ClassID:

171116

G01P15/097 - CPC Classification

Classification description:

Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements

Sub-classes:
Recent Application in this class:
#1
20260140135
2026-05-21

PHYSICAL QUANTITY SENSOR ELEMENT AND PHYSICAL QUANTITY SENSOR DEVICE

#2
20260092947
2026-04-02

Sensor Module

#3
20260079174
2026-03-19

HIGH DYNAMIC RANGE VIBRATING BEAM ACCELEROMETER

#4
20260063661
2026-03-05

Physical Quantity Sensor

#5
20260050005
2026-02-19

ACOUSTO-OPTICAL MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER

#6
20250341315
2025-11-06

APPLIANCE

#7
20250277662
2025-09-04

Single Body Multi-mode Mechanical Resonator Accelerometer

#8
20250244355
2025-07-31

THREE-DIMENSIONAL SHOCK DETECTION USING KNOCK SENSOR AND TUNING FORK

#9
20250172583
2025-05-29

PROCESSING SYSTEM, STORAGE MEDIUM STORING PROGRAM, AND PROCESSING METHOD

#10
20250155469
2025-05-15

MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS

#11
20250147065
2025-05-08

SYSTEM AND METHOD FOR VIBRATION SEVERITY MEASUREMENT

#12
20240402213
2024-12-05

VIBRATING BEAM ACCELEROMETER

#13
20240377431
2024-11-14

FORCE SENSOR WITH AN INCREASED OPERATING RANGE

#14
20240337491
2024-10-10

RESONANT SENSOR SYSTEM AND METHOD FOR OPERATING A RESONANT SENSOR SYSTEM

#15
20240310406
2024-09-19

SENSOR AND ELECTRONIC DEVICE

#16
20240102805
2024-03-28

Single body multi-mode mechanical resonator accelerometer

#17
20240085451
2024-03-14

SENSOR AND ELECTRONIC DEVICE

#18
20240072765
2024-02-29

Structure, physical quantity sensor, inertial sensor, and method for manufacturing structure

#19
20240044678
2024-02-08

APPLIANCE

#20
20230417792
2023-12-28

SYSTEM FOR DETECTING PEAKS IN VIBRATIONAL ENERGY SPECTRA

#21
20230384345
2023-11-30

INERTIAL MEASUREMENT DEVICE AND SELF-DIAGNOSIS METHOD OF INERTIAL MEASUREMENT DEVICE

#22
20230384344
2023-11-30

Inertial Measurement Device

#23
20230366909
2023-11-16

VIBRATING BEAM ACCELEROMETER

#24
20230364715
2023-11-16

SELECTIVE LASER ETCHING QUARTZ RESONATORS

#25
20230314469
2023-10-05

MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS

#26
20230314467
2023-10-05

Resonantly vibrating accelerometer driven in multiple vibrational modes

#27
20230314464
2023-10-05

Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes

#28
20230314463
2023-10-05

Resonantly vibrating accelerometer with cross-coupling signal suppression

#29
20230288446
2023-09-14

STRAIN SENSOR-BASED IMU SENSOR, AND INERTIAL MEASUREMENT SYSTEM COMPRISING SAME

#30
20230276171
2023-08-31

Accelerometer Contact Microphones And Methods Thereof

#31
20230273235
2023-08-31

Two-wire interface reference accelerometer with integrated mechanical transducing and self-calibration capability

#32
20230236333
2023-07-27

Multi-axis, single mass accelerometer

#33
20230204621
2023-06-29

MODE LOCALISED ACCELEROMETER

#34
20230204620
2023-06-29

SINGLE AXIS RESONANT ACCELEROMETER

#35
20230168272
2023-06-01

Vibration rectification error correction device, sensor module, and vibration rectification error correction method

#36
20230152099
2023-05-18

Sensor and electronic device

#37
20230124407
2023-04-20

Cross-beam axial accelerometer

#38
20230111114
2023-04-13

HOME APPLIANCE AND CONTROL METHOD THEREFOR

#39
20230096612
2023-03-30

Highly sensitive resonant force sensor with a test body and at least one resonant element decoupled and each disposed in a suitable environment

