G01Q60/46 - CPC Classification Index

ClassID:

171186 ⎘

G01Q60/46 - CPC Classification

Classification description:

Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof SCM [Scanning Capacitance Microscopy] or apparatus therefor, e.g. SCM probes

Sub-classes:

G01Q60/48 » Probes, their manufacture, or their related instrumentation, e.g. holders 13

Recent Application in this class:

20250341555

2025-11-06

METHOD FOR OBTAINING THE DIELECTRIC CONSTANT OF A DIELECTRIC SHEET

20240230710

2024-07-11

METHOD FOR OBTAINING THE EQUIVALENT OXIDE THICKNESS OF A DIELECTRIC LAYER

20240133918

2024-04-25

METHOD FOR OBTAINING THE EQUIVALENT OXIDE THICKNESS OF A DIELECTRIC LAYER

20230098264

2023-03-30

Method of preparing a specimen for scanning capacitance microscopy

20210318352

2021-10-14

SYSTEM FOR SCANNING PROBE MICROSCOPY APPLICATIONS AND METHOD FOR OBTAINING SAID SYSTEM

20170082685

2017-03-23

Probe-based data collection system with adaptive mode of probing controlled by local sample properties

20170016934

2017-01-19

Semiconductor testing structures and semiconductor testing apparatus

20160061695

2016-03-03

Method and apparatus for inspecting process solution, and sample preparation apparatus in inspection

20150316583

2015-11-05

Semiconductor testing structures and fabrication method thereof

#10

20150169997

2015-06-18

Apparatus and method for correlating images of a photolithographic mask

#11

20070221841

2007-09-27

Method and apparatus for two-dimensional profiling of doping profiles of a material sample with scanning capacitance microscope

#12

20050077915

2005-04-14

Method for measuring nm-scale tip-sample capacitance