171116 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
Sub-classes:PHYSICAL QUANTITY SENSOR ELEMENT AND PHYSICAL QUANTITY SENSOR DEVICE
#2Sensor Module
#3HIGH DYNAMIC RANGE VIBRATING BEAM ACCELEROMETER
#4Physical Quantity Sensor
#5ACOUSTO-OPTICAL MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER
#6APPLIANCE
#7Single Body Multi-mode Mechanical Resonator Accelerometer
#8THREE-DIMENSIONAL SHOCK DETECTION USING KNOCK SENSOR AND TUNING FORK
#9PROCESSING SYSTEM, STORAGE MEDIUM STORING PROGRAM, AND PROCESSING METHOD
#10MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
#11SYSTEM AND METHOD FOR VIBRATION SEVERITY MEASUREMENT
#12VIBRATING BEAM ACCELEROMETER
#13FORCE SENSOR WITH AN INCREASED OPERATING RANGE
#14RESONANT SENSOR SYSTEM AND METHOD FOR OPERATING A RESONANT SENSOR SYSTEM
#15SENSOR AND ELECTRONIC DEVICE
#16Single body multi-mode mechanical resonator accelerometer
#17SENSOR AND ELECTRONIC DEVICE
#18Structure, physical quantity sensor, inertial sensor, and method for manufacturing structure
#19APPLIANCE
#20SYSTEM FOR DETECTING PEAKS IN VIBRATIONAL ENERGY SPECTRA
#21INERTIAL MEASUREMENT DEVICE AND SELF-DIAGNOSIS METHOD OF INERTIAL MEASUREMENT DEVICE
#22Inertial Measurement Device
#23VIBRATING BEAM ACCELEROMETER
#24SELECTIVE LASER ETCHING QUARTZ RESONATORS
#25MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
#26Resonantly vibrating accelerometer driven in multiple vibrational modes
#27Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
#28Resonantly vibrating accelerometer with cross-coupling signal suppression
#29STRAIN SENSOR-BASED IMU SENSOR, AND INERTIAL MEASUREMENT SYSTEM COMPRISING SAME
#30Accelerometer Contact Microphones And Methods Thereof
#31Two-wire interface reference accelerometer with integrated mechanical transducing and self-calibration capability
#32Multi-axis, single mass accelerometer
#33MODE LOCALISED ACCELEROMETER
#34SINGLE AXIS RESONANT ACCELEROMETER
#35Vibration rectification error correction device, sensor module, and vibration rectification error correction method
#36Sensor and electronic device
#37Cross-beam axial accelerometer
#38HOME APPLIANCE AND CONTROL METHOD THEREFOR
#39Highly sensitive resonant force sensor with a test body and at least one resonant element decoupled and each disposed in a suitable environment
#40Z-axis resonant accelerometer with improved-performance detection structure
#41Resonant microelectromechanical sensor with improved operation
#42Sensor and electronic device
#43Physical Quantity Detection Element, Physical Quantity Sensor, And Physical Quantity Sensor Device
#44Physical quantity sensor, physical quantity sensor device, and method for manufacturing physical quantity sensor device
#45Oscillating device
#46METHOD FOR IDENTIFYING AN OBJECT HAVING A REPLACEABLE ACCESSARY AND AN OBJECT THEREFOR
#47MULTISENSOR MEMS AND/OR NEMS MEASUREMENT SYSTEM
#48Acceleration sensing device
#49System and method for vibration severity measurement
#50Vibration rectification error correction device, sensor module, and vibration rectification error correction method
#51Method and system for determining vibrations generated by a device
#52MEMS vibrating beam accelerometer with built-in test actuators
#53COMMUNICATION TERMINAL
#54Opto-mechanical resonator with two or more frequency modes
#55Generating textured three-dimensional meshes using two-dimensional scanner and panoramic camera
#56Sensor and electronic device
#57Active waveguide excitation and compensation
#58Diagnosis system, diagnosis method, program, and recording medium
#59Physical quantity sensor module, clinometer, and structure monitoring device
#60High precision rotation sensor and method
#61Inertial sensor and method of inertial sensing with tuneable mode coupling strength
#62Vibrating beam accelerometer with pressure damping
#63Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers
#64Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling
#65Resonator including one or more mechanical beams with added mass
#66Acceleration sensor comprising differential graphene resonant beams
#67Accelerometer contact microphones and methods thereof
#68INERTIAL MEASUREMENT APPARATUS, ELECTRONIC INSTRUMENT, AND MOVING OBJECT
#69VIBRATOR DEVICE
#70Inertial measurement unit having a sensor unit that is detachable from a substrate
#71Signal equalization method, device and storage medium based on motor vibration acceleration
#72Feedthrough rejection for optomechanical devices using elements
#73Electronic device, manufacturing method for electronic device, electronic apparatus, and vehicle
#74Optomechanical structure with corrugated edge
#75Anchor structure for securing optomechanical structure
#76Mechanical link for MEMS and NEMS mechanical structure, and MEMS and NEMS structure comprising such a mechanical link
