171124 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
CANTILEVER MOTION SENSOR
#2Portable Strain Gauge for Improved Impulse and Peak Force Detection
#3DETECTION DEVICE USING PIEZORESISTIVE TRANSDUCTION
#4STRAIN SENSOR
#5Two-wire interface reference accelerometer with integrated mechanical transducing and self-calibration capability
#6Physical quantity sensor
#7Circuit for sensing an analog signal, corresponding electronic system and method
#8Portable strain gauge for improved impulse and peak force detection
#9Piezoelectric thin-film sensor and use thereof
#10Increasing sensitivity of a sensor using an encoded signal
#11Self-diagnosis method for vibration sensor and vibration sensor system equipped with self-diagnosis function
#12Mechanical link for MEMS and NEMS mechanical structure, and MEMS and NEMS structure comprising such a mechanical link
#13Composite sensor and manufacturing method thereof
#14Circuit for sensing an analog signal, corresponding electronic system and method
#15Sensor unit, electronic apparatus, and moving body
#16Posture control apparatus, holding apparatus, posture control method, and program
#17Strain gauge sensor accelerometer with improved accuracy
#18Portable strain gauge for improved impulse and peak force detection
#19Acceleration sensor
#20Signal processing apparatus, inertial sensor, acceleration measurement method, and electronic apparatus
#21Sensor unit, construction machine, and structure monitoring device
#22Physical quantity sensor
#23Sensor element, inertial sensor, and electronic apparatus
#24Measuring device for measuring the space of two selected points on a shaping machine or handling apparatus
#25Microelectromechanical and/or nanoelectromechanical device offering improved robustness
#26Increasing sensitivity of a sensor using an encoded signal
#27Touch input detection using a piezoresistive sensor
#28Piezoresistive sensor for detecting a physical disturbance
#29GUN SHOT COUNTER
#30Force sensor
#31Physical quantity sensor, electronic apparatus, and vehicle
#32Method of manufacturing physical quantity sensor device and physical quantity sensor device
#33Inertial sensor
#34Piezoelectric thin-film sensor and use thereof
#35PIEZORESISTIVE SENSOR
#36Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor
#37Sensor
#38Method for producing a sensor element by means of laser structuring
#39MEMS DEVICE AND MANUFACTURING METHOD THEREOF
#40MEMS circuit for capacitive non-linear correction
#41Impact sensor
#42Inertial force sensor
#43Damped linear accerelometer
#44ACCELEROMETER
#45MEMS device to selectively measure excitation in different directions
#46Semiconductor device, electronic control system, and automobile
#47Piezoresistive detection resonant device in particular with large vibration amplitude
#48Method and device for examining signals
#49Sensor for detecting angular velocity
#50SENSOR AND METHOD OF MANUFACTURING SAME
#51Resistive element
#52Sensor control circuit and electronic apparatus
#53MEMS piezoresistive acceleration sensor
#54ACCELERATION SENSOR AND METHOD OF MANUFACTURING THE SAME
#55MULTI-AXIS SENSOR AND METHOD FOR MANUFACTURING THE SAME
#56MEMS accelerometer
#57Two-dimensional material-based accelerometer
#58In-plane piezoresistive detection sensor
#59INERTIAL SENSOR MODULE HAVING HERMETIC SEAL FORMED OF METAL AND MULTI-AXIS SENSOR EMPLOYING THE SAME
#60MULTI-AXIS SENSOR
#61High-output MEMS accelerometer
#62Acceleration sensor
#63Micro-electromechanical device comprising a mobile mass that can move out-of-plane
#64Angular acceleration sensor and acceleration sensor
#65Angular acceleration sensor and acceleration sensor
#66DETECTOR MODULE FOR MEMS SENSOR AND MEMS SENSOR HAVING THE SAME
#67ACCELERATION SENSOR
#68Amplifier circuit and amplifier circuit IC chip
#69ANGULAR ACCELERATION SENSOR
#70PIEZORESISTIVE MEMS SENSOR
#71Angular acceleration sensor and acceleration sensor
#72Silicon wafer with a plurality of chip patterns
#73Piezoelectric thin-film sensor
#74Angular velocity detection device and angular velocity sensor including the same
#75ACCELERATION SENSOR
#76Micro electro mechanical systems sensor
