171077 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values Details
Capacitive accelerometer
#902Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers
#903Sensor and method of manufacturing the same
#904Acceleration sensor with surface protection
#905Sensor apparatus for detecting variations in a dynamic quantity while suppressing detection deviations that are caused by bending deformation of a sensor chip
#906Micromechanical z-sensor
#907In-plane sensor, out-of-plane sensor, and method for making same
#908Scale factor measurement for mems gyroscopes and accelerometers
#909Sensor having improved thermal stability
#910Acceleration sensor and method of fabricating it
#911Semiconductor device including groove width variation portion for inspection
#912Device sensitive to a movement comprising at least one transistor
#913MEMS sensor
#914Micromechanical Acceleration Sensor
#915Method for correcting mask pattern and method for manufacturing acceleration sensor and angular velocity sensor by using the method for correcting the mask pattern
#916Element structure and method for producing the same
#917Semiconductor device with reduced sensitivity to package stress
#918SEMICONDUCTOR SENSOR AND MANUFACTURING METHOD OF SENSOR BODY FOR SEMICONDUCTOR SENSOR
#919Backside controlled MEMS capacitive sensor and interface and method
#920Acceleration sensor resistant to excessive force breakage
#921Three-axis accelerometers and fabrication methods
#922In-plane sensor and method for making same
#923Wafer level package structure, and sensor device obtained from the same package structure
#924Interconnection system on a plane adjacent to a solid-state device structure
#925Physical quantity sensor and method for manufacturing the same
#926Resonant accelerometer with low sensitivity to package stress
#927Semiconductor physical quantity sensor and method for manufacturing the same
#928External force detection device
#929Acceleration sensor
#930Semiconductor acceleration sensor
#931Sensor device and production method therefor
#932Element wafer and method for manufacturing the same
#933Physical quantity sensor
#934ACCELERATION SENSOR
#935Electromechanical sensor apparatus and methods with multisensing aspects
#936Physical sensor
#937Fiber optic acceleration and displacement sensors
#938Method for MEMS threshold sensor packaging
#939Semiconductor Device Having Element Portion and Method of Producing the Same
#940Acceleration sensor
#941Inertial sensor
#942Semiconductor mechanical sensor
#943Semiconductor device and method of manufacturing the semiconductor device
#944Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates
#945Wafer level package structure and production method therefor
#946Sensor device and production method therefor
#947Micromechanical system including a suspension and an electrode positioned movably
#948Method of manufacturing flexible semiconductor assemblies
#949Method for manufacturing a pendulous accelerometer
#950Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
#951Integrated sensor and circuitry
#952Accelerometer
#953Packaged micro movable device and method for making the same
#954Method for manufacturing a microelectromechanical component, and a microelectromechanical component
#955MEMS DIAPHRAGM STRUCTURE AND METHOD FOR FORMING THE SAME
#956SOI substrate and semiconductor acceleration sensor using the same
#957Acceleration strain transducer
#958Semiconductor device
#959Pendulous accelerometer with balanced gas damping
#960Capacitive acceleration sensor having a movable mass and a spring element
#961MEMS element, MEMS device and MEMS element manufacturing method
#962Semiconductor device having multiple substrates
#963Displacement sensor based on photonic crystal waveguides
#964Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates
#965Acceleration sensing device
#966Semiconductor sensor device and method for manufacturing same
#967Acceleration sensor
#968Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate
#969Physical sensor and method of process
#970Method of manufacturing micro electro mechanical systems device
#971Semiconductor mechanical sensor
#972Semiconductor device and manufacturing method of the same
#973Capacitive acceleration sensor
#974Multi-axis capacitive transducer and manufacturing method for producing it
#975GRA MEMS accelerometer
#976Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
#977Packaged device and method of manufacturing the same
