ClassID:

171146

G01Q20/02 - CPC Classification

Classification description:

Monitoring the movement or position of the probe by optical means

Recent Application in this class:
#1
20260124648
2026-05-07

DEBRIS REMOVAL FROM HIGH ASPECT STRUCTURES

#2
20260023095
2026-01-22

APPARATUS AND METHOD FOR IDENTIFYING TARGET POSITION IN ATOMIC FORCE MICROSCOPE

#3
20250290948
2025-09-18

Atomic Force Microscope Based Infrared Spectroscopy With Multiple Laser Pulse Repetition Rate Excitation And Optional Force Volume Operation

#4
20250271465
2025-08-28

HYBRID NEAR-FIELD SCANNING MICROWAVE MICROSCOPE

#5
20250264497
2025-08-21

SCANNING PROBE MICROSCOPE

#6
20250180601
2025-06-05

SINGLE-MOLECULE FORCE SPECTROSCOPY-INFRARED SPECTROSCOPY (SMFS-IR) COUPLING METHOD AND SYSTEM, AND DEVICE

#7
20250172585
2025-05-29

SCANNING PROBE MICROSCOPE AND METHOD OF ALIGNMENT, FOCUSING, AND MEASUREMENT

#8
20250164523
2025-05-22

METHODS FOR POSITIONING A MEASUREMENT SPOT USING A SCANNING PROBE MICROSCROPE

#9
20250138047
2025-05-01

SCANNING PROBE MICROSCOPE AND SAMPLE USED THEREIN

#10
20240426870
2024-12-26

SCANNING PROBE MICROSCOPE

#11
20240369595
2024-11-07

LIGHTING SYSTEM FOR MULTI-PROBE MICROSCOPE

#12
20240295583
2024-09-05

POSITIONING SYSTEM AND METHOD

#13
20240275130
2024-08-15

LASER DIODE ARRANGEMENT, METHOD OF OPERATING A LASER DIODE AND SCANNING MICROSCOPE DEVICE COMPRISING A LASER DIODE

#14
20240269717
2024-08-15

DEBRIS REMOVAL FROM HIGH ASPECT STRUCTURES

#15
20240210442
2024-06-27

METHOD OF CALIBRATING IN A SCANNING PROBE MICROSCOPY SYSTEM AN OPTICAL MICROSCOPE, CALIBRATION STRUCTURE AND SCANNING PROBE MICROSCOPY DEVICE

#16
20240110939
2024-04-04

AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND SCANNING PROBE MICROSCOPY SYSTEM USING THE SAME

#17
20240077516
2024-03-07

SYSTEM, METHOD, COMPUTER-ACCESSIBLE MEDIUM AND APPARATUS FOR DNA MAPPING

#18
20240069095
2024-02-29

Defect detection using thermal laser stimulation and atomic force microscopy

#19
20240012021
2024-01-11

Atomic force microscope

#20
20230393169
2023-12-07

ARRANGEMENT FOR AND METHOD OF DETERMINING CANTILEVER DEFLECTION IN A SCANNING PROBE MICROSCOPY SYSTEM

#21
20230358782
2023-11-09

Nano robotic system for high throughput single cell DNA sequencing

#22
20230324433
2023-10-12

METHOD FOR MEASURING, BY MEASUREMENT DEVICE, CHARACTERISTICS OF SURFACE OF OBJECT TO BE MEASURED, ATOMIC FORCE MICROSCOPE FOR PERFORMING SAME METHOD, AND COMPUTER PROGRAM STORED IN STORAGE MEDIUM TO PERFORM SAME METHOD

#23
20230251284
2023-08-10

Automated optimization of AFM light source positioning

#24
20230204624
2023-06-29

APPARATUS AND METHOD FOR IDENTIFYING TARGET POSITION IN ATOMIC FORCE MICROSCOPE

#25
20230161220
2023-05-25

Truncated nonlinear interferometer-based sensor system

#26
20230158555
2023-05-25

Debris removal from high aspect structures

#27
20230030991
2023-02-02

Method of imaging a surface using a scanning probe microscope

#28
20230020068
2023-01-19

Method and device for simultaneous independent motion measurement of multiple probes in atomic force microscope