#77PIEZORESISTANCE SENSOR MODULE AND MEMS SENSOR HAVING THE SAME
#78Microelectromechanical pressure sensors
#79ACCELERATION SENSOR
#80ACCELERATION SENSOR
#81Infrared sensor with acceleration sensor and method for operating an infrared sensor
#82Compact device for detecting at least one acceleration and one speed of rotation
#83INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME
#84Resistive element
#85ACCELERATION SENSOR
#86MEMS force sensors fabricated using paper substrates
#87Chip level sensor with multiple degrees of freedom
#88Tri-axis accelerometer having a single proof mass and fully differential output signals
#89Coaxial gyro accelerometer in a semiconductor substrate
#90Micro electro mechanical systems device
#91Micro/nano multiaxial inertial sensor of movements
#92Dynamic sensor
#93ACCELERATION SENSOR
#94Method and apparatus for sensing signals
#95Acceleration sensor
#96Method and apparatus for sensing underwater signals
#97Eutectic bonding of thin chips on a carrier substrate
#98Auto-calibration of acceleration sensors
#99Physical quantity sensor with son structure, and manufacturing method thereof
#100INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME
#101INERTIAL SENSOR WITH STRESS ISOLATION STRUCTURE
#102Dynamic quantity sensor
#103Sensor device manufacturing method and sensor device
#104Piezoresistive micromechanical sensor component and corresponding measuring method
#105Piezoresistive type Z-axis accelerometer
#106Angular velocity detection device and angular velocity sensor including the same
#107Piezoresistive transducer
#108NEMS comprising AlSi alloy based transducer
#109ACCELERATION SENSOR
#110Method for creating monocrystalline piezoresistors
#111In-plane piezoresistive detection sensor
#112Scheme for low power measurement
#113Inertial sensor
#114MOUNTING STRUCTURE OF CHIP AND MODULE USING THE SAME
#115Interconnection system on a plane adjacent to a solid-state device structure
#116DC responsive transducer with on-board user actuated auto-zero
#117Shock Resistant Mounting for High G Shock Accelerometer
#118Microelectromechanical system
#119Microelectromechanical accelerometer with wireless transmission capabilities
#120MEMS sensor capable of sensing acceleration and pressure
#121MEMS Sensor Package
#122High impact resistant acceleration sensor
#123Method for manufacturing electronic component
#124Force sensor chip and acceleration sensor chip
#125Force sensor with reduced noise
#126ACCELERATION SENSOR WITH PROTRUSIONS FACING STOPPERS
#127Method for fabricating a microelectromechanical sensor with a piezoresistive type readout
#128Semiconductor device using a silicon wafer with a pattern arrangement
#129Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor
#130Acceleration sensor
#131MEMS DEVICE
#132Piezoresistive strain sensor based nanowire mechanical oscillator
#133Acceleration sensor, semiconductor device and method of manufacturing semiconductor device
#134Integrated resonating gyro accelerometer in a semiconductor substrate
#135Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors
#136Uniaxial acceleration sensor
#137Component RFID tag with non-volatile display of component use including the use of energy harvesting
#138Scheme for low power strain measurement
#139Acceleration sensor element and acceleration sensor having same
#140Piezo devices with air-spaced cantilever
#141Tri-axis accelerometer having a single proof mass and fully differential output signals
#142Sensor device and method of manufacturing the sensor device
#143Bridge sensor with collocated electronics and two-wire interface
#144MEMS sensor, MEMS sensor manufacturing method, and electronic device
#145Inertial sensor
#146Acceleration sensor
#147Multi-axis force sensor and acceleration sensor
#148Method of epitaxially growing piezoresistors
#149MEMS SENSOR AND MEMS SENSOR MANUFACTURE METHOD
#150Method for manufacturing electronic component
#151FLEXIBLE IMPACT SENSORS AND METHODS OF MAKING SAME
#152MEMS SENSOR AND METHOD OF MANUFACTURING THE SAME
#153Acceleration sensor
#154MEMS sensor
#155Inertia force sensor and composite sensor for detecting inertia force