#978Piezo-resistive detection resonant device made using surface technologies
#979Sensing unit and method of making same
#980Sensing unit and method of making same
#981Acceleration sensor and fabrication method thereof
#982Fabrication process and package design for use in a micro-machined seismometer or other device
#983Multi-axis sensor
#984Semiconductor sensor and manufacturing method of the same
#985Passive electrically testable acceleration and voltage measurement devices
#986Acceleration sensor
#987Miniature RF and microwave components and methods for fabricating such components
#988Method for manufacturing semiconductor sensor
#989Semiconductor apparatus and method of manufacturing same
#990Semiconductor device
#991MICRO MOVABLE DEVICE, WAFER, AND METHOD OF MANUFACTURING WAFER
#992Functional device
#993Electronic part, method for fabricating electronic part, acceleration sensor, and method for fabricating acceleration sensor
#994Acceleration sensor incorporating a piezoelectric device
#995Method for manufacturing acceleration sensing unit
#996Sensor device and method for fabricating sensor device
#997Micro electrical mechanical system device
#998Semiconductor sensor and manufacturing method therefor
#999Variable-Capacity Capacitor Having A Specific Shape, Gyrometer Comprising One Such Capacitor And Accelerometer Comprising One Such Capacitor
#1000Integrated sensor and circuitry and process therefor
#1001Method for optimizing direct wafer bond line width for reduction of parasitic capacitance in MEMS accelerometers
#1002Piezoresistive sensing structure
#1003Force detector and acceleration detector and method of manufacturing the same
#1004Z-axis microelectromechanical device with improved stopper structure
#1005MOTION SENSOR, ACCELEROMETER, INCLINATION SENSOR, PRESSURE SENSOR, AND TACTILE CONTROLLER
#1006Sensor device, sensor system and methods for manufacturing them
#1007Motion sensor and method of manufacturing the same
#1008Acceleration sensor
#1009Sensor device provided with a circuit for detection of single or multiple events for generating corresponding interrupt signals
#1010Sensor module and method of manufacturing same
#1011Method for manufacturing electronic component, and electronic component
#1012Semiconductor device and manufacturing method of the same
#1013Electrochemically Fabricated Hermetically Sealed Microstructures and Methods of and Apparatus for Producing Such Structures
#1014Methods of and Apparatus for Forming Three-Dimensional Structures Integral with Semiconductor Based Circuitry
#1015Acceleration sensor having single and multi-layer substrates
#1016Physical quantity sensor and method for manufacturing the same
#1017Capacitive semiconductor sensor
#1018Systems and methods for isolation of torque and sense capacitors of an accelerometer
#1019Level sensor with redundant accelerometers
#1020Electronic device and method of manufacturing the same
#1021Micromachined artificial haircell
#1022Monolithic structures including alignment and/or retention fixtures for accepting components
#1023Three-axis inertial sensor and method of forming
#1024Tri-axis accelerometer having a single proof mass and fully differential output signals
#1025Acceleration sensor chip package and method of producing the same
#1026Semiconductor acceleration sensor
#1027Sensor having switch function, manufacturing method thereof and electronic device having sensor built therein
#1028Acceleration sensor
#1029MULTI-RANGE THREE-AXIS ACCELERATION SENSOR DEVICE
#1030Physical quantity sensor
#1031Capacitive microaccelerometers and fabrication methods
#1032CAPACITIVE ACCELERATING SENSOR BONDING SILICON SUBSTRATE AND GLASS SUBSTRATE
#1033MEMS device and method of reducing stiction in a MEMS device
#1034Wafer level capped sensor
#1035Method for manufacturing physical quantity sensor
#1036Sensor device and a method for its manufacturing
#1037Semiconductor device for providing capacitive semiconductor sensor and method for manufacturing capacitive semiconductor sensor
#1038Piezo-TFT cantilever MEMS fabrication
#1039Sensor device
#1040Manufacturing method of an acceleration sensing device
#1041Capacitive micro-electro-mechanical sensors with single crystal silicon electrodes
#1042Semiconductor Device
#1043Capacitive sensor
#1044MEMS vertical comb drive with improved vibration performance
#1045Sensor having hydrophobic coated elements
#1046Semiconductor device having microstructure and method of manufacturing microstructure
#1047Acceleration sensor and method of producing the same
