ClassID:

171124

G01P15/123 - CPC Classification

Classification description:

Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges

Recent Application in this class:
#1
20260002957
2026-01-01

CANTILEVER MOTION SENSOR

#2
20240085254
2024-03-14

Portable Strain Gauge for Improved Impulse and Peak Force Detection

#3
20240061009
2024-02-22

DETECTION DEVICE USING PIEZORESISTIVE TRANSDUCTION

#4
20230296455
2023-09-21

STRAIN SENSOR

#5
20230273235
2023-08-31

Two-wire interface reference accelerometer with integrated mechanical transducing and self-calibration capability

#6
20220155072
2022-05-19

Physical quantity sensor

#7
20220065893
2022-03-03

Circuit for sensing an analog signal, corresponding electronic system and method

#8
20220057278
2022-02-24

Portable strain gauge for improved impulse and peak force detection

#9
20220011177
2022-01-13

Piezoelectric thin-film sensor and use thereof

#10
20210302243
2021-09-30

Increasing sensitivity of a sensor using an encoded signal

#11
20210041286
2021-02-11

Self-diagnosis method for vibration sensor and vibration sensor system equipped with self-diagnosis function

#12
20210018378
2021-01-21

Mechanical link for MEMS and NEMS mechanical structure, and MEMS and NEMS structure comprising such a mechanical link

#13
20200319228
2020-10-08

Composite sensor and manufacturing method thereof

#14
20200233009
2020-07-23

Circuit for sensing an analog signal, corresponding electronic system and method

#15
20200132460
2020-04-30

Sensor unit, electronic apparatus, and moving body

#16
20200041877
2020-02-06

Posture control apparatus, holding apparatus, posture control method, and program

#17
20200025793
2020-01-23

Strain gauge sensor accelerometer with improved accuracy

#18
20200018658
2020-01-16

Portable strain gauge for improved impulse and peak force detection

#19
20190391175
2019-12-26

Acceleration sensor

#20
20190360809
2019-11-28

Signal processing apparatus, inertial sensor, acceleration measurement method, and electronic apparatus

#21
20190353506
2019-11-21

Sensor unit, construction machine, and structure monitoring device

#22
20190339147
2019-11-07

Physical quantity sensor

#23
20190265034
2019-08-29

Sensor element, inertial sensor, and electronic apparatus

#24
20190219607
2019-07-18

Measuring device for measuring the space of two selected points on a shaping machine or handling apparatus

#25
20190177153
2019-06-13

Microelectromechanical and/or nanoelectromechanical device offering improved robustness

#26
20190074833
2019-03-07

Increasing sensitivity of a sensor using an encoded signal

#27
20190073078
2019-03-07

Touch input detection using a piezoresistive sensor

#28
20190073064
2019-03-07

Piezoresistive sensor for detecting a physical disturbance

#29
20190024998
2019-01-24

GUN SHOT COUNTER

#30
20180313866
2018-11-01

Force sensor

#31
20180275160
2018-09-27

Physical quantity sensor, electronic apparatus, and vehicle

#32
20180238928
2018-08-23

Method of manufacturing physical quantity sensor device and physical quantity sensor device

#33
20180238710
2018-08-23

Inertial sensor

#34
20180231423
2018-08-16

Piezoelectric thin-film sensor and use thereof

#35
20180074091
2018-03-15

PIEZORESISTIVE SENSOR

#36
20180065840
2018-03-08

Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor

#37
20180038885
2018-02-08

Sensor

#38
20170370796
2017-12-28

Method for producing a sensor element by means of laser structuring

#39
20170336435
2017-11-23

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

#40
20170336205
2017-11-23

MEMS circuit for capacitive non-linear correction

#41
20170322096
2017-11-09

Impact sensor

#42
20170299623
2017-10-19

Inertial force sensor

#43
20170261528
2017-09-14

Damped linear accerelometer

#44
20170219619
2017-08-03

ACCELEROMETER

#45
20170184627
2017-06-29

MEMS device to selectively measure excitation in different directions

#46
20170115318
2017-04-27

Semiconductor device, electronic control system, and automobile

#47
20170059420
2017-03-02

Piezoresistive detection resonant device in particular with large vibration amplitude

