ClassID:

171147

G01Q20/04 - CPC Classification

Classification description:

Monitoring the movement or position of the probe Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezo-electric gauge

Recent Application in this class:
#1
20250147066
2025-05-08

Nanoscale Dynamic Mechanical Analysis Via Atomic Force Microscopy (AFM-nDMA)

#2
20240272196
2024-08-15

Scattering-type scanning near-field optical microscopy with Akiyama piezo-probes

#3
20240210443
2024-06-27

FIDUCIAL MARKER DESIGN, FIDUCIAL MARKER, SCANNING PROBE MICROSCOPY DEVICE AND METHOD OF CALIBRATING A POSITION OF A PROBE TIP

#4
20240175895
2024-05-30

Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)

#5
20240168053
2024-05-23

Nano-Mechanical Infrared Spectroscopy System and Method Using Gated Peak Force IR

#6
20240110939
2024-04-04

AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND SCANNING PROBE MICROSCOPY SYSTEM USING THE SAME

#7
20230243867
2023-08-03

Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)

#8
20220381803
2022-12-01

AFM imaging with creep correction

#9
20220260611
2022-08-18

Cantilever, scanning probe microscope, and measurement method using scanning probe microscope

#10
20220252638
2022-08-11

Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)

#11
20220244288
2022-08-04

Coated active cantilever probes for use in topography imaging in opaque liquid environments, and methods of performing topography imaging

#12
20220120783
2022-04-21

Method and control unit for demodulation

#13
20220057430
2022-02-24

Scanning probe microscope, scan head and method

#14
20220026464
2022-01-27

Atomic force microscopy cantilever, system and method

#15
20210239732
2021-08-05

Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)

#16
20210140996
2021-05-13

Scanning sensor having a spin defect

#17
20210020825
2021-01-21

Cantilever with a collocated piezoelectric actuator-sensor pair

#18
20200341027
2020-10-29

Scanning probe microscope with case and elastic body

#19
20200249255
2020-08-06

ATOMIC FORCE MICROSCOPY CANTILEVER, SYSTEM AND METHOD

#20
20200191827
2020-06-18

Multiple integrated tips scanning probe microscope

#21
20200041541
2020-02-06

Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)

#22
20190317124
2019-10-17

Scanning probe microscope and cantilever moving method

#23
20190128919
2019-05-02

Multiple integrated tips scanning probe microscope

#24
20190094267
2019-03-28

Method of controlling a probe using constant command signals

#25
20190064211
2019-02-28

SCANNING PROBE MICROSCOPE

#26
20190018040
2019-01-17

Method and apparatus of using peak force tapping mode to measure physical properties of a sample

#27
20180203037
2018-07-19

Compact probe for atomic-force microscopy and atomic-force microscope including such a probe

#28
20180172728
2018-06-21

Photonic probe for atomic force microscopy

#29
20180141801
2018-05-24

Multilayer MEMS cantilevers

#30
20180113149
2018-04-26

Miniaturized and compact probe for atomic force microscopy

#31
20170299525
2017-10-19

Microwave impedance microscopy using a tuning fork

#32
20160274144
2016-09-22

Method and apparatus of using peak force tapping mode to measure physical properties of a sample

#33
20160003866
2016-01-07

Microscope having a multimode local probe, tip-enhanced raman microscope, and method for controlling the distance between the local probe and the sample

#34
20150369839
2015-12-24

Interface of a microfabricated scanning force sensor for combined force and position sensing

#35
20150362525
2015-12-17

Surface force measuring method and surface force measuring apparatus

#36
20150323347
2015-11-12

Piezoelectric actuator and method of measuring motion by using the same

#37
20150047078
2015-02-12

Scanning probe microscope comprising an isothermal actuator

#38
20140250553
2014-09-04

Sensor for low force-noise detection in liquids

#39
20140047585
2014-02-13

Scanning probe microscopy cantilever comprising an electromagnetic sensor

#40
20130276176
2013-10-17

Atomic force microscope probe, method for preparing same, and uses thereof

#41
20130169341
2013-07-04

Detecting responses of micro-electromechanical system (MEMS) resonator device

#42
20120242189
2012-09-27

Micro-mechanical component with cantilever integrated electrical functional element

#43
20120137395
2012-05-31

SCANNED PROBE MICROSCOPE WITHOUT INTERFERENCE OR GEOMETRIC CONSTRAINT FOR SINGLE OR MULTIPLE PROBE OPERATION IN AIR OR LIQUID

#44
20120131702
2012-05-24

Method and apparatus of using peak force tapping mode to measure physical properties of a sample

#45
20120124706
2012-05-17

Scanning probe microscope and method for detecting proximity of probes thereof

#46
20110269121
2011-11-03

Lab-on-a-pipette

#47
20110265227
2011-10-27

Piezoelectric microcantilevers and uses in atomic force microscopy

#48
20110219635
2011-09-15

Method of aligning a first article relative to a second article

#49
20110055985
2011-03-03

Device and method for an atomic force microscope for the study and modification of surface properties