#156Acceleration sensor and method of manufacturing acceleration sensor
#157MEMS device and method for manufacturing the same
#158Acceleration sensor chip package
#1593-AXIAL ACCELEROMETER
#160Sensor having improved thermal stability
#161Semiconductor device including groove width variation portion for inspection
#162MICRO ELECTRO MECHANICAL SYSTEMS ELEMENT FOR MEASURING THREE-DIMENSIONAL VECTORS
#163Method for correcting mask pattern and method for manufacturing acceleration sensor and angular velocity sensor by using the method for correcting the mask pattern
#164Element structure and method for producing the same
#165Acceleration Sensor Device
#166SEMICONDUCTOR SENSOR AND MANUFACTURING METHOD OF SENSOR BODY FOR SEMICONDUCTOR SENSOR
#167Acceleration sensor resistant to excessive force breakage
#168Wafer level package structure, and sensor device obtained from the same package structure
#169Interconnection system on a plane adjacent to a solid-state device structure
#170Semiconductor acceleration sensor device and method for manufacturing the same
#171External force detection device
#172Acceleration sensor
#173Semiconductor acceleration sensor
#174Coupled pivoted acceleration sensors
#175Acceleration sensor package
#176Remote control device
#177ACCELERATION SENSOR
#178Acceleration sensor
#179Combined sensor
#180Wafer level package structure and production method therefor
#181Sensor device and production method therefor
#182DEVICE WITH DETECTION BY SUSPENDED PIEZORESISTIVE STRAIN GAUGE COMPRISING A STRAIN AMPLIFIER CELL
#183Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program
#184SOI substrate and semiconductor acceleration sensor using the same
#185Acceleration Sensor Device and Sensor Apparatus
#186Flexural pivot for micro-sensors
#187Acceleration sensor
#188Beam accelerometer with limiting apparatus
#189ACCELERATION SENSOR-ATTACHED TIRE
#190Acceleration sensor device having piezo-resistors measuring acceleration
#191Semiconductor sensor device and method for manufacturing same
#192MICROSTRUCTURE INSPECTING APPARATUS AND MICROSTRUCTURE INSPECTING METHOD
#193Acceleration sensor
#194ROAD SURFACE CONDITION DETECTION SYSTEM, ACTIVE SUSPENSION SYSTEM, ANTI-LOCK BRAKE SYSTEM, AND SENSOR UNIT THEREFOR
#195Sensing unit and method of making same
#196Sensor for detecting acceleration and angular velocity
#197Semiconductor acceleration sensor
#198Semiconductor sensor and manufacturing method of the same
#199Temperature compensating sensor
#200Method for manufacturing semiconductor sensor
#201Semiconductor apparatus and method of manufacturing same
#202Electronic part, method for fabricating electronic part, acceleration sensor, and method for fabricating acceleration sensor
#203Sensor device and method for fabricating sensor device
#204Semiconductor acceleration sensor
#205Micro electrical mechanical system device
#206Multi-axial angular velocity sensor
#207Motor vehicle drive control system and sensor unit for the same
#208Device, method and program for inspecting microstructure
#209Piezoresistive sensing structure
#210Stress detection method for force sensor device with multiple axis sensor and force sensor device employing this method
#211Method of producing acceleration sensor chip package
#212Method for manufacturing electronic component, and electronic component
#213Acceleration sensor with redundant contact holes
#214Micromachined artificial haircell
#215Tri-axis accelerometer having a single proof mass and fully differential output signals
#216Acceleration sensor and method of manufacturing the same
#217Semiconductor acceleration sensor
#218Bistable micromechanical devices
#219Acceleration sensor
#220MULTI-RANGE THREE-AXIS ACCELERATION SENSOR DEVICE
#221Acceleration measuring device
#222Method of fabricating a semiconductor chip package
#223Acceleration Detection Method and Device Therefor, Acceleration Sensor Module, and Tire
#224Semiconductor acceleration sensor
#225Acceleration sensor
#226Semiconductor device having microstructure and method of manufacturing microstructure
#227Acceleration sensor and method of producing the same
