Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe Coarse scanning or positioning
AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND SCANNING PROBE MICROSCOPY SYSTEM USING THE SAME
#2ATOMIC NANO-POSITIONING DEVICE
#3Method and device for measuring dimension of semiconductor structure
#4Apparatus and method for a scanning probe microscope
#5Modular scanning probe microscope head
#6Surface analysis device
#7Scanner and scanning probe microscope
#8Feedback correction in sub-resonant tapping mode of an atomic force microscope
#9Coupled multiscale positioning of arrays of parallel, independently actuated and simultaneously driven modular scanning probe microscopes for high-throughput, in-line, nanoscale measurement of flexible, large area, and roll-to-roll processes
#10AM/FM measurements using multiple frequency atomic force microscopy
#11Device and method for measuring and/or modifying surface features on a surface of a sample
#12INFORMATION ACQUIRING METHOD IN ATOMIC FORCE MICROSCOPE
#13Scanning probe microscope and probe contact detection method
#14Modular Atomic Force Microscope
#15AM/FM measurements using multiple frequency of atomic force microscopy
#16SCANNING ION CONDUCTANCE MICROSCOPY
#17Scanning ion conductance microscopy using surface roughness for probe movement
#18Three-dimensional fine movement device
#19System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing
#20Precise probe placement in automated scanning probe microscopy systems
#21Method and apparatus for automated scanning probe microscopy
#22Probe assembly for a scanning probe microscope
#23Fast-scanning SPM scanner and method of operating same
#24Metrology probe and method of configuring a metrology probe
#25Scanning Ion Conductance Microscopy
#26Scanning probe microscope and a measuring method using the same
#27Modular atomic force microscope
#28NANOROBOT MODULE, AUTOMATION AND EXCHANGE
#29Positioning apparatus and method
#30Fast-scanning SPM scanner and method of operating same
#31Scanning probe microscopy inspection and modification system
#32Scanning probe apparatus and drive stage therefor
#33Scanning probe microscopy inspection and modification system
#34Method and apparatus of manipulating a sample
#35Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope
#36Scanning mechanism for scanning probe microscope and scanning probe microscope
#37Scanning probe microscopy inspection and modification system
#38Scanning probe microscope and specimen observation method
#39Method and apparatus for manipulating a sample
#40Dual stage instrument for scanning a specimen