171177 ⎘
Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof; AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes AC mode
Sub-classes:ULTRA-PRECISION ELECTRON DENSITY CONTROLLER
#2SCANNING PROBE MICROSCOPY SYSTEM AND METHOD OF OPERATING SUCH A SYSTEM
#3ELEMENT OF AN AFM TOOL
#4DECOUPLED OPTICAL FORCE NANOSCOPY
#5METHOD, SYSTEM AND COMPUTER PROGRAM FOR PERFORMING ACOUSTIC SCANNING PROBE MICROSCOPY
#6HIGH-FREQUENCY ENHANCED ELECTROCHEMICAL STRAIN MICROSCOPE AND HIGH-FREQUENCY ENHANCED ELECTROCHEMICAL STRAIN MICROSCOPY USING THE SAME
#7OPTOMECHANICAL TRANSDUCER
#8Method of determining dimensions of features of a subsurface topography, scanning probe microscopy system and computer program
#9Vibration component measurement device, Kelvin probe force microscope, and vibration component measurement method
#10SEMICONDUCTOR-LASER-INTEGRATED ATOMIC FORCE MICROSCOPY OPTICAL PROBE
#11Heterodyne scanning probe microscopy method and scanning probe microscopy system
#12Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same
#13SCANNING PROBE MICROSCOPE AND METHOD FOR MEASURING PHYSICAL QUANTITY USING SCANNING PROBE MICROSCOPE
#14Sharpening method for probe tip of atomic force microscope (AFM)
#15Method of performing atomic force microscopy with an ultrasound transducer
#16Surface sensitive atomic force microscope based infrared spectroscopy
#17Method and apparatus of operating a scanning probe microscope
#18Method of and system for performing subsurface imaging using vibration sensing
#19Method of and atomic force microscopy system for performing subsurface imaging
#20Method of determining an overlay error, method for manufacturing a multilayer semiconductor device, atomic force microscopy device, lithographic system and semiconductor device
#21Device for the volumetric analysis of an organic or inorganic sample
#22Method of and system for performing defect detection on or characterization of a layer of a semiconductor element or semi-manufactured semiconductor element
#23Heterodyne scanning probe microscopy method and system
#24Material Property Measurements Using Multiple Frequency Atomic Force Microscopy
#25Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product
#26Tuned oscillator atomic force microscopy methods and apparatus
#27Method and apparatus of using peak force tapping mode to measure physical properties of a sample
#28Surface Sensitive Atomic Force Microscope Based Infrared Spectroscopy
#29Method of performing surface measurements on a surface of a sample, and scanning probe microscopy system therefore
#30AM/FM measurements using multiple frequency atomic force microscopy
#31Automatic calibration and tuning of feedback systems
#32Method and apparatus of operating a scanning probe microscope
#33Atomic force microscope and control method of the same
#34Method and device of using a scanning probe microscope
#35Peakforce photothermal-based detection of IR nanoabsorption
#36Thermal measurements using multiple frequency atomic force microscopy
#37Quantitative measurements using multiple frequency atomic force microscopy
#38Method and apparatus of operating a scanning probe microscope
#39Head-integrated atomic force microscope and composite microscope including same
#40AM/FM measurements using multiple frequency of atomic force microscopy
#41Measuring method for atomic force microscope
#42PeakForce photothermal-based detection of IR nanoabsorption
#43Harmonic feedback atomic force microscopy
#44Consensus-based multi-piezoelectric microcantilever sensor
#45Automated atomic force microscope and the operation thereof
#46Method and apparatus of operating a scanning probe microscope
#47Quantitative measurements using multiple frequency atomic force microscopy
#48Method and apparatus of using peak force tapping mode to measure physical properties of a sample
#49Dual-probe scanning probe microscope
#50Material property measurements using multiple frequency atomic force microscopy
#51Method and apparatus of operating a scanning probe microscope
#52Determination of local contact potential difference by noncontact atomic force microscopy
#53Scanning probe microscope and control method thereof
#54Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode
#55Exploitation of second-order effects in atomic force microscopy
#56Signal detection circuit and scanning probe microscope
#57Scanning probe microscope and scanning probe microscopy
#58AM/FM measurements using multiple frequency of atomic force microscopy
#59Automated atomic force microscope and the operation thereof
#60Band excitation method applicable to scanning probe microscopy
#61Methods, systems, and computer readable media for dual resonance frequency enhanced electrostatic force microscopy
#62Determination of local contact potential difference by noncontact atomic force microscopy
#63Thermal measurements using multiple frequency atomic force microscopy
#64Sealed AFM cell
#65Method and apparatus of operating a scanning probe microscope
#66Method and apparatus of using peak force tapping mode to measure physical properties of a sample
#67Method and apparatus of operating a scanning probe microscope
#68Scanning probe microscope and control method thereof
#69Method of controlling frequency modulated-atomic force microscope
#70Multiple frequency atomic force microscopy
#71Band excitation method applicable to scanning probe microscopy
#72Feedback controller in probe microscope utilizing a switch and a inverter
#73Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode
#74Detecting responses of micro-electromechanical system (MEMS) resonator device
#75Quantitative measurements using multiple frequency atomic force microscopy
#76High frequency deflection measurement of IR absorption with a modulated IR source
#77Method of measuring vibration characteristics of cantilever
#78Digital Q control for enhanced measurement capability in cantilever-based instruments
#79Cantilever excitation device and scanning probe microscope
#80High frequency deflection measurement of IR absorption
#81Scanning type probe microscope
#82Method and apparatus of using peak force tapping mode to measure physical properties of a sample
#83Material property measurements using multiple frequency atomic fore microscopy
