171124 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
Inertial sensor
#302Inertial sensor
#303Angular velocity sensor
#304Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing the apparatus
#305Physical quantity sensor
#306Micromechanical device with thinned cantilever structure and related methods
#307System and method for a three-axis MEMS accelerometer
#308Inclination sensor, method of manufacturing inclination sensor, and method of measuring inclination
#309Semiconductor sensor device and method of producing the same
#310Acceleration sensor
#311Accelerometer
#312Acceleration sensor and manufacturing method thereof
#313Acceleration sensor
#314Microstructure with movable mass