G01Q70/06 - CPC Classification

Classification description:

General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group Probe tip arrays

Recent Application in this class:
#1
20240175896
2024-05-30

Method for Producing a Substrate Comprising Multiple Tips for Scanning Probe Microscopy

#2
20230143037
2023-05-11

SYSTEMS AND METHODS FOR MANUFACTURING NANO-ELECTRO-MECHANICAL-SYSTEM PROBES

#3
20230019239
2023-01-19

Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope

#4
20220308086
2022-09-29

Probe for scanning probe microscope and binary state scanning probe microscope including the same

#5
20220107340
2022-04-07

Method and apparatus for examining a measuring tip of a scanning probe microscope

#6
20220091069
2022-03-24

Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same

#7
20210396783
2021-12-23

Array atomic force microscopy for enabling simultaneous multi-point and multi-modal nanoscale analyses and stimulations

#8
20210389346
2021-12-16

Systems and methods for manufacturing nano-electro-mechanical-system probes

#9
20210311092
2021-10-07

MICRO PROBE ARRAY DEVICE AND MANUFACTURING METHOD OF THE DEVICE

#10
20210278435
2021-09-09

Photodetector for scanning probe microscope

#11
20210263070
2021-08-26

Assembly for detecting the intensity distribution of components of the electromagnetic field in beams of radiation

#12
20210263069
2021-08-26

Rugged, single crystal wide-band-gap-material scanning-tunneling-microscopy/lithography tips

#13
20210247336
2021-08-12

Device and method for analyzing a defect of a photolithographic mask or of a wafer

#14
20210208181
2021-07-08

Scanning probe microscope using sensor molecules to improve photo-induced force on samples

#15
20200309816
2020-10-01

Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system

#16
20200278379
2020-09-03

Method for producing a probe suitable for scanning probe microscopy

#17
20200191827
2020-06-18

Multiple integrated tips scanning probe microscope

#18
20200156376
2020-05-21

Systems and methods for manufacturing nano-electro-mechanical-system probes

#19
20200141972
2020-05-07

Method and apparatus for examining a measuring tip of a scanning probe microscope

#20
20200057028
2020-02-20

Method of and atomic force microscopy system for performing subsurface imaging

#21
20190383856
2019-12-19

Systems and methods for manufacturing nano-electro-mechanical-system probes

#22
20190250524
2019-08-15

Alignment system and method

#23
20190250186
2019-08-15

Multiple integrated tips scanning probe microscope with pre-alignment components

#24
20190128919
2019-05-02

Multiple integrated tips scanning probe microscope

#25
20190120873
2019-04-25

Rugged, single crystal wide-band-gap-material scanning-tunneling-microscopy/lithography tips

#26
20190077024
2019-03-14

Integrated measurement and micromechanical positioning apparatus for real-time test control

#27
20190064211
2019-02-28

SCANNING PROBE MICROSCOPE

#28
20190018039
2019-01-17

MOTION SENSOR INTEGRATED NANO-PROBE N/MEMS APPARATUS, METHOD, AND APPLICATIONS

#29
20190004085
2019-01-03

Apparatus and methods for non-destructive inspection using microwave microscopy

#30
20180348254
2018-12-06

Coupled multiscale positioning of arrays of parallel, independently actuated and simultaneously driven modular scanning probe microscopes for high-throughput, in-line, nanoscale measurement of flexible, large area, and roll-to-roll processes

#31
20180321276
2018-11-08

METROLOGY DEVICES AND METHODS FOR INDEPENDENTLY CONTROLLING A PLURALITY OF SENSING PROBES

#32
20180272523
2018-09-27

Linked micromechanical positioning apparatus for real-time testing and measurement

#33
20180238931
2018-08-23

Device and method for measuring and/or modifying surface features on a surface of a sample

#34
20180217183
2018-08-02

Electrical contact auto-alignment strategy for highly parallel pen arrays in cantilever free scanning probe lithography

#35
20180217182
2018-08-02

Method of fabricating nano-scale structures on the edge and nano-scale structures fabricated on the edge using the method

#36
20180203040
2018-07-19

Thermal probe for a near-field thermal microscope and method for generating a thermal map

#37
20180203037
2018-07-19

Compact probe for atomic-force microscopy and atomic-force microscope including such a probe

