171079 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
Sub-classes:SYSTEMS AND METHODS HAVING MULTI-AXIS SENSITIVITY AND TRANSLATIONAL MODE SHAPES
#2MEMS sensor compensation for off-axis movement
#3FM inertial sensor and method for operating the FM inertial sensor
#4Proof mass and polysilicon electrode integrated thereon
#5MEMS device with off-axis shock protection
#6Composite vibratory in-plane accelerometer
#7Chip level sensor with multiple degrees of freedom
#8ACCELEROMETER