#29
20230019239
2023-01-19

Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope

#30
20230018874
2023-01-19

Scanning probe microscope and method for resonance-enhanced detection using a range of modulation frequencies

#31
20220373575
2022-11-24

Atomic force microscope using artificial intelligence object recognition technology and operation method thereof

#32
20220357359
2022-11-10

Information providing system, server device, and analyzer

#33
20220260611
2022-08-18

Cantilever, scanning probe microscope, and measurement method using scanning probe microscope

#34
20220244289
2022-08-04

Automated optimization of AFM light source positioning

#35
20220229088
2022-07-21

Heterodyne scanning probe microscopy method and scanning probe microscopy system

#36
20220178965
2022-06-09

Apparatus and method for examining and/or processing a sample

#37
20220155340
2022-05-19

Probe for detecting near field and near-field detecting system including the same

#38
20220146549
2022-05-12

3D multipurpose scanning microscopy probes

#39
20220146548
2022-05-12

Apparatus and method for a scanning probe microscope

#40
20220107340
2022-04-07

Method and apparatus for examining a measuring tip of a scanning probe microscope

#41
20220107339
2022-04-07

Torsion wing probe assembly

#42
20220065895
2022-03-03

Method and apparatus for aligning a probe for scanning probe microscopy to the tip of a pointed sample

#43
20220057429
2022-02-24

Atomic force microscope

#44
20220018873
2022-01-20

Scanning probe microscope and scanning probe microscope optical axis adjustment method

#45
20210405503
2021-12-30

Truncated non-linear interferometer-based sensor system

#46
20210396783
2021-12-23

Array atomic force microscopy for enabling simultaneous multi-point and multi-modal nanoscale analyses and stimulations

#47
20210341513
2021-11-04

High speed atomic force profilometry of large areas

#48
20210316986
2021-10-14

SCANNING PROBE MICROSCOPE AND METHOD FOR MEASURING PHYSICAL QUANTITY USING SCANNING PROBE MICROSCOPE

#49
20210311091
2021-10-07

Scanning type probe microscope and control device for scanning type probe microscope

#50
20210308724
2021-10-07

Debris removal in high aspect structures

#51
20210293850
2021-09-23

Micromechanical sensor with optical transduction

#52
20210263068
2021-08-26

Scanning probe microscope and optical axis adjustment method in scanning probe microscope

#53
20210215737
2021-07-15

Systems, method and computer-accessible medium for providing balanced asymmetric interferometry for vibrationally isolated optical scanning probe(s)

#54
20210190819
2021-06-24

Truncated nonlinear interferometer-based atomic force microscopes

#55
20210109126
2021-04-15

Apparatus and method for examining and/or processing a sample

#56
20210102971
2021-04-08

Scanning probe microscope and position adjustment method for scanning probe microscope

#57
20210096152
2021-04-01

Micro-optomechanical system and method for the production thereof

#58
20210033640
2021-02-04

Apparatus and methods for quantum beam tracking

#59
20200408806
2020-12-31

Method and apparatus for correcting responsivity variation in photothermal imaging

#60
20200355724
2020-11-12

SYSTEM AND METHOD FOR OPTICAL DRIFT CORRECTION

#61
20200348333
2020-11-05

Torsion wing probe assembly

#62
20200319229
2020-10-08

Surface analyzer

#63
20200309815
2020-10-01

Device integrated with scanning probe for optical nanofocusing and near-field optical imaging

#64
20200191827
2020-06-18

Multiple integrated tips scanning probe microscope

#65
20200191826
2020-06-18

Method and apparatus of operating a scanning probe microscope

#66
20200166540
2020-05-28

Low drift system for a metrology instrument

#67
20200141972
2020-05-07

Method and apparatus for examining a measuring tip of a scanning probe microscope