#228Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus
#229Semiconductor sensor having weight of material different than that of weight arranging part
#230Semiconductor Sensor
#231Piezoresistance element and semiconductor device having the same
#232Acceleration sensor with protrusions facing stoppers
#233Method for fabricating a three-dimensional acceleration sensor
#234Silicon inertial sensors formed using MEMS
#235Force sensor
#236Semiconductor acceleration sensor and fabrication method thereof
#237Nanoparticle Vibration and Acceleration Sensors
#238Nanoscale Sensor
#239Polymer Nanosensor Device
#240Sensor detection apparatus and sensor
#241Semiconductor chip package and fabrication method thereof
#242Strain gauge type sensor and strain gauge type sensor unit using the same
#243Semiconductor-type three-axis acceleration sensor
#244Semiconductor device with acceleration sensor
#245Single-mask fabrication process for linear and angular piezoresistive accelerometers
#246Mechanical quantity sensor
#247Semiconductor acceleration sensor device
#248Package structure for an acceleration sensor
#249Semiconductor device and method of manufacturing and inspection thereof
#250Semiconductor sensor production method and semiconductor sensor
#251Impact-resistant acceleration sensor
#252Failure diagnostic device for acceleration sensor, electronic device equipped with failure diagnostic device, failure diagnostic system, and failure diagnostic method
#253Package for semiconductor acceleration sensor
#254Semiconductor sensor with projection for preventing proof mass from sticking to cover plate
#255Semiconductor chip package
#256Method for fabricating a three-dimensional acceleration sensor
#257Multiaxial sensor
#258Bearing monitoring system
#259SEMICONDUCTOR SENSOR AND METHOD OF MANUFACTURING THE SAME
#260Three-axis integrated MEMS accelerometer
#261Integrated pressure and acceleration measurement device and a method of manufacture thereof
#262Piezoresistive sensing structure
#263Silicon inertial sensors formed using MEMS
#264Electromechanical transducer and method of fabricating the same
#265Triaxial acceleration sensor module and method of manufacturing the same
#266Acceleration sensor
#267Acceleration sensor chip
#268Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device
#269Multi-axial angular velocity sensor
#270Six-axis sensor
#271Sleep evaluation method, sleep evaluation system, operation program for sleep evaluation system, pulse oximeter, and sleep support system
#272Anti-lock brake system and sensor unit for the same
#273Acceleration sensor and inclination-detecting method
#274Semiconductor device and method of fabricating same
#275Acceleration sensor with redundant contact holes
#276Semiconductor sensor
#277Package for semiconductor device
#278Acceleration sensor
#279Output amplifier circuit and sensor device using the same
#280Semiconductor device and manufacturing method thereof
#281Acceleration sensor
#282Acceleration sensor manufacturable by simplified method
#283Acceleration sensor
#284Transducer responsive to pressure, vibration/acceleration and temperature and methods of fabricating the same
#285Micromechanical device with thinned cantilever structure and related methods
#286Micromechanical positional state sensing apparatus method and system
#287Acceleration sensor
#288Semiconductor acceleration sensor and process for manufacturing the same
#289Acceleration sensor chip package
#290Acceleration sensor
#291Semiconductor acceleration sensor and manufacturing method thereof
#292Semiconductor acceleration sensor
#293Method for making an impact detector
#294Inertial sensor
#295Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure
#296Semiconductor acceleration sensor device and method for manufacturing the same
#297Drop detection device or abnormality detection device and portable apparatus equipped with said device
#298Piezo resistance type semiconductor device and its manufacturing method
#299Acceleration sensor
#300Stress detection method for sensor device with multiple axis sensor and sensor device employing this method