171197 ⎘
General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group Probe tip arrays
METHOD OF CALIBRATING A PLURALITY OF METROLOGY DEVICES
#2PROBE DEVICE, PROBE CONTROL APPARATUS AND METHOD
#3RUGGED, SINGLE CRYSTAL WIDE-BAND-GAP-MATERIAL SCANNING-TUNNELING-MICROSCOPY/LITHOGRAPHY TIPS
#4LIGHTING SYSTEM FOR MULTI-PROBE MICROSCOPE
#5Method for Producing a Substrate Comprising Multiple Tips for Scanning Probe Microscopy
#6SYSTEMS AND METHODS FOR MANUFACTURING NANO-ELECTRO-MECHANICAL-SYSTEM PROBES
#7Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope
#8Probe for scanning probe microscope and binary state scanning probe microscope including the same
#9Method and apparatus for examining a measuring tip of a scanning probe microscope
#10Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same
#11Array atomic force microscopy for enabling simultaneous multi-point and multi-modal nanoscale analyses and stimulations
#12Systems and methods for manufacturing nano-electro-mechanical-system probes
#13Micro probe array device and manufacturing method of the device
#14Photodetector for scanning probe microscope
#15Assembly for detecting the intensity distribution of components of the electromagnetic field in beams of radiation
#16Rugged, single crystal wide-band-gap-material scanning-tunneling-microscopy/lithography tips
#17Device and method for analyzing a defect of a photolithographic mask or of a wafer
#18Scanning probe microscope using sensor molecules to improve photo-induced force on samples
#19Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system
#20Method for producing a probe suitable for scanning probe microscopy
#21Multiple integrated tips scanning probe microscope
#22Systems and methods for manufacturing nano-electro-mechanical-system probes
#23Method and apparatus for examining a measuring tip of a scanning probe microscope
#24Method of and atomic force microscopy system for performing subsurface imaging
#25Systems and methods for manufacturing nano-electro-mechanical-system probes
#26Alignment system and method
#27Multiple integrated tips scanning probe microscope with pre-alignment components
#28Multiple integrated tips scanning probe microscope
#29Rugged, single crystal wide-band-gap-material scanning-tunneling-microscopy/lithography tips
#30Integrated measurement and micromechanical positioning apparatus for real-time test control
#31SCANNING PROBE MICROSCOPE
#32MOTION SENSOR INTEGRATED NANO-PROBE N/MEMS APPARATUS, METHOD, AND APPLICATIONS
#33Apparatus and methods for non-destructive inspection using microwave microscopy
#34Coupled multiscale positioning of arrays of parallel, independently actuated and simultaneously driven modular scanning probe microscopes for high-throughput, in-line, nanoscale measurement of flexible, large area, and roll-to-roll processes
#35METROLOGY DEVICES AND METHODS FOR INDEPENDENTLY CONTROLLING A PLURALITY OF SENSING PROBES
#36Linked micromechanical positioning apparatus for real-time testing and measurement
#37Device and method for measuring and/or modifying surface features on a surface of a sample
#38Electrical contact auto-alignment strategy for highly parallel pen arrays in cantilever free scanning probe lithography
#39Method of fabricating nano-scale structures on the edge and nano-scale structures fabricated on the edge using the method
#40Thermal probe for a near-field thermal microscope and method for generating a thermal map
#41Compact probe for atomic-force microscopy and atomic-force microscope including such a probe
#42Apparatus and methods for investigating a sample surface
#43Device and method for analysing a defect of a photolithographic mask or of a wafer
#44System and method of performing scanning probe microscopy on a substrate surface
#45Dual-probe scanning probe microscope
#46Systems and methods for manufacturing nano-electro-mechanical-system probes
#47Apparatus for scanning nano structure with plural AFM probes and method thereof
#48Evaluation system and a method for evaluating a substrate
#49Dynamic optical head and imaging device using flexible nano film optical structure
#50High throughput microscopy device
#51MULTIFUNCTIONAL GRAPHENE COATED SCANNING TIPS
#52Multiple probe actuation
#53Multiple probe detection and actuation
#54Multiple probe actuation
#55High throughput scanning probe microscopy device
#56Motion sensor integrated nano-probe N/MEMS apparatus, method, and applications
#57Leveling apparatus and atomic force microscope including the same
#58Dual-probe scanning probe microscope
#59System and method for providing electromagnetic imaging through electroquasistatic sensing
#60High throughout reproducible cantilever functionalization
#61Probe head scanning probe microscope including the same
#62Probe assembly for a scanning probe microscope
#63USING OPTICAL DEFLECTION OF CANTILEVERS FOR ALIGNMENT
#64SCANNED PROBE MICROSCOPE WITHOUT INTERFERENCE OR GEOMETRIC CONSTRAINT FOR SINGLE OR MULTIPLE PROBE OPERATION IN AIR OR LIQUID
#65Scanning probe microscope and method for detecting proximity of probes thereof