#48
20170023609
2017-01-26

Method and device for examining signals

#49
20170003130
2017-01-05

Sensor for detecting angular velocity

#50
20160341759
2016-11-24

SENSOR AND METHOD OF MANUFACTURING SAME

#51
20160245880
2016-08-25

Resistive element

#52
20160233840
2016-08-11

Sensor control circuit and electronic apparatus

#53
20160069927
2016-03-10

MEMS piezoresistive acceleration sensor

#54
20160069926
2016-03-10

ACCELERATION SENSOR AND METHOD OF MANUFACTURING THE SAME

#55
20160054352
2016-02-25

MULTI-AXIS SENSOR AND METHOD FOR MANUFACTURING THE SAME

#56
20160018435
2016-01-21

MEMS accelerometer

#57
20150362521
2015-12-17

Two-dimensional material-based accelerometer

#58
20150355221
2015-12-10

In-plane piezoresistive detection sensor

#59
20150355220
2015-12-10

INERTIAL SENSOR MODULE HAVING HERMETIC SEAL FORMED OF METAL AND MULTI-AXIS SENSOR EMPLOYING THE SAME

#60
20150355219
2015-12-10

MULTI-AXIS SENSOR

#61
20150346235
2015-12-03

High-output MEMS accelerometer

#62
20150331010
2015-11-19

Acceleration sensor

#63
20150309069
2015-10-29

Micro-electromechanical device comprising a mobile mass that can move out-of-plane

#64
20150276788
2015-10-01

Angular acceleration sensor and acceleration sensor

#65
20150274504
2015-10-01

Angular acceleration sensor and acceleration sensor

#66
20150260751
2015-09-17

DETECTOR MODULE FOR MEMS SENSOR AND MEMS SENSOR HAVING THE SAME

#67
20150253349
2015-09-10

ACCELERATION SENSOR

#68
20150249434
2015-09-03

Amplifier circuit and amplifier circuit IC chip

#69
20150247880
2015-09-03

ANGULAR ACCELERATION SENSOR

#70
20150241465
2015-08-27

PIEZORESISTIVE MEMS SENSOR

#71
20150241462
2015-08-27

Angular acceleration sensor and acceleration sensor

#72
20150228637
2015-08-13

Silicon wafer with a plurality of chip patterns

#73
20150226618
2015-08-13

Piezoelectric thin-film sensor

#74
20150204897
2015-07-23

Angular velocity detection device and angular velocity sensor including the same

#75
20150198626
2015-07-16

ACCELERATION SENSOR

#76
20150135834
2015-05-21

Micro electro mechanical systems sensor

#77
20150107359
2015-04-23

PIEZORESISTANCE SENSOR MODULE AND MEMS SENSOR HAVING THE SAME

#78
20150101413
2015-04-16

Microelectromechanical pressure sensors

#79
20150059477
2015-03-05

ACCELERATION SENSOR

#80
20150059476
2015-03-05

ACCELERATION SENSOR

#81
20150028207
2015-01-29

Infrared sensor with acceleration sensor and method for operating an infrared sensor

#82
20150013455
2015-01-15

Compact device for detecting at least one acceleration and one speed of rotation

#83
20150007657
2015-01-08

INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME

#84
20150002145
2015-01-01

Resistive element

#85
20140283606
2014-09-25

ACCELERATION SENSOR

#86
20140224018
2014-08-14

MEMS force sensors fabricated using paper substrates

#87
20140150552
2014-06-05

Chip level sensor with multiple degrees of freedom

#88
20140102194
2014-04-17

Tri-axis accelerometer having a single proof mass and fully differential output signals

#89
20140085624
2014-03-27

Coaxial gyro accelerometer in a semiconductor substrate

#90
20140084393
2014-03-27

Micro electro mechanical systems device

#91
20140060184
2014-03-06

Micro/nano multiaxial inertial sensor of movements

#92
20140000368
2014-01-02

Dynamic sensor

#93
20130340527
2013-12-26

ACCELERATION SENSOR

#94
20130319118
2013-12-05

Method and apparatus for sensing signals

#95
20130319115
2013-12-05

Acceleration sensor

#96
20130312522
2013-11-28

Method and apparatus for sensing underwater signals

#97
20130241012
2013-09-19

Eutectic bonding of thin chips on a carrier substrate

#98
20130211764
2013-08-15

Auto-calibration of acceleration sensors

#99
20130193531
2013-08-01

Physical quantity sensor with son structure, and manufacturing method thereof

#100
20130167640
2013-07-04

INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME

#101
20130139593
2013-06-06

INERTIAL SENSOR WITH STRESS ISOLATION STRUCTURE

#102
20130113056
2013-05-09

Dynamic quantity sensor

#103
20130113055
2013-05-09

Sensor device manufacturing method and sensor device

#104
20130098154
2013-04-25

Piezoresistive micromechanical sensor component and corresponding measuring method

