166766 ⎘
Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements ; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means; Transmitting or indicating the displacement of flexible diaphragms; Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms Non square semiconductive diaphragm
Silicon carbide-based combined temperature-pressure micro-electro-mechanical system (MEMS) sensor chip and preparation method thereof
#2Micromechanical pressure sensor device including a diaphragm system and corresponding manufacturing method
#3Capacitive pressure sensors and other devices having a suspended membrane and having rounded corners at an anchor edge
#4Method of manufacturing physical quantity sensor device and physical quantity sensor device
#5Pressure sensor and microphone
#6MEMS chip, measuring element and pressure sensor for measuring a pressure
#7MEMS pressure sensor with thermal compensation
#8Pressure sensor and microphone
#9Differential pressure sensor with a capacitive read out system
#10Semiconductor device and manufacturing method thereof
#11Pressure sensor and microphone
#12Embedded MEMS sensors and related methods
#13Capacitance type pressure sensor and method for manufacturing a capacitance type pressure sensor