171118 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements by vibratory strings
Compliant Stops for MEMS Inertial Device Drive PLL Stability
#2Active waveguide excitation and compensation
#3Vibration rectification error correction circuit, physical quantity sensor module, structure monitoring device, and correction value adjustment method of vibration rectification error correction circuit
#4Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor
#5MEMS resonant accelerometer having improved electrical characteristics
#6Acceleration sensor
#7Acceleration sensor
#8Method, apparatus and system for providing metering of acceleration
#9INERTIAL FORCE SENSOR
#10MEMS resonant accelerometer having improved electrical characteristics