171077 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values Details
Sensor, sensor unit, and method for producing a sensor unit
#602MEMS APPARATUS
#603MEMS tunneling micro seismic sensor
#604MEMS device with multiple electrodes and fabricating method thereof
#605Micro electro mechanical system
#606Reducing MEMS stiction by deposition of nanoclusters
#607Bistable force and/or acceleration sensor
#608Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
#609Packaging system and process for inertial sensor modules using moving-gate transducers
#610Pendular accelerometer for detecting threshold oscillation values
#611MEMS devices
#612Tri-axis accelerometer having a single proof mass and fully differential output signals
#613Accelerometer and its fabrication technique
#614Acceleration sensor for detecting acceleration in three directions
#615Device for measuring force components, and method for its production
#616Accelerometer and its fabrication technique
#617Physical quantity sensor, manufacturing method thereof, and electronic apparatus
#618Printed circuit board arrangement comprising an oscillatory system
#619MEMS devices and methods for forming the same
#620Micromachined piezoelectric x-axis gyroscope
#621Substrate with multiple encapsulated devices
#622Micromachined piezoelectric x-axis gyroscope
#623Cantilever packages for sensor MEMS (micro-electro-mechanical system)
#624Inertial sensor
#625Integrated inertial sensor and pressure sensor, and forming method therefor
#626Sensor and a sensor system
#627Teeter-totter type MEMS accelerometer with electrodes on circuit wafer
#628Micromachined piezoelectric z-axis gyroscope
#629Package for Damping Inertial Sensor
#630MEMS sensor with stress isolation and method of fabrication
#631Combined sensor
#632Method for manufacturing MEMS device
#633Micromechanical inertial sensor and method for manufacturing same
#634Microelectromechanical systems devices and methods for the fabrication thereof
#635Sensor device and related fabrication methods
#636MEMS devices and methods of forming the same
#637Physical quantity sensor and electronic apparatus
#638Physical quantity sensor and electronic apparatus
#639Magnetic inertial sensor and method for operating the same
#640Interposer for hermetic sealing of sensor chips and for their integration with integrated circuit chips
#641Eutectic bonding of thin chips on a carrier substrate
#642Electrostatic capacitance sensor
#643Physical quantity sensor and electronic apparatus
#644Microelectromechanical sensor with out-of-plane sensing and process for manufacturing a microelectromechanical sensor
#645Method and apparatus for building three-dimensional MEMS elements
#646Suspended masses in micro-mechanical devices
#647Method and apparatus for building three-dimensional MEMS elements
#648Micromechanical component and method for the manufacture of same
#649Damping device for a micromechanical sensor device
#650Physical quantity sensor and electronic apparatus
#651Micromechanical structure and method for manufacturing a micromechanical structure
#652Substrate curvature compensation methods and apparatus
#653INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME
#654MEMS ACCELERATION SENSOR
#655INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME
#656Micro-electro-mechanical sensing device and manufacturing method thereof
#657Methods for forming MEMS devices
#658Etchant-free methods of producing a gap between two layers, and devices produced thereby
#659Inertial sensor
#660Method of manufacturing inertial sensor
#661INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SME
#662Dynamic quantity sensor
#663Sensor device manufacturing method and sensor device
#664Microsystem device and methods for fabricating the same
#665Semiconductor device and method for manufacturing same
#666Piezoresistive micromechanical sensor component and corresponding measuring method
#667Piezoresistive type Z-axis accelerometer
#668INERTIAL SENSOR
#669MEMS actuator/sensor
#670Combined sensor and method for manufacturing the same
#671Scheme to achieve robustness to electromagnetic interference in inertial sensors
#672Scheme to achieve robustness to electromagnetic interference in inertial sensors
#673ACCELERATION MEASURING APPARATUS AND ACCELERATION MEASURING METHOD
#674Linear capacitance-to-voltage converter using a single amplifier for accelerometer front ends with cancellation of spurious forces contributed by sensor circuitry
#675Linear capacitance-to-voltage converter using a single amplifier for transducer front ends with cancellation of spurious forces contributed by sensor circuitry
#676Semiconductor device