#68
20200141970
2020-05-07

Scanning probe microscope

#69
20200124635
2020-04-23

Heterodyne atomic force microscopy device, method and lithographic system

#70
20200116754
2020-04-16

Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample

#71
20200049734
2020-02-13

High speed atomic force profilometry of large areas

#72
20200025796
2020-01-23

Apparatus and method for a scanning probe microscope

#73
20200011893
2020-01-09

Scanning probe system

#74
20200003800
2020-01-02

Scanning probe microscope

#75
20190369139
2019-12-05

Atomic force microscopy device, method and lithographic system

#76
20190352710
2019-11-21

SYSTEM, METHOD, COMPUTER-ACCESSIBLE MEDIUM AND APPARATUS FOR DNA MAPPING

#77
20190337025
2019-11-07

Debris removal in high aspect structures

#78
20190331711
2019-10-31

Scanning probe microscope and light intensity adjusting method

#79
20190324054
2019-10-24

Metrological scanning probe microscope

#80
20190317124
2019-10-17

Scanning probe microscope and cantilever moving method

#81
20190310283
2019-10-10

Cryogenic cooling system

#82
20190293680
2019-09-26

Scanning probe microscope

#83
20190271631
2019-09-05

Debris removal from high aspect structures

#84
20190250524
2019-08-15

Alignment system and method

#85
20190250187
2019-08-15

Build Sequences for Mechanosynthesis

#86
20190234992
2019-08-01

Scanning probe microscope

#87
20190170789
2019-06-06

Measuring device for a scanning probe microscope, scanning probe microscope and method for operating the scanning probe microscope

#88
20190128919
2019-05-02

Multiple integrated tips scanning probe microscope

#89
20190064208
2019-02-28

Atomic force microscope with optical guiding mechanism

#90
20190049486
2019-02-14

Characterizing a height profile of a sample by side view imaging

#91
20190025340
2019-01-24

Determining interaction forces in a dynamic mode AFM during imaging

#92
20190011343
2019-01-10

Method for estimating a stiffness of a deformable part

#93
20180364276
2018-12-20

Filed-mapping and focal-spot tracking for s-SNOM

#94
20180321481
2018-11-08

Microscope comprising a movable objective-camera system with rolling shutter camera sensor and a multi-color strobe flash and method for scanning microscope slides with proper focus

#95
20180299481
2018-10-18

Scanning probe microscopy utilizing separable components

#96
20180299480
2018-10-18

Scanning probe microscope

#97
20180267082
2018-09-20

Build sequences for mechanosynthesis

#98
20180267081
2018-09-20

Measurement system

#99
20180259552
2018-09-13

Scanning probe microscope

#100
20180210007
2018-07-26

Systems and methods for nano-tribological manufacturing of nanostructures

#101
20180203037
2018-07-19

Compact probe for atomic-force microscopy and atomic-force microscope including such a probe

#102
20180172728
2018-06-21

Photonic probe for atomic force microscopy

#103
20180172726
2018-06-21

Scanning probe microscope

#104
20180164342
2018-06-14

Scanning probe system

#105
20180149673
2018-05-31

Apparatus and methods for investigating a sample surface

#106
20180143221
2018-05-24

Imaging a gap between sample and probe of a scanning probe microscope in a substantially horizontal side view

#107
20180136251
2018-05-17

Method and apparatus of operating a scanning probe microscope

#108
20180128853
2018-05-10

Metrological scanning probe microscope

#109
20180120346
2018-05-03

Build sequences for mechanosynthesis

#110
20180113149
2018-04-26

Miniaturized and compact probe for atomic force microscopy

#111
20180106832
2018-04-19

Scanning probe microscope

#112
20180106830
2018-04-19

Method and device of using a scanning probe microscope

#113
20180088148
2018-03-29

Scanning probe microscope using gradual increases and decreases in relative speed when shifting and reciprocating the scanned probe across a sample