#77Inertial sensor, electronic instrument, and vehicle
#78PIEZOELECTRIC SENSOR
#79Malfunction detection device and malfunction detection method
#80Torsional oscillator micro electro mechanical systems accelerometer
#81Method for installing inertial sensor unit, and inertial sensor unit
#82MEMS tri-axial accelerometer with one or more decoupling elements
#83Feedback cooling and detection for optomechanical devices
#84Physical quantity sensor having a movable portion including a frame surrounding a fixed portion fixed to a substrate
#85Method and apparatus for analyzing mouse gliding performance
#86Prestrained vibrating accelerometer
#87Accelerometer for determining an acceleration based on modulated optical signals
#88Sensor device including angular velocity sensor element and acceleration sensor element
#89MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
#90MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
#91Integrated Resonant Accelerometer Using Optical Strain Sensor
#92Multi-axis, single mass accelerometer
#93High performance micro-electro-mechanical systems accelerometer
#94High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
#95Apparatus and methods for photonic integrated resonant accelerometers
#96High performance micro-electro-mechanical systems accelerometer with electrostatic control of proof mass
#97Vibrating beam accelerometer
#98Vibrator device, method of manufacturing vibrator device, electronic apparatus, and vehicle
#99Mechanically-isolated in-plane pendulous vibrating beam accelerometer
#100In-plane translational vibrating beam accelerometer with mechanical isolation and 4-fold symmetry
#101Resampling circuit, physical quantity sensor unit, inertial measurement unit, and structure monitoring device
#102Physical quantity sensor module, clinometer, and structure monitoring device
#103System and method for providing the amplitude and phase delay of a sinusoidal signal
#104Gravimeter or inertial sensor system using a resonant sensor and method of operating a gravimeter or inertial sensor system
#105System For Recognizing Operator Attention And Preventing Diversion
#106Method and system of dual-mode actuation and sensing for real-time calibration of axisymmetric resonant gyroscopes
#107MEMS accelerometer anti-reflective and reflector coatings
#108Optical accelerometers for use in navigation grade environments
#109Vibrating beam accelerometer
#110Microelectromechanical system (MEMS) device readout with optical directional coupler
#111Physical quantity sensor, physical quantity sensor device, composite sensor device, inertial measurement unit, electronic apparatus, and vehicle
#112Physical quantity sensor with spring having protective beam
#113Method for ascertaining a state of a product
#114Perturbation measurement, correction, and inducing system adapted to provide highly accurate perturbation measurements and reduce the effects of perturbations within the system
#115FM inertial sensor and method for operating the FM inertial sensor
#116Proof mass and polysilicon electrode integrated thereon
#117System for vibration sensing
#118Angular rate sensor with in-phase motion suppression structure
#119Integrated sensor and homologous calibration structure for resonant devices
#120Microelectronic devices for isolating drive and sense signals of sensing devices
#121Method and device for imbalance detection
#122Detection device, physical quantity measuring device, detection system, electronic device, and vehicle
#123Physical quantity detector, physical quantity detection device, electronic apparatus, and vehicle
#124Resonant opto-mechanical accelerometer for use in navigation grade environments
#125Acceleration sensor including improved mass body
#126Gyro sensor, electronic apparatus, and vehicle
#127GYRO SENSOR, ELECTRONIC APPARATUS, AND VEHICLE
#128MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
#129MOTION MEASUREMENT DEVICES AND METHODS FOR MEASURING MOTION
#130Nonlinear mass sensors based on electronic feedback and methods of using the same
#131Apparatus and methods for photonic integrated resonant accelerometers
#132Integrated resonant accelerometer using optical strain sensor
#133MEMS tri-axial accelerometer with one or more decoupling elements
#134Folded tether structure for MEMS sensor devices
#135Systems and methods for reducing vibration noise
#136MULTIPLE DEGREE OF FREEDOM MEMS SENSOR CHIP AND METHOD FOR FABRICATING THE SAME
#137Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor
#138Method for operating a rotation rate sensor using different frequencies
#139OPTICALLY ENABLED MEMS INERTIAL SENSORS ON INTEGRATED PHOTONIC PLATFORMS