#1048Carbon nanotube structure-selective separation and surface fixation
#1049Semiconductor sensor having weight of material different than that of weight arranging part
#1050Resonant inertial microsensor with variable thickness produced by surface engineering
#1051Piezoresistance element and semiconductor device having the same
#1052Triaxial membrane accelerometer
#1053MEMS resonator using frequency tuning
#1054Acceleration sensor with protrusions facing stoppers
#1055Magnetic MEMS device
#1056Force detector and acceleration detector and method of manufacturing the same
#1057Method of and Apparatus for Forming Three-Dimensional Structures Integral With Semiconductor Based Circuitry
#1058Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns
#1059Method for fabricating a three-dimensional acceleration sensor
#1060Z offset MEMS device
#1061Silicon inertial sensors formed using MEMS
#1062Inertial sensor
#1063Process for the fabrication of an inertial sensor with failure threshold
#1064Method of forming an acceleration sensor
#1065INTEGRATED MEMS PACKAGE
#1066Dynamic quantity sensor
#1067Nanoparticle Vibration and Acceleration Sensors
#1068Microelectromechanical component
#1069Semiconductor dynamic sensor and method of manufacturing the same
#1070Nanoscale Sensor
#1071Micromechanical device and method for producing a micromechanical device
#1072Polymer Nanosensor Device
#1073Tri-axis accelerometer
#1074Method of manufacturing semiconductor sensor
#1075Method for manufacturing a microelectromechanical component, and a microelectromechanical component
#1076Multiple axis accelerometer
#1077SENSOR BLOCK
#1078MEMS PERFORMANCE IMPROVEMENT USING HIGH GRAVITY FORCE CONDITIONING
#1079Assembly process for out-of-plane MEMS and three-axis sensors
#1080Passive electrically testable acceleration and voltage measurement devices
#1081Single-mask fabrication process for linear and angular piezoresistive accelerometers
#1082DISPLACEMENT DETECTION DEVICE
#1083Combined sensor and its fabrication method
#1084Three-axis accelerometer
#1085Electrical contact for a MEMS device and method of making
#1086Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
#1087Electrochemically fabricated hermetically sealed microstructures and methods of and apparatus for producing such structures
#1088Package structure for an acceleration sensor
#1089Semiconductor device and method of manufacturing and inspection thereof
#1090Mesoscale and microscale device fabrication methods using split structures and alignment elements
#1091Movement detector having six degrees of freedom with three position sensors and method for the production of a sensor
#1092Semiconductor sensor production method and semiconductor sensor
#1093Thin film accelerometer
#1094Integrated sensor and circuitry and process therefor
#1095Package for semiconductor acceleration sensor
#1096Stress release mechanism in MEMS device and method of making same
#1097Method for fabricating a three-dimensional acceleration sensor
#1098Micromachined comb capacitive accelerometer
#1099Force detector and acceleration detector and method of manufacturing the same
#1100Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensor
#1101Semiconductor sensor and manufacturing method therefor
#1102Acceleration sensing apparatus
#1103Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor
#1104Substrate contact for a capped MEMS and method of making the substrate contact at the wafer level
#1105SEMICONDUCTOR SENSOR AND METHOD OF MANUFACTURING THE SAME
#1106Capacitive microaccelerometers and fabrication methods
#1107Semiconductor acceleration sensor device and fabrication method thereof
#1108Integrated pressure and acceleration measurement device and a method of manufacture thereof
#1109Integrated monolithic tri-axial micromachined accelerometer
#1110Piezoresistive sensing structure
#1111Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith
#1112Silicon inertial sensors formed using MEMS
#1113Electromechanical transducer and method of fabricating the same
#1114Method of forming a microelectronic device
#1115Single crystal silicon sensor with additional layer and method of producing the same
#1116Capacitive sensor and a method for manufacturing the capacitive sensor
#1117Acceleration sensor and method for manufacturing the same
#1118Method of making microsensor
#1119Acceleration sensor and method of manufacturing acceleration sensor
#1120Vibrating gyrosensor and vibrating element