#114
20180059136
2018-03-01

Chemical nano-identification of a sample using normalized near-field spectroscopy

#115
20170254834
2017-09-07

Modular Atomic Force Microscope

#116
20170242052
2017-08-24

Method and apparatus of operating a scanning probe microscope

#117
20170219621
2017-08-03

Field-mapping and focal-spot tracking for S-SNOM

#118
20170160309
2017-06-08

Method and apparatus for infrared scattering scanning near-field optical microscopy with background suppression

#119
20170059609
2017-03-02

Scanning probe microscope and optical axis adjustment method for scanning probe microscope

#120
20170003316
2017-01-05

Method and apparatus for infrared scattering scanning near-field optical microscopy with high speed point spectroscopy

#121
20160356809
2016-12-08

Chemical nano-identification of a sample using normalized near-field spectroscopy

#122
20160313368
2016-10-27

Optical beam positioning unit for atomic force microscope

#123
20160313367
2016-10-27

Method and apparatus of operating a scanning probe microscope

#124
20160282383
2016-09-29

Scanning probe microscope

#125
20160266165
2016-09-15

Debris removal from high aspect structures

#126
20160263632
2016-09-15

Debris removal in high aspect structures

#127
20160258979
2016-09-08

Method and apparatus of operating a scanning probe microscope

#128
20160252545
2016-09-01

Multiple Integrated Tips Scanning Probe Microscope

#129
20160238631
2016-08-18

Optical knife-edge detector with large dynamic range

#130
20160202288
2016-07-14

Scanning probe microscope head design

#131
20160187374
2016-06-30

Minute object characteristics measuring apparatus

#132
20160187373
2016-06-30

Head limiting movement range of laser spot and atomic force microscope having the same

#133
20160178659
2016-06-23

Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode

#134
20160169938
2016-06-16

METHOD OF ANALYZING SURFACE OF SAMPLE USING SCANNING PROBE MICROSCOPE AND SCANNING PROBE MICROSCOPE THEREFOR

#135
20160169937
2016-06-16

Metrological scanning probe microscope

#136
20160124014
2016-05-05

Force detection for microscopy based on direct tip trajectory observation

#137
20160077016
2016-03-17

Evaluation system and a method for evaluating a substrate

#138
20160033548
2016-02-04

Inspection method and its apparatus for thermal assist type magnetic head element

#139
20160033547
2016-02-04

Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source

#140
20160025771
2016-01-28

Scanning probe microscope head design

#141
20160018437
2016-01-21

Chemical nano-identification of a sample using normalized near-field spectroscopy

#142
20160011231
2016-01-14

Three-dimensional fine movement device

#143
20160011230
2016-01-14

Scanning mechanism and scanning probe microscope

#144
20150301079
2015-10-22

Probe calibration or measurement routine

#145
20150285836
2015-10-08

Multiple probe actuation

#146
20150219686
2015-08-06

Multiple probe detection and actuation

#147
20150219685
2015-08-06

Multiple probe actuation

#148
20150219684
2015-08-06

Photothermal actuation of a probe for scanning probe microscopy

#149
20150211841
2015-07-30

Device and method for the interferometric measuring of an object

#150
20150177126
2015-06-25

Method and system for characterization of nano- and micromechanical structures

#151
20150168239
2015-06-18

Nanoindenter multimodal microscope objective for mechanobiology

#152
20150153385
2015-06-04

Scanning mechanism and scanning probe microscope

#153
20150135374
2015-05-14

Scanning probe microscope

#154
20150121575
2015-04-30

Device and method for measuring distribution of atomic resolution deformation

#155
20150059026
2015-02-26

Measuring surface curvature

#156
20150020244
2015-01-15

Beam scanning system

#157
20150020243
2015-01-15

Scanning mechanism and scanning probe microscope

#158
20150013035
2015-01-08

Probe actuation

#159
20140368829
2014-12-18

Optical cantilever based analysis

#160
20140338074
2014-11-13

Microscope probe and method for use of same

#161
20140317790
2014-10-23

Optical beam positioning unit for atomic force microscope

#162
20140297222
2014-10-02

Actuator position calculation device, actuator position calculation method, and actuator position calculation program

