#70Integrated differential pressure sensor
#71Method for producing a semiconductor component and a semiconductor component produced according to the method
#72Method for manufacturing a semiconductor pressure sensor
#73Pressure sensor having a high full-scale value with package thereof
#74Integrated pressure sensor with double measuring scale and a high full-scale value
#75Force Measuring Device, Especially Pressure Gauge, And Associated Production Method
#76Micromechanical pressure sensor system
#77Analog data-input device provided with a pressure sensor of a microelectromechanical type
#78Integrated differential pressure sensor and manufacturing process thereof
#79Method for manufacturing a micromechanical sensor element
#80Sensor element with trenched cavity
#81Method for producing a semiconductor component and a semiconductor component produced according to the method
#82Method for manufacturing a semiconductor pressure sensor
#83Episeal pressure sensor
#84Pressure sensors and methods of making the same