#105
20130091949
2013-04-18

Piezoresistive type Z-axis accelerometer

#106
20130091948
2013-04-18

Angular velocity detection device and angular velocity sensor including the same

#107
20130042687
2013-02-21

Piezoresistive transducer

#108
20120272742
2012-11-01

NEMS comprising AlSi alloy based transducer

#109
20120255358
2012-10-11

ACCELERATION SENSOR

#110
20120248552
2012-10-04

Method for creating monocrystalline piezoresistors

#111
20120210792
2012-08-23

In-plane piezoresistive detection sensor

#112
20120185192
2012-07-19

Scheme for low power measurement

#113
20120152020
2012-06-21

Inertial sensor

#114
20120133042
2012-05-31

MOUNTING STRUCTURE OF CHIP AND MODULE USING THE SAME

#115
20120126351
2012-05-24

Interconnection system on a plane adjacent to a solid-state device structure

#116
20120105054
2012-05-03

DC responsive transducer with on-board user actuated auto-zero

#117
20120085170
2012-04-12

Shock Resistant Mounting for High G Shock Accelerometer

#118
20120073372
2012-03-29

Microelectromechanical system

#119
20120073371
2012-03-29

Microelectromechanical accelerometer with wireless transmission capabilities

#120
20120060605
2012-03-15

MEMS sensor capable of sensing acceleration and pressure

#121
20120056280
2012-03-08

MEMS Sensor Package

#122
20120024065
2012-02-02

High impact resistant acceleration sensor

#123
20110265929
2011-11-03

Method for manufacturing electronic component

#124
20110239784
2011-10-06

Force sensor chip and acceleration sensor chip

#125
20110219875
2011-09-15

Force sensor with reduced noise

#126
20110215067
2011-09-08

ACCELERATION SENSOR WITH PROTRUSIONS FACING STOPPERS

#127
20110159627
2011-06-30

Method for fabricating a microelectromechanical sensor with a piezoresistive type readout

#128
20110140214
2011-06-16

Semiconductor device using a silicon wafer with a pattern arrangement

#129
20110117689
2011-05-19

Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor

#130
20110113881
2011-05-19

Acceleration sensor

#131
20110108933
2011-05-12

MEMS DEVICE

#132
20110107841
2011-05-12

Piezoresistive strain sensor based nanowire mechanical oscillator

#133
20110057274
2011-03-10

Acceleration sensor, semiconductor device and method of manufacturing semiconductor device

#134
20110051144
2011-03-03

Integrated resonating gyro accelerometer in a semiconductor substrate

#135
20110041608
2011-02-24

Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors

#136
20110006380
2011-01-13

Uniaxial acceleration sensor

#137
20100315248
2010-12-16

Component RFID tag with non-volatile display of component use including the use of energy harvesting

#138
20100308794
2010-12-09

Scheme for low power strain measurement

#139
20100300205
2010-12-02

Acceleration sensor element and acceleration sensor having same

#140
20100270889
2010-10-28

Piezo devices with air-spaced cantilever

#141
20100263447
2010-10-21

Tri-axis accelerometer having a single proof mass and fully differential output signals