#140Pinch contact switch for determining bending surface states
#141Composite vibratory in-plane accelerometer
#142Switched closed loop read-out methods and systems for resonant sensing platforms
#143Resonating measurement system using improved resolution
#144Method for forming a captive spacer housed in a mounting base of an accelerometer sensor and sensor equipped with such a mounting base
#145Inertial sensors
#146Inertial sensor
#147Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, and moving object
#148MEMS resonator
#149Angular velocity sensor
#150Ocean bottom seismic systems
#151Multi-Axis, single mass accelerometer
#152Multiple-axis resonant accelerometers
#153Mechanical low pass filter for motion sensors
#154Mechanical low pass filter for motion sensors
#155Miniature hermetic acceleration detection device
#156Active waveguide excitation and compensation
#157Optical-mechanical vibrating beam accelerometer
#158Apparatus and methods for photonic integrated resonant accelerometer
#159Extracting inertial information from nonlinear periodic signals
#160Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device
#161Nonlinear mass sensors based on electronic feedback and methods of using the same
#162Sensor including moving masses and means for detecting relative movements of the masses
#163Sensor with moving sensitive element having mixed vibrating and pendular operation, and methods for controlling such a sensor
#164Drive circuit, vibrator device, electronic apparatus, and moving object
#165Bulk acoustic wave accelerometers
#166Method of making an accelerometer
#167PLL and adaptive compensation method in PLL
#168Magnetic inertial sensor and method for operating the same
#169Physical-quantity detection circuit, physical-quantity sensor, and electronic device
#170Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation
#171Sensor device, electronic apparatus, and moving object
#172Dual use of a ring structure as gyroscope and accelerometer
#173Method and system of dual-mode actuation and sensing for real-time calibration of axisymmetric resonant gyroscopes
#174In-plane vibrating beam accelerometer
#175Accelerometer with strain compensation
#176Angular velocity sensor
#177Time domain switched ring/disc resonant gyroscope
#178Sensor device, and electronic apparatus
#179Resonant sensor
#180MEMS sensors and methods for detecting rotation rates
#181MEMS resonant accelerometer having improved electrical characteristics
#182Inertial sensor
#183Micromechanical acceleration sensor
#184Vibration-sensing field unit
#185Inertia sensor with switching elements
#186Angular velocity sensor and manufacturing method therefor
#187METHODS AND SYSTEMS FOR MANAGING MOTION INFORMATION FOR ELECTRONIC DEVICES
#188Resonating beam accelerometer
#189ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
#190System and method for detecting vibrations using an opto-analytical device
#191Vibration sensor
#192Dual and triple axis inertial sensors and methods of inertial sensing
#193Physical quantity sensor
#194Magnet placement for integrated sensor packages
#195Sensor with a vibrating member in a cavity with integrated anomaly detection
#196Resonator
#197Physical quantity sensor with multiple masses and displacement conversion mechanism
#198Method and apparatus for detecting linear and rotational movement
#199Inertial force sensor
#200Inertial force sensor and electronic device using same
#201Stress tolerant MEMS accelerometer
#202Acceleration sensor
#203Acceleration sensor
#204Micropatterned component and method for manufacturing a micropatterned component
#205Physical quantity detection apparatus
#206Physical quantity detection circuit, physical quantity detector, electronic apparatus and moving object
#207Electronic device, integrated circuit, electronic apparatus, and moving object
#208Method of manufacturing a mechanical resonating structure
#209Apparatus and methods for time domain measurement using phase shifted virtual intervals
#210MEMS inertial sensor and method of inertial sensing
#211Electro-mechanical resonance loop
#212Physical quantity sensor, electronic device, and moving object
#213Composite micro-electro-mechanical-system apparatus and manufacturing method thereof
#214Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures
#215MEMS vibrator, method of manufacturing MEMS vibrator, electronic device, and moving object
#216MEMS resonant accelerometer
#217Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation
#218Highly-reliable micro-electromechanical system temperature sensor
#219ENERGY HARVESTER POWERED ACCELEROMETER
#220Detection structure for a Z-axis resonant accelerometer
#221Bistable force and/or acceleration sensor
#222ACCELERATION SENSOR
#223SENSOR DEVICE, MOTION SENSOR, AND ELECTRONIC DEVICE
