G01R31/2653 - CPC Classification Index

#1

20260086138

2026-03-26

OPTIMAL DETERMINATION OF AN OVERLAY TARGET

#2

20260063701

2026-03-05

DETECTION METHOD OF MOS TRANSISTOR

#3

20260011529

2026-01-08

SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERFORMING A NON-CONTACT ELECTRICAL MEASUREMENT ON A CELL AND/OR NON-CONTACT ELECTRICAL MEASUREMENT CELL VEHICLE USING A REGISTRATION CELL

#4

20260009845

2026-01-08

SYSTEMS, DEVICES, AND METHODS FOR PERFORMING A NON-CONTACT ELECTRICAL MEASUREMENT ON A CELL, NON-CONTACT ELECTRICAL MEASUREMENT CELL VEHICLE, CHIP, WAFER, DIE, OR LOGIC BLOCK

#5

20250362335

2025-11-27

INSPECTION APPARATUS AND METHOD

#6

20250258214

2025-08-14

INSPECTION APPARATUS AND INSPECTION METHOD USING THE SAME

#7

20240329128

2024-10-03

SYSTEMS, DEVICES, AND METHODS FOR PERFORMING A NON-CONTACT ELECTRICAL MEASUREMENT ON A CELL, NON-CONTACT ELECTRICAL MEASUREMENT CELL VEHICLE, CHIP, WAFER, DIE, OR LOGIC BLOCK

#8

20240304414

2024-09-12

SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERFORMING A NON-CONTACT ELECTRICAL MEASUREMENT ON A CELL AND/OR NON-CONTACT ELECTRICAL MEASUREMENT CELL VEHICLE USING A REGISTRATION CELL

#9

20240288488

2024-08-29

OPTIMAL DETERMINATION OF AN OVERLAY TARGET

#10

20240027514

2024-01-25

INSPECTION APPARATUS AND METHOD

#11

20230358804

2023-11-09

Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic block

#12

20230282444

2023-09-07

Systems, devices, and methods for aligning a particle beam and performing a non-contact electrical measurement on a cell and/or non-contact electrical measurement cell vehicle using a registration cell

#13

20230273254

2023-08-31

Inspection method

#14

20230273253

2023-08-31

Semiconductor inspection device and method for inspecting semiconductor sample

#15

20230258707

2023-08-17

Automated probe landing

#16

20230069433

2023-03-02

Test structure and test method for online detection of metal via open circuit

#17

20230043999

2023-02-09

IN-LINE DEVICE ELECTRICAL PROPERTY ESTIMATING METHOD AND TEST STRUCTURE OF THE SAME

#18

20220365134

2022-11-17

Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic block

#19

20220349934

2022-11-03

Detection method for sensitive parts of ionization damage in bipolar transistor

#20

20220336187

2022-10-20

Systems, devices, and methods for aligning a particle beam and performing a non-contact electrical measurement on a cell and/or non-contact electrical measurement cell vehicle using a registration cell

#21

20210132174

2021-05-06

Method for calibrating verticality of particle beam and system applied to semiconductor fabrication process

#22

20210098229

2021-04-01

Methods for aligning a particle beam and performing a non-contact electrical measurement on a cell using a registration cell

#23

20210096179

2021-04-01

Methods for performing a non-contact electrical measurement on a cell, chip, wafer, die, or logic block

#24

20200193588

2020-06-18

Optical-mode selection for multi-mode semiconductor inspection

#25

20200081056

2020-03-12

Soft error inspection method, soft error inspection apparatus, and soft error inspection system

#26

20190101586

2019-04-04

Method for inspecting semiconductor device structure

#27

20180123046

2018-05-03

Method for making thin film transistor

#28

20180122652

2018-05-03

Method of ROI Encapsulation During Axis Conversion of Cross-Sectional TEM Lamellae

#29

20170356953

2017-12-14

In-line device electrical property estimating method and test structure of the same

#30

20170276721

2017-09-28

PROCESS AND ASSEMBLY FOR TESTING ELECTRICAL AND OPTICAL PARAMETERS OF A PLURALITY OF LIGHT-EMITTING DEVICES

#31

20170226655

2017-08-10

Non-Contact Sheet Resistance Measurement of Barrier and/or Seed Layers Prior to Electroplating

#32

20170176513

2017-06-22

Pulsed electron beam current probe and methods of operating the same

#33

20160314237

2016-10-27

Method and system for detecting defects of wafer by wafer sort

#34

20160084901

2016-03-24

APPARATUS OF INSPECTING RESISTIVE DEFECTS OF SEMICONDUCTOR DEVICES AND INSPECTING METHOD USING THE SAME

#35

20150293169

2015-10-15

METHOD, SYSTEMS, AND DEVICES FOR INSPECTING SEMICONDUCTOR DEVICES

#36

20150260784

2015-09-17

Multidimensional structural access

#37

20150212147

2015-07-30

Testing apparatus and method for testing semiconductor chips

#38

20140103935

2014-04-17

Optical to optical methods enhancing the sensitivity and resolution of ultraviolet, electron beam and ion beam devices

#39

20130300451

2013-11-14

Evaluating transistors with e-beam inspection

#40

20130119999

2013-05-16

Specimen Testing Device and Method for Creating Absorbed Current Image

#41

20120133922

2012-05-31

Optical to optical infrared imaging detection system

#42

20100091292

2010-04-15

Holographic condition assessment system for a structure including a semiconductor material

#43

20090002717

2009-01-01

Interferometric condition assessment system for a microelectronic structure including a semiconductor or free-metal material

#44

20080186580

2008-08-07

Condition assessment method for a structure including a semiconductor material

#45

20070019209

2007-01-25

Condition assessment system for a structure including a semiconductor material

#46

20070018662

2007-01-25

CONDITION ASSESSMENT METHOD FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL

#47

20060022295

2006-02-02

Evaluation method and manufacturing method of semiconductor device

#48

20050156609

2005-07-21

Voltage testing and measurement