#66Dynamic mode nano-scale imaging and position control using deflection signal direct sampling of higher mode-actuated microcantilevers
#67Lab-on-a-pipette
#68Method of aligning a first article relative to a second article
#69Method for automatically loading a probe assembly
#70Apparatus and method for investigating surface properties of different materials
#71System and method for providing electromagnetic imaging through magnetoquasistatic sensing
#72Method for examining a test sample using a scanning probe microscope, measurement system and a measuring probe system
#73System and method for providing electromagnetic imaging through electroquasistatic sensing
#74Probe assembly for a scanning probe microscope
#75Apparatus and process for controlled nanomanufacturing using catalyst retaining structures
#76Scanning probe microscope and a method to measure relative-position between probes
#77Atomic force microscope
#78System and method for the inspection of micro and nanomechanical structures
#79Array and cantilever array leveling
#80Measuring device with daisy type cantilever wheel
#81Nanoindentation surface analysis method
#82Near-field nano-imager
#83Nanolithography with use of viewports
#84Probe arrangement
#85System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers
#86SURFACE TREATMENT AND SURFACE SCANNING
#87Apparatus and method of transporting and loading probe devices of a metrology instrument
#88Near-field optical apparatus and method using photodetector array
#89Scanning probe microscopy inspection and modification system
#90Using optical deflection of cantilevers for alignment
#91APPARATUS AND METHOD OF TRANSPORTING AND LOADING PROBE DEVICES OF A METROLOGY INSTRUMENT
#92Multifunctional probe array system
#93Multi-tipped optical component
#94MULTI-TIP SURFACE CANTILEVER PROBE
#95Scanning probe microscope probe and manufacturing method therefor, scanning probe microscope and using method therefor, needle-like body and manufacturing method therefor, electronic device and manufacturing method therefor, charge density wave quantum phase microscope, and charge density wave quantum interferometer
#96Atomic force microscope tip arrays and methods of manufacturing same
#97Apparatus for aligning a first article relative to a second article
#98Apparatus for evaluating piezoelectric film, and method for evaluating piezoelectric film
#99Atomic force microscope
#100Coherent electron junction scanning probe interference microscope, nanomanipulator and spectrometer with assembler and DNA sequencing applications
#101Nanoindentation surface analysis tool and method
#102Programmable molecular manipulating processes
#103Nanogap series substance capturing, detecting and identifying method and device
#104Object inspection and/or modification system and method
#105Deconvolving tip artifacts using multiple scanning probes
#106Multifunctional probe array system
#107Electrical feedback detection system for multi-point probes
#108Scanning probe microscopy inspection and modification system
#109Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers
#110Three-dimensional structure composed of silicon fine wires, method for producing the same, and device including the same
#111Multiple local probe measuring device and method
#112Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers
#113Interferometric apparatus utilizing a cantilever array to measure a surface
#114Electrostatic nanolithography probe actuation device and method
#115Method and device for measuring vibration frequency of multi-cantilever
#116Programmable molecular manipulating devices
#117Programmable molecular manipulating processes
#118Recording/reproducing apparatus
#119Surface shape measuring apparatus, surface measuring method, and exposure apparatus
#120Diffractive optical position detector in an atomic force microscope having a moveable cantilever
#121Scanning probe for data storage and microscopy
#122Software synchronization of multiple scanning probes
#123Surface characteristic analysis apparatus
#124Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus
#125Probe storage device
#126Surface treatment and surface scanning
#127Fine pattern forming apparatus and fine pattern inspecting apparatus
#128Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same
#129Multiple local probe measuring device and method
#130Scanning probe microscopy inspection and modification system
#131Near-field optical probe
#132Method of forming atomic force microscope tips
#133Use of arrays of atomic force microscope/scanning tunneling microscope tips to scan nanocodes
#134Microstructures
#135Electrical feedback detection system for multi-point probes
#136Software synchronization of multiple scanning probes
#137Object inspection and/or modification system and method
#138Multiple local probe measuring device and method
#139Dual stage instrument for scanning a specimen
#140Probe card for characterizing processes of submicron semiconductor device fabrication
#141Carbon nanotube probes and structures and methods of measurement