#84Sub-microsecond-resolution probe microscopy
#85High frequency deflection measurement of IR absorption
#86CANTILEVER-BASED OPTICAL INTERFACE FORCE MICROSCOPE
#87Scanning probe microscope with current controlled actuator
#88Flexibly displaceable coupling device for acoustically excited atomic force microscopy with acoustic excitation of the sample
#89High frequency deflection measurement of IR absorption
#90Method for measuring a piezoelectric response by means of a scanning probe microscope
#91SCANNING PROBE MICROSCOPY WITH SPECTROSCOPIC MOLECULAR RECOGNITION
#92Mode synthesizing atomic force microscopy and mode-synthesizing sensing
#93Method and apparatus of operating a scanning probe microscope
#94Thermal measurements using multiple frequency atomic force microscopy
#95WHISPERING GALLERY MODE ULTRASONICALLY COUPLED SCANNING PROBE MICROSCOPE
#96Cantilever with paddle for operation in dual-frequency mode
#97Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer
#98Scanning near field thermoelastic acoustic holography (SNFTAH)
#99Scanning near field ultrasound holography
#100Device for oscillation excitation of an elastic bar fastened on one side in an atomic force microscope
#101Band excitation method applicable to scanning probe microscopy
#102Scanning probe in pulsed-force mode, digital and in real time
#103Atomic force microscopy probe
#104Method for measuring the force of interaction in a scanning probe microscope
#105Coherent demodulation with reduced latency adapted for use in scanning probe microscopes
#106Method and apparatus of operating a scanning probe microscope
#107Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever
#108Charge-Amp Based Piezoelectric Charge Microscopy (CPCM) Reading of Ferroelectric Bit Charge Signal
#109Atomic force microscope and interaction force measurement method using atomic force microscope
#110Multiple frequency atomic force microscopy
#111Scanning probe microscope with periodically phase-shifted AC excitation
#112Atomic force microscope
#113Preamplifying cantilever and applications thereof
#114Band excitation method applicable to scanning probe microscopy
#115Scanning probe microscope apparatus
#116High frequency deflection measurement of IR absorption
#117Probe apparatus for measuring an electron state on a sample surface
#118Non-destructive ambient dynamic mode AFM amplitude versus distance curve acquisition
#119Scanning probe microscope
#120Scanning near field ultrasound holography
#121Scanning Probe Microscope with Improved Scanning Speed
#122Method for determining a dopant concentration in a semiconductor sample
#123Atomic force gradient microscope and method of using this microscope
#124Shape measuring apparatus
#125Material property measurements using multiple frequency atomic force microscopy
#126Scan type probe microscope
#127Tweezer-equipped scanning probe microscope and transfer method
#128Resonant difference-frequency atomic force ultrasonic microscope
#129High frequency deflection measurement of IR absorption
#130Non-destructive wafer-scale sub-surface ultrasonic microscopy employing near field AFM detection
#131Digital Q control for enhanced measurement capability in cantilever-based instruments
#132Phase feedback AFM and control method therefor
#133Higher harmonics atomic force microscope
#134Method and apparatus for obtaining material property information of a heterogeneous sample using harmonic resonance imaging
#135Cantilever holder and scanning probe microscope including the same
#136Scanning probe microscope
#137Whispering gallery mode ultrasonically coupled scanning probe microscopy
#138Surface position measuring method and surface position measuring device
#139Analog High Sensitivity Continuous Phase and Amplitude Detection Device for a Harmonic Microcantilever Sensor
#140Carbon nanotube detection system
#141Electric potential difference detection method and scanning probe microscope
#142Scanning type probe microscope
#143Cantilever free-decay measurement system with coherent averaging
#144Cantilever control device
#145Probe microscope and measuring method using probe microscope
#146Atomic force microscope technique for minimal tip damage
#147Multiple frequency atomic force microscopy
#148Method and apparatus for measuring electrical properties in torsional resonance mode
#149Digital Q control for enhanced measurement capability in cantilever-based instruments
#150Method and apparatus of driving torsional resonance mode of a probe-based instrument
#151Scanning probe in pulsed-force mode, digital and in real time
#152Probe apparatus for measuring an electron state on a sample surface
#153Vibration-type cantilever holder and scanning probe microscope
#154Method and device for the contactless excitation of torsional vibrations in a one-sidedly clamped-in spring cantilever of an atomic force microscope
#155Oscillating probe with a virtual probe tip
#156Method and apparatus for determining surface characteristics by using SPM techniques with acoustic excitation and real-time digitizing
#157Scanning probe device and processing method of scanning probe
#158Scanning probe device and processing method by scanning probe
#159Method to transiently detect sample features using cantilevers
#160Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope
#161Real time detection of loss of cantilever sensing loss
#162Atomic force microscope and method of energy dissipation imaging using the same
#163Carbon nanotube excitation system
#164Scanning probe microscope and scanning method
#165Alignment-tolerant lens structures for acoustic force actuation of cantilevers
#166Scanning near field ultrasound holography
#167Scanning probe device and processing method by scanning probe
#168Method and apparatus for measuring electrical properties in torsional resonance mode
#169Digital control of quality factor in resonant systems including cantilever based instruments
#170Scanning probe microscope and specimen observation method
#171Method to transiently detect samples in atomic force microscopes
#172Near field acoustic holography with scanning probe microscope (SPM)
#173Scanning probe microscope and scanning method
#174Method and apparatus of driving torsional resonance mode of a probe-based instrument