171077 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values Details
Moulding assembly for forming at least one protective cap
#1202Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
#1203Semiconductor mechanical sensor
#1204Single axis accelerometer and method therefore
#1205Piezo-TFT cantilever MEMS
#1206Acceleration sensor and method of manufacturing acceleration sensor
#1207Internally shock caged serpentine flexure for micro-machined accelerometer
#1208Hermetically sealed silicon micro-machined electromechanical system (MEMS) device having diffused conductors
#1209Micromechanical sensor
#1210Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
#1211Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction
#1212Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
#1213Out-of-plane compensation suspension for an accelerometer
#1214Silicon dual inertial sensors
#1215Vibrating beam accelerometer two-wafer fabrication process
#1216Accelerometer
#1217Method of manufacturing an accelerometer
#1218Semiconductor dynamic sensor having variable capacitor formed on laminated substrate
#1219Multi-step release method for electrochemically fabricated structures
#1220Micro-sensor
#1221Fabrication method for microstructures with high aspect ratios
#1222Diamond triode devices with a diamond microtip emitter
#1223Method for manufacturing electronic device including package
#1224Foreign material removing method for capacitance type dynamic quantity sensor
#1225Acceleration sensor and manufacturing method thereof
#1226Acceleration sensor
#1227Wafer level capped sensor
#1228Capacitance type dynamic quantity sensor device
#1229Acceleration sensor
#1230Inertia sensor
#1231Methods for electrochemically fabricating multi-layer structures including regions incorporating maskless, patterned, multiple layer thickness depositions of selected materials
#1232Method of producing a contact system on the rear of a component with stacked substrates
#1233Microstructure with movable mass
#1234Semiconductor device including a potential drawing portion formed at a corner
#1235Semiconductor mechanical sensor
#1236Semiconductor dynamic quantity sensor
#12373-D deformation and motion sensors made with ionic polymer metal composites
#1238Gun control unit and method of use
#1239System for detecting peaks in vibrational energy spectra
#1240Gun control unit and method of use
#1241Guided cold atom inertial sensors with membrane integrated photonics on atom trap integrated platforms
#1242Method for reducing bias drift in a microelectromechanical systems sensor
#1243System, method and apparatus of a motion sensing stack
#1244Simulating inertial motion using true inertial motion
#1245Shock sensor resonance detection for notch filter tuning
#1246Wafer level micro-electro-mechanical systems package with accelerometer and gyroscope