#1121Acceleration sensor chip
#1122Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device
#1123Acceleration sensor
#1124High performance MEMS packaging architecture
#1125Electronic component having micro-electrical mechanical system
#1126Micromachined comb capacitive accelerometer
#1127Microelectromechanical (MEM) device with a protective cap that functions as a motion stop
#1128Multiple microelectromechanical (MEM) devices formed on a single substrate and sealed at different pressures and method therefor
#1129Method of manufacturing an electronic device and electronic device
#1130Pendulous in-plane MEMS accelerometer device
#1131Weighted released-beam sensor
#1132Method for fabricating micro-mechanical devices
#1133Semiconductor device and manufacturing method thereof
#1134Acceleration sensor manufacturable by simplified method
#1135Pyramid socket suspension
#1136Pyramid socket suspension
#1137Pyramid socket suspension
#1138Method of making a microelectromechanical (MEM) device using porous material as a sacrificial layer
#1139Accelerometer
#1140Method of manufacturing external force detection sensor
#1141Displacement sensor based on photonic crystal waveguides
#1142Micromechanical device with thinned cantilever structure and related methods
#1143Microelectromechanical (MEM) device including a spring release bridge and method of making the same
#1144Semiconductor acceleration sensor and process for manufacturing the same
#1145Acceleration sensor
#1146Acceleration sensor chip package
#1147Semiconductor acceleration sensor and manufacturing method thereof
#1148Semiconductor acceleration sensor
#1149Capacitance type physical quantity sensor having sensor chip and circuit chip
#1150Sensor element with trenched cavity
#1151Method for fabricating microstructure and microstructure
#1152Semiconductor device having multiple substrates
#1153Post-release capacitance enhancement in micromachined devices and a method of performing the same
#1154Component including a fixed element that is in a silicon layer and is mechanically connected to a substrate via an anchoring element and method for its manufacture
#1155Method for manufacturing a silicon sensor and a silicon sensor
#1156Acceleration sensing device
#1157Method for making an impact detector
#1158Sensor device
#1159Tungsten coated silicon fingers
#1160Vertical offset structure and method for fabricating the same
#1161Small structure and method for fabricating the same
#1162Semiconductor mechanical sensor
#1163Method for manufacturing semiconductor physical quantity sensor
#1164Physical quantity sensor
#1165Inertial sensor
#1166Acceleration sensor and method of manufacturing acceleration sensor
#1167Piezo resistance type semiconductor device and its manufacturing method
#1168Dynamically balanced capacitive pick-off accelerometer
#1169Acceleration sensor
#1170Method for fabricating vertical offset structure
#1171Apparatus and method for anchoring micromachined structures
#1172Wafer level capped sensor
#1173Acceleration sensor
#1174Magnetic MEMS sensor device
#1175Displacement sensor
#1176Method of manufacturing MEMS device
#1177Dual-axis accelerometer
#1178Semiconductor device manufacturing method
#1179Electronic component having micro-electrical mechanical system
#1180Inertial sensor
#1181Inertial sensor
#1182Capped sensor
#1183Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
#1184Electrochemical fabrication process including process monitoring, making corrective action decisions, and taking appropriate actions
#1185Sensor device
#1186Single crystal silicon sensor with additional layer and method of producing the same
#1187Microelectromechanical system
#1188Physical quantity sensor
#1189Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
#1190Internally shock caged serpentine flexure for micro-machined accelerometer
#1191Method of inspecting a semiconductor dynamic quantity sensor
#1192Pyramid socket suspension
#1193Micromechanical device with thinned cantilever structure and related methods
#1194Vertically integrated MEMS structure with electronics in a hermetically sealed cavity
#1195Vibrating beam accelerometer
#1196Capacitive sensor for dynamical quantity
#1197Inclination sensor, method of manufacturing inclination sensor, and method of measuring inclination
#1198Semiconductor sensor device and method of producing the same
#1199Coplanar proofmasses employable to sense acceleration along three axes
#1200Method for forming at least one protective cap