#40
20230082421
2023-03-16

Z-axis resonant accelerometer with improved-performance detection structure

#41
20230072687
2023-03-09

Resonant microelectromechanical sensor with improved operation

#42
20230062441
2023-03-02

Sensor and electronic device

#43
20230055371
2023-02-23

Physical Quantity Detection Element, Physical Quantity Sensor, And Physical Quantity Sensor Device

#44
20230032633
2023-02-02

Physical quantity sensor, physical quantity sensor device, and method for manufacturing physical quantity sensor device

#45
20230018805
2023-01-19

Oscillating device

#46
20230010787
2023-01-12

METHOD FOR IDENTIFYING AN OBJECT HAVING A REPLACEABLE ACCESSARY AND AN OBJECT THEREFOR

#47
20220411257
2022-12-29

MULTISENSOR MEMS AND/OR NEMS MEASUREMENT SYSTEM

#48
20220341964
2022-10-27

Acceleration sensing device

#49
20220268807
2022-08-25

System and method for vibration severity measurement

#50
20220206038
2022-06-30

Vibration rectification error correction device, sensor module, and vibration rectification error correction method

#51
20220196698
2022-06-23

Method and system for determining vibrations generated by a device

#52
20220178963
2022-06-09

MEMS vibrating beam accelerometer with built-in test actuators

#53
20220150675
2022-05-12

COMMUNICATION TERMINAL

#54
20220057427
2022-02-24

Opto-mechanical resonator with two or more frequency modes

#55
20220046221
2022-02-10

Generating textured three-dimensional meshes using two-dimensional scanner and panoramic camera

#56
20210396780
2021-12-23

Sensor and electronic device

#57
20210372971
2021-12-02

Active waveguide excitation and compensation

#58
20210349132
2021-11-11

Diagnosis system, diagnosis method, program, and recording medium

#59
20210325424
2021-10-21

Physical quantity sensor module, clinometer, and structure monitoring device

#60
20210278432
2021-09-09

High precision rotation sensor and method

#61
20210270608
2021-09-02

Inertial sensor and method of inertial sensing with tuneable mode coupling strength

#62
20210140995
2021-05-13

Vibrating beam accelerometer with pressure damping

#63
20210140994
2021-05-13

Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers

#64
20210140993
2021-05-13

Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling

#65
20210140992
2021-05-13

Resonator including one or more mechanical beams with added mass

#66
20210140991
2021-05-13

Acceleration sensor comprising differential graphene resonant beams

#67
20210127202
2021-04-29

Accelerometer contact microphones and methods thereof

#68
20210123947
2021-04-29

INERTIAL MEASUREMENT APPARATUS, ELECTRONIC INSTRUMENT, AND MOVING OBJECT

#69
20210123945
2021-04-29

VIBRATOR DEVICE

#70
20210096150
2021-04-01

Inertial measurement unit having a sensor unit that is detachable from a substrate

#71
20210058020
2021-02-25

Signal equalization method, device and storage medium based on motor vibration acceleration

#72
20210048448
2021-02-18

Feedthrough rejection for optomechanical devices using elements

#73
20210025915
2021-01-28

Electronic device, manufacturing method for electronic device, electronic apparatus, and vehicle

#74
20210018531
2021-01-21

Optomechanical structure with corrugated edge

#75
20210018530
2021-01-21

Anchor structure for securing optomechanical structure

#76
20210018378
2021-01-21

Mechanical link for MEMS and NEMS mechanical structure, and MEMS and NEMS structure comprising such a mechanical link

#77
20200409367
2020-12-31

Inertial sensor, electronic instrument, and vehicle

#78
20200400708
2020-12-24

PIEZOELECTRIC SENSOR

#79
20200398447
2020-12-24

Malfunction detection device and malfunction detection method

#80
20200393247
2020-12-17

Torsional oscillator micro electro mechanical systems accelerometer

#81
20200379002
2020-12-03

Method for installing inertial sensor unit, and inertial sensor unit

#82
20200363448
2020-11-19

MEMS tri-axial accelerometer with one or more decoupling elements

#83
20200334484
2020-10-22

Feedback cooling and detection for optomechanical devices

#84
20200333375
2020-10-22

Physical quantity sensor having a movable portion including a frame surrounding a fixed portion fixed to a substrate