#38
20180149673
2018-05-31

Apparatus and methods for investigating a sample surface

#39
20170292923
2017-10-12

Device and method for analysing a defect of a photolithographic mask or of a wafer

#40
20170131323
2017-05-11

System and method of performing scanning probe microscopy on a substrate surface

#41
20160274143
2016-09-22

Dual-probe scanning probe microscope

#42
20160252546
2016-09-01

Systems and methods for manufacturing nano-electro-mechanical-system probes

#43
20160231351
2016-08-11

Apparatus for scanning nano structure with plural AFM probes and method thereof

#44
20160077016
2016-03-17

Evaluation system and a method for evaluating a substrate

#45
20150338267
2015-11-26

Dynamic optical head and imaging device using flexible nano film optical structure

#46
20150323561
2015-11-12

High throughput microscopy device

#47
20150309073
2015-10-29

MULTIFUNCTIONAL GRAPHENE COATED SCANNING TIPS

#48
20150285836
2015-10-08

Multiple probe actuation

#49
20150219686
2015-08-06

Multiple probe detection and actuation

#50
20150219685
2015-08-06

Multiple probe actuation

#51
20150185248
2015-07-02

High throughput scanning probe microscopy device

#52
20140331367
2014-11-06

Motion sensor integrated nano-probe N/MEMS apparatus, method, and applications

#53
20140304861
2014-10-09

Leveling apparatus and atomic force microscope including the same

#54
20140283228
2014-09-18

Dual-probe scanning probe microscope

#55
20140159748
2014-06-12

System and method for providing electromagnetic imaging through electroquasistatic sensing

#56
20140123348
2014-05-01

High throughout reproducible cantilever functionalization

#57
20130111635
2013-05-02

Probe head scanning probe microscope including the same

#58
20130014296
2013-01-10

Probe assembly for a scanning probe microscope

#59
20120317684
2012-12-13

USING OPTICAL DEFLECTION OF CANTILEVERS FOR ALIGNMENT

#60
20120137395
2012-05-31

SCANNED PROBE MICROSCOPE WITHOUT INTERFERENCE OR GEOMETRIC CONSTRAINT FOR SINGLE OR MULTIPLE PROBE OPERATION IN AIR OR LIQUID

#61
20120124706
2012-05-17

Scanning probe microscope and method for detecting proximity of probes thereof

#62
20110321202
2011-12-29

Dynamic mode nano-scale imaging and position control using deflection signal direct sampling of higher mode-actuated microcantilevers

#63
20110269121
2011-11-03

Lab-on-a-pipette

#64
20110219635
2011-09-15

Method of aligning a first article relative to a second article

#65
20110173729
2011-07-14

Method for automatically loading a probe assembly

#66
20110047662
2011-02-24

Apparatus and method for investigating surface properties of different materials

#67
20100253332
2010-10-07

System and method for providing electromagnetic imaging through magnetoquasistatic sensing

#68
20100218284
2010-08-26

Method for examining a test sample using a scanning probe microscope, measurement system and a measuring probe system

#69
20100194374
2010-08-05

System and method for providing electromagnetic imaging through electroquasistatic sensing

#70
20100186132
2010-07-22

Probe assembly for a scanning probe microscope

#71
20100032313
2010-02-11

Apparatus and process for controlled nanomanufacturing using catalyst retaining structures

#72
20100005552
2010-01-07

Scanning probe microscope and a method to measure relative-position between probes

#73
20090300806
2009-12-03

Atomic force microscope

#74
20090207404
2009-08-20

System and method for the inspection of micro and nanomechanical structures

#75
20090205091
2009-08-13

Array and cantilever array leveling

#76
20090138994
2009-05-28

Measuring device with daisy type cantilever wheel

#77
20090120172
2009-05-14

Nanoindentation surface analysis method

#78
20090095882
2009-04-16

Near-field nano-imager

#79
20080309688
2008-12-18

Nanolithography with use of viewports

#80
20080302960
2008-12-11

Probe arrangement

#81
20080259356
2008-10-23

System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers

#82
20080230696
2008-09-25

SURFACE TREATMENT AND SURFACE SCANNING

#83
20080179206
2008-07-31

Apparatus and method of transporting and loading probe devices of a metrology instrument

