171083 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
DUAL-OPERATING ACCELEROMETER
#2Dual-operating accelerometer
#3Single proof mass based three-axis accelerometer
#4Single proof mass based three-axis accelerometer
#5Three-axis inertial sensor for detecting linear acceleration forces
#6Multi-axis accelerometers with reduced cross-axis sensitivity
#7MEMS MASS-SPRING-DAMPER SYSTEMS USING AN OUT-OF-PLANE SUSPENSION SCHEME
#8Semiconductor device and method of manufacturing the same
#9MOBILE DEVICE, METHOD FOR CONTROLLING MOBILE DEVICE, AND NON-TRANSITORY STORAGE MEDIUM
#10Miniature hermetic acceleration detection device
#11Accelerometer with inductive pick-off
#12Sensor with moving sensitive element having mixed vibrating and pendular operation, and methods for controlling such a sensor
#13Acceleration sensor
#14Micro-electro-mechanical system (MEMS) device including an internal anchor area
#15MEMS mass-spring-damper systems using an out-of-plane suspension scheme
#16Low noise amplifier for multiple channels
#17Stacked lateral overlap transducer (SLOT) based three-axis accelerometer
#18Fabrication process and package design for use in a micro-machined seismometer or other device
#19MEMS proof mass with split Z-axis portions
#20Capacitance detection circuit
#21Micromachined piezoelectric x-axis gyroscope
#22Micromachined monolithic 6-axis inertial sensor
#23MEMS proof mass with split z-axis portions
#24Low noise amplifier for multiple channels
#25Three-dimensional micro-electro-mechanical-system sensor
#26Capacitive accelerometer
#27INERTIA SENSING APPARATUS
#28MEMS biaxial resonant accelerometer
#29MEMS device with stress isolation and method of fabrication
#30Three phase capacitance-based sensing
#31Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element
#32Microelectromechanical accelerometer with wireless transmission capabilities
#33MEMS accelerometer with enhanced structural strength
#34MEMS THREE-AXIS ACCELEROMETER
#35Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure
#36Accelerometer
#37Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer
#38Stacked lateral overlap transducer (SLOT) based three-axis accelerometer
#39Micromachined piezoelectric z-axis gyroscope
#40Micromachined piezoelectric x-axis gyroscope
#41Micromachined piezoelectric X-Axis gyroscope
#42Laminated structure provided with movable portion
#43FRAMED TRANSDUCER DEVICE
#44Fabrication process and package design for use in a micro-machined seismometer or other device
#45Mass for use in a micro-electro-mechanical-system sensor and 3-dimensional micro-electro-mechanical-system sensor using same
#46MEMS SENSOR, METHOD OF MANUFACTURING THEREOF, AND ELECTRONIC APPARATUS
#47Method for adjusting an acceleration sensor
#48MEMS SENSOR, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING MEMS SENSOR
#49MEMS device with stress isolation and method of fabrication
#50Micromachined devices and fabricating the same
#51Micromachined inertial sensor devices
#52MEMS mass-spring-damper systems using an out-of-plane suspension scheme
#53CAPACITIVE SENSOR HAVING CYCLIC AND ABSOLUTE ELECTRODE SETS
#54Triple-axis MEMS accelerometer having a bottom capacitor
#55MEMS SENSOR AND ELECTRONIC APPARATUS
#56MEMS sensor, method of manufacturing MEMS sensor, and electronic apparatus
#57Multi-axial linear and rotational displacement sensor
#58Vertically integrated MEMS sensor device with multi-stimulus sensing
#59Vertically integrated MEMS acceleration transducer
#60Apparatus having a movable body
#61MEMS SENSOR, MEMS SENSOR MANUFACTURING METHOD, AND ELECTRONIC DEVICE
#62SEMICONDUCTOR PHYSICAL QUANTITY SENSOR AND CONTROL DEVICE USING THE SAME
#63Multi-axis capacitive accelerometer
#64Semiconductor dynamic quantity sensor and method of producing the same
#65Transducer with decoupled sensing in mutually orthogonal directions
#66Inertia sensor
#67Multi-axis capacitive accelerometer
#68Acceleration sensor and method of fabricating it
#69Device sensitive to a movement comprising at least one transistor
#70Semiconductor device with reduced sensitivity to package stress
#71Physical sensor
#72Caddie-corner single proof mass XYZ MEMS transducer
#73Integrated MEMS 3D multi-sensor
#74Semiconductor device
#75Out-of-plane sensing device
#76Fabrication process and package design for use in a micro-machined seismometer or other device
#77Multi-axis sensor
#78Three phase capacitance-based sensing and actuation
#79MEMS sensor suite on a chip
#80Image stabilizing device of the MEMS type, in particular for image acquisition using a digital-image sensor
#81Microelectromechanical sensor having multiple full-scale and sensitivity values
#82Sensor having free fall self-test capability and method therefor
#83Microelectromechanical inertial sensor, in particular for free-fall detection applications
#84Capacitive sensor
#85Micro-electromechanical structure with self-compensation of the thermal drifts caused by thermomechanical stress
#86Multi-axis micromachined accelerometer and rate sensor
#87Triaxial membrane accelerometer
#88Inertial sensor
#89Multiple axis accelerometer
#90Combined sensor and its fabrication method
#91Multi-axis micromachined accelerometer
#92Capacitive sensor with damping
#93Integrated monolithic tri-axial micromachined accelerometer
#94Method of making microsensor
#95Multiple-axis linear accelerometer
#96Linear accelerometer
#97Planar 3-axis inertial measurement unit
#98Solid-state gyroscopes and planar three-axis inertial measurement unit
#99Multiple axis acceleration sensor
#100Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package
#101Micro accelerometer
#102Apparatus and method for anchoring micromachined structures
#103Circuit and method of processing multiple-axis sensor output signals
#104Dual-axis accelerometer
#105Internally shock caged serpentine flexure for micro-machined accelerometer
#106Multiaxial micromachined differential accelerometer
#107Internally shock caged serpentine flexure for micro-machined accelerometer
#108Multi-axis solid state accelerometer
#109Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
#110Single proof mass, 3 axis MEMS transducer
#111MEMS having a three-wafer structure
#112Single proof mass, 3 axis MEMS transducer
#113Free mass MEMS accelerometer