#85
20200319723
2020-10-08

Method and apparatus for analyzing mouse gliding performance

#86
20200319227
2020-10-08

Prestrained vibrating accelerometer

#87
20200309812
2020-10-01

Accelerometer for determining an acceleration based on modulated optical signals

#88
20200300627
2020-09-24

Sensor device including angular velocity sensor element and acceleration sensor element

#89
20200225037
2020-07-16

MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning

#90
20200225036
2020-07-16

MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning

#91
20200200792
2020-06-25

Integrated Resonant Accelerometer Using Optical Strain Sensor

#92
20200166666
2020-05-28

Multi-axis, single mass accelerometer

#93
20200166537
2020-05-28

High performance micro-electro-mechanical systems accelerometer

#94
20200124634
2020-04-23

High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement

#95
20200096537
2020-03-26

Apparatus and methods for photonic integrated resonant accelerometers

#96
20200096536
2020-03-26

High performance micro-electro-mechanical systems accelerometer with electrostatic control of proof mass

#97
20200064367
2020-02-27

Vibrating beam accelerometer

#98
20200058843
2020-02-20

Vibrator device, method of manufacturing vibrator device, electronic apparatus, and vehicle

#99
20200025792
2020-01-23

Mechanically-isolated in-plane pendulous vibrating beam accelerometer

#100
20200025790
2020-01-23

In-plane translational vibrating beam accelerometer with mechanical isolation and 4-fold symmetry

#101
20190331708
2019-10-31

Resampling circuit, physical quantity sensor unit, inertial measurement unit, and structure monitoring device

#102
20190324052
2019-10-24

Physical quantity sensor module, clinometer, and structure monitoring device

#103
20190310294
2019-10-10

System and method for providing the amplitude and phase delay of a sinusoidal signal

#104
20190301870
2019-10-03

Gravimeter or inertial sensor system using a resonant sensor and method of operating a gravimeter or inertial sensor system

#105
20190298273
2019-10-03

System For Recognizing Operator Attention And Preventing Diversion

#106
20190271718
2019-09-05

Method and system of dual-mode actuation and sensing for real-time calibration of axisymmetric resonant gyroscopes

#107
20190257854
2019-08-22

MEMS accelerometer anti-reflective and reflector coatings

#108
20190257853
2019-08-22

Optical accelerometers for use in navigation grade environments

#109
20190234988
2019-08-01

Vibrating beam accelerometer

#110
20190226847
2019-07-25

Microelectromechanical system (MEMS) device readout with optical directional coupler

#111
20190162750
2019-05-30

Physical quantity sensor, physical quantity sensor device, composite sensor device, inertial measurement unit, electronic apparatus, and vehicle

#112
20190162749
2019-05-30

Physical quantity sensor with spring having protective beam

#113
20190156648
2019-05-23

Method for ascertaining a state of a product

#114
20190103820
2019-04-04

Perturbation measurement, correction, and inducing system adapted to provide highly accurate perturbation measurements and reduce the effects of perturbations within the system

#115
20190064205
2019-02-28

FM inertial sensor and method for operating the FM inertial sensor

#116
20190035905
2019-01-31

Proof mass and polysilicon electrode integrated thereon

#117
20190018038
2019-01-17

System for vibration sensing

#118
20190017823
2019-01-17

Angular rate sensor with in-phase motion suppression structure

#119
20190003854
2019-01-03

Integrated sensor and homologous calibration structure for resonant devices

#120
20180328957
2018-11-15

Microelectronic devices for isolating drive and sense signals of sensing devices

#121
20180299341
2018-10-18

Method and device for imbalance detection

#122
20180274925
2018-09-27

Detection device, physical quantity measuring device, detection system, electronic device, and vehicle

#123
20180267078
2018-09-20

Physical quantity detector, physical quantity detection device, electronic apparatus, and vehicle

#124
20180246139
2018-08-30

Resonant opto-mechanical accelerometer for use in navigation grade environments

#125
20180238929
2018-08-23

Acceleration sensor including improved mass body

#126
20180238688
2018-08-23

Gyro sensor, electronic apparatus, and vehicle

#127
20180224278
2018-08-09

GYRO SENSOR, ELECTRONIC APPARATUS, AND VEHICLE

#128
20180216936
2018-08-02

MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning

#129
20180209791
2018-07-26

MOTION MEASUREMENT DEVICES AND METHODS FOR MEASURING MOTION

#130
20180180466
2018-06-28

Nonlinear mass sensors based on electronic feedback and methods of using the same