#50
20110047662
2011-02-24

Apparatus and method for investigating surface properties of different materials

#51
20110047661
2011-02-24

Microprobe, measurement system and method

#52
20110043229
2011-02-24

Quantum tunnelling sensor device and method

#53
20100306885
2010-12-02

Cantilevers with integrated piezoelectric actuators for probe microscopy

#54
20100257644
2010-10-07

Coupled mass-spring systems and imaging methods for scanning probe microscopy

#55
20100235954
2010-09-16

DUAL-TIP CANTILEVER

#56
20100205698
2010-08-12

Atomic force microscopy probe

#57
20100180355
2010-07-15

Probe sensor with multi-dimensional optical grating

#58
20100180354
2010-07-15

Three-dimensional nanoscale metrology using FIRAT probe

#59
20100175156
2010-07-08

Three-dimensional imaging and manipulation

#60
20100147820
2010-06-17

HEATED CANTILEVER

#61
20100132075
2010-05-27

Self displacement sensing cantilever and scanning probe microscope

#62
20100116038
2010-05-13

FEEDBACK- ENHANCED THERMO-ELECTRIC TOPOGRAPHY SENSING

#63
20100115672
2010-05-06

SCANNING PROBE EPITAXY

#64
20100100989
2010-04-22

Piezoresistor height sensing cantilever

#65
20100089869
2010-04-15

Nanomanufacturing devices and methods

#66
20100071098
2010-03-18

SCANNING PROBE EPITAXY

#67
20100059475
2010-03-11

METHOD OF NANOSCALE PATTERNING USING BLOCK COPOLYMER PHASE SEPARATED NANOSTRUCTURE TEMPLATES

#68
20100058499
2010-03-04

Cantilever, cantilever system, and probe microscope and adsorption mass sensor including the cantilever system

#69
20090301176
2009-12-10

Microelectromechanical System Comprising a Deformable Portion and a Stress Sensor

#70
20090265819
2009-10-22

Sensor for observations in liquid environments and observation apparatus for use in liquid environments

#71
20090206953
2009-08-20

Resonant MEMS device that detects photons, particles and small forces

#72
20090145209
2009-06-11

Probe apparatus for measuring an electron state on a sample surface

#73
20090038404
2009-02-12

Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes

#74
20090025465
2009-01-29

Miniaturized spring element and method for producing the spring element

#75
20090007645
2009-01-08

Piezoelectric microcantilevers and uses in atomic force microscopy

#76
20080307865
2008-12-18

Three-dimensional nanoscale metrology using FIRAT probe

#77
20080271522
2008-11-06

Sample analysis using cantilever probe

#78
20080216583
2008-09-11

Detection of resonator motion using piezoresistive signal downmixing

#79
20080209988
2008-09-04

Cantilevers with integrated actuators for probe microscopy

#80
20080168830
2008-07-17

Devices for probe microscopy

#81
20080061230
2008-03-13

Probe sensor with multi-dimensional optical grating

#82
20080047334
2008-02-28

Scanning Microscope With Shape Correction Means

#83
20080011058
2008-01-17

PIEZORESISTIVE CANTILEVER BASED NANOFLOW AND VISCOSITY SENSOR FOR MICROCHANNELS

#84
20070295064
2007-12-27

Methods of imaging in probe microscopy

#85
20070248892
2007-10-25

Apparatus for aligning a first article relative to a second article

#86
20070163335
2007-07-19

Method and apparatus for measuring electrical properties in torsional resonance mode

#87
20070125159
2007-06-07

Method for analysis through layer-by-layer sample removal using a cantilever probe

#88
20070113630
2007-05-24

Probe apparatus for measuring an electron state on a sample surface

#89
20070107502
2007-05-17

Overlay measurement methods with firat based probe microscope

#90
20070107501
2007-05-17

Nanoscale displacement detector

#91
20070089496
2007-04-26

Three-dimensional nanoscale metrology using FIRAT probe

#92
20060288786
2006-12-28

Ultrasonically coupled scanning probe microscope

#93
20060283338
2006-12-21

Force sensing integrated readout and active tip based probe microscope systems

#94
20060277981
2006-12-14

Micro structure, cantilever, scanning probe microscope and a method of measuring deformation quantity for the fine structure

#95
20060238206
2006-10-26

Measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts

#96
20060207317
2006-09-21

Scanning probe microscope

#97
20060162455
2006-07-27

Method and device for measuring vibration frequency of multi-cantilever

#98
20060113469
2006-06-01

Scanning probe microscope and sample observing method using this and semiconductor device production method

#99
20050212529
2005-09-29

Method and apparatus for measuring electrical properties in torsional resonance mode

#100
20050150280
2005-07-14

Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes

#101
20050133717
2005-06-23

Method for manufacturing a split probe

#102
20050103996
2005-05-19

Measurement device for electron microscope

#103
20050034543
2005-02-17

Micro-force sensing system