#677Method for manufacturing a micromechanical structure, and micromechanical structure
#678Physical quantity sensor and electronic apparatus
#679Method for manufacturing a micromechanical structure, and micromechanical structure
#680Inertial sensor and method of manufacturing the same
#681Micro-electromechanical system devices
#682Packaged device
#683Acceleration sensor
#684PROCESS FOR A SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIRONMENT
#685Capacitance detector for accelerometer and gyroscope and accelerometer and gyroscope with capacitance detector
#686INERTIAL SENSOR
#687Method for manufacturing physical quantity detector, and physical quantity detector
#688MEMS accelerometer using capacitive sensing and production method thereof
#689MICROSYSTEM
#690Processes and mounting fixtures for fabricating electromechanical devices and devices formed therewith
#691Acceleration sensor
#692Three-axis accelerometers and fabrication methods
#693Inertial sensor
#694METHOD OF MANUFACTURING INERTIAL SENSOR
#695Functional element, sensor element, electronic apparatus, and method for producing a functional element
#696MEMS composite transducer including compliant membrane
#697INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME
#698Method of manufacturing inertial sensor
#699Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
#700MEMS sensor device with multi-stimulus sensing
#701Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
#702Micromechanical system and corresponding manufacturing method
#703Micromechanical component and manufacturing method for a micromechanical component
#704Method for creating monocrystalline piezoresistors
#705Dynamic quantity sensor and manufacturing method thereof
#706High accuracy and high dynamic range MEMS inertial measurement unit with automatic dynamic range control
#707Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers
#708Method and structure for forming a gyroscope and accelerometer
#709Methods for making a sensitive resonating beam accelerometer
#710Acceleration sensor
#711MEMS sensor with movable Z-axis sensing element
#712Propagating signals across a web graph
#713In-plane piezoresistive detection sensor
#714Micro-electromechanical system devices
#715MEMS device having variable gap width and method of manufacture
#716Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates
#717In-plane capacitive mems accelerometer
#718MEMS device and deformation protection structure therefor and method for making same
#719Micromechanical component and manufacturing method for a micromechanical component
#720MOUNTING STRUCTURE OF CHIP AND MODULE USING THE SAME
#721Micromechanical component
#722Interconnection system on a plane adjacent to a solid-state device structure
#723MEMS device with stress isolation and method of fabrication
#724Method for manufacturing a microelectromechanical component; and a microelectromechanical component
#725Semi-conductor sensor fabrication
#726Functional device, method of manufacturing the functional device, physical quantity sensor, and electronic apparatus
#727Method of Manufacturing a Semiconductor Device Including Removing a Reformed Layer
#728Electrostatic capacitance type physical quantity sensor and angular velocity sensor
#729MEMS SENSOR
#730UNSTABLE ELECTROSTATIC SPRING ACCELEROMETER
#731METHOD OF PRODUCING ELECTRONIC MODULE, AND ELECTRONIC MODULE
#732Physical quantity sensor
#733Semiconductor device and method for manufacturing the same
#734Method of producing a microelectromechanical (MEMS) sensor device
#735MEMS device and method of manufacturing MEMS device
#736Micromechanical component and manufacturing method for a micromechanical component
#737Sensor module
#738Inertial sensor and method for manufacturing an inertial sensor
#739MEMS element and method for manufacturing same
#740Systems and methods for mounting inertial sensors
#741High impact resistant acceleration sensor
#742Method for fabricating miniature structures or devices such as RF and microwave components
#743Device structures for in-plane and out-of-plane sensing micro-electro-mechanical systems (MEMS)
#744MEMS tunneling accelerometer
#745Semiconductor device and method of manufacture thereof
#746Micromechanical system
#747Miniaturized piezoelectric accelerometers
#748Physical quantity sensor and electronic apparatus
#749ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE
#750Inertial sensor and method of manufacturing the same
#751Method for determining leak rate through a bond line of a MEMS device
#752Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer
#753Method for manufacturing electronic component
#754Stacked lateral overlap transducer (SLOT) based three-axis accelerometer