#163
20140289910
2014-09-25

Sealed AFM cell

#164
20140283229
2014-09-18

Method and apparatus of operating a scanning probe microscope

#165
20140250553
2014-09-04

Sensor for low force-noise detection in liquids

#166
20140137300
2014-05-15

Atomic force microscope system using selective active damping

#167
20140130213
2014-05-08

Interferometric atomic-force microscopy device and method

#168
20140082775
2014-03-20

Modular UHV Compatible Angle Physical Contact Fiber Connection for Transferable Fiber Interferometer Type Dynamic Force Microscope Head

#169
20140047585
2014-02-13

Scanning probe microscopy cantilever comprising an electromagnetic sensor

#170
20130312142
2013-11-21

System and method for high-speed atomic force microscopy with switching between two feedback loops

#171
20130298294
2013-11-07

Feedback controller in probe microscope utilizing a switch and a inverter

#172
20130278937
2013-10-24

Integrated Displacement Sensors for Probe Microscopy and Force Spectroscopy

#173
20130276174
2013-10-17

Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode

#174
20130111635
2013-05-02

Probe head scanning probe microscope including the same

#175
20130110262
2013-05-02

Automatic tuning of atomic force microscope

#176
20130037978
2013-02-14

Methods of manufacturing diamond capsules

#177
20120327429
2012-12-27

Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope

#178
20120246768
2012-09-27

Method of measuring vibration characteristics of cantilever

#179
20120204295
2012-08-09

Fast-scanning SPM scanner and method of operating same

#180
20120167261
2012-06-28

High frequency deflection measurement of IR absorption

#181
20120079633
2012-03-29

Apparatus and Method for Isolating and Measuring Movement in Metrology Apparatus

#182
20120047610
2012-02-23

CANTILEVER-BASED OPTICAL INTERFACE FORCE MICROSCOPE

#183
20110296929
2011-12-08

Load measuring apparatus

#184
20110271411
2011-11-03

Method and apparatus for measuring cantilever deflection in constrained spaces

#185
20110247107
2011-10-06

Method for processing output of scanning type probe microscope, and scanning type probe microscope

#186
20110247106
2011-10-06

Dynamic probe detection system

#187
20110211197
2011-09-01

Heterodyne detection device for imaging an object by re-injection

#188
20110167525
2011-07-07

Probe detection system

#189
20110162117
2011-06-30

Device for scanning a sample surface covered with a liquid

#190
20110138506
2011-06-09

METHOD OF PROBE ALIGNMENT

#191
20110113515
2011-05-12

Scanning probe microscope

#192
20110055986
2011-03-03

Athermal atomic force microscope probes

#193
20110035848
2011-02-10

Laser guided tip approach with 3D registration to a surface

#194
20110007324
2011-01-13

Probe microscope

#195
20100306884
2010-12-02

Scanning probe microscope having improved optical access

#196
20100275334
2010-10-28

Modular atomic force microscope

#197
20100257643
2010-10-07

ULTRASOFT ATOMIC FORCE MICROSCOPY DEVICE AND METHOD

#198
20100235955
2010-09-16

Vibration compensation in probe microscopy

#199
20100218288
2010-08-26

Atomic force microscopy devices, arrangements and systems

#200
20100207039
2010-08-19

Probe microscopy and probe position monitoring apparatus

#201
20100199393
2010-08-05

Probe microscope

#202
20100192267
2010-07-29

Scanning probe microscope with independent force control and displacement measurements

