171140 ⎘
Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe Coarse scanning or positioning
MANIPULATOR, DETECTION DEVICE AND METHOD FOR DETECTING PHYSICAL FEATURE OF MICRO-NANO COMPONENT
#2PROBES, APPARATUSES AND METHODS FOR USE IN SCANNING PROBE MICROSCOPY
#3SCANNING PROBE MICROSCOPE
#4AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND SCANNING PROBE MICROSCOPY SYSTEM USING THE SAME
#5Atomic nano-positioning device
#6Method and device for measuring dimension of semiconductor structure
#7Apparatus and method for a scanning probe microscope
#8Modular scanning probe microscope head
#9Surface analysis device
#10Scanner and scanning probe microscope
#11Feedback correction in sub-resonant tapping mode of an atomic force microscope
#12Coupled multiscale positioning of arrays of parallel, independently actuated and simultaneously driven modular scanning probe microscopes for high-throughput, in-line, nanoscale measurement of flexible, large area, and roll-to-roll processes
#13AM/FM measurements using multiple frequency atomic force microscopy
#14Device and method for measuring and/or modifying surface features on a surface of a sample
#15INFORMATION ACQUIRING METHOD IN ATOMIC FORCE MICROSCOPE
#16Scanning probe microscope and probe contact detection method
#17Modular Atomic Force Microscope
#18AM/FM measurements using multiple frequency of atomic force microscopy
#19SCANNING ION CONDUCTANCE MICROSCOPY
#20Scanning ion conductance microscopy using surface roughness for probe movement
#21Three-dimensional fine movement device
#22System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing
#23Precise probe placement in automated scanning probe microscopy systems
#24Method and apparatus for automated scanning probe microscopy
#25Probe assembly for a scanning probe microscope
#26Fast-scanning SPM scanner and method of operating same
#27Metrology probe and method of configuring a metrology probe
#28Scanning Ion Conductance Microscopy
#29Scanning probe microscope and a measuring method using the same
#30Modular atomic force microscope
#31NANOROBOT MODULE, AUTOMATION AND EXCHANGE
#32Positioning apparatus and method
#33Fast-scanning SPM scanner and method of operating same
#34Scanning probe microscopy inspection and modification system
#35Scanning probe apparatus and drive stage therefor
#36Scanning probe microscopy inspection and modification system
#37Method and apparatus of manipulating a sample
#38Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope
#39Scanning mechanism for scanning probe microscope and scanning probe microscope
#40Scanning probe microscopy inspection and modification system
#41Scanning probe microscope and specimen observation method
#42Method and apparatus for manipulating a sample
#43Dual stage instrument for scanning a specimen