#131
20180172723
2018-06-21

Apparatus and methods for photonic integrated resonant accelerometers

#132
20180128850
2018-05-10

Integrated resonant accelerometer using optical strain sensor

#133
20180120342
2018-05-03

MEMS tri-axial accelerometer with one or more decoupling elements

#134
20180100874
2018-04-12

Folded tether structure for MEMS sensor devices

#135
20180077507
2018-03-15

Systems and methods for reducing vibration noise

#136
20180074090
2018-03-15

MULTIPLE DEGREE OF FREEDOM MEMS SENSOR CHIP AND METHOD FOR FABRICATING THE SAME

#137
20180065840
2018-03-08

Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor

#138
20180058852
2018-03-01

Method for operating a rotation rate sensor using different frequencies

#139
20180038890
2018-02-08

OPTICALLY ENABLED MEMS INERTIAL SENSORS ON INTEGRATED PHOTONIC PLATFORMS

#140
20180038886
2018-02-08

Pinch contact switch for determining bending surface states

#141
20180031601
2018-02-01

Composite vibratory in-plane accelerometer

#142
20180003749
2018-01-04

Switched closed loop read-out methods and systems for resonant sensing platforms

#143
20170314973
2017-11-02

Resonating measurement system using improved resolution

#144
20170242049
2017-08-24

Method for forming a captive spacer housed in a mounting base of an accelerometer sensor and sensor equipped with such a mounting base

#145
20170227572
2017-08-10

Inertial sensors

#146
20170191830
2017-07-06

Inertial sensor

#147
20170184626
2017-06-29

Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, and moving object

#148
20170170802
2017-06-15

MEMS resonator

#149
20170131100
2017-05-11

Angular velocity sensor

#150
20170123091
2017-05-04

Ocean bottom seismic systems

#151
20170123088
2017-05-04

Multi-Axis, single mass accelerometer

#152
20170108529
2017-04-20

Multiple-axis resonant accelerometers

#153
20170089943
2017-03-30

Mechanical low pass filter for motion sensors

#154
20170089942
2017-03-30

Mechanical low pass filter for motion sensors

#155
20170059607
2017-03-02

Miniature hermetic acceleration detection device

#156
20170030871
2017-02-02

Active waveguide excitation and compensation

#157
20160377647
2016-12-29

Optical-mechanical vibrating beam accelerometer

#158
20160349283
2016-12-01

Apparatus and methods for photonic integrated resonant accelerometer

#159
20160341758
2016-11-24

Extracting inertial information from nonlinear periodic signals

#160
20160305780
2016-10-20

Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device

#161
20160290855
2016-10-06

Nonlinear mass sensors based on electronic feedback and methods of using the same

#162
20160290803
2016-10-06

Sensor including moving masses and means for detecting relative movements of the masses

#163
20160282382
2016-09-29

Sensor with moving sensitive element having mixed vibrating and pendular operation, and methods for controlling such a sensor

#164
20160271649
2016-09-22

Drive circuit, vibrator device, electronic apparatus, and moving object

#165
20160258976
2016-09-08

Bulk acoustic wave accelerometers

#166
20160245841
2016-08-25

Method of making an accelerometer

#167
20160226500
2016-08-04

PLL and adaptive compensation method in PLL

#168
20160209440
2016-07-21

Magnetic inertial sensor and method for operating the same

#169
20160187136
2016-06-30

Physical-quantity detection circuit, physical-quantity sensor, and electronic device

#170
20160169935
2016-06-16

Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation

#171
20160169675
2016-06-16

Sensor device, electronic apparatus, and moving object

#172
20160153779
2016-06-02

Dual use of a ring structure as gyroscope and accelerometer

#173
20160139176
2016-05-19

Method and system of dual-mode actuation and sensing for real-time calibration of axisymmetric resonant gyroscopes