#203
20100180355
2010-07-15

Probe sensor with multi-dimensional optical grating

#204
20100180354
2010-07-15

Three-dimensional nanoscale metrology using FIRAT probe

#205
20100122385
2010-05-13

Method and apparatus of operating a scanning probe microscope

#206
20100116038
2010-05-13

FEEDBACK- ENHANCED THERMO-ELECTRIC TOPOGRAPHY SENSING

#207
20100067021
2010-03-18

Method of detecting a movement of a measuring probe and measuring instrument

#208
20100031405
2010-02-04

Tool tips with scanning probe microscopy and/or atomic force microscopy applications

#209
20090300806
2009-12-03

Atomic force microscope

#210
20090293160
2009-11-26

Automatic landing method and apparatus for scanning probe microscope using the same

#211
20090219506
2009-09-03

Heterodyne laser doppler probe and measurement system using the same

#212
20090210971
2009-08-20

Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope

#213
20090207404
2009-08-20

System and method for the inspection of micro and nanomechanical structures

#214
20090184242
2009-07-23

Raster scanning microscope having transparent optical element with inner curved surface

#215
20090168073
2009-07-02

CANTILEVER SENSOR SYSTEM AND PROFILERS AND BIOSENSORS USING THE SAME

#216
20090145209
2009-06-11

Probe apparatus for measuring an electron state on a sample surface

#217
20090138994
2009-05-28

Measuring device with daisy type cantilever wheel

#218
20090128825
2009-05-21

Apparatus and method for dynamic cellular probing and diagnostics using holographic optical forcing array

#219
20090079990
2009-03-26

Homodyne laser interferometer probe and displacement measurement system using the same

#220
20090032706
2009-02-05

Fast-scanning SPM and method of operating same

#221
20090027690
2009-01-29

Measuring probe, sample surface measuring apparatus and sample surface measuring method

#222
20090021747
2009-01-22

Shape measuring apparatus

#223
20090002714
2009-01-01

Optical device comprising a cantilever and method of fabrication and use thereof

#224
20080307865
2008-12-18

Three-dimensional nanoscale metrology using FIRAT probe

#225
20080266575
2008-10-30

Hybrid contact mode scanning cantilever system

#226
20080259356
2008-10-23

System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers

#227
20080257022
2008-10-23

Factory-alignable compact cantilever probe

#228
20080256850
2008-10-23

Diamond structures as fuel capsules for nuclear fusion

#229
20080223119
2008-09-18

Fast-scanning SPM scanner and method of operating same

#230
20080121028
2008-05-29

Scanning probe microscopy inspection and modification system

#231
20080073520
2008-03-27

Tip structure for scanning devices, method of its preparation and devices thereon

#232
20080072665
2008-03-27

Device and method for scanning probe microscopy

#233
20080061230
2008-03-13

Probe sensor with multi-dimensional optical grating

#234
20080049236
2008-02-28

Optical displacement detection mechanism and surface information measurement device using the same

#235
20080049223
2008-02-28

Optical displacement-detecting mechanism and probe microscope using the same

#236
20080047335
2008-02-28

Measuring apparatus

#237
20080047334
2008-02-28

Scanning Microscope With Shape Correction Means

#238
20080007823
2008-01-10

Microscope and interferometer thereof

#239
20080000292
2008-01-03

System for nano position sensing in scanning probe microscopes using an estimator

#240
20080000291
2008-01-03

Method and apparatus for monitoring of a SPM actuator

#241
20070271996
2007-11-29

Cantilever assembly

#242
20070234786
2007-10-11

Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography

#243
20070220958
2007-09-27

Optical detection alignment/tracking method and apparatus

#244
20070195333
2007-08-23

Atomic force microscope

#245
20070158554
2007-07-12

Probe for probe microscope using transparent substrate, method of producing the same, and probe microscope device

