G01P2015/0842 - CPC Classification Index

ClassID:

171091 ⎘

G01P2015/0842 - CPC Classification

Classification description:

Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Recent Application in this class:

20170345948

2017-11-30

Acceleration sensor and mounting structure of acceleration sensor

20170299623

2017-10-19

Inertial force sensor

20150228637

2015-08-13

Silicon wafer with a plurality of chip patterns

20150204897

2015-07-23

Angular velocity detection device and angular velocity sensor including the same

20150135834

2015-05-21

Micro electro mechanical systems sensor

20130139593

2013-06-06

INERTIAL SENSOR WITH STRESS ISOLATION STRUCTURE

20130113056

2013-05-09

Dynamic quantity sensor

20130113055

2013-05-09

Sensor device manufacturing method and sensor device

20130091948

2013-04-18

Angular velocity detection device and angular velocity sensor including the same

#10

20120255358

2012-10-11

ACCELERATION SENSOR

#11

20120152020

2012-06-21

Inertial sensor

#12

20120133042

2012-05-31

MOUNTING STRUCTURE OF CHIP AND MODULE USING THE SAME

#13

20120125102

2012-05-24

Acceleration sensor

#14

20120056280

2012-03-08

MEMS Sensor Package

#15

20120024065

2012-02-02

High impact resistant acceleration sensor

#16

20110215067

2011-09-08

ACCELERATION SENSOR WITH PROTRUSIONS FACING STOPPERS

#17

20110140214

2011-06-16

Semiconductor device using a silicon wafer with a pattern arrangement

#18

20110113881

2011-05-19

Acceleration sensor

#19

20110031565

2011-02-10

Micromachined devices and fabricating the same

#20

20110030473

2011-02-10

Micromachined inertial sensor devices

#21

20100252932

2010-10-07

Sensor device and method of manufacturing the sensor device

#22

20100218607

2010-09-02

Acceleration sensor

#23

20100199783

2010-08-12

Multi-axis force sensor and acceleration sensor

#24

20100139400

2010-06-10

Mechanical quantity sensor and method of manufacturing the same

#25

20100126270

2010-05-27

INERTIA FORCE SENSOR

#26

20100116057

2010-05-13

MEMS SENSOR AND METHOD OF MANUFACTURING THE SAME

#27

20100107764

2010-05-06

Acceleration sensor

#28

20100089156

2010-04-15

Mechanical quantity sensor and method of manufacturing the same

#29

20100083755

2010-04-08

Mechanical quantity sensor and method of manufacturing the same

#30

20100071468

2010-03-25

Inertia force sensor and composite sensor for detecting inertia force

#31

20100064808

2010-03-18

Acceleration sensor and method of manufacturing acceleration sensor

#32

20090321858

2009-12-31

Semiconductor device including groove width variation portion for inspection

#33

20090305439

2009-12-10

Method for correcting mask pattern and method for manufacturing acceleration sensor and angular velocity sensor by using the method for correcting the mask pattern

#34

20090282918

2009-11-19

Acceleration sensor resistant to excessive force breakage

#35

20090267165

2009-10-29

Wafer level package structure, and sensor device obtained from the same package structure

#36

20090255340

2009-10-15

Semiconductor acceleration sensor device and method for manufacturing the same

#37

20090241671

2009-10-01

Acceleration sensor

#38

20090241670

2009-10-01

Semiconductor acceleration sensor

#39

20090241668

2009-10-01

Acceleration sensor package

#40

20090183571

2009-07-23

Acceleration sensor

#41

20090183569

2009-07-23

Combined sensor

#42

20090159997

2009-06-25

Wafer level package structure and production method therefor

#43

20090152656

2009-06-18

Sensor device and production method therefor

#44

20090128171

2009-05-21

Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program

#45

20090039908

2009-02-12

MICROSTRUCTURE INSPECTING APPARATUS AND MICROSTRUCTURE INSPECTING METHOD

#46

20090025478

2009-01-29

Acceleration sensor

#47

20080216574

2008-09-11

Sensor device and method for fabricating sensor device

#48

20080211041

2008-09-04

Micro electrical mechanical system device

#49

20080190206

2008-08-14

Device, method and program for inspecting microstructure

#50

20080163687

2008-07-10

MEMS sensor suite on a chip

#51

20080148849

2008-06-26

Motion sensor and method of manufacturing the same

#52

20080034867

2008-02-14

MULTI-RANGE THREE-AXIS ACCELERATION SENSOR DEVICE

#53

20070277607

2007-12-06

Semiconductor acceleration sensor

#54

20070262306

2007-11-15

Semiconductor device having microstructure and method of manufacturing microstructure

#55

20070261490

2007-11-15

Acceleration sensor and method of producing the same

#56

20070240509

2007-10-18

Dynamic amount sensor

#57

20070215966

2007-09-20

Piezoresistance element and semiconductor device having the same

#58

20070214888

2007-09-20

Acceleration sensor with protrusions facing stoppers

#59

20070199191

2007-08-30

Method for fabricating a three-dimensional acceleration sensor

#60

20070180909

2007-08-09

Angular velocity sensor having one amplifying circuit for amplifying plural detection signals

#61

20070089514

2007-04-26

Semiconductor-type three-axis acceleration sensor

#62

20070089511

2007-04-26

Semiconductor device with acceleration sensor

#63

20070044557

2007-03-01

Package structure for an acceleration sensor

#64

20070044556

2007-03-01

Semiconductor device and method of manufacturing and inspection thereof

#65

20070037310

2007-02-15

Semiconductor sensor production method and semiconductor sensor

#66

20070028687

2007-02-08

Impact-resistant acceleration sensor

#67

20070022814

2007-02-01

Semiconductor sensor with projection for preventing proof mass from sticking to cover plate

#68

20070017289

2007-01-25

Method for fabricating a three-dimensional acceleration sensor

#69

20060196268

2006-09-07

Acceleration sensor chip

#70

20060173257

2006-08-03

Sleep evaluation method, sleep evaluation system, operation program for sleep evaluation system, pulse oximeter, and sleep support system

#71

20060162450

2006-07-27

Acceleration sensor and inclination-detecting method

#72

20060157835

2006-07-20

Semiconductor device and method of fabricating same

#73

20060130580

2006-06-22

Acceleration sensor manufacturable by simplified method

#74

20060130577

2006-06-22

Acceleration sensor

#75

20060086185

2006-04-27

Acceleration sensor

#76

20060005629

2006-01-12

Inertial sensor

#77

20050279170

2005-12-22

Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure

#78

20050279166

2005-12-22

Semiconductor acceleration sensor device and method for manufacturing the same

#79

20050268717

2005-12-08

Acceleration sensor

#80

20050217378

2005-10-06

Inertial sensor

#81

20050217373

2005-10-06

Inertial sensor

#82

20050160814

2005-07-28

System and method for a three-axis MEMS accelerometer

#83

20050097958

2005-05-12

Accelerometer

#84

20050056096

2005-03-17

Acceleration sensor and manufacturing method thereof

#85

20050056093

2005-03-17

Acceleration sensor

#86

20050016271

2005-01-27

Microstructure with movable mass