#142
20100252932
2010-10-07

Sensor device and method of manufacturing the sensor device

#143
20100244813
2010-09-30

Bridge sensor with collocated electronics and two-wire interface

#144
20100244160
2010-09-30

MEMS sensor, MEMS sensor manufacturing method, and electronic device

#145
20100223996
2010-09-09

Inertial sensor

#146
20100218607
2010-09-02

Acceleration sensor

#147
20100199783
2010-08-12

Multi-axis force sensor and acceleration sensor

#148
20100176465
2010-07-15

Method of epitaxially growing piezoresistors

#149
20100162823
2010-07-01

MEMS SENSOR AND MEMS SENSOR MANUFACTURE METHOD

#150
20100132185
2010-06-03

Method for manufacturing electronic component

#151
20100126273
2010-05-27

FLEXIBLE IMPACT SENSORS AND METHODS OF MAKING SAME

#152
20100116057
2010-05-13

MEMS SENSOR AND METHOD OF MANUFACTURING THE SAME

#153
20100101325
2010-04-29

Acceleration sensor

#154
20100101324
2010-04-29

MEMS sensor

#155
20100071468
2010-03-25

Inertia force sensor and composite sensor for detecting inertia force

#156
20100064808
2010-03-18

Acceleration sensor and method of manufacturing acceleration sensor

#157
20100059836
2010-03-11

MEMS device and method for manufacturing the same

#158
20100043553
2010-02-25

Acceleration sensor chip package

#159
20100043552
2010-02-25

3-AXIAL ACCELEROMETER

#160
20100005886
2010-01-14

Sensor having improved thermal stability

#161
20090321858
2009-12-31

Semiconductor device including groove width variation portion for inspection

#162
20090320597
2009-12-31

MICRO ELECTRO MECHANICAL SYSTEMS ELEMENT FOR MEASURING THREE-DIMENSIONAL VECTORS

#163
20090305439
2009-12-10

Method for correcting mask pattern and method for manufacturing acceleration sensor and angular velocity sensor by using the method for correcting the mask pattern

#164
20090297770
2009-12-03

Element structure and method for producing the same

#165
20090293618
2009-12-03

Acceleration Sensor Device

#166
20090289315
2009-11-26

SEMICONDUCTOR SENSOR AND MANUFACTURING METHOD OF SENSOR BODY FOR SEMICONDUCTOR SENSOR

#167
20090282918
2009-11-19

Acceleration sensor resistant to excessive force breakage

#168
20090267165
2009-10-29

Wafer level package structure, and sensor device obtained from the same package structure

#169
20090261432
2009-10-22

Interconnection system on a plane adjacent to a solid-state device structure

#170
20090255340
2009-10-15

Semiconductor acceleration sensor device and method for manufacturing the same

#171
20090241694
2009-10-01

External force detection device

#172
20090241671
2009-10-01

Acceleration sensor

#173
20090241670
2009-10-01

Semiconductor acceleration sensor

#174
20090241669
2009-10-01

Coupled pivoted acceleration sensors

#175
20090241668
2009-10-01

Acceleration sensor package

#176
20090237288
2009-09-24

Remote control device

#177
20090223292
2009-09-10

ACCELERATION SENSOR

#178
20090183571
2009-07-23

Acceleration sensor

#179
20090183569
2009-07-23

Combined sensor

#180
20090159997
2009-06-25

Wafer level package structure and production method therefor

#181
20090152656
2009-06-18

Sensor device and production method therefor

#182
20090139342
2009-06-04

DEVICE WITH DETECTION BY SUSPENDED PIEZORESISTIVE STRAIN GAUGE COMPRISING A STRAIN AMPLIFIER CELL

#183
20090128171
2009-05-21

Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program

#184
20090115006
2009-05-07

SOI substrate and semiconductor acceleration sensor using the same

#185
20090095076
2009-04-16

Acceleration Sensor Device and Sensor Apparatus

#186
20090084196
2009-04-02

Flexural pivot for micro-sensors

#187
20090071251
2009-03-19

Acceleration sensor

#188
20090071250
2009-03-19

Beam accelerometer with limiting apparatus

#189
20090071249
2009-03-19

ACCELERATION SENSOR-ATTACHED TIRE

#190
20090071248
2009-03-19

Acceleration sensor device having piezo-resistors measuring acceleration

#191
20090050990
2009-02-26

Semiconductor sensor device and method for manufacturing same

#192
20090039908
2009-02-12

MICROSTRUCTURE INSPECTING APPARATUS AND MICROSTRUCTURE INSPECTING METHOD

#193
20090025478
2009-01-29

Acceleration sensor

#194
20090012688
2009-01-08

ROAD SURFACE CONDITION DETECTION SYSTEM, ACTIVE SUSPENSION SYSTEM, ANTI-LOCK BRAKE SYSTEM, AND SENSOR UNIT THEREFOR

#195
20080314146
2008-12-25

Sensing unit and method of making same

#196
20080289417
2008-11-27

Sensor for detecting acceleration and angular velocity

#197
20080271535
2008-11-06

Semiconductor acceleration sensor

#198
20080265346
2008-10-30

Semiconductor sensor and manufacturing method of the same

#199
20080245149
2008-10-09

Temperature compensating sensor

#200
20080241984
2008-10-02

Method for manufacturing semiconductor sensor

#201
20080237839
2008-10-02

Semiconductor apparatus and method of manufacturing same

#202
20080229827
2008-09-25

Electronic part, method for fabricating electronic part, acceleration sensor, and method for fabricating acceleration sensor