#174
20160139171
2016-05-19

In-plane vibrating beam accelerometer

#175
20160139170
2016-05-19

Accelerometer with strain compensation

#176
20160138920
2016-05-19

Angular velocity sensor

#177
20160126890
2016-05-05

Time domain switched ring/disc resonant gyroscope

#178
20160109238
2016-04-21

Sensor device, and electronic apparatus

#179
20160061857
2016-03-03

Resonant sensor

#180
20160003617
2016-01-07

MEMS sensors and methods for detecting rotation rates

#181
20150362522
2015-12-17

MEMS resonant accelerometer having improved electrical characteristics

#182
20150355218
2015-12-10

Inertial sensor

#183
20150355217
2015-12-10

Micromechanical acceleration sensor

#184
20150355216
2015-12-10

Vibration-sensing field unit

#185
20150338432
2015-11-26

Inertia sensor with switching elements

#186
20150330785
2015-11-19

Angular velocity sensor and manufacturing method therefor

#187
20150276789
2015-10-01

METHODS AND SYSTEMS FOR MANAGING MOTION INFORMATION FOR ELECTRONIC DEVICES

#188
20150268267
2015-09-24

Resonating beam accelerometer

#189
20150247877
2015-09-03

ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT

#190
20150247398
2015-09-03

System and method for detecting vibrations using an opto-analytical device

#191
20150241463
2015-08-27

Vibration sensor

#192
20150226762
2015-08-13

Dual and triple axis inertial sensors and methods of inertial sensing

#193
20150204690
2015-07-23

Physical quantity sensor

#194
20150185247
2015-07-02

Magnet placement for integrated sensor packages

#195
20150153220
2015-06-04

Sensor with a vibrating member in a cavity with integrated anomaly detection

#196
20150143905
2015-05-28

Resonator

#197
20150143904
2015-05-28

Physical quantity sensor with multiple masses and displacement conversion mechanism

#198
20150128701
2015-05-14

Method and apparatus for detecting linear and rotational movement

#199
20150122021
2015-05-07

Inertial force sensor

#200
20150046737
2015-02-12

Inertial force sensor and electronic device using same

#201
20150022431
2015-01-22

Stress tolerant MEMS accelerometer

#202
20150013457
2015-01-15

Acceleration sensor

#203
20150013456
2015-01-15

Acceleration sensor

#204
20140339654
2014-11-20

Micropatterned component and method for manufacturing a micropatterned component

#205
20140336976
2014-11-13

Physical quantity detection apparatus

#206
20140324392
2014-10-30

Physical quantity detection circuit, physical quantity detector, electronic apparatus and moving object

#207
20140312437
2014-10-23

Electronic device, integrated circuit, electronic apparatus, and moving object

#208
20140306580
2014-10-16

Method of manufacturing a mechanical resonating structure

#209
20140305213
2014-10-16

Apparatus and methods for time domain measurement using phase shifted virtual intervals

#210
20140305208
2014-10-16

MEMS inertial sensor and method of inertial sensing

#211
20140300425
2014-10-09

Electro-mechanical resonance loop

#212
20140290363
2014-10-02

Physical quantity sensor, electronic device, and moving object

#213
20140284603
2014-09-25

Composite micro-electro-mechanical-system apparatus and manufacturing method thereof

#214
20140260615
2014-09-18

Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures

#215
20140246737
2014-09-04

MEMS vibrator, method of manufacturing MEMS vibrator, electronic device, and moving object

#216
20140238132
2014-08-28

MEMS resonant accelerometer

#217
20140208823
2014-07-31

Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation

#218
20140204976
2014-07-24

Highly-reliable micro-electromechanical system temperature sensor

#219
20140182378
2014-07-03

ENERGY HARVESTER POWERED ACCELEROMETER

#220
20140174183
2014-06-26

Detection structure for a Z-axis resonant accelerometer

#221
20140165724
2014-06-19

Bistable force and/or acceleration sensor

#222
20140116137
2014-05-01

ACCELERATION SENSOR

#223
20140103467
2014-04-17

SENSOR DEVICE, MOTION SENSOR, AND ELECTRONIC DEVICE

#224
20140102217
2014-04-17

Sensor, electronic apparatus, robot, and mobile object

#225
20140102197
2014-04-17

Bulk acoustic wave accelerometers

#226
20140102196
2014-04-17

Acceleration sensor and method for producing an acceleration sensor

#227
20140090469
2014-04-03

Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device

#228
20140076051
2014-03-20

Techniques, systems and devices related to acceleration measurement

#229
20140062567
2014-03-06

Auto-ranging for time domain extraction of perturbations to sinusoidal oscillation

#230
20140060186
2014-03-06

Detection and mitigation of aerodynamic error sources for micromachined inertial sensors