#755Micromachined piezoelectric z-axis gyroscope
#756Micromachined piezoelectric x-axis gyroscope
#757Micromachined piezoelectric X-Axis gyroscope
#758Method for manufacturing a micro-electromechanical structure
#759Semiconductor device with a controlled cavity and method of formation
#760Methods for making a sensitive resonating beam accelerometer
#761MEMS sensor
#762Semiconductor physical quantity sensor
#763In-plane sensor and method for making same
#764SENSOR AND METHOD FOR MANUFACTURING A SENSOR
#765Force sensor with reduced noise
#766ELECTRICAL CONTACT CONFIGURATION OF MICRO-ELECTROMECHANICAL COMPONENT AND FABRICATION METHOD
#767ACCELERATION SENSOR WITH PROTRUSIONS FACING STOPPERS
#768Manufacturing method of combined sensor
#769Three-axis accelerometers and fabrication methods
#770Method for manufacturing acceleration sensing unit
#771ACCELERATION SENSOR
#772Acceleration sensor having an electrode bridge
#773Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
#774Semiconductor device
#775Fabrication process and package design for use in a micro-machined seismometer or other device
#776Capacitive sensor device and a method of sensing accelerations
#777Method for fabricating a microelectromechanical sensor with a piezoresistive type readout
#778Semiconductor device and manufacturing method of the same
#779Micromechanical structure comprising a mobile part having stops for out-of plane displacements of the structure and its production process
#780Semiconductor device using a silicon wafer with a pattern arrangement
#781Acceleration sensor
#782Micro electro mechanical system
#783Region divided substrate and semiconductor device
#784Flexure assemblies and methods for manufacturing and using the same
#785Optical detection method and optical MEMS detector, and method for making MEMS detector
#786Packaged device and method of manufacturing the same
#787MEMS SENSOR, METHOD OF MANUFACTURING THEREOF, AND ELECTRONIC APPARATUS
#788Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor
#789PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING PHYSICAL QUANTITY SENSOR
#790Acceleration sensor
#791MEMS DEVICE
#792Omnidirectional accelerometer device and medical device incorporating same
#793Method for fabricating micro-electro-mechanical system (MEMS) device
#794Thermal bubble type angular accelerometer
#795Single crystal silicon sensor with additional layer and method of producing the same
#796Semiconductor device and method of fabricating the semiconductor device
#797Micromechanical structure and method for manufacturing a micromechanical structure
#798Miniature RF and Microwave Components and Methods for Fabricating Such Components
#799Manufacturing method for a micromechanical component and micromechanical component
#800Acceleration sensor, semiconductor device and method of manufacturing semiconductor device
#801Inertial sensor having a field effect transistor
#802PHYSICAL QUANTITY SENSOR, MANUFACTURING METHOD OF PHYSICAL QUANTITY SENSOR, AND ELECTRONIC APPARATUS
#803Micromechanical system
#804MEMS SENSOR, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING MEMS SENSOR
#805MEMS device with stress isolation and method of fabrication
#806Microsystem
#807Micromechanical component
#808Inertial sensor and method of manufacturing the same
#809Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors
#810Acceleration sensor
#811MEMS mass-spring-damper systems using an out-of-plane suspension scheme
#812Methods of and Apparatus for Electrochemically Fabricating Structures Via Interlaced Layers or Via Selective Etching and Filling of Voids
#813Manufacturing method for a micromechanical component having a thin-layer capping
#814Microelectromechanical inertial sensor with atmospheric damping
#815SEMICONDUCTOR DEVICE AND METHOD
#816Uniaxial acceleration sensor
#817Method for sensing acceleration using a translational mass in-plane MEMS accelerometer
#818Translational mass in-plane MEMS accelerometer
#819CMOS microelectromechanical system (MEMS) device and fabrication method thereof
#820Bidirectional, out-of-plane, comb drive accelerometer
#821Silicon-Rich Nitride Etch Stop Layer for Vapor HF Etching in MEMS Device Fabrication
#822MEMS DEVICE AND METHOD OF FABRICATING THE MEMS DEVICE
#823MICROMECHANICAL ACCELERATION SENSOR AND METHOD FOR MANUFACTURING AN ACCELERATION SENSOR
#824Semiconductor dynamic quantity sensor and method of manufacturing the same
#825MEMS rotational sensor with improved anchoring
#826Gap control for die or layer bonding using intermediate layers
#827Acceleration sensor element and acceleration sensor having same
#828MEMS SENSOR AND ELECTRONIC APPARATUS
#829Physical quantity sensor