#224Sensor, electronic apparatus, robot, and mobile object
#225Bulk acoustic wave accelerometers
#226Acceleration sensor and method for producing an acceleration sensor
#227Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device
#228Techniques, systems and devices related to acceleration measurement
#229Auto-ranging for time domain extraction of perturbations to sinusoidal oscillation
#230Detection and mitigation of aerodynamic error sources for micromachined inertial sensors
#231Micro/nano multiaxial inertial sensor of movements
#232Inertial sensor using sliding plane proximity switches
#233Inertial force sensor
#234Device for measuring the temperature of a vibrating beam and application to the improvement of the precision of measurement of a vibrating-beam sensor
#235MEMS inertial sensor and method of inertial sensing
#236MEMS quadrature cancellation and signal demodulation
#237Electronic device and manufacturing method thereof, electronic apparatus, and moving body
#238Inertial force sensor
#239Vibrating beam accelerometer
#240Double-ended tuning fork with outrigger excitation
#241Sensor capable of measuring acceleration, angular velocity, and DC acceleration
#242Physical quantity detection device, physical quantity detector, and electronic device
#243Microsystem device and methods for fabricating the same
#244Physical quantity detection device, physical quantity detector, and electronic apparatus
#245Electronic damper circuit for MEMS sensors and resonators
#246Auto-ranging for time domain inertial sensor
#247Electromechanical magnetometer and applications thereof
#248MEMS actuator/sensor
#249Method for the functional checking of an inertial sensor and inertial sensor
#250Nano-resonator inertial sensor assembly
#251Sensor device, and electronic apparatus
#252Vibrating micro-system with automatic gain control loop, with integrated control of the quality factor
#253Apparatus and methods for time domain measurement of oscillation perturbations
#254External force detection apparatus and external force detection sensor
#255Acceleration measuring apparatus
#256INERTIAL SENSOR
#257Method for manufacturing physical quantity detector, and physical quantity detector
#258Acceleration sensor
#259Inertial sensor
#260NEMS comprising AlSi alloy based transducer
#261Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration
#262Orthogonally referenced integrated ensemble for navigation and timing
#263Vibration transducer
#264Methods and apparatus for improving performance of an accelerometer
#265Methods for making a sensitive resonating beam accelerometer
#266Acceleration detector, acceleration detecting device, inclination sensor, inclination sensor device, and electronic device
#267MEMS vibrating-beam accelerometer with piezoelectric drive
#268External force detecting device and external force detecting sensor
#269External force detecting method and external force detecting device
#270MEMS biaxial resonant accelerometer
#271SOLID-STATE INERTIAL SENSOR ON CHIP
#272Acceleration and angular velocity detection device
#273UNSTABLE ELECTROSTATIC SPRING ACCELEROMETER
#274Sensor device, motion sensor, and electronic device
#275Resonant sensing using extensional modes of a plate
#276Integrally fabricated micromachine and logic elements
#277Inertial sensor
#278Method for detecting accelerations and rotation rates, and MEMS sensor
#279Cantilever beam structural resonant-type integrated optical waveguide accelerometer
#280Inertial force sensor
#281Method of manufacturing a resonating structure
#282VIBRATION-TYPE FORCE DETECTION SENSOR AND VIBRATION-TYPE FORCE DETECTION DEVICE
#283Methods for making a sensitive resonating beam accelerometer
#284Acceleration sensor
#285Vibrator element, sensor device, sensor, and electronic apparatus
#286VIBRATOR ELEMENT, VIBRATOR, SENSOR, AND ELECTRONIC APPARATUS
#287Method for manufacturing acceleration sensing unit
#288Inertial measurement unit
#289ACCELERATION SENSOR AND ACCELERATION DETECTING APPARATUS
#290OSCILLATOR HAVING REDUCED SENSITIVITY TO ACCELERATION
#291Comb-structured MEMS accelerometer
#292Piezoresistive strain sensor based nanowire mechanical oscillator
#293ACCELERATION SENSOR
#294MEMS resonant accelerometer having improved electrical characteristics
#295Integrated resonating gyro accelerometer in a semiconductor substrate
#296Offset detection and compensation for micromachined inertial sensors
#297Coupled MEMS structure for motion amplification
#298Piezoelectric device, electronic device using the same, and automobile
#299Guiding blade for a proof mass and micromachined electromechanical system using such blade
#300Inertial or resonating sensor in surface technology, with out of plane detection by strain gauge