#231
20140060184
2014-03-06

Micro/nano multiaxial inertial sensor of movements

#232
20140047918
2014-02-20

Inertial sensor using sliding plane proximity switches

#233
20140026657
2014-01-30

Inertial force sensor

#234
20140016666
2014-01-16

Device for measuring the temperature of a vibrating beam and application to the improvement of the precision of measurement of a vibrating-beam sensor

#235
20130298675
2013-11-14

MEMS inertial sensor and method of inertial sensing

#236
20130269413
2013-10-17

MEMS quadrature cancellation and signal demodulation

#237
20130265701
2013-10-10

Electronic device and manufacturing method thereof, electronic apparatus, and moving body

#238
20130228012
2013-09-05

Inertial force sensor

#239
20130204571
2013-08-08

Vibrating beam accelerometer

#240
20130152685
2013-06-20

Double-ended tuning fork with outrigger excitation

#241
20130133426
2013-05-30

Sensor capable of measuring acceleration, angular velocity, and DC acceleration

#242
20130112019
2013-05-09

Physical quantity detection device, physical quantity detector, and electronic device

#243
20130105921
2013-05-02

Microsystem device and methods for fabricating the same

#244
20130104677
2013-05-02

Physical quantity detection device, physical quantity detector, and electronic apparatus

#245
20130104656
2013-05-02

Electronic damper circuit for MEMS sensors and resonators

#246
20130104622
2013-05-02

Auto-ranging for time domain inertial sensor

#247
20130096825
2013-04-18

Electromechanical magnetometer and applications thereof

#248
20130075237
2013-03-28

MEMS actuator/sensor

#249
20130042664
2013-02-21

Method for the functional checking of an inertial sensor and inertial sensor

#250
20130019682
2013-01-24

Nano-resonator inertial sensor assembly

#251
20130014581
2013-01-17

Sensor device, and electronic apparatus

#252
20130008226
2013-01-10

Vibrating micro-system with automatic gain control loop, with integrated control of the quality factor

#253
20120326700
2012-12-27

Apparatus and methods for time domain measurement of oscillation perturbations

#254
20120326566
2012-12-27

External force detection apparatus and external force detection sensor

#255
20120312097
2012-12-13

Acceleration measuring apparatus

#256
20120312096
2012-12-13

INERTIAL SENSOR

#257
20120304769
2012-12-06

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Inertial sensor

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NEMS comprising AlSi alloy based transducer

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Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration

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Orthogonally referenced integrated ensemble for navigation and timing

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Vibration transducer

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Methods and apparatus for improving performance of an accelerometer

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Methods for making a sensitive resonating beam accelerometer

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External force detecting device and external force detecting sensor

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External force detecting method and external force detecting device

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MEMS biaxial resonant accelerometer

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SOLID-STATE INERTIAL SENSOR ON CHIP

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Acceleration and angular velocity detection device

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UNSTABLE ELECTROSTATIC SPRING ACCELEROMETER

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Sensor device, motion sensor, and electronic device

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Resonant sensing using extensional modes of a plate

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Integrally fabricated micromachine and logic elements

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Inertial sensor

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Method for detecting accelerations and rotation rates, and MEMS sensor

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Cantilever beam structural resonant-type integrated optical waveguide accelerometer

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Inertial force sensor

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Method of manufacturing a resonating structure

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VIBRATION-TYPE FORCE DETECTION SENSOR AND VIBRATION-TYPE FORCE DETECTION DEVICE

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Methods for making a sensitive resonating beam accelerometer

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Acceleration sensor

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Method for manufacturing acceleration sensing unit

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OSCILLATOR HAVING REDUCED SENSITIVITY TO ACCELERATION

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Comb-structured MEMS accelerometer

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Piezoresistive strain sensor based nanowire mechanical oscillator

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ACCELERATION SENSOR

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MEMS resonant accelerometer having improved electrical characteristics

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Integrated resonating gyro accelerometer in a semiconductor substrate

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Offset detection and compensation for micromachined inertial sensors

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Coupled MEMS structure for motion amplification

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Piezoelectric device, electronic device using the same, and automobile

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Guiding blade for a proof mass and micromachined electromechanical system using such blade

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Inertial or resonating sensor in surface technology, with out of plane detection by strain gauge