#203
20080216574
2008-09-11

Sensor device and method for fabricating sensor device

#204
20080216573
2008-09-11

Semiconductor acceleration sensor

#205
20080211041
2008-09-04

Micro electrical mechanical system device

#206
20080210008
2008-09-04

Multi-axial angular velocity sensor

#207
20080195279
2008-08-14

Motor vehicle drive control system and sensor unit for the same

#208
20080190206
2008-08-14

Device, method and program for inspecting microstructure

#209
20080179698
2008-07-31

Piezoresistive sensing structure

#210
20080173106
2008-07-24

Stress detection method for force sensor device with multiple axis sensor and force sensor device employing this method

#211
20080131989
2008-06-05

Method of producing acceleration sensor chip package

#212
20080113164
2008-05-15

Method for manufacturing electronic component, and electronic component

#213
20080087087
2008-04-17

Acceleration sensor with redundant contact holes

#214
20080072683
2008-03-27

Micromachined artificial haircell

#215
20080053228
2008-03-06

Tri-axis accelerometer having a single proof mass and fully differential output signals

#216
20080041157
2008-02-21

Acceleration sensor and method of manufacturing the same

#217
20080041156
2008-02-21

Semiconductor acceleration sensor

#218
20080036478
2008-02-14

Bistable micromechanical devices

#219
20080034868
2008-02-14

Acceleration sensor

#220
20080034867
2008-02-14

MULTI-RANGE THREE-AXIS ACCELERATION SENSOR DEVICE

#221
20080033679
2008-02-07

Acceleration measuring device

#222
20080014680
2008-01-17

Method of fabricating a semiconductor chip package

#223
20080000295
2008-01-03

Acceleration Detection Method and Device Therefor, Acceleration Sensor Module, and Tire

#224
20070277607
2007-12-06

Semiconductor acceleration sensor

#225
20070272016
2007-11-29

Acceleration sensor

#226
20070262306
2007-11-15

Semiconductor device having microstructure and method of manufacturing microstructure

#227
20070261490
2007-11-15

Acceleration sensor and method of producing the same

#228
20070256469
2007-11-08

Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus

#229
20070240510
2007-10-18

Semiconductor sensor having weight of material different than that of weight arranging part

#230
20070234804
2007-10-11

Semiconductor Sensor

#231
20070215966
2007-09-20

Piezoresistance element and semiconductor device having the same

#232
20070214888
2007-09-20

Acceleration sensor with protrusions facing stoppers

#233
20070199191
2007-08-30

Method for fabricating a three-dimensional acceleration sensor

#234
20070193353
2007-08-23

Silicon inertial sensors formed using MEMS

#235
20070186665
2007-08-16

Force sensor

#236
20070144259
2007-06-28

Semiconductor acceleration sensor and fabrication method thereof

#237
20070138583
2007-06-21

Nanoparticle Vibration and Acceleration Sensors

#238
20070127164
2007-06-07

Nanoscale Sensor

#239
20070125181
2007-06-07

Polymer Nanosensor Device

#240
20070115005
2007-05-24

Sensor detection apparatus and sensor

#241
20070090540
2007-04-26

Semiconductor chip package and fabrication method thereof

#242
20070089536
2007-04-26

Strain gauge type sensor and strain gauge type sensor unit using the same

#243
20070089514
2007-04-26

Semiconductor-type three-axis acceleration sensor

#244
20070089511
2007-04-26

Semiconductor device with acceleration sensor

#245
20070084041
2007-04-19

Single-mask fabrication process for linear and angular piezoresistive accelerometers