#84
20080144029
2008-06-19

Near-field optical apparatus and method using photodetector array

#85
20080121028
2008-05-29

Scanning probe microscopy inspection and modification system

#86
20080055598
2008-03-06

Using optical deflection of cantilevers for alignment

#87
20080006083
2008-01-10

APPARATUS AND METHOD OF TRANSPORTING AND LOADING PROBE DEVICES OF A METROLOGY INSTRUMENT

#88
20070289369
2007-12-20

Multifunctional probe array system

#89
20070281130
2007-12-06

Multi-tipped optical component

#90
20070278405
2007-12-06

MULTI-TIP SURFACE CANTILEVER PROBE

#91
20070272855
2007-11-29

Scanning probe microscope probe and manufacturing method therefor, scanning probe microscope and using method therefor, needle-like body and manufacturing method therefor, electronic device and manufacturing method therefor, charge density wave quantum phase microscope, and charge density wave quantum interferometer

#92
20070261480
2007-11-15

Atomic force microscope tip arrays and methods of manufacturing same

#93
20070248892
2007-10-25

Apparatus for aligning a first article relative to a second article

#94
20070227235
2007-10-04

Apparatus for evaluating piezoelectric film, and method for evaluating piezoelectric film

#95
20070195333
2007-08-23

Atomic force microscope

#96
20070194225
2007-08-23

Coherent electron junction scanning probe interference microscope, nanomanipulator and spectrometer with assembler and DNA sequencing applications

#97
20070193347
2007-08-23

Nanoindentation surface analysis tool and method

#98
20070190562
2007-08-16

Programmable molecular manipulating processes

#99
20070140905
2007-06-21

Nanogap series substance capturing, detecting and identifying method and device

#100
20070114402
2007-05-24

Object inspection and/or modification system and method

#101
20070084273
2007-04-19

Deconvolving tip artifacts using multiple scanning probes

#102
20070062264
2007-03-22

Multifunctional probe array system

#103
20070024301
2007-02-01

Electrical feedback detection system for multi-point probes

#104
20070022804
2007-02-01

Scanning probe microscopy inspection and modification system

#105
20070018096
2007-01-25

Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers

#106
20060273445
2006-12-07

Three-dimensional structure composed of silicon fine wires, method for producing the same, and device including the same

#107
20060255818
2006-11-16

Multiple local probe measuring device and method

#108
20060253943
2006-11-09

Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers

#109
20060231757
2006-10-19

Interferometric apparatus utilizing a cantilever array to measure a surface

#110
20060228873
2006-10-12

Electrostatic nanolithography probe actuation device and method

#111
20060162455
2006-07-27

Method and device for measuring vibration frequency of multi-cantilever

#112
20060097161
2006-05-11

Programmable molecular manipulating devices

#113
20060097160
2006-05-11

Programmable molecular manipulating processes

#114
20060092811
2006-05-04

Recording/reproducing apparatus

#115
20060076488
2006-04-13

Surface shape measuring apparatus, surface measuring method, and exposure apparatus

#116
20060072185
2006-04-06

Diffractive optical position detector in an atomic force microscope having a moveable cantilever

#117
20060043288
2006-03-02

Scanning probe for data storage and microscopy

#118
20060032296
2006-02-16

Software synchronization of multiple scanning probes

#119
20060011830
2006-01-19

Surface characteristic analysis apparatus

#120
20060011467
2006-01-19

Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus

#121
20050286321
2005-12-29

Probe storage device

#122
20050280174
2005-12-22

Surface treatment and surface scanning

#123
20050269035
2005-12-08

Fine pattern forming apparatus and fine pattern inspecting apparatus

#124
20050247998
2005-11-10

Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same

#125
20050184746
2005-08-25

Multiple local probe measuring device and method

#126
20050172703
2005-08-11

Scanning probe microscopy inspection and modification system

#127
20050167576
2005-08-04

Near-field optical probe

#128
20050161430
2005-07-28

Method of forming atomic force microscope tips

#129
20050138996
2005-06-30

Use of arrays of atomic force microscope/scanning tunneling microscope tips to scan nanocodes

#130
20050130551
2005-06-16

Microstructures

#131
20050127929
2005-06-16

Electrical feedback detection system for multi-point probes

#132
20050097944
2005-05-12

Software synchronization of multiple scanning probes

#133
20050056783
2005-03-17

Object inspection and/or modification system and method

#134
20050040836
2005-02-24

Multiple local probe measuring device and method

#135
20050005688
2005-01-13

Dual stage instrument for scanning a specimen