#830Mesoscale and microscale device fabrication methods using split structures and alignment elements
#831Carrier modulating accelerometer
#832Sensor module
#833MEMS sensor, method of manufacturing MEMS sensor, and electronic apparatus
#834SENSOR SYSTEM
#835Tri-axis accelerometer having a single proof mass and fully differential output signals
#836Multi-axial linear and rotational displacement sensor
#837Sensor device and method of manufacturing the sensor device
#838Bridge sensor with collocated electronics and two-wire interface
#839Using pole pieces to guide magnetic flux through a MEMS device and method of making
#840MEMS sensor, MEMS sensor manufacturing method, and electronic device
#841MEMS SENSOR, MEMS SENSOR MANUFACTURING METHOD, AND ELECTRONIC DEVICE
#842Vertically integrated MEMS sensor device with multi-stimulus sensing
#843Process for fabricating a capacitance type tri-axial accelerometer
#844Using pole pieces to guide magnetic flux through a MEMS device and method of making
#845Vertically integrated MEMS acceleration transducer
#846Method of accurately spacing Z-axis electrode
#847MEMS SENSOR, MEMS SENSOR MANUFACTURING METHOD, AND ELECTRONIC DEVICE
#848Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns
#849Acceleration sensor and electronic device
#8503-axis accelerometer with gap-closing capacitive electrodes
#851Acceleration sensor having substrate, web, and seismic mass
#852Sensor element for sensing accelerations in three spatial directions
#853MICROMECHANICAL COMPONENT AND METHOD FOR OPERATING A MICROMECHANICAL COMPONENT
#854MEMS sensor
#855Method of Fabricating High Aspect Ratio Transducer Using Metal Compression Bonding
#856Cavity closure process for at least one microelectronic device
#857Acceleration sensor
#858Inertial or resonating sensor in surface technology, with out of plane detection by strain gauge
#859Sensors and actuators using piezo polymer layers
#860SYSTEM AND METHOD FOR INCREASED FLUX DENSITY D'ARSONVAL MEMS ACCELEROMETER
#861Semiconductor device including sensor member and cap member and method of making the same
#862Method of epitaxially growing piezoresistors
#863Microphone and orientation sensor assembly
#864MEMS accelerometer having a flux concentrator between parallel magnets
#865Use of field oxidation to simplify chamber fabrication in microfluidic devices
#866MEMS SENSOR AND MEMS SENSOR MANUFACTURE METHOD
#867Method of making a sensing unit
#868Semiconductor device and method for manufacturing the same
#869Sensor for detecting acceleration
#870Mechanical quantity sensor and method of manufacturing the same
#871Electrochemically Fabricated Hermetically Sealed Microstructures and Methods of and Apparatus for Producing Such Structures
#872High-sensitivity z-axis vibration sensor and method of fabricating the same
#873Method for manufacturing electronic component
#874SEMICONDUCTOR PHYSICAL QUANTITY SENSOR AND CONTROL DEVICE USING THE SAME
#875INERTIA FORCE SENSOR
#876Micromechanical component
#877Semiconductor dynamic quantity sensor and method of producing the same
#878Device containing plurality of smaller MEMS devices in place of a larger MEMS device
#879MEMS SENSOR AND METHOD OF MANUFACTURING THE SAME
#880Micro-electro-mechanical system device
#881Micro-electro-mechanical system device, out-of-plane sensor and method for making micro-electro-mechanical system device
#882Component and production method for a component
#883METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING VIBRATOR WHICH IS PROVIDED WITH SIDE INSULATING FILM AND INSULATING SEPARATION REGION FORMED BY THERMAL OXIDATION
#884Method and structure for forming a gyroscope and accelerometer
#885Acceleration sensor and method for its manufacture
#886MEMS sensor
#887Mechanical quantity sensor and method of manufacturing the same
#888Mounting system for torsional suspension of a MEMS device
#889Mechanical quantity sensor and method of manufacturing the same
#890Mechanical quantity sensor and method of manufacturing the same
#891Inertia sensor
#892Inertia force sensor and composite sensor for detecting inertia force
#893Method of fabricating packaged-device
#894Micro-movable device
#895Semiconductor device including a plurality of semiconductor substrates and method of manufacturing the same
#896Electrochemical Fabrication Process Including Process Monitoring, Making Corrective Action Decisions, and Taking Appropriate Actions
#897Electrochemical Fabrication Process Including Process Monitoring, Making Corrective Action Decisions, and Taking Appropriate Actions
#898Acceleration sensor and method of manufacturing acceleration sensor
#899MEMS device and method for manufacturing the same
#900MEMS sensor with movable z-axis sensing element