#246
20070051182
2007-03-08

Mechanical quantity sensor

#247
20070045787
2007-03-01

Semiconductor acceleration sensor device

#248
20070044557
2007-03-01

Package structure for an acceleration sensor

#249
20070044556
2007-03-01

Semiconductor device and method of manufacturing and inspection thereof

#250
20070037310
2007-02-15

Semiconductor sensor production method and semiconductor sensor

#251
20070028687
2007-02-08

Impact-resistant acceleration sensor

#252
20070028664
2007-02-08

Failure diagnostic device for acceleration sensor, electronic device equipped with failure diagnostic device, failure diagnostic system, and failure diagnostic method

#253
20070024409
2007-02-01

Package for semiconductor acceleration sensor

#254
20070022814
2007-02-01

Semiconductor sensor with projection for preventing proof mass from sticking to cover plate

#255
20070018314
2007-01-25

Semiconductor chip package

#256
20070017289
2007-01-25

Method for fabricating a three-dimensional acceleration sensor

#257
20070000335
2007-01-04

Multiaxial sensor

#258
20060288783
2006-12-28

Bearing monitoring system

#259
20060283248
2006-12-21

SEMICONDUCTOR SENSOR AND METHOD OF MANUFACTURING THE SAME

#260
20060272413
2006-12-07

Three-axis integrated MEMS accelerometer

#261
20060261424
2006-11-23

Integrated pressure and acceleration measurement device and a method of manufacture thereof

#262
20060258038
2006-11-16

Piezoresistive sensing structure

#263
20060225506
2006-10-12

Silicon inertial sensors formed using MEMS

#264
20060219025
2006-10-05

Electromechanical transducer and method of fabricating the same

#265
20060201251
2006-09-14

Triaxial acceleration sensor module and method of manufacturing the same

#266
20060196270
2006-09-07

Acceleration sensor

#267
20060196268
2006-09-07

Acceleration sensor chip

#268
20060185428
2006-08-24

Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device

#269
20060179941
2006-08-17

Multi-axial angular velocity sensor

#270
20060174718
2006-08-10

Six-axis sensor

#271
20060173257
2006-08-03

Sleep evaluation method, sleep evaluation system, operation program for sleep evaluation system, pulse oximeter, and sleep support system

#272
20060170281
2006-08-03

Anti-lock brake system and sensor unit for the same

#273
20060162450
2006-07-27

Acceleration sensor and inclination-detecting method

#274
20060157835
2006-07-20

Semiconductor device and method of fabricating same

#275
20060156817
2006-07-20

Acceleration sensor with redundant contact holes

#276
20060144144
2006-07-06

Semiconductor sensor

#277
20060131711
2006-06-22

Package for semiconductor device

#278
20060130584
2006-06-22

Acceleration sensor

#279
20060130583
2006-06-22

Output amplifier circuit and sensor device using the same

#280
20060130582
2006-06-22

Semiconductor device and manufacturing method thereof

#281
20060130581
2006-06-22

Acceleration sensor

#282
20060130580
2006-06-22

Acceleration sensor manufacturable by simplified method

#283
20060130577
2006-06-22

Acceleration sensor

#284
20060117860
2006-06-08

Transducer responsive to pressure, vibration/acceleration and temperature and methods of fabricating the same

#285
20060101912
2006-05-18

Micromechanical device with thinned cantilever structure and related methods

#286
20060097727
2006-05-11

Micromechanical positional state sensing apparatus method and system

#287
20060096379
2006-05-11

Acceleration sensor

#288
20060094148
2006-05-04

Semiconductor acceleration sensor and process for manufacturing the same

#289
20060086186
2006-04-27

Acceleration sensor chip package

#290
20060086185
2006-04-27

Acceleration sensor

#291
20060070444
2006-04-06

Semiconductor acceleration sensor and manufacturing method thereof

#292
20060065054
2006-03-30

Semiconductor acceleration sensor

#293
20060037398
2006-02-23

Method for making an impact detector

#294
20060005629
2006-01-12

Inertial sensor

#295
20050279170
2005-12-22

Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure

#296
20050279166
2005-12-22

Semiconductor acceleration sensor device and method for manufacturing the same

#297
20050279165
2005-12-22

Drop detection device or abnormality detection device and portable apparatus equipped with said device

#298
20050274191
2005-12-15

Piezo resistance type semiconductor device and its manufacturing method

#299
20050268717
2005-12-08

Acceleration sensor

#300
20050229720
2005-10-20

Stress detection method for sensor device with multiple axis sensor and sensor device employing this method