#246
20070144244
2007-06-28

Probe module with integrated actuator for a probe microscope

#247
20070140905
2007-06-21

Nanogap series substance capturing, detecting and identifying method and device

#248
20070114402
2007-05-24

Object inspection and/or modification system and method

#249
20070113630
2007-05-24

Probe apparatus for measuring an electron state on a sample surface

#250
20070103697
2007-05-10

Integrated displacement sensors for probe microscopy and force spectroscopy

#251
20070089496
2007-04-26

Three-dimensional nanoscale metrology using FIRAT probe

#252
20070086919
2007-04-19

Apparatus and method for detecting deformability of cells using spatially modulated optical force microscopy

#253
20070022804
2007-02-01

Scanning probe microscopy inspection and modification system

#254
20070018096
2007-01-25

Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers

#255
20070012873
2007-01-18

Scanning-type probe microscope

#256
20070012094
2007-01-18

Integrated displacement sensors for probe microscopy and force spectroscopy

#257
20060283338
2006-12-21

Force sensing integrated readout and active tip based probe microscope systems

#258
20060272398
2006-12-07

Beam tracking system for scanning-probe type atomic force microscope

#259
20060255818
2006-11-16

Multiple local probe measuring device and method

#260
20060254346
2006-11-16

Method to transiently detect sample features using cantilevers

#261
20060253943
2006-11-09

Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers

#262
20060237639
2006-10-26

Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements

#263
20060231757
2006-10-19

Interferometric apparatus utilizing a cantilever array to measure a surface

#264
20060219900
2006-10-05

Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope

#265
20060219899
2006-10-05

Scanning probe microscope

#266
20060213261
2006-09-28

Real time detection of loss of cantilever sensing loss

#267
20060168703
2006-07-27

Apparatus and method for a scanning probe microscope

#268
20060162455
2006-07-27

Method and device for measuring vibration frequency of multi-cantilever

#269
20060113469
2006-06-01

Scanning probe microscope and sample observing method using this and semiconductor device production method

#270
20060076488
2006-04-13

Surface shape measuring apparatus, surface measuring method, and exposure apparatus

#271
20060072185
2006-04-06

Diffractive optical position detector in an atomic force microscope having a moveable cantilever

#272
20060065047
2006-03-30

Atomic force microscope

#273
20060005615
2006-01-12

Method and apparatus for evanescent filed measuring of particle-solid separation

#274
20050279158
2005-12-22

Atomic force microscope and corrector thereof and measuring method

#275
20050269510
2005-12-08

Electrical scanning probe microscope apparatus

#276
20050264825
2005-12-01

Sensor with cantilever and optical resonator

#277
20050247874
2005-11-10

Scanning probe microscope and molecular structure change observation method

#278
20050239047
2005-10-27

Methods and devices for determining a cell characteristic, and applications employing the same

#279
20050213107
2005-09-29

Microscope using quantum-mechanically entangled photons

#280
20050210966
2005-09-29

Scanning probe microscope and measuring method by means of the same

#281
20050184746
2005-08-25

Multiple local probe measuring device and method

#282
20050172703
2005-08-11

Scanning probe microscopy inspection and modification system

#283
20050151077
2005-07-14

Scanning probe microscope and specimen observation method

#284
20050117163
2005-06-02

High sensitivity scanning probe system

#285
20050103996
2005-05-19

Measurement device for electron microscope

#286
20050066713
2005-03-31

Method to transiently detect samples in atomic force microscopes

#287
20050061970
2005-03-24

Apparatus and method for a scanning probe microscope

#288
20050056783
2005-03-17

Object inspection and/or modification system and method

#289
20050040836
2005-02-24

Multiple local probe measuring device and method

#290
20050030054
2005-02-10

Electrical scanning probe microscope apparatus

#291
20050023481
2005-02-03

Method of and an apparatus for measuring a specimen by means of a scanning probe microscope

#292
20050012936
2005-01-20

Scanning probe microscope and measurement method using the same

#293
19024749
2025-06-17

Method for adjusting laser path of terahertz near-field system

#294
17023670
2022-05-03

Metal coated spike array

#295
15924713
2019-01-01

Scanning probe microscope

#296
15248746
2018-01-16

Atomic-force microscope system with integrated fabry-perot resonator